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1. 发明申请

WO1991012536A1 VOLTAGE IMAGING SYSTEM USING ELECTRO-OPTICS 审中-公开
标题翻译：使用电光源的电压成像系统
公开(公告)号：WO1991012536A1
公开(公告)日：1991-08-22
申请号：PCT/US1991000992
申请日：1991-02-08
申请人： PHOTON DYNAMICS, INC.
发明人： PHOTON DYNAMICS, INC. , HENLEY, Francois, J.
IPC分类号： G01R31/28
CPC分类号： G01R31/308 , G01R31/309
摘要： A two dimensional image of the voltage distribution across a surface (14) at a large plurality voltage test points of a panel under test (16) is extracted by illuminating the surface (14) with an expanded, collimated beam (24) of optical energy (20) of a known polarization state through an electro-optic modulator (30), such as KDP, wherein the crystal is disposed to allow longitudinal probing geometries such that a voltage on the surface (14) of the panel under test (16) causes a phase shift in the optical energy (the electro optic effect) which can be observed through an area polarization sensor (44, 45, 46, 48) for use to directly produce a two-dimensional spatially-dependent power modulation image directly representative of the spatially corresponding voltage state on the surface of the panel under test (16). Surface cross-talk is minimized by placing the face of the crystal closer to the panel under test (16) than the spacing of voltage sites in the panel under test (16). The device may operate in a pass-through mode or in a reflective mode. An etalon may be used to enhance sensitivity.
摘要翻译：通过用扩展的准直的光能束（24）照射表面（14），提取在待测试面板（16）的大的多个电压测试点处跨越表面（14）的电压分布的二维图像通过诸如KDP的电光调制器（30）具有已知偏振状态的（20），其中所述晶体被设置成允许纵向探测几何形状，使得被测试面板（16）的表面（14）上的电压导致通过区域偏振传感器（44,45,46,48）可以观察到的光能（电光效应）的相位偏移，用于直接产生直接表示的二维空间依赖的功率调制图像在测试板（16）的表面上的空间对应的电压状态。通过将晶体的表面放置在被测试板（16）上比正在测试的板（16）中的电压位置的间距更近，使表面的串扰最小化。该装置可以以直通模式或反射模式操作。标准具可用于提高灵敏度。

2. 发明申请

WO1997013140A1 TECHNIQUE FOR DETERMINING DEFECT POSITIONS IN THREE DIMENSIONS IN A TRANSPARENT STRUCTURE 审中-公开
标题翻译：用于确定三维尺寸在透明结构中的缺陷位置的技术
公开(公告)号：WO1997013140A1
公开(公告)日：1997-04-10
申请号：PCT/US1996015907
申请日：1996-10-04
申请人： PHOTON DYNAMICS, INC.
发明人： PHOTON DYNAMICS, INC. , HENLEY, François, J. , BRYAN, Michael, A.
IPC分类号： G01N21/00
CPC分类号： G01N21/8806 , G01N21/958
摘要： A method (500) for inspecting anomalies (118, 135, 137, 139, 143), which are likely defects of several types, namely, particles on the surface, scratches into surface, and defects in bulk material (127), is provided. This inspection method involves two types of illumination, which can be used separately or together. These two types highlight anomalies sufficiently differently to enable the defect monitoring tool to distinguish between defect type and defect location along an inspection axis. The illumination methods are direct internal side illumination (114) where the plate (102) is used as light pipe, and external front-side illumination (117). In direct internal side illumination, a fiber optic feed (115) with flared end arranged as a line source is abutted to an edge (123) of the plate (102). In external side illumination, the source (117) is light directed at an acute angle, preferably a grazing angle, to one of the surfaces (121). Anomalies such as dust particles (118) of the illuminated surface will scatter light much more efficiently with external front-side illumination, than direct internal side lighting, since particles on the surface would otherwise scatter light only through weak evanescent coupling via the internal side lighting.
摘要翻译：提供了用于检查异常（118,135,137,139,143）的方法（118,135,137,139,143），其可能是几种类型的缺陷，即表面上的颗粒，划痕到表面和散装材料（127）中的缺陷。这种检查方法涉及两种类型的照明，可单独使用或一起使用。这两种类型强调异常，使缺陷监测工具能够区分沿着检查轴的缺陷类型和缺陷位置。照明方法是直接内侧照明（114），其中板（102）用作光管和外部前侧照明（117）。在直接内侧照明中，具有布置成线源的喇叭口端的光纤馈电（115）与板（102）的边缘（123）邻接。在外侧照明中，源（117）以一定角度（优选为掠角）指向一个表面（121）。例如照射表面的灰尘颗粒（118）的异常将比直接内侧照明更有效地散射光，因为表面上的颗粒否则将通过内侧照明通过弱的渐逝耦合散射光。

3. 发明申请

WO1992015021A1 VOLTAGE IMAGING SYSTEM USING ELECTRO-OPTICS 审中-公开
标题翻译：使用电光源的电压成像系统
公开(公告)号：WO1992015021A1
公开(公告)日：1992-09-03
申请号：PCT/US1992000350
申请日：1992-01-14
申请人： PHOTON DYNAMICS, INC.
发明人： PHOTON DYNAMICS, INC. , HENLEY, Francois, J.
IPC分类号： G01R31/28
CPC分类号： G01R31/308 , G01R15/241
摘要： A two-dimensional image of the voltage distribution across a surface at a large plurality voltage test points of a panel under test (14) is extracted by illuminating the surface with an input beam (24) of optical energy through an electro-optic modulator (30) wherein the modulator (30) is disposed to allow longitudinal probing geometries such that a voltage differential on the surface of the panel under test (14) causes a power modulation in the optical energy which can be observed through an area optical sensor (a camera) (48) for use to directly produce a two-dimensional spatially-dependent power modulation image directly representative of the spatially corresponding differential voltage state on the surface of the panel under test (14). Surface cross-talk is minimized by placing the face of the modulator (30) closer to the panel under test (14) than the spacing of voltage sites in the panel under test (14). The device may operate in a pass-through mode or in a reflective mode.
摘要翻译：通过光电调制器（14）的光能的输入光束（24）照射表面，提取测试板（14）的大的多个电压测试点的表面上的表面上的电压分布的二维图像 30），其中所述调制器（30）设置成允许纵向探测几何形状，使得被测试面板（14）的表面上的电压差导致光能的功率调制，所述光能可以通过区域光学传感器（a 相机）（48），用于直接产生直接代表待测试板（14）的表面上的空间对应差分电压状态的二维空间相关功率调制图像。通过将调制器（30）的表面放置在比被测试板（14）中的电压位置的间隔更靠近待测试板（14）的位置来最小化表面串扰。该装置可以以直通模式或反射模式操作。

4. 发明申请

WO1997026546A1 SUBSTRATE INSPECTION APPARATUS AND METHOD 审中-公开
标题翻译：基板检查装置和方法
公开(公告)号：WO1997026546A1
公开(公告)日：1997-07-24
申请号：PCT/US1997000573
申请日：1997-01-13
申请人： PHOTON DYNAMICS, INC.
发明人： PHOTON DYNAMICS, INC. , HAWTHORNE, Jeffrey , SETZER, Joseph
IPC分类号： G01R31/00
CPC分类号： G09G3/006 , G02F1/1309 , G06T7/0004 , G06T2207/30121 , H04N5/66 , H04N17/04 , Y10S345/904
摘要： A method for inspecting a substrate having a plurality of output pixels using an image sensing device having a plurality of input pixels includes the steps of capturing an input image of a plurality of groups of output pixels with a plurality of groups of input pixels (300), each group of input pixels capturing a group of output pixels, each input pixel in a group of input pixels having a position, inhibiting modulation contributions from input pixels in the input image (310), forming a plurality of images from the plurality of groups of input pixels in the input image, each image including input pixels from a similar position in each group of input pixels, detecting defects in each of the plurality of images, and determining defects in subpixels of the substrate in response to the defects detected in each of the plurality of images (340).
摘要翻译：使用具有多个输入像素的图像感测装置检查具有多个输出像素的基板的方法包括以多个输入像素组（300）捕获多组输出像素的输入图像的步骤，每组输入像素捕获一组输出像素，一组输入像素中的每个输入像素具有位置，禁止来自输入图像（310）中的输入像素的调制贡献，从多个组中形成多个图像每个图像包括来自每组输入像素中的相似位置的输入像素，检测多个图像中的每一个中的缺陷，以及响应于每个图像中检测到的缺陷来确定基板的子像素中的缺陷的多个图像（340）。

5. 发明申请

WO1993019453A1 FLAT PANEL DISPLAY INSPECTION SYSTEM 审中-公开
标题翻译：平板显示检测系统
公开(公告)号：WO1993019453A1
公开(公告)日：1993-09-30
申请号：PCT/US1993002060
申请日：1993-03-12
申请人： PHOTON DYNAMICS, INC.
发明人： PHOTON DYNAMICS, INC. , CUMMINS, Robert, E. , SCOTT, Daniel, H. , HAWTHORNE, Jeffrey, A.
IPC分类号： G09G03/36
CPC分类号： G09G3/006 , G06F11/2221 , G09G3/20 , G09G3/36 , G09G2320/0233 , G09G2320/0285 , G09G2320/0693
摘要： An improved testing system (10) and method for testing a flat-panel display is disclosed herein. A display (11) is positioned under a high resolution camera (15) for detection of, for example, brightness uniformity across the display (11). Errors in the detected image due to aliasing are avoided in the present invention by incrementally shifting the displayed image relative to the camera (15) and detecting the displayed image at various shifted positions. A resulting accurate display can then be reconstructed by identifying those detector pixels (52) generating a maximum signal. A single image may then be reconstructed using only those detected maximum pixel signals. The reconstructed image will be free of aliasing. The reconstructed image may then be analyzed electronically, and any anomalies in the pixels (50, 70) forming the display panel (11) can then be accurately detected. Anomalies due to uneven brightness across the display (11) can be corrected by programming a memory chip (66) for the particular display panel (11) to permanently compensate the display driver (40) signals for each display pixel (50, 70) to eliminate such anomalies in the display (11). Other tests for viewing angles and chromaticity may also be performed.
摘要翻译：本文公开了一种改进的测试系统（10）和用于测试平板显示器的方法。显示器（11）位于高分辨率相机（15）下方，用于检测例如显示器（11）的亮度均匀性。在本发明中，通过对显示的图像相对于照相机（15）进行递增移位并在各种偏移的位置检测显示的图像，从而避免了由于混叠引起的检测到的图像中的错误。然后可以通过识别生成最大信号的那些检测器像素（52）来重构所得到的精确显示。然后可以仅使用那些检测到的最大像素信号来重构单个图像。重建的图像将没有混叠。然后可以电子地分析重建的图像，然后可以精确地检测到形成显示面板（11）的像素（50,70）中的任何异常。可以通过编程用于特定显示面板（11）的存储芯片（66）来对每个显示像素（50,70）的显示驱动器（40）信号进行永久补偿，从而校正显示器（11）上的亮度不均匀导致的异常，消除显示中的这种异常（11）。也可以进行视角和色度的其它测试。

6. 发明申请

WO1991012534A1 VOLTAGE IMAGING SYSTEM USING ELECTRO-OPTICS 审中-公开
标题翻译：使用电光源的电压成像系统
公开(公告)号：WO1991012534A1
公开(公告)日：1991-08-22
申请号：PCT/US1991000916
申请日：1991-02-08
申请人： PHOTON DYNAMICS, INC.
发明人： PHOTON DYNAMICS, INC. , HENLEY, Francois, J.
IPC分类号： G01R19/00
CPC分类号： G01R31/309 , G01R31/308
摘要： A two dimensional image of the voltage distribution across a surface at a large plurality voltage test points of a panel under test (14, 16) is extracted by illuminating the surface with an input beam (24) of optical energy through an electro optic modulator (30, 31) wherein the modulator is disposed to allow longitudinal probing geometries such that a voltage on the surface of the panel under test (14, 16) causes a power modulation in the optical energy which can be observed through an area optical sensor (a camera (48)) for use to directly produce a two-dimensional spatially-dependent power modulation image directly representative of the spatially corresponding voltage state on the surface of the panel under test (14). Surface cross-talk is minimized by placing the face of the modulator (30, 31) closer to the panel under test (14) than the spacing of the voltage sites in the panel under test (14). The device may operate in a pass-through mode or in a reflective mode.
摘要翻译：通过光电调制器（14）的光能的输入光束（24）照射表面，提取在待测试的面板（14,16）的大的多个电压测试点的表面上的表面上的电压分布的二维图像 30,31），其中所述调制器被设置为允许纵向探测几何形状，使得被测试面板（14,16）的表面上的电压导致光能的功率调制，所述光能可以通过区域光学传感器（a 摄像机（48）），用于直接产生直接代表待测试板（14）的表面上的空间对应电压状态的二维空间相关功率调制图像。通过将调制器（30,31）的表面放置在比待测试板（14）处的电压位置的间隔更靠近被测试板（14）的位置来最小化表面串扰。该装置可以以直通模式或反射模式操作。

7. 发明申请

WO1997000452A2 MURA DETECTION APPARATUS AND METHOD 审中-公开
标题翻译：木瓜检测装置和方法
公开(公告)号：WO1997000452A2
公开(公告)日：1997-01-03
申请号：PCT/US1996010219
申请日：1996-06-11
申请人： PHOTON DYNAMICS, INC.
发明人： PHOTON DYNAMICS, INC. , HAWTHORNE, Jeffrey, A. , SETZER, Joseph
IPC分类号： G01R00/00
CPC分类号： G09G3/006 , G02F1/1303 , G02F1/1309 , G02F1/136259 , G02F2001/136254
摘要： A method and apparatus for identifying and classifying pixel defects, and in particular Mura defects using digital processing techniques. The present method includes steps of acquiring an image with a Mura defect, and performing a Laplacian convolution on the image to enhance the Mura defect against background illumination. A step of thresholding the Mura defect against the background illumination is also provided. The thresholded Mura defect is compared against the original Mura defect to define statistical parameters of the original Mura defect. An annular region is defined around the periphery of the Mura defect. Statistics of the annular region define statistics for background illumination as compared to the original Mura defect. The statistics from the Mura defect are then compared to the background illumination statistics for Mura defect classification and analysis.
摘要翻译：用于使用数字处理技术来识别和分类像素缺陷，特别是Mura缺陷的方法和装置。本方法包括以下步骤：获取具有Mura缺陷的图像，以及对图像执行拉普拉斯积分以增强Mura缺陷以抵抗背景照明。还提供了针对背景照明来限制Mura缺陷的步骤。将阈值的Mura缺陷与原始Mura缺陷进行比较，以定义原始Mura缺陷的统计参数。围绕Mura缺陷的周边限定环形区域。与原始Mura缺陷相比，环形区域的统计定义了背景照明的统计。然后将Mura缺陷的统计数据与Mura缺陷分类和分析的背景照明统计量进行比较。

8. 发明申请

WO1996022520A1 LARGE AREA DEFECT MONITOR TOOL FOR MANUFACTURE OF CLEAN SURFACES 审中-公开
标题翻译：用于制造清洁表面的大面积缺陷监测工具
公开(公告)号：WO1996022520A1
公开(公告)日：1996-07-25
申请号：PCT/US1996000691
申请日：1996-01-17
申请人： PHOTON DYNAMICS, INC.
发明人： PHOTON DYNAMICS, INC. , HENLEY, Francois, J.
IPC分类号： G01N21/00
CPC分类号： G01N21/9501 , G01N21/8806 , G01N21/94
摘要： A method and resulting system (602) for directing generally collimated illumination from a source (623) at an oblique angle to a surface under inspection (SUS) (611) to produce a scattered nonspecular energy substantially normal to the SUS and for observing the scattered nonspecular energy in one of a plurality of fractional windows of a viewed image of the SUS via a plurality of focussing elements (622). Such arrangement results in simultaneous and significant throughput and sensitivity enhancement over existing art. The method can be enhanced further wherein the observing step is performed through suitable relative motion of the scattering image over the imaging plane to permit over-sampling. Imaging sensors (621) with an aggregate 2000 x 2000 pixel resolution could image a 200 mm wafer (611) to 100 microns pitch.
摘要翻译：一种用于将来自源（623）的大致准直照明与受检表面（SUS）（611）倾斜的角度引导以产生基本上垂直于SUS的散射非特定能量并用于观察散射的方法和所得系统（602）通过多个聚焦元件（622），SUS观察图像的多个分数窗口之一中的非特定能量。这种布置导致与现有技术同时且显着的吞吐量和灵敏度增强。该方法可以进一步增强，其中通过在成像平面上的散射图像的合适的相对运动来执行观察步骤以允许过采样。具有2000×2000像素聚集度的成像传感器（621）可将200mm晶片（611）成像到100微米间距。

9. 发明申请

WO1994020827A1 METHOD AND APPARATUS FOR POSITIONING AND BIASING AN ELECTRO-OPTIC MODULATOR OF AN ELECTRO-OPTIC IMAGING SYSTEM 审中-公开
标题翻译：用于定位和偏移电光成像系统的电光调制器的方法和装置
公开(公告)号：WO1994020827A1
公开(公告)日：1994-09-15
申请号：PCT/US1994002363
申请日：1994-03-04
申请人： PHOTON DYNAMICS, INC.
发明人： PHOTON DYNAMICS, INC. , MILLER, Michael, J. , ADDIEGO, Ginetto , HENLEY, François, J.
IPC分类号： G01J01/20
CPC分类号： G09G3/006 , G01R31/308 , G02F1/1309
摘要： An imaging method creates a two-dimensional image of a voltage distribution or a capacitance distribution of a substrate (2) under test using an electro-optic modulator (9). A coarse modulator calibration determines the effect of nonuniformities in the modulator and determines a look-up table relating the gap distance between the modulator and the substrate to the intensity of the light emerging from the modulator. A positioning means calibration determines a look-up table relating control voltage to response by the positioning means. The modulator (9) is moved over a portion of the substrate (2) and then undergoes a positioning step, a fine onsite calibration step, and a measuring step. The positioning step can be accomplished using the intensity of emerging light to determine modulator gap distance, and the response versus control voltage look-up table to determine a control signal to vertically position the modulator. The look-up tables permit the modulator to be positioned substantially parallel to the substrate at a desired gap distance using one-step positioning.
摘要翻译：成像方法使用电光调制器（9）产生正在测试的衬底（2）的电压分布或电容分布的二维图像。粗调制器校准确定调制器中不均匀性的影响，并且确定将调制器和衬底之间的间隙距离与从调制器出射的光的强度相关联的查找表。定位装置校准确定将控制电压与定位装置的响应相关联的查找表。调制器（9）在衬底（2）的一部分上移动，然后进行定位步骤，精细的现场校准步骤和测量步骤。可以使用出射光的强度来确定调制器间隙距离以及响应与控制电压查找表以确定控制信号以垂直定位调制器来实现定位步骤。查找表允许使用一步式定位使调制器以所需间隔距离基本平行于基底平行。

10. 发明申请

WO1993011409A1 METHOD AND APPARATUS FOR POSITIONING AND BIASING AN ELECTRO-OPTIC MODULATOR OF AN ELECTRO-OPTIC IMAGING SYSTEM 审中-公开
标题翻译：用于定位和偏移电光成像系统的电光调制器的方法和装置
公开(公告)号：WO1993011409A1
公开(公告)日：1993-06-10
申请号：PCT/US1992010223
申请日：1992-12-02
申请人： PHOTON DYNAMICS, INC.
发明人： PHOTON DYNAMICS, INC. , SPEEDY, James , HENLEY, Francois, J. , CHOI, Hee-June , MILLER, Michael, J. , LIU, Ying-Moh
IPC分类号： G01J01/20
CPC分类号： G09G3/006 , G01R31/308 , G02F1/1309
摘要： An imaging method creates a two-dimensional image of a voltage distribution or a capacitance distribution across a surface of a substrate (2) under test using an electro-optic modulator (9) which is positioned and biased with respect to the surface of the substrate. The method involves a first coarse offsite calibrating step to compensate for nonuniformities in the light emerging from the modulator. Then, for each successive portion of the substrate over which the modulator is to detect characteristics of the substrate, the system undergoes a modulator relocating step, a modulator levelling step, a modulator gapping step, a fine onsite calibrating step, and a measuring step. An apparatus is disclosed for levelling the bottom surface of a modulator (9) into a substantially coplanar spacial relationship with a portion of top surface of the underlying substrate being tested monitors light emerging from at least three regions on the top surface of the modulator in order to determine the relative distances of three corresponding regions of the bottom surface of the modulator from the underlying top surface of the substrate being tested. In one embodiment, three transducers are used to control the spacial orientation of the modulator. The method and apparatus see special application in detecting defects in LCD display panels.

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