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    • 1. 发明授权
    • Selective parylene coating for cardiac pacemaker electrodes
    • 心脏起搏器电极的选择性聚对二甲苯涂层
    • US08355802B2
    • 2013-01-15
    • US12486006
    • 2009-06-17
    • Oliver KeitelFrank KrügerMichael Pönitz
    • Oliver KeitelFrank KrügerMichael Pönitz
    • A61N1/05
    • A61N1/0565A61N1/0573B05D1/60B05D3/145
    • A stimulation electrode is produced having a porous film layer and being partially coated with an insulating parylene (polyparaxylylene) film, whose insulating film has a dielectric breakdown voltage of greater than 100 V. Parylene is deposited on the entire surface of a porous film coating and then partially removed again by plasma. After the partial removal of the parylene, this porous film still has a capacitance of greater than 15 mF/cm2 in a physiological NaCl solution at a frequency of 0.1 Hz. For the stimulation electrode, the transition from the insulating film to the porous film is formed so that the film thickness of the parylene film decreases continuously. In this way, a stimulation electrode having a porous film layer and being partially coated with an insulating parylene film is provided, whose electrode on the non-insulating parylene film-coated surface has a capacitance of greater than 15 mF/cm2 in a physiological NaCl solution at a frequency of 0.1 Hz and whose insulating film advantageously has a dielectric breakdown voltage of greater than 100 V.
    • 产生具有多孔膜层并部分涂覆绝缘聚对二甲苯(聚对二甲苯)膜的刺激电极,其绝缘膜具有大于100V的绝缘击穿电压。聚对二甲苯沉积在多孔膜涂层的整个表面上, 然后再次通过等离子体去除。 部分去除聚对二甲苯之后,该多孔膜在0.1Hz的频率下在生理NaCl溶液中仍然具有大于15mF / cm 2的电容。 对于刺激电极,形成从绝缘膜到多孔膜的过渡,使得聚对二甲苯膜的膜厚度连续降低。 以这种方式,提供了具有多孔膜层并部分地涂有绝缘聚对二甲苯膜的刺激电极,其非绝缘聚对二甲苯膜涂覆表面上的电极在生理NaCl中具有大于15mF / cm 2的电容 溶液,其频率为0.1Hz,其绝缘膜有利地具有大于100V的介电击穿电压。
    • 10. 发明授权
    • Method for the production of substrates, magnetron source and sputter-coating chamber
    • 制造基板,磁控管源和溅射镀膜室的方法
    • US06579424B2
    • 2003-06-17
    • US09775527
    • 2001-02-01
    • Bernhard CordGerd DeppichKarl-Heinz SchullerOliver Keitel
    • Bernhard CordGerd DeppichKarl-Heinz SchullerOliver Keitel
    • C23C1435
    • H01J37/3429C23C14/3407C23C14/35H01J37/3405H01J37/3408H01J37/3455
    • A target of an alloy of metals having different specific weights is used in a method for producing substrates that are coated with a layer comprising the same two metals by magnetron sputtering of the target. When sputtering such a target material, the metals of the alloy will sputter off with different sputtering characteristics with regard to a static angle &agr; at which the sputtered off material leaves the target. For this reason, at the substrate to be sputter-coated, there occurs a demixing effect of these metals which will be deposited with a varying local ratio of the metals, that differs form the ratio of the metals in the alloy of the target. To counter-act this demixing phenomenon, the location of an electron trap formed by the magnetron field of the sputter source at the target with respect to the location of the substrate, is selected. By proving this electron trap and the resulting erosion profile on the target, the amount of deposited heavier metal to the amount of lighter metal is increased along the surface of the substrate.
    • 在具有不同比重的金属的合金的靶材用于通过靶的磁控溅射涂覆有包含相同的两种金属的层的基板的制造方法。 当溅射这种目标材料时,关于溅射的材料离开靶材的静态角度α,合金的金属将以不同的溅射特性溅射掉。 为此,在溅射涂覆的基板上,会发生这些金属的分层效应,这些金属将以不同的局部比例的金属沉积,这不同于目标合金中金属的比例。 为了抵消这种分层现象,选择了相对于衬底的位置在靶处由溅射源的磁控管场形成的电子阱的位置。 通过证明该电子阱和在靶上产生的侵蚀曲线,沿着衬底的表面增加沉积的较重金属量与较轻金属量的量。