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    • 7. 发明授权
    • Carrier device in polishing apparatus and method for controlling carrier device
    • 抛光装置中的载体装置及载体装置的控制方法
    • US06241578B1
    • 2001-06-05
    • US09357843
    • 1999-07-21
    • Tetsuji TogawaNobuyuki Takada
    • Tetsuji TogawaNobuyuki Takada
    • B24B900
    • B24D15/02B24B37/013B24B41/061B24B49/16
    • A carrier device is adapted for use in a polishing apparatus with a turntable having a polishing surface. The carrier device includes a carrier for carrying an article to be polished and a control device operatively associated with the carrier. The control device includes an actuator operable to cause the carrier to urge the article against the polishing surace of the turntable to polish the article, a sensor operatively associated with the actuator and operable to sense a pressure as applied to the article when the article is urged against the polishing surface of the turntable and a control unit operatively associated with the actuator and the sensor so as to monitor the pressure during a polishing operation. The control unit is operable to control operation of the actuator in response to the pressure as monitored so as to keep the pressure at a target level and halt the polishing operation when the pressure is deviated from a predetermined range over a predetermined period of time.
    • 载体装置适用于具有抛光表面的转台的抛光装置。 载体装置包括用于承载待抛光制品的载体和与载体可操作地相关联的控制装置。 所述控制装置包括致动器,所述致动器可操作以使所述载体将所述物品推向所述转盘的抛光轮廓以抛光所述物品,所述传感器与所述致动器可操作地相关联并且可操作以感测当所述物品被推动时施加到所述物品上的压力 抵靠转盘的抛光表面和与致动器和传感器可操作地相关联的控制单元,以便在抛光操作期间监测压力。 控制单元可操作以响应于所监视的压力来控制致动器的操作,以便当压力在预定时间段内偏离预定范围时将压力保持在目标水平并停止抛光操作。
    • 8. 发明授权
    • Polishing apparatus
    • 抛光设备
    • US6042455A
    • 2000-03-28
    • US208987
    • 1998-12-11
    • Tetsuji TogawaKuniaki YamaguchiNobuyuki Takada
    • Tetsuji TogawaKuniaki YamaguchiNobuyuki Takada
    • B24B37/34B24B53/007B24B53/017B24B55/06B24B55/12H01L21/00B24B49/00
    • H01L21/67219B24B37/345B24B53/017B24B55/06B24B55/12
    • A polishing apparatus is used for polishing a workpiece such as a semiconductor wafer to a flat mirror finish. The polishing apparatus includes an enclosing structure having an outer wall and at least one door, a polishing section enclosed by the enclosing structure for polishing a surface of a workpiece by holding the workpiece and pressing the workpiece against a polishing surface of a turntable, a sensor for detecting an opening or closing of the door, and an exhaust system for exhausting ambient air from an interior of the enclosing structure. The polishing apparatus further includes an adjusting mechanism for adjusting an amount of air which is exhausted from the interior of the enclosing structure. The amount of air exhausted from the interior of the enclosing structure is reduced by the adjusting mechanism when the door is closed, and the amount of air exhausted from the interior of the enclosing structure is increased by the adjusting mechanism when the door is opened.
    • 抛光装置用于将诸如半导体晶片的工件抛光到平面镜面。 抛光装置包括具有外壁和至少一个门的封闭结构,由封闭结构封闭的抛光部分,用于通过保持工件并将工件压靠在转台的抛光表面上来抛光工件的表面,传感器 用于检测门的打开或关闭;以及用于从封闭结构的内部排出环境空气的排气系统。 抛光装置还包括调节机构,用于调节从封闭结构内部排出的空气量。 当门关闭时,通过调节机构减少从封闭结构内部排出的空气量,并且当门打开时通过调节机构从封闭结构的内部排出的空气量增加。
    • 10. 发明授权
    • Polishing apparatus
    • 抛光设备
    • US06447385B1
    • 2002-09-10
    • US09605989
    • 2000-06-29
    • Tetsuji TogawaNobuyuki Takada
    • Tetsuji TogawaNobuyuki Takada
    • B24B500
    • B24B37/345
    • A polishing apparatus applicable to a dry-in/dry-out polishing system is capable of increasing the capacity of processing substrates to be polished, e.g. semiconductor wafers, per unit of time and per unit area of installation. A polishing unit includes a turntable having a polishing surface, and at least two wafer carriers each adapted to hold a wafer and to press the wafer against the polishing surface. Each wafer carrier is supported by a pivot shaft and movable between a polishing position where the wafer is polished on the turntable and a transfer position for transferring the wafer. The at least two wafer carriers can be situated at the polishing position simultaneously and also alternately.
    • 适用于干式/干式抛光系统的抛光装置能够增加处理待抛光衬底的能力,例如, 半导体晶片,每单位时间和每单位安装面积。 抛光单元包括具有抛光表面的转盘和至少两个晶片载体,每个晶片载体适于保持晶片并将晶片压靠在抛光表面上。 每个晶片载体由枢转轴支撑,并且可在转盘上抛光晶片的抛光位置和用于转移晶片的转移位置之间移动。 至少两个晶片载体可以同时并且交替地位于抛光位置。