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1. 发明申请

WO2011056318A2 APPARATUS AND METHOD FOR MEASURING POSITION AND/OR MOTION USING SURFACE MICRO-STRUCTURE 审中-公开
标题翻译：使用表面微结构测量位置和/或运动的装置和方法
公开(公告)号：WO2011056318A2
公开(公告)日：2011-05-12
申请号：PCT/US2010/050045
申请日：2010-09-23
申请人： KLA-TENCOR CORPORATION , UMMETHALA, Upendra , BAREKET, Noah , BEVIS, Christopher
发明人： UMMETHALA, Upendra , BAREKET, Noah , BEVIS, Christopher
IPC分类号： G01B11/00 , H01L21/66
CPC分类号： G01B11/0691 , B82Y10/00 , B82Y40/00 , G01P3/806 , H01J37/3174
摘要： One embodiment relates to a method in which a measuring apparatus is used to collect a first set of wave form data which depends on micro-structure of a moving surface. A correspondence is identified between the first set of wave form data and actual position data. Calibrated wave form data is stored which indicates said correspondence between the first set of wave form data and actual position data. In addition, the measuring apparatus may be used to collect a second set of wave form data which depends on micro-structure of the moving surface, a cross-correlation may be computed between the second set of wave form data and the calibrated wave form data. Another embodiment relates to an apparatus for measuring position and/or motion using surface micro-structure of a moving surface. Another embodiment relates to method for measuring motion using surface micro-structure. Other embodiments and features are also disclosed.
摘要翻译：一个实施例涉及一种方法，其中使用测量装置来收集取决于移动表面的微结构的第一组波形数据。在第一组波形数据和实际位置数据之间识别对应关系。校准波形数据被存储，其指示第一组波形数据与实际位置数据之间的所述对应关系。另外，测量装置可以用于收集取决于运动表面的微结构的第二组波形数据，可以计算第二组波形数据与校准波形数据之间的互相关。另一个实施例涉及一种使用移动表面的表面微观结构来测量位置和/或运动的设备。另一个实施例涉及使用表面微结构测量运动的方法。其他实施例和特征也被公开。

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