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1. 发明申请

WO2010033420A2 METHODS FOR ELECTRON-BEAM INDUCED DEPOSITION OF MATERIAL INSIDE ENERGETIC-BEAM MICROSCOPES 审中-公开
标题翻译：电子束诱导沉积在能量束显微镜内的材料的方法
公开(公告)号：WO2010033420A2
公开(公告)日：2010-03-25
申请号：PCT/US2009056492
申请日：2009-09-10
申请人： OMNIPROBE INC , ZAYKOVA-FELDMAN LYUDMILA , KRUGER ROCKY , MARCHMAN HERSCHEL , MOORE THOMAS
发明人： ZAYKOVA-FELDMAN LYUDMILA , KRUGER ROCKY , MARCHMAN HERSCHEL , MOORE THOMAS
IPC分类号： H01L21/205
CPC分类号： C23C16/487 , C23C16/0227 , C23C16/48 , C23C16/483
摘要： We disclose methods for materials deposition on a surface (120) inside an energetic-beam instrument, where the energetic-beam instrument is provided with a laser beam (170), an electron beam (100), and a source (130) of precursor gas (150). The electron beam (100) is focused on the surface (120), and the laser beam (170) is focused to a focal point (190) that is at a distance (200) above the surface (120) of about 5 microns to one mm, preferably from 5 to 50 microns. The focal point (190) of the laser beam (170) will thus be within the stream of precursor gas (150) injected at the sample surface (120), so that the laser beam (170) will facilitate reactions in this gas cloud with less heating of the surface (120).
摘要翻译：我们公开了用于在能量束仪器内的表面（120）上沉积材料的方法，其中能量束仪器设置有激光束（170），电子束（100）和前体源（130）气（150）。电子束（100）聚焦在表面（120）上，并且激光束（170）聚焦到焦点（190），焦点（190）距表面（120）上的距离（200）约为5微米到 1毫米，优选5至50微米。激光束（170）的焦点（190）将因此位于在样品表面（120）处注入的前体气体（150）的流内，使得激光束（170）将促进该气体云中的反应与表面（120）的加热较少。

2. 发明申请

WO2010025317A3 SINGLE-CHANNEL OPTICAL PROCESSING SYSTEM FOR ENERGETIC-BEAM MICROSCOPES 审中-公开
标题翻译：用于能量束显微镜的单通道光学处理系统
公开(公告)号：WO2010025317A3
公开(公告)日：2010-06-17
申请号：PCT/US2009055286
申请日：2009-08-28
申请人： OMNIPROBE INC , MARCHMAN HERSCHEL , MOORE THOMAS , KRUGER ROCKY
发明人： MARCHMAN HERSCHEL , MOORE THOMAS , KRUGER ROCKY
IPC分类号： H01J37/26
CPC分类号： H01J37/226 , H01J37/3045 , H01J2237/2482 , H01J2237/317 , H01J2237/31749
摘要： A single-channel optical processing system for an energetic-beam instrument has separate sources for processing radiation (170) and illumination radiation (180) that are combined in a single optical path and directed to a sample surface (140) through a selffocusing rod lens (130). The self-focusing rod lens (130) thus has a working distance from the sample surface (140) that will not interfere with typical arrangements of ion beams (100) and electron beams (110) in such instruments. A combination of polarizers (220) and beam splitters (240) allows separation of the combined incident radiation (150) and the reflected radiation (160) from the sample surface (140) and returned through the same optical channel, so that the reflected radiation (160) may be directed to an optical detector (370), such as a camera or spectrometer.
摘要翻译：用于能量束仪器的单通道光学处理系统具有用于处理辐射（170）和照射辐射（180）的单独源，其被组合在单个光学路径中并且通过光束聚焦杆透镜被引导到样品表面（140）（130）。因此，自聚焦棒透镜（130）具有与样品表面（140）的工作距离，其不会干扰这些仪器中的离子束（100）和电子束（110）的典型布置。偏振器（220）和分束器（240）的组合允许组合的入射辐射（150）和反射辐射（160）从样品表面（140）分离并通过相同的光学通道返回，使得反射辐射（160）可以被引导到诸如照相机或光谱仪的光学检测器（370）。

3. 发明申请

WO2011011661A3 METHOD AND APPARATUS FOR THE MONITORING OF SAMPLE MILLING IN A CHARGED PARTICLE INSTRUMENT 审中-公开
标题翻译：用于监测充电颗粒仪器中样品铣削的方法和装置
公开(公告)号：WO2011011661A3
公开(公告)日：2011-04-28
申请号：PCT/US2010043014
申请日：2010-07-23
申请人： OMNIPROBE INC , ZAYKOVA-FELDMAN LYUDMILA , MOORE THOMAS , AMADOR GONZALO
发明人： ZAYKOVA-FELDMAN LYUDMILA , MOORE THOMAS , AMADOR GONZALO
IPC分类号： H01J37/26 , H01J37/20 , H01J37/244
CPC分类号： H01J37/3056 , G01N1/32 , H01J37/304 , H01J2237/20207 , H01J2237/2482 , H01J2237/30466 , H01J2237/31745
摘要： An apparatus for monitoring sample milling in a charged-particle instrument has a variable-tilt specimen holder (130) attached to the instrument tilt stage (120). The variable-tilt specimen holder (130) includes a first pivoting plate (260) having a slot (280) for holding a specimen (290) rotatably supported in the variable-tilt specimen holder (130). The first pivoting plate (260) has a range of rotation sufficient to move the preferred axis of thinning of the specimen (290) from a first position where the tilt stage (120) is placed at its maximum range of tilt and the angle between the preferred axis of thinning of the specimen (290) and the axis of the ion beam column (110) of the instrument is greater than zero, to a second position where the preferred axis for thinning of the specimen (290) is substantially parallel to the axis of the ion-beam column (110). A light detector (250) is positioned to intercept light passing through the specimen (290) as it is thinned by ion-beam milling. The intensity of the light passing through the specimen (290) may be compared to the intensity recorded for previous stages of milling to determine an endpoint for milling
摘要翻译：用于监测带电粒子仪器中的样品研磨的装置具有附接到仪器倾斜台（120）的可变倾斜试样保持器（130）。可变倾斜试样架（130）包括第一枢转板（260），其具有用于保持可旋转地支撑在可变倾斜试样保持器（130）中的试样（290）的狭槽（280）。第一枢转板（260）具有足够的旋转范围，以便将倾斜台（120）放置在其最大倾斜范围的第一位置移动样品（290）的优选稀疏轴线，样品（290）的薄化的优选轴线和仪器的离子束柱（110）的轴线大于零，到第二位置，其中样品（290）的薄化优选轴线基本上平行于离子束柱（110）的轴线。光检测器（250）被定位成通过离子束铣削来遮蔽通过样品（290）的光线。可以将通过样品（290）的光的强度与先前研磨阶段记录的强度进行比较，以确定铣削的终点

4. 发明申请

WO2009114112A3 METHOD AND APPARATUS FOR PRECURSOR DELIVERY SYSTEM FOR IRRADIATION BEAM INSTRUMENTS 审中-公开
标题翻译：照射光束仪器的前体输送系统的方法和设备
公开(公告)号：WO2009114112A3
公开(公告)日：2009-12-10
申请号：PCT/US2009001480
申请日：2009-03-06
申请人： OMNIPROBE INC , KRUGER ROCKY , SMITH AARON , MOORE THOMAS
发明人： KRUGER ROCKY , SMITH AARON , MOORE THOMAS
IPC分类号： C23C16/455 , C23C16/48
CPC分类号： C23C16/4481 , C23C16/45561 , C23C16/48 , C23C16/52 , C23C16/54
摘要： A precursor delivery system for an irradiation beam instrument having a vacuum chamber includes an injection tube (340) for injecting gasses into the vacuum chamber of the instrument and a main gas line (290) having an inlet (295) and an outlet 335). The outlet (335)is connected to the injection tube, (340) and the inlet (295) is connected to a sequential pair of valves (120, 125) connected to a carrier gas source (150). A crucible (190) for holding precursor material is selectively connected to the main gas line (290) at a location between the pair of valves (120, 125) and the injection tube (340). The source (150) of carrier gas may be selectively connected to the inlet (295) by sequential operation of the pair of carrier gas valves (120, 125), so that pulses of carrier gas assist the flow of precursor material to the injection tube (340). Rapid purging of the system between precursors is enabled by a valve (110) selectively connecting the main line (290) to an envelope (300) in communication with the instrument vacuum. Methods of CVD and etching using the system are also disclosed.
摘要翻译：用于具有真空室的辐射束仪器的前驱体输送系统包括用于将气体喷射到仪器的真空室中的喷射管（340）和具有入口（295）和出口335的主气体管线（290）。出口（335）连接到注入管（340），并且入口（295）连接到连接到载气源（150）的顺序的一对阀（120,125）。用于容纳前体材料的坩埚（190）在一对阀（120,125）和注入管（340）之间的位置选择性地连接到主气体管线（290）。载气源（150）可以通过一对载气阀（120,125）的顺序操作而选择性地连接到入口（295），使得载气脉冲辅助前体材料流到注入管（340）。通过选择性地将主管线（290）连接到与仪器真空连通的封套（300）的阀（110）实现前体之间系统的快速清洗。还公开了使用该系统的CVD和蚀刻方法。

5. 发明申请

WO2013022917A3 METHOD FOR PROCESSING SAMPLES HELD BY A NANOMANIPULATOR 审中-公开
标题翻译：处理纳米管的样品的方法
公开(公告)号：WO2013022917A3
公开(公告)日：2013-04-11
申请号：PCT/US2012049908
申请日：2012-08-08
申请人： OMNIPROBE INC , HARTFIELD CHERYL , MOORE THOMAS , MILLER BRIAN
发明人： HARTFIELD CHERYL , MOORE THOMAS , MILLER BRIAN
IPC分类号： G01N1/36 , G01B9/04 , H01J37/20
CPC分类号： G01N1/32 , B82Y10/00 , B82Y40/00 , G01N1/286 , G01N2001/2886 , G02B21/32 , H01J37/20 , H01J2237/0216 , H01J2237/208 , H01J2237/31745
摘要： A method for processing a sample in a charged-particle beam microscope. A sample is collected from a substrate and the sample is attached to the tip of a nanomanipulator. The sample is optionally oriented to optimize further processing. The nanomanipulator tip is brought into contact with a stabilizing support to minimize drift or vibration of the sample. The attached sample is then stabilized and available for preparation and analysis.
摘要翻译：一种在带电粒子束显微镜中处理样品的方法。从基底收集样品并将样品附着到纳米操纵器的尖端。该样本可选地被定向以优化进一步的处理。纳米操纵器尖端与稳定支架接触以使样品的漂移或振动最小化。附着的样品然后稳定并可用于制备和分析。

6. 发明申请

WO2005046851A2 METHOD AND APPARATUS FOR RAPID SAMPLE PREPARATION IN A FOCUSED ION BEAM MICROSCOPE 审中-公开
标题翻译：在聚焦离子束显微镜中快速制备样品的方法和设备
公开(公告)号：WO2005046851A2
公开(公告)日：2005-05-26
申请号：PCT/US2004036560
申请日：2004-11-03
申请人： OMNIPROBE INC , MOORE THOMAS
发明人： MOORE THOMAS
IPC分类号： B01F20060101 , H01J37/20 , B01F
CPC分类号： H01J37/20 , G01N1/286 , H01J37/26 , H01J37/3056 , H01J37/31 , H01J2237/31745 , H01J2237/31749
摘要： A coupon (100) for preparing a TEM sample holder (170) comprises a sheet of material (120) that includes a TEM sample holder form (170). There is at least one section of the sheet (120) connecting the TEM sample holder form (170) to other portions of the sheet (120). A TEM sample holder (170) is formed by cutting the TEM sample holder form (170) from the coupon in a press. The cutting joins the tip point (160) of a nano-manipulator probe tip (150) with the formed TEM sample holder (170). The tip point (160) of the probe (150) has a sample (140) attached for inspection in a TEM.
摘要翻译：用于制备TEM样本保持器（170）的优惠券（100）包括包含TEM样本保持器形式（170）的片材（120）。片材120的至少一部分将TEM样品保持器模板170连接到片材120的其他部分。 TEM样品保持器（170）通过在压机中从样品切割TEM样品保持器模板（170）而形成。切割将纳米操纵器探针尖端（150）的尖端点（160）与形成的TEM样本保持器（170）连接。探针（150）的尖端点（160）具有用于在TEM中进行检查的样本（140）。

7. 发明申请

WO2012018800A3 METHOD FOR ACQUIRING SIMULTANEOUS AND OVERLAPPING OPTICAL AND CHARGED PARTICLE BEAM IMAGES 审中-公开
标题翻译：获取同时和重叠光学和充电粒子束图像的方法
公开(公告)号：WO2012018800A3
公开(公告)日：2012-04-26
申请号：PCT/US2011046247
申请日：2011-08-02
申请人： MOORE THOMAS , HARTFIELD CHERYL , MAGEL GREGORY , OMNIPROBE INC
发明人： MOORE THOMAS , HARTFIELD CHERYL , MAGEL GREGORY
IPC分类号： G01B11/00 , G01B9/04 , H01J37/26
CPC分类号： H01J37/28 , G01N23/2251 , G01N2223/10 , G01N2223/418 , G02B21/002 , G02B21/367 , H01J37/228 , H01J2237/2445
摘要： This disclosure relates to a method and apparatus for producing multiple pixel-by-pixel simultaneous and overlapping images of a sample (100) in a microscope (10) with multiple imaging beams (120, 130). A scanning electron microscope, a focused ion-beam microscope (10), or a microscope having both beams (120, 130), also has an optical microscope (140). A region of interest (210) on a sample (100) is scanned by both charged-particle (120) and optical (130) beams, either by moving the sample (100) beneath the beams (120, 130) by use of a mechanical stage (110), or by synchronized scanning of the stationary sample (100) by the imaging beams (120, 130), or by independently scanning the sample (100) with the imaging beams (120, 130) and recording imaging signals so as to form pixel-by-pixel simultaneous and overlapping images.
摘要翻译：本公开涉及一种用于在具有多个成像光束（120,130）的显微镜（10）中产生样品（100）的多个逐像素同时和重叠图像的方法和装置。扫描电子显微镜，聚焦离子束显微镜（10）或具有两个光束（120,130）的显微镜也具有光学显微镜（140）。无论是通过将样品（100）在梁（120,130）下方移动，通过两个带电粒子（120）和光学（130）两个光束来扫描样品（100）上的感兴趣区域（210）或者通过成像光束（120,130）对固定样品（100）进行同步扫描，或者通过用成像光束（120,130）独立地扫描样品（100），并记录成像信号，从而以形成逐像素同时和重叠的图像。

8. 发明专利

HK1095426A1 METHOD AND APPARATUS FOR RAPID SAMPLE PREPARATION IN A FOCUSED ION BEAM MICROSCOPE 未知
公开(公告)号：HK1095426A1
公开(公告)日：2007-05-04
申请号：HK07100867
申请日：2007-01-25
申请人： OMNIPROBE INC
发明人： MOORE THOMAS
IPC分类号： B01F20060101 , H01J20060101 , H01J37/20
摘要： A coupon for preparing a TEM sample holder comprises a sheet of material that includes a TEM sample holder form. There is at least one section of the sheet connecting the TEM sample holder form to other portions of the sheet. A TEM sample holder is formed by cutting the TEM sample holder form from the coupon in a press. The cutting joins the tip point of a nano-manipulator probe tip with the formed TEM sample holder. The tip point of the probe has a sample attached for inspection in a TEM.

9. 发明专利

CA2543462A1 METHOD AND APPARATUS FOR RAPID SAMPLE PREPARATION IN A FOCUSED ION BEAM MICROSCOPE 未知
公开(公告)号：CA2543462A1
公开(公告)日：2005-05-26
申请号：CA2543462
申请日：2004-11-03
申请人： OMNIPROBE INC
发明人： MOORE THOMAS
IPC分类号： H01J37/20 , B01F20060101
摘要： A coupon for preparing a TEM sample holder comprises a sheet of material that includes a TEM sample holder form. There is at least one section of the sheet connecting the TEM sample holder form to other portions of the sheet. A TEM sample holder is formed by cutting the TEM sample holder form from the coupon in a press. The cutting joins the tip point of a nano-manipulator probe tip with the formed TEM sample holder. The tip point of the probe has a sample attached for inspection in a TEM.

10. 发明公开

EP2742334A4 METHOD FOR PROCESSING SAMPLES HELD BY A NANOMANIPULATOR 审中-公开
标题翻译：一种用于在纳操作器样品加工
公开(公告)号：EP2742334A4
公开(公告)日：2015-03-11
申请号：EP12822777
申请日：2012-08-08
申请人： OMNIPROBE INC
发明人： HARTFIELD CHERYL , MOORE THOMAS , MILLER BRIAN
IPC分类号： G01N1/32 , B82Y10/00 , B82Y40/00 , G01B9/04 , G01N1/28 , G02B21/32 , H01J37/20
CPC分类号： G01N1/32 , B82Y10/00 , B82Y40/00 , G01N1/286 , G01N2001/2886 , G02B21/32 , H01J37/20 , H01J2237/0216 , H01J2237/208 , H01J2237/31745

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