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    • 2. 发明申请
    • VARIABLE-TILT TEM SPECIMEN HOLDER FOR CHARGED-PARTICLE BEAM INSTRUMENTS
    • 用于带电粒子束仪器的变倾斜透射电子显微镜样品架
    • WO2011011659A3
    • 2011-04-28
    • PCT/US2010043012
    • 2010-07-23
    • OMNIPROBE INCAMADOR GONZALOMILLER BRIAN
    • AMADOR GONZALOMILLER BRIAN
    • H01J37/20H01J37/26
    • H01J37/20H01J2237/20207H01J2237/31745H01J2237/31749
    • A variable-tilt specimen holder (100) for a charged particle instrument having a tilt stage (360), where the tilt stage (360) has a maximum range of tilt, a sample plate (280) affixed to the tilt stage (360), and an ion-beam column (320) having an ion-beam column axis. The variable-tilt specimen holder (100) has a base (110) for mounting to the sample plate (280), so that the base (110) is substantially parallel to the tilt stage (360). A rotatably supported pivot plate (140) has slots (210) for holding TEM specimens (270) or TEM grids holding specimens (270). The pivot plate (140) is rotatable so that the TEM specimens (270) held therein can be aligned with the axis of the ion beam column (320) for thinning of the specimen (270). The pivot plate (140) has a range of rotation sufficient to move the preferred axis (275) of thinning of the specimen (270) from a first position where the tilt stage (360) is placed at its maximum range of tilt and the angle between the preferred axis (275) of thinning of the specimen (270) and the axis of the ion beam column (320) is greater than zero, to a second position where the preferred axis (275) for thinning of the specimen (270) is substantially parallel to the axis of the ion-beam column (320).
    • 一种用于具有倾斜台(360)的带电粒子仪器的可变倾斜试样保持器(100),其中倾斜台(360)具有最大倾斜范围,固定到倾斜台(360)的样品板(280) 和具有离子束列轴的离子束柱(320)。 可变倾斜试样架(100)具有用于安装到试样板(280)的基座(110),使得基座(110)基本平行于倾斜台(360)。 可旋转地支撑的枢轴板(140)具有用于容纳保持样本(270)的TEM样本(270)或TEM网格的狭槽(210)。 枢轴板(140)是可旋转的,使得保持在其中的TEM样本(270)可以与离子束柱(320)的轴线对齐以使样本(270)变薄。 枢转板(140)具有足以使试样(270)变薄的优选轴(275)从其中倾斜台(360)被放置在其最大倾斜范围处的第一位置移动的旋转范围, 在样本(270)的变薄的优选轴(275)和离子束列(320)的轴之间的距离大于零的第二位置到用于使样本(270)变薄的优选轴(275) 基本平行于离子束柱(320)的轴线。