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1. 发明申请

WO2006050494A3 APPARATUS AND METHOD OF DETECTING PROBE TIP CONTACT WITH A SURFACE 审中-公开
标题翻译：检测探头与表面接触的装置和方法
公开(公告)号：WO2006050494A3
公开(公告)日：2006-12-14
申请号：PCT/US2005039940
申请日：2005-11-03
申请人： OMNIPROBE INC , MOORE THOMAS M , ZAYKOVA-FELDMAN LYUDMILA
发明人： MOORE THOMAS M , ZAYKOVA-FELDMAN LYUDMILA
IPC分类号： G01J1/04 , H01J3/14
CPC分类号： H01J37/22 , B82Y35/00 , H01J37/20 , H01J37/3056 , H01J2237/20 , H01J2237/202 , H01J2237/204 , H01J2237/206 , H01J2237/208 , H01J2237/2482 , H01J2237/28 , H01J2237/31745
摘要： We disclose an apparatus and method for detecting probe-tip (120) contact with a surface, generally inside a focused ion-beam instrument, where the probe tip (120) is attached to a capsule (130), and the capsule (130) is movably secured in a probe shaft (140). There is a fiber-optic cable (150) having a first end and a second end; a beam splitter (115) having first and second output ports; and a light source (100) connected to the beam splitter (115). The first output port of the beam splitter (115) is connected to the first end of the fiber-optic cable (150), and the second output port of the beam splitter (115) is connected to a photodiode (110). The second end of the fiber-optic cable (150) has a mirror (155) for reflecting incident light at approximately a ninety-degree angle to the axis of the optical path in the fiber-optic cable (150) and onto the capsule (130), so that the intensity of the light reflected back from the capsule (130) through the fiber-optic cable (150) is proportional to the deflection of the capsule (130) as the probe tip (120) makes contact with the surface.
摘要翻译：我们公开了一种用于检测探针尖端（120）与通常在聚焦离子束仪器内部的表面接触的装置和方法，其中探针尖端（120）连接到胶囊（130），并且胶囊（130）可移动地固定在探针轴（140）中。存在具有第一端和第二端的光纤电缆（150）分束器（115），其具有第一和第二输出端口; 和连接到分束器（115）的光源（100）。分束器（115）的第一输出端口连接到光缆（150）的第一端，分束器（115）的第二输出端口连接到光电二极管（110）。光纤电缆（150）的第二端具有反射镜（155），用于以大约90度的角度将入射光反射到光纤电缆（150）中的光路的轴线上并且反射到胶囊上从而当探针尖端（120）与表面（130）接触时，从胶囊（130）通过光纤电缆（150）反射回来的光的强度与胶囊（130）的偏转成比例。

2. 发明申请

WO2006050495A3 METHOD AND APPARATUS FOR THE AUTOMATED PROCESS OF IN-SITU LIFT-OUT 审中-公开
标题翻译：用于自动提升自动化过程的方法和装置
公开(公告)号：WO2006050495A3
公开(公告)日：2008-08-14
申请号：PCT/US2005039942
申请日：2005-11-03
申请人： OMNIPROBE INC , MOORE THOMAS M , ZAYKOVA-FELDMAN LYUDMILA
发明人： MOORE THOMAS M , ZAYKOVA-FELDMAN LYUDMILA
IPC分类号： H01J37/26 , H01J37/304
CPC分类号： H01J37/302 , B82Y15/00 , G01N1/32 , H01J37/20 , H01J37/22 , H01J37/3056 , H01J2237/20 , H01J2237/202 , H01J2237/204 , H01J2237/206 , H01J2237/208 , H01J2237/2482 , H01J2237/28 , H01J2237/30411 , H01J2237/30472 , H01J2237/31745
摘要： An apparatus for performing automated in-situ lift-out of a sample (150) from a specimen (125) includes a computer (100) having a memory with computer-readable instructions, a stage (120) for a specimen (125) and a nano-manipulator (130). The stage (120) and the nano-manipulator (130) are controlled by motion controllers (110) connected to the computer (100). The nano-manipulator (130) has a probe tip (140) for attachment to samples (150) excised from the specimen (125). The computer-readable instructions include instructions to cause the stage motion controllers (110) and the nano-manipulator motion controllers (110), as well as an ion-beam source (170), to automatically perform in-situ lift-out of a sample (150) from the specimen (125).
摘要翻译：用于从样本（125）进行样品（150）的自动原位取出的设备包括具有计算机可读指令的存储器的计算机（100），用于样本（125）的级（120）和纳米操纵器（130）。舞台（120）和纳米机械手（130）由连接到计算机（100）的运动控制器（110）控制。纳米操纵器（130）具有用于附接到从样本（125）切除的样品（150）的探针尖端（140）。所述计算机可读指令包括使所述载物台运动控制器（110）和所述纳米机械手运动控制器（110）以及离子束源（170）自动执行原位取出的指令来自样品（125）的样品（150）。

3. 发明申请

WO2006096549A3 APPARATUS AND METHOD FOR AUTOMATED STRESS TESTING OF FLIP-CHIP PACKAGES 审中-公开
标题翻译：用于自动应力测试的芯片包装的装置和方法
公开(公告)号：WO2006096549A3
公开(公告)日：2007-04-19
申请号：PCT/US2006007700
申请日：2006-03-03
申请人： OMNIPROBE INC , ZAYKOVA-FELDMAN LYUDMILA , MOORE THOMAS M
发明人： ZAYKOVA-FELDMAN LYUDMILA , MOORE THOMAS M
IPC分类号： G01N27/82 , G01N11/00 , G01R33/09 , G01R33/12
CPC分类号： G01R31/2881 , G01M7/08 , G01N3/00 , G01N3/307 , G01N3/313 , G01N2203/0044 , G01N2203/005 , G01N2203/0057 , G01N2203/0296 , G01N2203/0676 , G01R31/2868 , H01L21/67011
摘要： An apparatus for testing flip-chip packages has a programmed computer (100), a test-engine stage (130) for applying an impact to at least one package (110) under test, and a monitoring stage (140). The test-engine stage (130) causes an impact on the package (110) on the side opposite its ball-grid array. The test-engine stage (130) has actuators connected to the test-engine stage (130) and the computer (100), for moving and aligning the test-engine stage (130). The monitoring stage (140) has a digital camera (300) connected to the computer (100) for transmitting digital images from the ball-grid array side of the package (110) to the computer (100). A microscope (290) is preferably connected to the digital camera (300). A sample stage (120) located between the test-engine stage (130) and the monitoring stage (140) holds the package (110 under test. The sample stage (120) has an acoustic transducer (190) capable of being removably connected to the package (110) under test. The acoustic transducer (190) is connected to the computer (100) for transmitting signals from the acoustic transducer (190) to the computer (100).
摘要翻译：用于测试倒装芯片封装的装置具有编程计算机（100），用于对被测试的至少一个封装（110）施加冲击的测试引擎级（130）和监视级（140）。测试引擎级（130）在与球栅阵列相对的一侧上引起对包装（110）的冲击。测试发动机级（130）具有连接到测试引擎级（130）和计算机（100）的致动器，用于移动和对准测试引擎级（130）。监视级（140）具有连接到计算机（100）的数字照相机（300），用于将数字图像从包装（110）的球栅阵列侧传送到计算机（100）。显微镜（290）优选地连接到数字照相机（300）。位于测试引擎级（130）和监控级（140）之间的样品台（120）保持被测试的包装（110）。样品台（120）具有能够可移除地连接到声学换能器（190）连接到计算机（100），用于将信号从声换能器（190）发送到计算机（100）。

4. 发明申请

WO2006020324A2 METHOD AND APPARATUS FOR IN-SITU PROBE TIP REPLACEMENT INSIDE A CHARGED PARTICLE BEAM MICROSCOPE 审中-公开
标题翻译：在充电颗粒光束显微镜内部的现场探针尖端替换的方法和装置
公开(公告)号：WO2006020324A2
公开(公告)日：2006-02-23
申请号：PCT/US2005025745
申请日：2005-07-21
申请人： MOORE THOMAS M , ZAYKOVA-FELDMAN LYUDMILA
发明人： MOORE THOMAS M , ZAYKOVA-FELDMAN LYUDMILA
IPC分类号： G21K7/00
CPC分类号： H01J37/20 , H01J37/26 , H01J2237/2005 , H01J2237/2006 , H01J2237/2007 , H01J2237/201 , H01J2237/204 , H01J2237/208 , H01J2237/26 , H01J2237/262 , H01J2237/31745 , H01J2237/31749
摘要： We disclose a gripper and associated apparatus and methods for delivering nano-manipulator probe tips inside a vacuum chamber. The gripper includes a tube; a compression cylinder inside of and coaxial with the tube; and at least one elastic ring adjacent to the compression cylinder. There is a vacuum seal coaxial with the compression cylinder for receiving and sealing against a probe tip. An actuator is connected to the compression cylinder for compressing the elastic ring and causing it to grip the probe tip. Thus the probe tip can be gripped, transferred to a different location in the vacuum chamber, and released there. Samples attached to the probe tips will be transferred to a TEM sample holder, shown in several embodiments, that includes a bar having opposed ends; an arm attached to each opposed end of the bar; one or more slots for receiving a probe tip; and, each slot having an inner part and an outer part, where the inner part is smaller than the outer part. The TEM sample holders just described are inserted into a carrier cassette. A cassette for transferring one or more TEM sample holders comprises a platform; at least one bar extending upwardly from the platform; the bar having a groove for receiving and holding a TEM sample holder. A rotatable magazine holds one or more probe tips and selectively releases the tips. The magazine includes a cartridge having a plurality of longitudinal openings for receiving probe tips and dispensing probe tips.
摘要翻译：我们公开了一种夹具和相关的装置和方法，用于在真空室内输送纳米机械手探头尖端。夹具包括管; 压缩缸内部并与管同轴; 以及与压缩圆筒相邻的至少一个弹性环。存在与压缩筒同轴的真空密封件，用于接收和密封探针尖端。致动器连接到压缩气缸，用于压缩弹性环并使其夹持探针尖端。因此，探针尖端可以被夹持，转移到真空室中的不同位置，并在那里释放。附接到探针尖端的样品将转移到TEM样品保持器，如几个实施方案中所示，其包括具有相对端的棒; 连接到杆的每个相对端的臂; 用于接收探头尖端的一个或多个狭槽; 并且每个狭槽具有内部部分和外部部分，其中内部部分小于外部部分。刚刚描述的TEM样品架被插入到载体盒中。用于转移一个或多个TEM样品保持器的盒子包括平台; 从平台向上延伸的至少一个杆; 该棒具有用于容纳和保持TEM样品保持器的凹槽。一个可旋转刀库可容纳一个或多个探针尖端并选择性地释放尖端。该盒包括具有多个用于接收探针尖端并分配探针尖端的多个纵向开口的盒。

5. 发明申请

WO2011011661A3 METHOD AND APPARATUS FOR THE MONITORING OF SAMPLE MILLING IN A CHARGED PARTICLE INSTRUMENT 审中-公开
标题翻译：用于监测充电颗粒仪器中样品铣削的方法和装置
公开(公告)号：WO2011011661A3
公开(公告)日：2011-04-28
申请号：PCT/US2010043014
申请日：2010-07-23
申请人： OMNIPROBE INC , ZAYKOVA-FELDMAN LYUDMILA , MOORE THOMAS , AMADOR GONZALO
发明人： ZAYKOVA-FELDMAN LYUDMILA , MOORE THOMAS , AMADOR GONZALO
IPC分类号： H01J37/26 , H01J37/20 , H01J37/244
CPC分类号： H01J37/3056 , G01N1/32 , H01J37/304 , H01J2237/20207 , H01J2237/2482 , H01J2237/30466 , H01J2237/31745
摘要： An apparatus for monitoring sample milling in a charged-particle instrument has a variable-tilt specimen holder (130) attached to the instrument tilt stage (120). The variable-tilt specimen holder (130) includes a first pivoting plate (260) having a slot (280) for holding a specimen (290) rotatably supported in the variable-tilt specimen holder (130). The first pivoting plate (260) has a range of rotation sufficient to move the preferred axis of thinning of the specimen (290) from a first position where the tilt stage (120) is placed at its maximum range of tilt and the angle between the preferred axis of thinning of the specimen (290) and the axis of the ion beam column (110) of the instrument is greater than zero, to a second position where the preferred axis for thinning of the specimen (290) is substantially parallel to the axis of the ion-beam column (110). A light detector (250) is positioned to intercept light passing through the specimen (290) as it is thinned by ion-beam milling. The intensity of the light passing through the specimen (290) may be compared to the intensity recorded for previous stages of milling to determine an endpoint for milling
摘要翻译：用于监测带电粒子仪器中的样品研磨的装置具有附接到仪器倾斜台（120）的可变倾斜试样保持器（130）。可变倾斜试样架（130）包括第一枢转板（260），其具有用于保持可旋转地支撑在可变倾斜试样保持器（130）中的试样（290）的狭槽（280）。第一枢转板（260）具有足够的旋转范围，以便将倾斜台（120）放置在其最大倾斜范围的第一位置移动样品（290）的优选稀疏轴线，样品（290）的薄化的优选轴线和仪器的离子束柱（110）的轴线大于零，到第二位置，其中样品（290）的薄化优选轴线基本上平行于离子束柱（110）的轴线。光检测器（250）被定位成通过离子束铣削来遮蔽通过样品（290）的光线。可以将通过样品（290）的光的强度与先前研磨阶段记录的强度进行比较，以确定铣削的终点

6. 发明申请

WO2010033420A2 METHODS FOR ELECTRON-BEAM INDUCED DEPOSITION OF MATERIAL INSIDE ENERGETIC-BEAM MICROSCOPES 审中-公开
标题翻译：电子束诱导沉积在能量束显微镜内的材料的方法
公开(公告)号：WO2010033420A2
公开(公告)日：2010-03-25
申请号：PCT/US2009056492
申请日：2009-09-10
申请人： OMNIPROBE INC , ZAYKOVA-FELDMAN LYUDMILA , KRUGER ROCKY , MARCHMAN HERSCHEL , MOORE THOMAS
发明人： ZAYKOVA-FELDMAN LYUDMILA , KRUGER ROCKY , MARCHMAN HERSCHEL , MOORE THOMAS
IPC分类号： H01L21/205
CPC分类号： C23C16/487 , C23C16/0227 , C23C16/48 , C23C16/483
摘要： We disclose methods for materials deposition on a surface (120) inside an energetic-beam instrument, where the energetic-beam instrument is provided with a laser beam (170), an electron beam (100), and a source (130) of precursor gas (150). The electron beam (100) is focused on the surface (120), and the laser beam (170) is focused to a focal point (190) that is at a distance (200) above the surface (120) of about 5 microns to one mm, preferably from 5 to 50 microns. The focal point (190) of the laser beam (170) will thus be within the stream of precursor gas (150) injected at the sample surface (120), so that the laser beam (170) will facilitate reactions in this gas cloud with less heating of the surface (120).
摘要翻译：我们公开了用于在能量束仪器内的表面（120）上沉积材料的方法，其中能量束仪器设置有激光束（170），电子束（100）和前体源（130）气（150）。电子束（100）聚焦在表面（120）上，并且激光束（170）聚焦到焦点（190），焦点（190）距表面（120）上的距离（200）约为5微米到 1毫米，优选5至50微米。激光束（170）的焦点（190）将因此位于在样品表面（120）处注入的前体气体（150）的流内，使得激光束（170）将促进该气体云中的反应与表面（120）的加热较少。

7. 发明公开

EP1817557A4 APPARATUS AND METHOD OF DETECTING PROBE TIP CONTACT WITH A SURFACE 审中-公开
标题翻译：装置和方法检测之间探针和表面接触的
公开(公告)号：EP1817557A4
公开(公告)日：2010-06-16
申请号：EP05851362
申请日：2005-11-03
申请人： OMNIPROBE INC
发明人： MOORE THOMAS M , ZAYKOVA-FELDMAN LYUDMILA
IPC分类号： H01J37/26
CPC分类号： H01J37/22 , B82Y35/00 , H01J37/20 , H01J37/3056 , H01J2237/20 , H01J2237/202 , H01J2237/204 , H01J2237/206 , H01J2237/208 , H01J2237/2482 , H01J2237/28 , H01J2237/31745

8. 发明公开

EP1782435A4 METHOD AND APPARATUS FOR IN-SITU PROBE TIP REPLACEMENT INSIDE A CHARGED PARTICLE BEAM MICROSCOPE 审中-公开
标题翻译： METHOD AND APPARATUS FOR在显微镜原位探针尖端更改与带电粒子束
公开(公告)号：EP1782435A4
公开(公告)日：2010-06-16
申请号：EP05773762
申请日：2005-07-21
申请人： OMNIPROBE INC
发明人： MOORE THOMAS M , ZAYKOVA-FELDMAN LYUDMILA
IPC分类号： G21K7/00
CPC分类号： H01J37/20 , H01J37/26 , H01J2237/2005 , H01J2237/2006 , H01J2237/2007 , H01J2237/201 , H01J2237/204 , H01J2237/208 , H01J2237/26 , H01J2237/262 , H01J2237/31745 , H01J2237/31749

9. 发明公开

EP1812945A4 METHOD AND APPARATUS FOR THE AUTOMATED PROCESS OF IN-SITU LIFT-OUT 有权转让
标题翻译： VERFAHREN UND VORRICHTUNGFÜRDEN AUTOMATISIERTEN VORGANG DES IN-SITU-AUSHEBENS
公开(公告)号：EP1812945A4
公开(公告)日：2009-11-18
申请号：EP05821396
申请日：2005-11-03
申请人： OMNIPROBE INC
发明人： MOORE THOMAS M , ZAYKOVA-FELDMAN LYUDMILA
IPC分类号： H01J37/26
CPC分类号： H01J37/302 , B82Y15/00 , G01N1/32 , H01J37/20 , H01J37/22 , H01J37/3056 , H01J2237/20 , H01J2237/202 , H01J2237/204 , H01J2237/206 , H01J2237/208 , H01J2237/2482 , H01J2237/28 , H01J2237/30411 , H01J2237/30472 , H01J2237/31745

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