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    • 6. 发明授权
    • Gas sensor and flip-chip method for its manufacture
    • 气体传感器和倒装芯片制造方法
    • US09012962B2
    • 2015-04-21
    • US13002188
    • 2009-05-04
    • Stefan HenneckRalf Schmidt
    • Stefan HenneckRalf Schmidt
    • G01N27/403G01N27/414
    • G01N27/4141
    • A sensor element is described that includes at least one semiconductor component having a gas-sensitive layer which is attached to a substrate by the flip-chip method, the gas-sensitive layer facing the substrate and a supply arrangement being provided to supply a gas to be examined to the gas-sensitive layer. The semiconductor component is enclosed in a casing. Also described is a method for manufacturing the sensor element, in which a semiconductor component having a gas-sensitive layer is attached by the flip-chip method to a substrate in such a way that the gas-sensitive layer faces the substrate. After that, the casing is applied by a plasma sputtering method, in particular an atmospheric plasma sputtering method. Finally, a use of the sensor element in the exhaust system of an internal combustion engine is also described.
    • 描述了一种传感器元件,其包括至少一个半导体部件,其具有通过倒装芯片方法附接到基板的气敏层,面对基板的气体敏感层和供应装置,以将气体供应到 检查气敏层。 半导体部件被封装在壳体中。 还描述了一种用于制造传感器元件的方法,其中通过倒装芯片法将具有气敏层的半导体部件以气敏层面向基板的方式附着到基板上。 之后,通过等离子溅射法,特别是大气等离子体溅射法施加套管。 最后,还描述了在内燃机的排气系统中使用传感器元件。
    • 8. 发明授权
    • Piezoceramic multi-layer structure with regular polygon cross-sectional area
    • 具有规则多边形横截面积的压电多层结构
    • US06661156B1
    • 2003-12-09
    • US09830767
    • 2001-08-06
    • Stefan Henneck
    • Stefan Henneck
    • H01L4104
    • H01L41/0471H01L41/0833
    • A piezoelectric ceramic body in the form of a prism, which has a plurality of insulating layers arranged over one another and made of a piezoceramic material, the insulating layers being at least regionally separated from one another by a conducting layer made of an electrode material. The top view of the insulating layers at least approximates the shape of an n-gon, especially a regular n-gon, n being greater than four and especially being six, eight, or ten. Furthermore, the conducting layers cover each of the insulating layers so extensively that two adjacent insulating layers are only in direct contact with one another in the region of narrow dead zones regionally located at the outer edge of the insulating layers.
    • 一种棱镜形式的压电陶瓷体,其具有彼此排列并由压电陶瓷材料制成的多个绝缘层,所述绝缘层通过由电极材料制成的导电层至少在区域上彼此分离。 绝缘层的顶视图至少近似于n-gon的形状,特别是正规n-gon n大于4,特别是6,8或10。 此外,导电层如此广泛地覆盖每个绝缘层,使得两个相邻的绝缘层在区域上位于绝缘层的外边缘处的窄死区的区域中仅彼此直接接触。