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    • 3. 发明授权
    • Force sensor chip
    • 力传感器芯片
    • US07536922B2
    • 2009-05-26
    • US11889438
    • 2007-08-13
    • Nobuhiro SakuraiTakeshi Ohsato
    • Nobuhiro SakuraiTakeshi Ohsato
    • G01D7/00
    • G01L1/205
    • In a force sensor chip, a semiconductor substrate includes: a plurality of operating parts each including an external-force acting area section and a non-deforming section; a supporting part for supporting the operating parts, and a plurality of connecting parts for connecting the operating parts and the supporting part. Strain resistance elements are provided on deformation-generating sections of the connecting parts. The plurality of operating parts are provided, in corresponding relation to the plurality of connecting parts, between the connecting parts and the supporting part.
    • 在力传感器芯片中,半导体衬底包括:多个操作部件,每个操作部件包括外力作用区域部分和非变形部分; 用于支撑操作部件的支撑部件和用于连接操作部件和支撑部件的多个连接部件。 应变电阻元件设置在连接部件的变形产生部分上。 多个操作部件以与多个连接部件相对应的方式设置在连接部件和支撑部件之间。
    • 9. 发明申请
    • Force sensor chip
    • 力传感器芯片
    • US20080034897A1
    • 2008-02-14
    • US11882327
    • 2007-07-31
    • Takeshi OhsatoNobuhiro Sakurai
    • Takeshi OhsatoNobuhiro Sakurai
    • G01L1/04G01L1/20
    • G01L5/162
    • In a force sensor chip, a base member, to which an external force is applied, includes: an operating part provided in a central portion of the base member and having an external-force acting area section; a supporting part provided, in an outer peripheral portion of the base member, for supporting the operating part; an intermediate part provided between the operating part and the supporting part; a first connecting arm section connecting the operating part and the intermediate section; a second connecting arm section connecting the intermediate part and the supporting part; and at least one strain resistance element provided on each of respective deformation-generating portions of the first and the second connecting arm sections.
    • 在力传感器芯片中,施加有外力的基部构件包括:设置在基座构件的中心部分并具有外力作用区域的操作部; 支撑部,其设置在所述基部构件的外周部中,用于支撑所述操作部; 设置在所述操作部和所述支撑部之间的中间部; 连接所述操作部和所述中间部的第一连接臂部; 连接中间部分和支撑部分的第二连接臂部分; 以及设置在第一和第二连接臂部的各变形产生部的每一个上的至少一个应变电阻元件。