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    • 3. 发明授权
    • Process for manufacturing semiconductor device
    • 半导体器件制造工艺
    • US07776703B2
    • 2010-08-17
    • US12277533
    • 2008-11-25
    • Kazuhiro Fukuchi
    • Kazuhiro Fukuchi
    • H01L21/331H01L21/8222
    • H01L23/544B41M5/262H01L2223/5448H01L2224/16H01L2924/13091
    • Reduction of damage to a semiconductor device due to a marking process while inhibiting deterioration of a mark can not be achieved in conventional processes for manufacturing semiconductor devices. A process for manufacturing the semiconductor device 100 involves irradiating the marking film 21 with an energy beam through the transparent protective film 31 after the protective film 31 is formed, and such irradiation causes a chemical modification of the material of the marking film 21 to create the marks. According to the above-described process for manufacturing the semiconductor device 100, the region for the marking or the upper surface of the marking film 21 is sheathed by the protective film 31, so that a damage to the semiconductor chip 11 due to the generations of dust, exothermic heat, gas, stress or the like during the marking operation can be reduced. This allows achieving the process for manufacturing the semiconductor device 100 that provides a manufacture of better quality of the marks.
    • 在制造半导体器件的传统工艺中,不能实现减少由于标记过程而导致的半导体器件对标记的劣化的损害。 半导体装置100的制造方法包括:在形成保护膜31之后,通过透明保护膜31将标记膜21照射到能量束上,并且这种照射使标记膜21的材料发生化学改性,从而形成 分数。 根据上述半导体装置100的制造工序,标记用的标记区域或标记膜21的上表面被保护膜31所覆盖,从而由于产生了半导体芯片 可以减少打标动作时的灰尘,放热,气体,应力等。 这允许实现制造提供更好质量标记的半导体器件100的工艺。