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1. 发明授权

US5386720A Integrated AFM sensor 失效
标题翻译：集成的AFM传感器
公开(公告)号：US5386720A
公开(公告)日：1995-02-07
申请号：US197352
申请日：1994-02-16
申请人： Akitoshi Toda , Michio Takayama , Katsuhiro Matsuyama , Nobuaki Sakai , Yasushi Nakamura
发明人： Akitoshi Toda , Michio Takayama , Katsuhiro Matsuyama , Nobuaki Sakai , Yasushi Nakamura
IPC分类号： G01Q20/00 , G01Q20/04 , G01Q60/38 , H01J37/26 , G01B5/28
CPC分类号： G01Q20/04 , B82Y35/00 , G01Q60/38 , Y10S977/873
摘要： An integrated AFM sensor includes a cantilever which has two beams extending from a support portion. The beams are integrated with each other at their ends to form a triangular free end, and a probe having a sharp distal end is arranged at the free end. The cantilever is formed by stacking a passivation layer, a piezoresistive layer, and a silicon layer. Electrodes electrically connected to the piezoresistive layer are formed at the fixed end of the cantilever through contact holes.
摘要翻译：集成AFM传感器包括悬臂，其具有从支撑部分延伸的两个梁。梁在其端部彼此一体地形成三角形自由端，并且在自由端设置具有尖锐远端的探针。悬臂通过堆叠钝化层，压阻层和硅层形成。电连接到压阻层的电极通过接触孔形成在悬臂的固定端。

2. 发明授权

US5272913A Cantilever for a scanning probe microscope and a method of manufacturing the same 失效
标题翻译：用于扫描探针显微镜的悬臂及其制造方法
公开(公告)号：US5272913A
公开(公告)日：1993-12-28
申请号：US724146
申请日：1991-07-01
申请人： Akitoshi Toda , Kaoru Tadokoro , Yasuji Nagata , Etsuo Shinohara , Yoshimitsu Enomoto , Michio Takayama , Ryo Ohta
发明人： Akitoshi Toda , Kaoru Tadokoro , Yasuji Nagata , Etsuo Shinohara , Yoshimitsu Enomoto , Michio Takayama , Ryo Ohta
IPC分类号： G01B21/30 , B81C1/00 , G01B5/28 , G01N27/00 , G01N37/00 , G01Q60/16 , G01Q70/10 , G01Q70/16 , H01J37/28 , H01L21/302
CPC分类号： G01Q70/16 , B82Y35/00 , G01Q70/02 , G01Q70/10 , Y10S977/878 , Y10S977/879
摘要： A cantilever for a scanning probe microscope comprises a lever section and a probe section disposed near the free end thereof. The probe section includes a conical distal end portion having a narrow point angle and a bulging proximal end portion continuous with the distal end portion. The cantilever is manufactured by utilizing a semiconductor process.
摘要翻译：用于扫描探针显微镜的悬臂包括设置在其自由端附近的杆部和探针部。探头部分包括具有窄点角度的锥形远端部分和与远端部分连续的凸出近端部分。通过利用半导体工艺制造悬臂。

3. 发明授权

US5883387A SPM cantilever and a method for manufacturing the same 失效
标题翻译： SPM悬臂及其制造方法
公开(公告)号：US5883387A
公开(公告)日：1999-03-16
申请号：US878686
申请日：1997-06-19
申请人： Katsuhiro Matsuyama , Michio Takayama
发明人： Katsuhiro Matsuyama , Michio Takayama
IPC分类号： G01B21/30 , G01Q60/04 , G01Q60/06 , G01Q60/16 , G01Q60/22 , G01Q60/38 , G01Q60/40 , G01Q70/14 , G01B5/28
CPC分类号： G01Q60/06 , B82Y20/00 , B82Y35/00 , G01Q60/04 , G01Q60/16 , G01Q60/22 , G01Q60/38 , G01Q60/40 , G01Q70/14 , Y10S977/873
摘要： An SPM cantilever comprises a cantilever portion shaped as a thin plate and extending between a proximal end and a free end, a supporting portion attached to one surface of the cantilever portion on a side of the proximal end, and a probe projecting from the other surface of the cantilever portion on a side of the free end of the cantilever portion the supporting member, and the cantilever portion and the probe are made of different materials.
摘要翻译： SPM悬臂包括形成为薄板并在近端和自由端之间延伸的悬臂部分，附接到近端侧的悬臂部分的一个表面的支撑部分和从另一表面突出的探针的悬臂部分在支撑部件的悬臂部分的自由端的一侧上，并且悬臂部分和探针由不同的材料制成。

4. 发明授权

US5299901A Wafer transfer machine 失效
标题翻译：晶圆转印机
公开(公告)号：US5299901A
公开(公告)日：1994-04-05
申请号：US869428
申请日：1992-04-16
申请人： Michio Takayama
发明人： Michio Takayama
IPC分类号： B65G49/07 , H01L21/677
CPC分类号： H01L21/67781 , Y10S414/138
摘要： The plate-shaped part (wafer) transfer machine of this invention consists of a rotatable turntable that supports the carrier; carrier pressers that are set on the turntable and are used to fix the carrier; a lifter which can move vertically with a wafer in the carrier or boat supported on it; and a guide which guides the wafer when the lifter performs vertical movement (the role of the guide is played by the wafer presser used for fixing the wafer in the carrier).
摘要翻译：本发明的板状部件（晶片）转印机由支承载体的可旋转转盘组成，设置在转盘上的载体压脚，用于固定载体; 一个能够承载在载体或船上的晶片垂直移动的升降器; 以及当升降机执行垂直运动时引导晶片的引导件（引导件的作用由用于将晶片固定在载体中的晶片压脚进行）。

5. 发明授权

US06504163B2 Electron beam irradiation process and an object irradiated with an electron beam 失效
公开(公告)号：US06504163B2
公开(公告)日：2003-01-07
申请号：US09731312
申请日：2000-12-06
申请人： Michio Takayama , Masami Kuwahara , Takeshi Hirose , Toru Kurihashi , Masayoshi Matsumoto
发明人： Michio Takayama , Masami Kuwahara , Takeshi Hirose , Toru Kurihashi , Masayoshi Matsumoto
IPC分类号： G21K504
CPC分类号： G21K5/04
摘要： A process of accelerating electrons with a voltage applied thereto in a vacuum, guiding the accelerated electrons into a normal-pressure atmosphere, and irradiating the electron beam (EB) onto an object. The electron beam irradiation process uses a vacuum tube-type electron beam irradiation apparatus, and with the acceleration voltage for generating an electron beam set at a value smaller than 100 kV, the electron beam is irradiated onto the object.

6. 发明授权

US5071488A Method for subjecting an object to a liquid treatment 失效
标题翻译：将物体投放到液体处理的方法
公开(公告)号：US5071488A
公开(公告)日：1991-12-10
申请号：US560405
申请日：1990-07-31
申请人： Michio Takayama , Akihiko Hayakawa
发明人： Michio Takayama , Akihiko Hayakawa
IPC分类号： B08B3/04 , B08B3/10 , C23G3/00 , H01L21/304 , H01L21/306
CPC分类号： B08B3/04 , Y10S134/902
摘要： An apparatus for treating an object with a liquid in which the object is immersed into the liquid in a tank which has overflow control members provided above faces of the tank with a predetermined space in an overflow area for said liquid, said space being structured to lead the overflow of said liquid by capillary action.

7. 发明授权

US06188075B1 Electron beam irradiating method and object to be irradiated with electron beam 失效
标题翻译：电子束照射方法和被电子束照射的物体
公开(公告)号：US06188075B1
公开(公告)日：2001-02-13
申请号：US09065052
申请日：1998-04-23
申请人： Michio Takayama , Masami Kuwahara , Takeshi Hirose , Toru Kurihashi , Masayoshi Matsumoto
发明人： Michio Takayama , Masami Kuwahara , Takeshi Hirose , Toru Kurihashi , Masayoshi Matsumoto
IPC分类号： G21K504
CPC分类号： G21K5/04
摘要： A process of accelerating electrons with a voltage applied thereto in a vacuum, guiding the accelerated electrons into a normal-pressure atmosphere, and irradiating the electron beam (EB) onto an object. The electron beam irradiation process uses a vacuum tube-type electron beam irradiation apparatus, and with the acceleration voltage for generating an electron beam set at a value smaller than 100 kV, the electron beam is irradiated onto the object.
摘要翻译：在真空中以电压施加电压的方式加速电子的过程，将加速的电子引导到常压气氛中，并将电子束（EB）照射到物体上。电子束照射处理使用真空管型电子束照射装置，并且利用设定为小于100kV的电子束的加速电压，将电子束照射到物体上。

8. 发明授权

US4071827A Transversal type automatic phase and amplitude equalizer 失效
标题翻译：横向型自动相位和幅度均衡器
公开(公告)号：US4071827A
公开(公告)日：1978-01-31
申请号：US749136
申请日：1976-12-09
申请人： Shin'ichi Koike , Seijiro Hayashi , Michio Takayama
发明人： Shin'ichi Koike , Seijiro Hayashi , Michio Takayama
IPC分类号： H04B3/06 , H03K5/00 , H04L7/00 , H04L7/02 , H04L25/03 , H04B1/12
CPC分类号： H04L7/0062 , H04L25/03038
摘要： A transversal type automatic equalizer includes circuits for differentiating the equalized signal, sampling the equalized signal under the control of a timing signal, and generating an error signal from the sampled signal. The differentiated and error signals are multiplied together and a variable phase shifter phase shifts the timing signal in response to their product to provide optimum equalization.
摘要翻译：横向型自动均衡器包括用于微分均衡信号的电路，在定时信号的控制下采样均衡信号，并从采样信号产生误差信号。微分和误差信号被相乘，并且可变移相器根据其乘积来移位定时信号以提供最佳均衡。

9. 发明授权

US5341473A System of transferring data in a multi-CPU arrangement using address generators 失效
标题翻译：使用地址生成器在多CPU布置中传输数据的系统
公开(公告)号：US5341473A
公开(公告)日：1994-08-23
申请号：US743052
申请日：1991-08-09
申请人： Michio Takayama
发明人： Michio Takayama
IPC分类号： G06F13/28 , G06F9/46 , G06F13/42
CPC分类号： G06F13/28
摘要： A system for transferring digital signals between at least two printed circuit boards (packages) provided within a digital signal processing apparatus and each mounting a plurality of electronic parts such as microprocessors between a CPU package and a peripheral control package. The CPU package has a microprocessor (CPU), a transmitting sequential address generator 1, a receiving sequential address generator circuit 1, a transmitting dual port RAM 1 and a receiving dual port RAM 1. The peripheral control package has a digital processing circuit, a transmitting sequential address generator 2, a receiving sequential address generator 2, a transmitting dual port RAM 2 and a receiving dual port RAM. When a control information is to be sent from the CPU to the digital processing circuit, the CPU is required to only write the control information in the transmitting dual port RAM. The control information is read out from the transmitting dual port RAM according to sequential addresses produced by the transmitting sequential address generator independently from the CPU and outputted to the receiving dual port RAM of the peripheral control package. The control information thus outputted is written in the receiving dual port RAM 2 according to addresses produced by the receiving sequential address generator 2. The digital processing circuit reads the control information from the receiving dual port RAM 2 and processes it in a manner predetermined. This is the same for a case where information is transferred from the digital processing circuit to the CPU.
摘要翻译：一种用于在设置在数字信号处理装置内的至少两个印刷电路板（封装）之间传送数字信号的系统，并且每个在CPU封装和外围控制封装之间安装多个电子部件，例如微处理器。 CPU封装具有微处理器（CPU），发送顺序地址发生器1，接收顺序地址发生器电路1，发送双端口RAM 1和接收双端口RAM 1.外围控制包具有数字处理电路，发送顺序地址生成器2，接收顺序地址生成器2，发送双端口RAM2和接收双端口RAM。当控制信息从CPU发送到数字处理电路时，CPU只需要在发送双端口RAM中写入控制信息。控制信息根据由发送顺序地址发生器产生的连续地址从发送双端口RAM中读出，并独立于CPU并输出到外围控制包的接收双端口RAM。这样输出的控制信息根据由接收顺序地址发生器2产生的地址写入接收双端口RAM2中。数字处理电路从接收双端口RAM2读取控制信息，并以预定的方式对其进行处理。对于从数字处理电路向CPU传送信息的情况，这是相同的。

10. 发明授权

US4967777A Apparatus for treating substrates with a liquid 失效
标题翻译：用液体处理基材的设备
公开(公告)号：US4967777A
公开(公告)日：1990-11-06
申请号：US386838
申请日：1989-07-27
申请人： Michio Takayama , Akihiko Hayakawa
发明人： Michio Takayama , Akihiko Hayakawa
IPC分类号： B08B3/04 , B08B3/10 , C23G3/00 , H01L21/304 , H01L21/306
CPC分类号： B08B3/04 , Y10S134/902
摘要： An apparatus for treating an object with a liquid in which the object is immersed into the liquid in a tank which has overflow control members provided above faces of the tank with a predetermined space in an overflow area for said liquid, said space being structured to lead the overflow of said liquid by capillary action.
摘要翻译：一种用于处理物体的装置，其中物体被浸入液体中的液体中，该罐具有在所述液体的溢流区域中以预定空间设置在所述罐的上方的上方的溢流控制部件，所述空间被构造成引导所述液体通过毛细作用而溢出。

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