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1. 发明申请

WO2014172621A9 CORNEAL TOPOGRAPHY MEASUREMENT AND ALIGNMENT OF CORNEAL SURGICAL PROCEDURES 审中-公开
标题翻译：角膜地形图的测量和角膜手术的调整
公开(公告)号：WO2014172621A9
公开(公告)日：2014-10-23
申请号：PCT/US2014/034628
申请日：2014-04-18
申请人： OPTIMEDICA CORPORATION , SCOTT, David, D. , GONZALEZ, Javier , DEWEY, David , BAREKET, Noah , SCHUELE, Georg
发明人： SCOTT, David, D. , GONZALEZ, Javier , DEWEY, David , BAREKET, Noah , SCHUELE, Georg
IPC分类号： A61F9/009 , A61B3/107
摘要： Methods and apparatus are configures to measure an eye without contacting the eye with a patient interface, and these measurements are used to determine alignment and placement of the incisions when the patient interface contacts the eye. The pre-contact locations of one or more structures of the eye can be used to determine corresponding post-contact locations of the one or more optical structures of the eye when the patient interface has contacted the eye, such that the laser incisions are placed at locations that promote normal vision of the eye. The incisions are positioned in relation to the pre-contact optical structures of the eye, such as an astigmatic treatment axis, nodal points of the eye, and visual axis of the eye.
摘要翻译：方法和设备被配置成在患者接口不接触眼睛的情况下测量眼睛，并且这些测量被用于确定当患者接口接触眼睛时切口的对准和放置。当患者接口已经接触眼睛时，眼睛的一个或多个结构的预接触位置可以用于确定眼睛的一个或多个光学结构的相应的接触后位置，使得激光切口位于促进眼睛正常视力的位置。切口相对于眼睛的预接触光学结构定位，例如散光治疗轴，眼睛的节点以及眼睛的视轴。

2. 发明申请

WO2015147925A1 CONFOCAL LASER EYE SURGERY SYSTEM 审中-公开
标题翻译：眼科激光眼部手术系统
公开(公告)号：WO2015147925A1
公开(公告)日：2015-10-01
申请号：PCT/US2014/071392
申请日：2014-12-19
申请人： OPTIMEDICA CORPORATION , SCHUELE, Georg , BAREKET, Noah , DEWEY, David , HART, John, S. , GONZALEZ, Javier, G. , WOO, Raymond , TEISSEYRE, Thomas, Z. , GOLDA, Jeffrey, A. , SHEEHY, Katrina, B. , O'MEARA, Madeleine, C. , WOODLEY, Bruce
发明人： SCHUELE, Georg , BAREKET, Noah , DEWEY, David , HART, John, S. , GONZALEZ, Javier, G. , WOO, Raymond , TEISSEYRE, Thomas, Z. , GOLDA, Jeffrey, A. , SHEEHY, Katrina, B. , O'MEARA, Madeleine, C. , WOODLEY, Bruce
IPC分类号： A61F9/008 , A61B3/14 , A61F9/007 , A61B3/10
CPC分类号： A61B3/1173 , A61B3/0025 , A61B3/1025 , A61B3/14 , A61F9/00754 , A61F9/008 , A61F2009/00844 , A61F2009/00878 , A61F2009/00897
摘要： A laser surgery system includes a light source, an eye interface device, a scanning assembly, a confocal detection assembly and preferably a confocal bypass assembly. The light source generates an electromagnetic beam. The scanning assembly scans a focal point of the electromagnetic beam to different locations within the eye. An optical path propagates the electromagnetic beam from a light source to the focal point, and also propagates a portion of the electromagnetic beam reflected from the focal point location back along at least a portion of the optical path. The optical path includes an optical element associated with a confocal detection assembly that diverts a portion of the reflected electromagnetic radiation to a sensor. The sensor generates an intensity signal indicative of intensity the electromagnetic beam reflected from the focal point location. The confocal bypass assembly reversibly diverts the electromagnetic beam along a diversion optical path around the optical element.
摘要翻译：激光手术系统包括光源，眼睛接口装置，扫描组件，共焦检测组件和优选共焦旁路组件。光源产生电磁波束。扫描组件将电磁波束的焦点扫描到眼睛内的不同位置。光路将电磁波从光源传播到焦点，并且还沿着光路的至少一部分将从焦点位置反射的电磁波束的一部分传播回传播。光路包括与共焦检测组件相关联的光学元件，其将一部分反射的电磁辐射转移到传感器。传感器产生表示从焦点位置反射的电磁波的强度的强度信号。共焦旁路组件沿着光学元件周围的转向光路可逆地转移电磁束。

3. 发明申请

WO2006076484A3 PERIODIC DIFFRACTING SYSTEM FOR SAMPLE MEASUREMENT 审中-公开
公开(公告)号：WO2006076484A3
公开(公告)日：2006-07-20
申请号：PCT/US2006/001067
申请日：2006-01-11
申请人： KLA-TENCOR TECHNOLOGIES CORPORATION , BAREKET, Noah , WACK, Daniel, C. , ZHAO, Guoheng
发明人： BAREKET, Noah , WACK, Daniel, C. , ZHAO, Guoheng
IPC分类号： G01N21/00
摘要： To measure the critical dimensions and other parameters of a one- or two-dimensional diffracting structure of a film, the calculation may be simplified by first performing a measurement of the thickness of the film, employing a film model that does not vary the critical dimension or parameters related to other characteristics of the structure. The thickness of the film may be estimated using the film model sufficiently accurately so that such estimate may be employed to simplify the structure model for deriving the critical dimension and other parameters related to the two-dimensional diffracting structure.

4. 发明申请

WO2004076963A2 APPARATUS AND METHOD FOR DETECTING OVERLAY ERRORS USING SCATTEROMETRY 审中-公开
标题翻译：用于使用散射检测来检测重叠错误的装置和方法
公开(公告)号：WO2004076963A2
公开(公告)日：2004-09-10
申请号：PCT/US2004/005419
申请日：2004-02-23
申请人： KLA-TENCOR TECHNOLOGIES CORPORATION , MIEHER, Walter, D. , LEVY, Ady , GOLOVANEVSKY, Boris , FRIEDMANN, Michael , SMITH, Ian , ADEL, Michael , FABRIKANT, Anatoly , BEVIS, Christopher, F. , FIELDEN, John , BAREKET, Noah , GROSS, Ken , ZALICKI, Piotr , WACK, Dan , DECECCO, Paola , DZIURA, Thaddeus, G. , GHINOVKER, Mark
发明人： MIEHER, Walter, D. , LEVY, Ady , GOLOVANEVSKY, Boris , FRIEDMANN, Michael , SMITH, Ian , ADEL, Michael , FABRIKANT, Anatoly , BEVIS, Christopher, F. , FIELDEN, John , BAREKET, Noah , GROSS, Ken , ZALICKI, Piotr , WACK, Dan , DECECCO, Paola , DZIURA, Thaddeus, G. , GHINOVKER, Mark
IPC分类号： G01B
CPC分类号： G03F9/7088 , G01N21/956 , G01N2021/213 , G03F7/70625 , G03F7/70633 , G03F7/70683 , G03F9/7049 , G03F9/7084
摘要： Disclosed is a method of determining an overlay error between two layers of a multiple layer sample. For a plurality of periodic targets that each have a first structure formed from a first layer and a second structure formed from a second layer of the sample, an optical system is employed to thereby measure an optical signal from each of the periodic targets. There are predefined offsets between the first and second structures. An overlay error is determined between the first and second structures by analyzing the measured optical signals from the periodic targets using a scatterometry overlay technique based on the predefined offsets. The optical system comprises any one or more of the following apparatus: an imaging reflectometer, an imaging spectroscopic reflectometer, a polarized spectroscopic imaging reflectometer, a scanning reflectometer system, a system with two or more reflectometers capable of parallel data acquisition, a system with two or more spectroscopic reflectometers capable of parallel data acquisition, a system with two or more polarized spectroscopic reflectometers capable of parallel data acquisition, a system with two or more polarized spectroscopic reflectometers capable of serial data acquisition without moving the wafer stage or moving any optical elements or the reflectometer stage, imaging spectrometers, imaging system with wavelength filter, imaging system with long-pass wavelength filter, imaging system with short-pass wavelength filter, imaging system without wavelength filter, interferometric imaging system, imaging ellipsometer, a spectroscopic ellipsometer, a laser ellipsometer having a photoelastic modulator, an imaging spectroscopic ellipsometer, a scanning ellipsometer system, a system with two or more ellipsometers capable of parallel data acquisition, a system with two or more ellipsometers capable of serial data acquisition without moving the wafer stage or moving any optical elements or the ellipsometer stage, a Michelson interferometer, and a Mach-Zehnder interferometer, a Sagnac interferometer, a scanning angle of incidence system, a scanning azimuth angle system, a +/- first order differential reflectometer, a +/- first order differential polarized reflectometer.
摘要翻译：公开了一种确定多层样本的两层之间的覆盖误差的方法。对于每个具有由第一层形成的第一结构和由第二层样品形成的第二结构的多个周期性目标，采用光学系统，从而测量来自每个周期性目标的光信号。在第一和第二结构之间有预定义的偏移。通过使用基于预定偏移的散射测量覆盖技术来分析来自周期性目标的所测量的光信号，在第一和第二结构之间确定覆盖误差。光学系统包括以下装置中的任何一个或多个：成像反射计，成像光谱反射计，偏振光谱成像反射计，扫描反射计系统，具有两个或更多个能够并行数据采集的反射计的系统，具有两个具有能够并行数据采集的两个或更多个偏振分光反射计的系统，具有两个或更多个偏振光谱反射计的系统，其能够进行串行数据采集而不移动晶片台或移动任何光学元件或反射计阶段，成像光谱仪，波长滤波器成像系统，长波长滤波器成像系统，短波长滤波器成像系统，无波长滤波器成像系统，干涉成像系统，成像椭偏仪，光谱椭偏仪，激光椭偏仪具有光弹性调制器，成像光谱椭偏仪，扫描椭偏仪系统，具有能够并行数据采集的两个或更多个椭偏仪的系统，具有两个或更多个椭圆计的系统，能够进行串行数据采集而不移动晶片台或移动任何光学元件或椭圆偏振台，迈克尔逊干涉仪和马赫 - 策德尔干涉仪，Sagnac干涉仪，入射系统的扫描角度，扫描方位角系统，+/-一阶微分反射计，+/-一阶差分偏振反射计。

5. 发明申请

WO2008077048A2 SUBSTRATE PROCESSING APPARATUS AND METHOD 审中-公开
标题翻译：基板处理装置和方法
公开(公告)号：WO2008077048A2
公开(公告)日：2008-06-26
申请号：PCT/US2007/087953
申请日：2007-12-18
申请人： KLA-TENCOR CORPORATION , ZYWNO, Marek , BAREKET, Noah
发明人： ZYWNO, Marek , BAREKET, Noah
IPC分类号： G03F7/20 , F16C39/06 , G01N21/95 , H01L21/68
CPC分类号： G03F7/70775 , F16C32/044 , G01N21/9501 , G03F7/704 , G03F7/70733 , G03F7/70816 , H01L21/67265 , H01L21/68714 , H01L21/68771
摘要： Substrate processing methods and apparatus are disclosed. In some embodiments a substrate processing apparatus may comprise a support structure and a moveable stage including first and second stages. The moveable stage has one or more maglev units attached to the first stage and/or second stage proximate an edge of the first stage. The first stage retains one or more substrates and moves with respect to a first axis that is substantially fixed with respect to the second stage. The second stage translates along a second axis with respect to the support structure. In other embodiments, a primary motor may maintain a rotary stage at an angular speed and/or accelerate or decelerate the stage from a first angular speed to a second angular speed. A secondary motor may accelerate the stage from rest to the first angular speed and/or decelerate the stage from a non-zero angular speed.
摘要翻译：公开了衬底处理方法和装置。在一些实施例中，衬底处理设备可以包括支撑结构和包括第一和第二级的可移动台。可移动平台具有一个或多个靠近第一平台的边缘附接到第一平台和/或第二平台的磁悬浮单元。第一阶段保持一个或多个衬底并相对于基本上相对于第二阶段固定的第一轴线移动。第二阶段相对于支撑结构沿第二轴线平移。在其他实施例中，主电机可以以角速度保持旋转台和/或将台从第一角速度加速或减速至第二角速度。辅助电机可以将舞台从静止状态加速到第一角速度和/或从非零角速度减速舞台。

6. 发明申请

WO2006062952A3 MULTIPLE ANGLE OF INCIDENCE SPECTROSCOPIC SCATTEROMETER SYSTEM 审中-公开
公开(公告)号：WO2006062952A3
公开(公告)日：2006-06-15
申请号：PCT/US2005/044075
申请日：2005-12-06
申请人： KLA-TENCOR TECHNOLOGIES CORPORATION , BAREKET, Noah , WANG, Haiming
发明人： BAREKET, Noah , WANG, Haiming
IPC分类号： G01B7/00 , G01B11/00 , G01B11/14 , G01B15/00 , G01J3/28 , G01N21/86 , G06F7/60 , G06F15/00 , G06F17/10 , G06F19/00 , G01V8/00 , H01L21/00
摘要： Techniques for optimizing the sensitivity of spectroscopic measurement techniques (100) with respect to certain profile variables include selecting desired measurement angles (104) since the measurement sensitivity to each variable depends, at least in part, on the measurement angles of an incident beam. The selected desired set of measurement angles includes both an azimuth angle and a polar angle (106). Optimizing the sensitivity of spectroscopic measurement techniques (100) can also reduce or eliminate measurement correlation among variables to be measured.

7. 发明申请

WO2011056318A2 APPARATUS AND METHOD FOR MEASURING POSITION AND/OR MOTION USING SURFACE MICRO-STRUCTURE 审中-公开
标题翻译：使用表面微结构测量位置和/或运动的装置和方法
公开(公告)号：WO2011056318A2
公开(公告)日：2011-05-12
申请号：PCT/US2010/050045
申请日：2010-09-23
申请人： KLA-TENCOR CORPORATION , UMMETHALA, Upendra , BAREKET, Noah , BEVIS, Christopher
发明人： UMMETHALA, Upendra , BAREKET, Noah , BEVIS, Christopher
IPC分类号： G01B11/00 , H01L21/66
CPC分类号： G01B11/0691 , B82Y10/00 , B82Y40/00 , G01P3/806 , H01J37/3174
摘要： One embodiment relates to a method in which a measuring apparatus is used to collect a first set of wave form data which depends on micro-structure of a moving surface. A correspondence is identified between the first set of wave form data and actual position data. Calibrated wave form data is stored which indicates said correspondence between the first set of wave form data and actual position data. In addition, the measuring apparatus may be used to collect a second set of wave form data which depends on micro-structure of the moving surface, a cross-correlation may be computed between the second set of wave form data and the calibrated wave form data. Another embodiment relates to an apparatus for measuring position and/or motion using surface micro-structure of a moving surface. Another embodiment relates to method for measuring motion using surface micro-structure. Other embodiments and features are also disclosed.
摘要翻译：一个实施例涉及一种方法，其中使用测量装置来收集取决于移动表面的微结构的第一组波形数据。在第一组波形数据和实际位置数据之间识别对应关系。校准波形数据被存储，其指示第一组波形数据与实际位置数据之间的所述对应关系。另外，测量装置可以用于收集取决于运动表面的微结构的第二组波形数据，可以计算第二组波形数据与校准波形数据之间的互相关。另一个实施例涉及一种使用移动表面的表面微观结构来测量位置和/或运动的设备。另一个实施例涉及使用表面微结构测量运动的方法。其他实施例和特征也被公开。

8. 发明申请

WO2017070473A1 LASER BEAM CALIBRATION AND BEAM QUALITY MEASUREMENT IN LASER SURGERY SYSTEMS 审中-公开
标题翻译：激光外科系统中的激光束校准和光束质量测量
公开(公告)号：WO2017070473A1
公开(公告)日：2017-04-27
申请号：PCT/US2016/058125
申请日：2016-10-21
申请人： OPTIMEDICA CORPORATION
发明人： BAREKET, Noah , DEWEY, David A. , SIMONEAU, Michael J.
IPC分类号： A61F9/008
CPC分类号： A61F9/008 , A61F9/009 , A61F2009/00844 , A61F2009/00855
摘要： A laser eye surgery system includes a computer which scans a focused laser beam in a trajectory over a reticle or target and determines beam quality via laser light reflected from the target. The target may have a grid pattern of lines, with the diameter of the focused laser beam determined based on a time interval for the scanned beam to move onto a line of the grid pattern. Methods for measuring beam quality in a laser eye surgery system provide a direct, quantitative quality measurement of the focused laser beam, and may be performed quickly and automatically. Using scanning mirror position information together with signals resulting from laser light reflected from the target, the laser eye surgery system may also be calibrated.
摘要翻译：激光眼科手术系统包括计算机，该计算机在掩模版或目标上的轨道上扫描聚焦的激光束，并经由从目标反射的激光来确定光束质量。目标可以具有网格图案，其中基于扫描光束移动到网格图案的线上的时间间隔来确定聚焦激光束的直径。在激光眼科手术系统中测量光束质量的方法提供了聚焦激光束的直接定量质量测量，并且可以快速且自动地执行。使用扫描反射镜位置信息和从目标反射的激光产生的信号，激光眼科手术系统也可以被校准。

9. 发明申请

WO2016061547A1 AUTOMATIC PATIENT POSITIONING WITHIN A LASER EYE SURGERY SYSTEM 审中-公开
标题翻译：自动患者在激光眼手术系统中的定位
公开(公告)号：WO2016061547A1
公开(公告)日：2016-04-21
申请号：PCT/US2015/056080
申请日：2015-10-16
申请人： OPTIMEDICA CORPORATION
发明人： GONZALEZ, Javier, G. , DEWEY, David, A. , BAREKET, Noah , CAMPOS, Michael, A. , CHEN, Yu-tai Ray , SCOTT, David, D.
IPC分类号： A61B3/00 , A61B3/10 , A61F9/007 , A61F9/008
CPC分类号： A61F9/009 , A61B5/6844 , A61B5/704 , A61F9/007 , A61F9/008 , A61F2009/0052 , A61F2009/00846 , A61F2009/00851 , A61F2009/0087 , A61F2009/00887 , A61G15/02
摘要： A laser eye surgery system produces a treatment beam that includes a plurality of laser pulses. An optical coherence tomography (OCT) subsystem produces a source beam used to locate one or more structures of an eye. The OCT subsystem is used to sense the distance between a camera objective on the underside of the laser eye surgery system and the patient's eye. Control electronics compare the sensed distance with a pre-determined target distance, and reposition a movable patient support toward or away the camera objective until the sensed distance is at the predetermined target distance. A subsequent measurement dependent upon the spacing between the camera objective and the patient's eye is performed, such as determining the astigmatic axis by observing the reflection of a plurality of point source LEDs arranged in concentric rings off the eye.
摘要翻译：激光眼手术系统产生包括多个激光脉冲的治疗束。光学相干断层扫描（OCT）子系统产生用于定位眼睛的一个或多个结构的源束。 OCT子系统用于感测激光眼手术系统下侧的相机物镜与患者眼睛之间的距离。控制电子装置将感测到的距离与预定的目标距离进行比较，并将可移动的患者支架重新定位到或离开相机物镜，直到感测到的距离处于预定的目标距离。执行取决于相机物镜和患者眼睛之间的间隔的随后测量，例如通过观察以眼睛中同心环排列的多个点光源LED的反射来确定散光轴。

10. 发明申请

WO2016061454A1 CORNEAL TOPOGRAPHY MEASUREMENTS AND FIDUCIAL MARK INCISIONS IN LASER SURGICAL PROCEDURES 审中-公开
标题翻译：激光手术过程中的角膜测量和FIDUCAL MARK INCISIONS
公开(公告)号：WO2016061454A1
公开(公告)日：2016-04-21
申请号：PCT/US2015/055936
申请日：2015-10-16
申请人： OPTIMEDICA CORPORATION
发明人： SRINIVASAN, Rajeshwari , GOLDA, Jeffrey, A. , GONZALEZ, Javier, G. , SCOTT, David, D. , DEWEY, David, A. , BAREKET, Noah , SCHUELE, Georg
IPC分类号： A61F9/008
CPC分类号： A61F9/00825 , A61F2009/00865 , A61F2009/0087 , A61F2009/00872 , A61F2009/00882
摘要： A method of cataract surgery in an eye of a patient includes identifying a feature selected from the group consisting of an axis, a meridian, and a structure of an eye by corneal topography and forming fiducial mark incisions with a laser beam along the axis, meridian or structure in the cornea outside the optical zone of the eye. A laser cataract surgery system a laser source, a topography measurement system, an integrated optical subsystem, and a processor in operable communication with the laser source, corneal topography subsystem and the integrated optical system. The processor includes a tangible non- volatile computer readable medium comprising instructions to determine one of an axis, meridian and structure of an eye of the patient based on the measurements received from topography measurement system, and direct the treatment beam so as to incise radial fiducial mark incisions.
摘要翻译：在患者眼睛中的白内障手术的方法包括通过角膜形貌识别选自由轴，子午线和眼睛结构组成的组的特征，并且沿着轴线形成具有激光束的基准标记切口，子午线或在眼睛的光学区域外的角膜中的结构。激光白内障手术系统，激光源，地形测量系统，集成光学子系统和与激光源，角膜地形子系统和集成光学系统可操作地通信的处理器。处理器包括有形的非易失性计算机可读介质，其包括用于基于从地形测量系统接收的测量值来确定患者的眼睛的轴线，子午线和结构之一的指令，并且引导治疗束以切割径向基准标记切口。

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