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    • 2. 发明授权
    • Semiconductor device and manufacturing method thereof
    • 半导体装置及其制造方法
    • US07776495B2
    • 2010-08-17
    • US11725507
    • 2007-03-20
    • Masahito HiroshimaTakashi Nishida
    • Masahito HiroshimaTakashi Nishida
    • G03F7/00
    • H01L28/91G03F1/00H01L27/10808H01L27/10852
    • A semiconductor device and a manufacturing method thereof in which the peripheral length of an aperture and the mechanical strength of cylinders in a cell can be increased without changing the occupation rate of patterns in the cell. By forming a slit in the middle of each mask pattern so as not to expose parts of wafer, the aperture of the wafer becomes nearly cocoon-shaped with a constriction in the middle. Thereby, the peripheral length of the aperture can be increased without changing the occupation rate of the mask patterns in a cell. Further, the shape of the bottom of the aperture also becomes nearly cocoon-shaped with a constriction in the middle, and therefore it is possible to increase the mechanical strength of cylinders.
    • 一种半导体器件及其制造方法,其中可以增加孔的圆周长度和单元中气缸的机械强度,而不改变单元中图案的占用率。 通过在每个掩模图案的中间形成狭缝以不暴露晶片的一部分,晶片的孔径在中间收缩而变为几乎茧形。 因此,可以增加孔径的周长,而不改变单元中的掩模图案的占有率。 此外,孔的底部的形状也变得几乎茧形,中间有收缩,因此可以提高气缸的机械强度。
    • 3. 发明授权
    • Semiconductor device and manufacturing method thereof
    • 半导体装置及其制造方法
    • US07208788B2
    • 2007-04-24
    • US10995134
    • 2004-11-24
    • Masahito HiroshimaTakashi Nishida
    • Masahito HiroshimaTakashi Nishida
    • H01L29/73
    • H01L28/91G03F1/00H01L27/10808H01L27/10852
    • A semiconductor device and a manufacturing method thereof in which the peripheral length of an aperture and the mechanical strength of cylinders in a cell can be increased without changing the occupation rate of patterns in the cell. By forming a slit in the middle of each mask pattern so as not to expose parts of wafer, the aperture of the wafer becomes nearly cocoon-shaped with a constriction in the middle. Thereby, the peripheral length of the aperture can be increased without changing the occupation rate of the mask patterns in a cell. Further, the shape of the bottom of the aperture also becomes nearly cocoon-shaped with a constriction in the middle, and therefore it is possible to increase the mechanical strength of cylinders.
    • 一种半导体器件及其制造方法,其中可以增加孔的圆周长度和单元中气缸的机械强度,而不改变单元中图案的占用率。 通过在每个掩模图案的中间形成狭缝以不暴露晶片的一部分,晶片的孔径在中间收缩而变为几乎茧形。 因此,可以增加孔径的周长,而不改变单元中的掩模图案的占有率。 此外,孔的底部的形状也变得几乎茧形,中间有收缩,因此可以提高气缸的机械强度。