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    • 7. 发明申请
    • SUBSTRATE TRANSFER ROBOT AND VACUUM PROCESSING APPARATUS PROVIDED WITH SAME
    • 基板传送机器人和真空加工设备
    • US20110014015A1
    • 2011-01-20
    • US12667149
    • 2008-06-30
    • Yoshinori FujiiNobuaki Mochizuki
    • Yoshinori FujiiNobuaki Mochizuki
    • H01L21/677
    • H01L21/68707H01L21/67742
    • Provided is a substrate transfer robot which can surely eliminate adhesion, shifting, dropping and the like of a substrate at the time of transferring the substrate. A vacuum processing apparatus provided with such substrate transfer robot is also provided. The substrate transfer robot is provided with a substrate receiving section for placing the substrate; a plurality of substrate slip preventing members, which are arranged on the upper surface of the substrate receiving section at intervals and are composed of an elastic material; and a extendable/retractable arm section whereupon the substrate receiving section is arranged at the leading end. On the upper end surface of the substrate slip preventing member, a protruding section is arranged. The vacuum processing apparatus is configured as a multi-chamber vacuum processing apparatus provided with the substrate transfer robot.
    • 提供了一种基板传送机器人,其可以在传送基板时可靠地消除基板的粘附,移动和落下等。 还提供了一种设置有这种基板传送机器人的真空处理设备。 衬底传送机器人设置有用于放置衬底的衬底接收部分; 多个基板防滑部件,其间隔设置在基板接收部的上表面上并且由弹性材料构成; 以及可延伸/可伸缩的臂部分,其中衬底接收部分布置在前端。 在基板防滑部件的上端面设置有突出部。 真空处理装置被配置为设置有基板传送机器人的多室真空处理装置。