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1. 发明授权

US5386720A Integrated AFM sensor 失效
标题翻译：集成的AFM传感器
公开(公告)号：US5386720A
公开(公告)日：1995-02-07
申请号：US197352
申请日：1994-02-16
申请人： Akitoshi Toda , Michio Takayama , Katsuhiro Matsuyama , Nobuaki Sakai , Yasushi Nakamura
发明人： Akitoshi Toda , Michio Takayama , Katsuhiro Matsuyama , Nobuaki Sakai , Yasushi Nakamura
IPC分类号： G01Q20/00 , G01Q20/04 , G01Q60/38 , H01J37/26 , G01B5/28
CPC分类号： G01Q20/04 , B82Y35/00 , G01Q60/38 , Y10S977/873
摘要： An integrated AFM sensor includes a cantilever which has two beams extending from a support portion. The beams are integrated with each other at their ends to form a triangular free end, and a probe having a sharp distal end is arranged at the free end. The cantilever is formed by stacking a passivation layer, a piezoresistive layer, and a silicon layer. Electrodes electrically connected to the piezoresistive layer are formed at the fixed end of the cantilever through contact holes.
摘要翻译：集成AFM传感器包括悬臂，其具有从支撑部分延伸的两个梁。梁在其端部彼此一体地形成三角形自由端，并且在自由端设置具有尖锐远端的探针。悬臂通过堆叠钝化层，压阻层和硅层形成。电连接到压阻层的电极通过接触孔形成在悬臂的固定端。

2. 发明授权

US6097197A Scanning probe microscope 失效
标题翻译：扫描探针显微镜
公开(公告)号：US6097197A
公开(公告)日：2000-08-01
申请号：US907191
申请日：1997-08-06
申请人： Katsuhiro Matsuyama , Nobuaki Sakai , Seizo Morita , Yasuhiro Sugawara
发明人： Katsuhiro Matsuyama , Nobuaki Sakai , Seizo Morita , Yasuhiro Sugawara
IPC分类号： G01B21/30 , G01N37/00 , G01Q30/04 , G01Q60/30 , G01Q90/00 , G01R31/302 , G01R31/02 , G01R31/305 , G03N23/00
CPC分类号： G01Q60/30 , B82Y35/00 , Y10S977/852
摘要： A conductive cantilever having a conductive probe on its free end is supported by a piezoelectric element, which oscillates upon reception of an AC voltage from a first AC voltage supply unit. An AC voltage is applied between a conductive sample and the probe by a variable DC voltage supply unit and a second AC voltage supply unit. An AM demodulator demodulates a signal from a displacement meter at an angular frequency of the first AC voltage supply unit. A lowpass filter extracts a DC component from an output signal from the AM demodulator, and a synchronism detector extracts a component concerning to the angular frequency twice as high as that of the second AC voltage supply unit from the AM demodulator output signal. A Z controller controls a position of a tube scanner based on an output signal from the subtracter which subtracts an output signal of the synchronism detector from an output signal of the lowpass filter. A data processing unit maps configuration data from the Z controller and surface potential data from a voltage control circuit, referring to XY data from an XY scanning circuit, such that a configuration image and a potential distribution image of the sample are obtained.
摘要翻译：在其自由端具有导电探针的导电悬臂由压电元件支撑，该压电元件在接收到来自第一AC电压供应单元的AC电压时振荡。通过可变直流电压供应单元和第二交流电压供应单元在导电样品和探针之间施加交流电压。 AM解调器以位于第一AC电压供应单元的角频率处的来自位移计的信号解调。低通滤波器从AM解调器的输出信号中提取DC分量，同步检测器从AM解调器输出信号中提取与第二AC电压供给单元的角频率相关的分量的两倍。 Z控制器基于来自减法器的输出信号控制管扫描器的位置，该输出信号从低通滤波器的输出信号中减去同步检测器的输出信号。参考XY扫描电路的XY数据，数据处理单元将来自Z控制器的配置数据和来自电压控制电路的表面电位数据进行映射，从而获得样品的配置图像和电位分布图像。

3. 发明授权

US5929643A Scanning probe microscope for measuring the electrical properties of the surface of an electrically conductive sample 失效
标题翻译：扫描探针显微镜，用于测量导电样品表面的电性能
公开(公告)号：US5929643A
公开(公告)日：1999-07-27
申请号：US757131
申请日：1996-12-03
申请人： Nobuaki Sakai , Katsuhiro Matsuyama
发明人： Nobuaki Sakai , Katsuhiro Matsuyama
IPC分类号： G01Q20/00 , G01R1/067 , G01R11/00
CPC分类号： G01R1/06705 , B82Y35/00 , G01Q60/30 , Y10S977/852 , Y10S977/864
摘要： A scanning probe microscope for measuring the electrical properties of the surface of a sample comprises a first sensor for detecting electrical information for the sample surface and outputting a first electrical signal corresponding thereto, the first sensor including an electrically conductive probe located near the surface of the sample, a second sensor for detecting the distance between the probe and the sample and outputting a second electrical signal corresponding thereto, an actuator for relatively moving the probe and the sample in a three-dimensional manner, a servo control mechanism for adjusting the distance between the probe and the sample to a desired value by servo control in accordance with the second electrical signal while the electrical information is being detected by the first sensor, and a processing unit for processing the first electrical signal.
摘要翻译：用于测量样品表面的电性能的扫描探针显微镜包括用于检测样品表面的电信息并输出与其对应的第一电信号的第一传感器，所述第一传感器包括位于所述样品表面的表面附近的导电探针样品，用于检测探针和样品之间的距离并输出与其对应的第二电信号的第二传感器，用于以三维方式相对移动探针和样品的致动器，用于调节探针和样品之间的距离的伺服控制机构，所述探针和所述样品在所述电信息被所述第一传感器检测到的同时根据所述第二电信号进行伺服控制而达到期望值;以及处理单元，用于处理所述第一电信号。

4. 发明授权

US5367165A Cantilever chip for scanning probe microscope 失效
标题翻译：悬臂芯片用于扫描探针显微镜
公开(公告)号：US5367165A
公开(公告)日：1994-11-22
申请号：US3322
申请日：1993-01-12
申请人： Akitoshi Toda , Katsuhiro Matsuyama
发明人： Akitoshi Toda , Katsuhiro Matsuyama
IPC分类号： G01Q70/10 , G01Q60/38 , H01J37/00
CPC分类号： G01Q60/38 , B82Y35/00 , Y10S977/873
摘要： A cantilever chip has a holding substrate, and a cantilever having the shape of a hollow triangle extends from the holding substrate. A probe is arranged at the distal end portion of the cantilever. An axis of the probe is inclined at a predetermined angle with respect to a normal extending from the surface of the cantilever. This angle is set such that the axis of the probe is perpendicular to a sample surface when the cantilever chip is mounted on an atomic force microscope.
摘要翻译：悬臂芯片具有保持基板，并且具有中空三角形的悬臂从保持基板延伸。探针位于悬臂的远端部分。相对于从悬臂的表面延伸的法线，探针的轴线以预定的角度倾斜。当将悬臂芯片安装在原子力显微镜上时，该角度被设定为使得探针的轴线垂直于样品表面。

5. 发明授权

US08616707B2 Projector with cooling mechanism 有权
标题翻译：投影机带冷却机构
公开(公告)号：US08616707B2
公开(公告)日：2013-12-31
申请号：US13013582
申请日：2011-01-25
申请人： Yasunaga Miyazawa , Yoshitaka Itoh , Toshihiko Sakai , Katsuhiro Matsuyama , Yasuteru Miyaoka
发明人： Yasunaga Miyazawa , Yoshitaka Itoh , Toshihiko Sakai , Katsuhiro Matsuyama , Yasuteru Miyaoka
IPC分类号： G03B21/26
CPC分类号： G03B21/16
摘要： A projector includes: a housing; an optical element accommodated in the housing; and an air supply unit configured to generate a flow of cooling air for cooling a cooling target element including the optical element, a dustproof area into which the cooling air can be introduced from the outside of the housing via a dustproof filter is formed inside the housing, the optical element is accommodated in the dustproof area of the housing, and the air supply unit includes a first air supply unit configured to introduce the cooling air from the outside of the housing to the dustproof area via the dustproof filter, and a second air supply unit accommodated in the dustproof area and configured to supply the cooling air introduced to the dustproof area by the first air supply unit toward the optical element.
摘要翻译：投影机包括：外壳; 容纳在所述壳体中的光学元件; 以及空气供给单元，其构造成产生用于冷却包括所述光学元件的冷却目标元件的冷却空气流，所述外壳的内部形成有可以通过防尘过滤器从所述壳体的外部引入所述冷却空气的防尘区域所述光学元件被容纳在所述壳体的防尘区域中，所述空气供给单元包括：第一空气供给单元，其经由所述防尘过滤器将所述冷却空气从所述壳体的外部导入所述防尘区域;第二空气供给单元容纳在防尘区域中，并且构造成将由第一空气供给单元引入防尘区域的冷却空气朝向光学元件供给。

6. 发明授权

US06415653B1 Cantilever for use in a scanning probe microscope 失效
标题翻译：悬臂用于扫描探针显微镜
公开(公告)号：US06415653B1
公开(公告)日：2002-07-09
申请号：US09273216
申请日：1999-03-19
申请人： Katsuhiro Matsuyama
发明人： Katsuhiro Matsuyama
IPC分类号： G01B528
CPC分类号： G01Q70/16 , G01Q70/10 , Y10S977/732 , Y10S977/849 , Y10S977/86 , Y10S977/873 , Y10S977/878
摘要： A cantilever for use in a scanning probe microscope includes a lever portion having a probe portion made from a semiconductor substrate. The length and thickness directions of the lever portion are parallel to a top surface of the semiconductor substrate, and a width direction of the lever portion corresponds to a thickness direction of the semiconductor substrate. The probe portion is triangular or substantially triangular pyramid shaped having three faces, two of which are made of crystal and a remaining one of which is formed by an artificial process.
摘要翻译：用于扫描探针显微镜的悬臂包括具有由半导体衬底制成的探针部分的杆部分。杠杆部分的长度和厚度方向平行于半导体基板的顶表面，并且杠杆部分的宽度方向对应于半导体基板的厚度方向。探头部分是具有三个面的三角形或大致三角锥形，其中两个由三个面组成，其中两个由晶体制成，其余的一个由人造工艺形成。

7. 发明授权

US5883387A SPM cantilever and a method for manufacturing the same 失效
标题翻译： SPM悬臂及其制造方法
公开(公告)号：US5883387A
公开(公告)日：1999-03-16
申请号：US878686
申请日：1997-06-19
申请人： Katsuhiro Matsuyama , Michio Takayama
发明人： Katsuhiro Matsuyama , Michio Takayama
IPC分类号： G01B21/30 , G01Q60/04 , G01Q60/06 , G01Q60/16 , G01Q60/22 , G01Q60/38 , G01Q60/40 , G01Q70/14 , G01B5/28
CPC分类号： G01Q60/06 , B82Y20/00 , B82Y35/00 , G01Q60/04 , G01Q60/16 , G01Q60/22 , G01Q60/38 , G01Q60/40 , G01Q70/14 , Y10S977/873
摘要： An SPM cantilever comprises a cantilever portion shaped as a thin plate and extending between a proximal end and a free end, a supporting portion attached to one surface of the cantilever portion on a side of the proximal end, and a probe projecting from the other surface of the cantilever portion on a side of the free end of the cantilever portion the supporting member, and the cantilever portion and the probe are made of different materials.
摘要翻译： SPM悬臂包括形成为薄板并在近端和自由端之间延伸的悬臂部分，附接到近端侧的悬臂部分的一个表面的支撑部分和从另一表面突出的探针的悬臂部分在支撑部件的悬臂部分的自由端的一侧上，并且悬臂部分和探针由不同的材料制成。

8. 发明授权

US09039200B2 Projector and control method for projector 有权
标题翻译：投影机投影机及控制方法
公开(公告)号：US09039200B2
公开(公告)日：2015-05-26
申请号：US13596543
申请日：2012-08-28
申请人： Tatsuhiko Nobori , Toru Katahira , Katsuhiro Matsuyama , Haruyoshi Yamada
发明人： Tatsuhiko Nobori , Toru Katahira , Katsuhiro Matsuyama , Haruyoshi Yamada
IPC分类号： G03B21/14 , G03B21/16 , H04N9/31 , G03B21/20
CPC分类号： H04N9/3155 , G03B21/16 , G03B21/2053 , H04N9/3194 , H04N9/3197
摘要： A projector which modulates light emitted from a light source and projects the light, the projector including: an image acquiring unit for acquiring an image from an image source; a modulating unit for modulating the light emitted from the light sources, based on the image acquired by the image acquiring unit; a light adjustment mechanism for reducing an amount of light incident on the modulating unit from the light source; and a light adjustment control unit for performing light adjustment control by the light adjustment mechanism, based on the image acquired by the image acquiring unit; wherein the light adjustment control unit stops execution of the light adjustment control when at least one of an operating state of the projector and a state of the image acquired by the image acquiring unit meets a predetermined condition.
摘要翻译：一种投影仪，其对从光源发出的光进行调光并使光投射，所述投影仪包括：图像获取单元，用于从图像源获取图像; 调制单元，用于基于由图像获取单元获取的图像来调制从光源发射的光; 光调制机构，其用于减少从所述光源入射到所述调制单元的光量; 以及调光控制单元，用于基于由所述图像获取单元获取的图像执行所述调光机构的调光控制; 其中当所述投影仪的操作状态和由所述图像获取单元获取的图像的状态中的至少一个满足预定条件时，所述调光控制单元停止执行所述调光控制。

9. 发明授权

US5811017A Cantilever for use in a scanning probe microscope and method of manufacturing the same 失效
标题翻译：用于扫描探针显微镜的悬臂及其制造方法
公开(公告)号：US5811017A
公开(公告)日：1998-09-22
申请号：US645655
申请日：1996-05-14
申请人： Katsuhiro Matsuyama
发明人： Katsuhiro Matsuyama
IPC分类号： G01B21/30 , B81B1/00 , G01N37/00 , G01Q60/04 , G01Q60/16 , G01Q60/38 , G01Q70/02 , G01Q70/10 , G01Q70/16 , G01Q90/00 , H01J37/28 , H01L21/306
CPC分类号： G01Q60/38 , B82Y35/00
摘要： A composite silicon-on-insulator substrate comprises first and second substrates and an oxide film interposed between them. The second substrate is partially removed, such that a lever-base section is formed. An oxide film is formed on the sides of the lever-base section. The second substrate has its thickness set to a predetermined value by wet anisotropic etching, such that a pre-lever section is formed and such that a probe-base section is formed at one end of the pre-lever section. An oxide film is formed on the pre-lever section and the probe-base section, such that a lever section with a desired thickness and a probe section with a sharpened tip are formed. A part of the first substrate is etched away, such that a support section is formed. The oxide film covering the lever section and the probe section is removed.
摘要翻译：复合绝缘体上硅衬底包括第一和第二衬底以及介于它们之间的氧化膜。部分地移除第二基板，从而形成杠杆基部。在杠杆基部的侧面上形成氧化膜。第二基板通过湿式各向异性蚀刻将其厚度设定为预定值，从而形成预拉杆部分，并且使得探针基部形成在预拉杆部分的一端。在前杠杆部分和探针基部上形成氧化膜，从而形成具有期望厚度的杠杆部分和具有锋利尖端的探针部分。蚀刻掉第一衬底的一部分，从而形成支撑部分。去除覆盖杆部和探针部的氧化膜。

10. 发明授权

US5753912A Cantilever chip 失效
标题翻译：悬臂芯片
公开(公告)号：US5753912A
公开(公告)日：1998-05-19
申请号：US811227
申请日：1997-03-03
申请人： Katsuhiro Matsuyama
发明人： Katsuhiro Matsuyama
IPC分类号： G01B21/30 , G01N37/00 , G01Q20/04 , G01Q60/16 , G01Q60/38 , G01Q70/16 , H01J37/28
CPC分类号： G01Q70/16 , B82Y35/00 , G01Q70/10 , Y10S977/873
摘要： A cantilever chip comprises a support section having a support face and an attachment face opposed to the support face, a cantilever supported on the support face of the support section, and a probe provided on a free-end portion of the cantilever. The width of the support face of the support section is less than the width of the attachment face such that a pointed end portion of the probe may scan a desired portion of a sample without influence due to the shape of a surface of the sample. First and second inclined faces extending in the longitudinal direction of the cantilever are formed between the support face and the attachment face.
摘要翻译：悬臂片包括支撑部分，其具有支撑面和与支撑面相对的附接面，支撑在支撑部的支撑面上的悬臂以及设置在悬臂的自由端部上的探针。支撑部分的支撑面的宽度小于附接面的宽度，使得探针的尖端部分可以由于样品表面的形状而不影响地扫描样品的期望部分。在支撑面和安装面之间形成有在悬臂的纵向方向上延伸的第一和第二倾斜面。

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