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1. 发明申请

WO2010033420A2 METHODS FOR ELECTRON-BEAM INDUCED DEPOSITION OF MATERIAL INSIDE ENERGETIC-BEAM MICROSCOPES 审中-公开
标题翻译：电子束诱导沉积在能量束显微镜内的材料的方法
公开(公告)号：WO2010033420A2
公开(公告)日：2010-03-25
申请号：PCT/US2009056492
申请日：2009-09-10
申请人： OMNIPROBE INC , ZAYKOVA-FELDMAN LYUDMILA , KRUGER ROCKY , MARCHMAN HERSCHEL , MOORE THOMAS
发明人： ZAYKOVA-FELDMAN LYUDMILA , KRUGER ROCKY , MARCHMAN HERSCHEL , MOORE THOMAS
IPC分类号： H01L21/205
CPC分类号： C23C16/487 , C23C16/0227 , C23C16/48 , C23C16/483
摘要： We disclose methods for materials deposition on a surface (120) inside an energetic-beam instrument, where the energetic-beam instrument is provided with a laser beam (170), an electron beam (100), and a source (130) of precursor gas (150). The electron beam (100) is focused on the surface (120), and the laser beam (170) is focused to a focal point (190) that is at a distance (200) above the surface (120) of about 5 microns to one mm, preferably from 5 to 50 microns. The focal point (190) of the laser beam (170) will thus be within the stream of precursor gas (150) injected at the sample surface (120), so that the laser beam (170) will facilitate reactions in this gas cloud with less heating of the surface (120).
摘要翻译：我们公开了用于在能量束仪器内的表面（120）上沉积材料的方法，其中能量束仪器设置有激光束（170），电子束（100）和前体源（130）气（150）。电子束（100）聚焦在表面（120）上，并且激光束（170）聚焦到焦点（190），焦点（190）距表面（120）上的距离（200）约为5微米到 1毫米，优选5至50微米。激光束（170）的焦点（190）将因此位于在样品表面（120）处注入的前体气体（150）的流内，使得激光束（170）将促进该气体云中的反应与表面（120）的加热较少。

2. 发明申请

WO2010025317A3 SINGLE-CHANNEL OPTICAL PROCESSING SYSTEM FOR ENERGETIC-BEAM MICROSCOPES 审中-公开
标题翻译：用于能量束显微镜的单通道光学处理系统
公开(公告)号：WO2010025317A3
公开(公告)日：2010-06-17
申请号：PCT/US2009055286
申请日：2009-08-28
申请人： OMNIPROBE INC , MARCHMAN HERSCHEL , MOORE THOMAS , KRUGER ROCKY
发明人： MARCHMAN HERSCHEL , MOORE THOMAS , KRUGER ROCKY
IPC分类号： H01J37/26
CPC分类号： H01J37/226 , H01J37/3045 , H01J2237/2482 , H01J2237/317 , H01J2237/31749
摘要： A single-channel optical processing system for an energetic-beam instrument has separate sources for processing radiation (170) and illumination radiation (180) that are combined in a single optical path and directed to a sample surface (140) through a selffocusing rod lens (130). The self-focusing rod lens (130) thus has a working distance from the sample surface (140) that will not interfere with typical arrangements of ion beams (100) and electron beams (110) in such instruments. A combination of polarizers (220) and beam splitters (240) allows separation of the combined incident radiation (150) and the reflected radiation (160) from the sample surface (140) and returned through the same optical channel, so that the reflected radiation (160) may be directed to an optical detector (370), such as a camera or spectrometer.
摘要翻译：用于能量束仪器的单通道光学处理系统具有用于处理辐射（170）和照射辐射（180）的单独源，其被组合在单个光学路径中并且通过光束聚焦杆透镜被引导到样品表面（140）（130）。因此，自聚焦棒透镜（130）具有与样品表面（140）的工作距离，其不会干扰这些仪器中的离子束（100）和电子束（110）的典型布置。偏振器（220）和分束器（240）的组合允许组合的入射辐射（150）和反射辐射（160）从样品表面（140）分离并通过相同的光学通道返回，使得反射辐射（160）可以被引导到诸如照相机或光谱仪的光学检测器（370）。

3. 发明申请

WO2009114112A3 METHOD AND APPARATUS FOR PRECURSOR DELIVERY SYSTEM FOR IRRADIATION BEAM INSTRUMENTS 审中-公开
标题翻译：照射光束仪器的前体输送系统的方法和设备
公开(公告)号：WO2009114112A3
公开(公告)日：2009-12-10
申请号：PCT/US2009001480
申请日：2009-03-06
申请人： OMNIPROBE INC , KRUGER ROCKY , SMITH AARON , MOORE THOMAS
发明人： KRUGER ROCKY , SMITH AARON , MOORE THOMAS
IPC分类号： C23C16/455 , C23C16/48
CPC分类号： C23C16/4481 , C23C16/45561 , C23C16/48 , C23C16/52 , C23C16/54
摘要： A precursor delivery system for an irradiation beam instrument having a vacuum chamber includes an injection tube (340) for injecting gasses into the vacuum chamber of the instrument and a main gas line (290) having an inlet (295) and an outlet 335). The outlet (335)is connected to the injection tube, (340) and the inlet (295) is connected to a sequential pair of valves (120, 125) connected to a carrier gas source (150). A crucible (190) for holding precursor material is selectively connected to the main gas line (290) at a location between the pair of valves (120, 125) and the injection tube (340). The source (150) of carrier gas may be selectively connected to the inlet (295) by sequential operation of the pair of carrier gas valves (120, 125), so that pulses of carrier gas assist the flow of precursor material to the injection tube (340). Rapid purging of the system between precursors is enabled by a valve (110) selectively connecting the main line (290) to an envelope (300) in communication with the instrument vacuum. Methods of CVD and etching using the system are also disclosed.
摘要翻译：用于具有真空室的辐射束仪器的前驱体输送系统包括用于将气体喷射到仪器的真空室中的喷射管（340）和具有入口（295）和出口335的主气体管线（290）。出口（335）连接到注入管（340），并且入口（295）连接到连接到载气源（150）的顺序的一对阀（120,125）。用于容纳前体材料的坩埚（190）在一对阀（120,125）和注入管（340）之间的位置选择性地连接到主气体管线（290）。载气源（150）可以通过一对载气阀（120,125）的顺序操作而选择性地连接到入口（295），使得载气脉冲辅助前体材料流到注入管（340）。通过选择性地将主管线（290）连接到与仪器真空连通的封套（300）的阀（110）实现前体之间系统的快速清洗。还公开了使用该系统的CVD和蚀刻方法。

4. 发明申请

WO2014011292A8 GAS INJECTION SYSTEM FOR ENERGETIC-BEAM INSTRUMENTS 审中-公开
标题翻译：用于能量光束仪器的气体注入系统
公开(公告)号：WO2014011292A8
公开(公告)日：2015-02-26
申请号：PCT/US2013036554
申请日：2013-04-15
申请人： OMNIPROBE INC
发明人： KRUGER ROCKY , SMITH AARON , HARTFIELD CHERYL
IPC分类号： C23C16/455 , C23C16/44
CPC分类号： H01J37/08 , C23C16/448 , C23C16/48 , C23C16/52 , C23C16/56 , G01N1/28 , H01J37/02 , H01J2237/006 , H01J2237/317 , Y10T137/0329 , Y10T137/0352
摘要： A gas injection system for an energetic-beam instrument having a vacuum chamber. The system has a cartridge containing a chemical serving as a source for an output gas to be delivered into the vacuum chamber. The cartridge has a reservoir containing the chemical, which rises to a fill line having a level defined by an amount of the chemical present in the reservoir at a given time, An outlet from the reservoir is coupled to an output passage through an outlet valve and configured so that when the system is tilted the outlet remains above the level of the fill line. Embodiments include isolation valves allowing the cartridge to be disconnected without destroying system vacuum.
摘要翻译：一种用于具有真空室的能量束仪器的气体注入系统。该系统具有一个包含化学物质的药筒，作为输出气体的来源，被输送到真空室中。药筒具有容纳化学物质的储存器，其在给定时间上升到具有由储存器中存在的化学物质量限定的水平的填充管线。储存器的出口通过出口阀联接到输出通道，配置成使得当系统倾斜时，出口保持在填充线的水平面上方。实施例包括隔离阀，允许筒被断开而不破坏系统真空。

5. 发明公开

EP2872669A4 GAS INJECTION SYSTEM FOR ENERGETIC-BEAM INSTRUMENTS 审中-公开
标题翻译：食品科技有限公司FÜRINSTRUMENTE MIT ENERGETISCHEM STRAHL
公开(公告)号：EP2872669A4
公开(公告)日：2016-03-23
申请号：EP13817088
申请日：2013-04-15
申请人： OMNIPROBE INC
发明人： KRUGER ROCKY , SMITH AARON , HARTFIELD CHERYL
IPC分类号： H01J37/02 , C23C16/448 , C23C16/48 , C23C16/52 , C23C16/56
CPC分类号： H01J37/08 , C23C16/448 , C23C16/48 , C23C16/52 , C23C16/56 , G01N1/28 , H01J37/02 , H01J2237/006 , H01J2237/317 , Y10T137/0329 , Y10T137/0352

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