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    • 5. 发明授权
    • Bead inspection method, and bead inspection apparatus
    • 珠检查方法和珠检查装置
    • US08724122B2
    • 2014-05-13
    • US13581228
    • 2011-02-22
    • Hironari AdachiNaohiro KuboMasayuki AzumaMasahiro NishioMasaki Tanzawa
    • Hironari AdachiNaohiro KuboMasayuki AzumaMasahiro NishioMasaki Tanzawa
    • G01B11/28
    • B23K3/08B23K31/125G01B11/25
    • A bead inspection step and a bead inspection apparatus that inspect the quality of a bead are disclosed . . . . The bead inspection apparatus includes a wire-feed-speed measurement device that measures the feed speed of a brazing wire, and an analysis portion that measures and analyzes position coordinate data about surfaces of a first, workpiece, a second workpiece and the bead, and performs a first shape data measurement step of. measuring first shape data before brazing, a second shape data measurement step of measuring second shape data after the brazing, a feature quantity calculation step of calculating predicted values of feature quantities based on the first and second shape data and the brazing wire feed speed, and a throat thickness calculation step of calculating a predicted value of the throat thickness by a regression expression formed based on actual measurements of the feature quantities and of the throat thickness.
    • 公开了一种检查胎圈质量的胎圈检查步骤和胎圈检查装置。 。 。 。 珠检查装置包括测量钎焊丝的进给速度的送丝速度测量装置和测量和分析关于第一工件,第二工件和胎圈的表面的位置坐标数据的分析部分,以及 执行第一形状数据测量步骤。 在钎焊之前测量第一形状数据,第二形状数据测量步骤,在钎焊之后测量第二形状数据;特征量计算步骤,基于第一形状数据和第二形状数据和钎焊丝馈送速度计算特征量的预测值,以及 喉部厚度计算步骤,通过基于特征量和喉部厚度的实际测量形成的回归表达式来计算喉部厚度的预测值。
    • 6. 发明授权
    • Laser dicing device
    • 激光切割装置
    • US08492676B2
    • 2013-07-23
    • US10555451
    • 2004-05-17
    • Masayuki AzumaYasuyuki Sakaya
    • Masayuki AzumaYasuyuki Sakaya
    • B23K26/14
    • B23K26/04B23K26/40B23K26/53B23K2101/40B23K2103/50H01L21/67092H01L21/67253
    • There is provided a laser dicing apparatus comprising: a first position detecting device detecting a position of the surface of a wafer at an incident point of laser light; second position detecting device detecting in advance a position of the surface of the wafer; and a control section controlling the position in the thickness direction of a condensing point inside the wafer, wherein the control section, when scanning the laser light from the outside of a periphery of the wafer to the inside of the periphery of the wafer, performs control based on data obtained with the second position detecting device detecting the position of the condensing point at the periphery of the wafer, and after scanning a predetermined distance, switches to perform control based on data obtained by the first position detecting device. Thereby, when the laser light is made incident through the surface of the wafer and scanned, the position control of the condensing point of the laser light can be performed even at the periphery of the wafer, and a modified region by multi-photon absorption can be formed at a predetermined position inside the wafer.
    • 提供了一种激光切割装置,包括:第一位置检测装置,其在激光入射点处检测晶片表面的位置; 第二位置检测装置预先检测晶片的表面的位置; 以及控制部,其控制晶片内的聚光点的厚度方向的位置,其中,所述控制部在从所述晶片的周围的外部到所述晶片的周围的内侧扫描所述激光时,进行控制 基于通过第二位置检测装置检测到晶片周围的聚光点的位置而获得的数据,并且在扫描预定距离之后,切换到基于由第一位置检测装置获得的数据进行控制。 因此,当激光通过晶片的表面入射并进行扫描时,即使在晶片的周围也可以执行激光的聚光点的位置控制,并且通过多光子吸收的改质区域 形成在晶片内部的预定位置。
    • 7. 发明申请
    • BEAD INSPECTION METHOD, AND BEAD INSPECTION APPARATUS
    • 珠子检查方法和珠子检查装置
    • US20120314225A1
    • 2012-12-13
    • US13581228
    • 2011-02-22
    • Hironari AdachiNaohiro KuboMasayuki AzumaMasahiro NishioMasaki Tanzawa
    • Hironari AdachiNaohiro KuboMasayuki AzumaMasahiro NishioMasaki Tanzawa
    • G01B11/24
    • B23K3/08B23K31/125G01B11/25
    • A bead inspection step and a bead inspection apparatus that inspect the quality of a bead are disclosed . . . . The bead inspection apparatus includes a wire-feed-speed measurement device that measures the feed speed of a brazing wire, and an analysis portion that measures and analyzes position coordinate data about surfaces of a first, workpiece, a second workpiece and the bead, and performs a first shape data measurement step of. measuring first shape data before brazing, a second shape data measurement step of measuring second shape data after the brazing, a feature quantity calculation step of calculating predicted values of feature quantities based on the first and second shape data and the brazing wire feed speed, and a throat thickness calculation step of calculating a predicted value of the throat thickness by a regression expression formed based on actual measurements of the feature quantities and of the throat thickness.
    • 公开了一种检查胎圈质量的胎圈检查步骤和胎圈检查装置。 。 。 。 珠检查装置包括测量钎焊丝的进给速度的送丝速度测量装置和测量和分析关于第一工件,第二工件和胎圈的表面的位置坐标数据的分析部分,以及 执行第一形状数据测量步骤。 在钎焊之前测量第一形状数据,第二形状数据测量步骤,在钎焊之后测量第二形状数据;特征量计算步骤,基于第一形状数据和第二形状数据和钎焊丝馈送速度计算特征量的预测值,以及 喉部厚度计算步骤,通过基于特征量和喉部厚度的实际测量形成的回归表达式来计算喉部厚度的预测值。