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1. 发明授权

US09139381B2 Transport apparatus and vacuum system 有权
标题翻译：运输设备和真空系统
公开(公告)号：US09139381B2
公开(公告)日：2015-09-22
申请号：US13982925
申请日：2012-03-16
申请人： Yoshinori Fujii
发明人： Yoshinori Fujii
IPC分类号： B65G49/00 , H01L21/67 , H01L21/677 , H01L21/68
CPC分类号： B65G49/00 , H01L21/67259 , H01L21/67742 , H01L21/681
摘要： A transport apparatus that supports and moves a substrate by using a robot hand between a plurality of chambers includes a first detection unit that detects the substrate, in a first stop position of the robot hand, using a first detection position set on one surface of the substrate supported by the robot hand, and a second detection unit that detects the substrate, in a second stop position of the robot hand, using a second detection position set on the one surface of the substrate supported by the robot hand.
摘要翻译：通过使用机器人手在多个室之间支撑和移动基板的输送装置包括：第一检测单元，其利用设置在所述机器人手的一个表面上的第一检测位置，在所述机器人手的第一停止位置中检测所述基板; 由机器人手支撑的基板和第二检测单元，其使用设置在由机器人手支撑的基板的一个表面上的第二检测位置来检测机器人手的第二停止位置中的基板。

2. 发明授权

US08956513B2 Substrate processing method 有权
标题翻译：基板加工方法
公开(公告)号：US08956513B2
公开(公告)日：2015-02-17
申请号：US13378534
申请日：2010-07-15
申请人： Shinya Nakamura , Yoshinori Fujii , Hideto Nagashima
发明人： Shinya Nakamura , Yoshinori Fujii , Hideto Nagashima
IPC分类号： C23C14/56 , C23C14/06 , C23C14/00
CPC分类号： C23C14/0641 , C23C14/0036 , C23C14/56 , C23C14/568
摘要： There is provided a substrate processing method, in which a throughput can be improved even in case the time for recovery processing for restoring the state of a processing chamber is longer than the time for predetermined processing to be performed in the processing chamber. Substrates are alternately transferred to two processing chambers C, D, and the same film forming processing is performed on the substrates in the processing chambers C, D in parallel with each other. When the number of substrates processed in the processing chamber C has reached a predetermined number (11 substrates), dummy sputtering processing in the film forming chamber C is started and also 23rd-25th substrates of the first lot are transferred to the film forming chamber D to thereby perform film forming processing until the dummy sputtering processing is finished.
摘要翻译：提供了一种基板处理方法，其中即使在用于恢复处理室的状态的恢复处理的时间比在处理室中进行预定处理的时间长的情况下也可以提高吞吐量。基板交替地传送到两个处理室C，D，并且在处理室C，D中的基板上彼此平行地执行相同的成膜处理。当处理室C中处理的基板的数量达到预定数量（11个基板）时，成膜室C中的虚拟溅射处理开始，第一批次的第23至25个基板被转印到成膜室D 从而进行成膜处理，直到虚拟溅射处理结束。

3. 发明申请

US20130004284A1 TRANSPORT METHOD 有权
标题翻译：运输方式
公开(公告)号：US20130004284A1
公开(公告)日：2013-01-03
申请号：US13635173
申请日：2011-04-14
申请人： Yoshinori Fujii
发明人： Yoshinori Fujii
IPC分类号： H01L21/677
CPC分类号： H01L21/67742 , H01L21/67745 , H01L21/68707
摘要： By a transport robot having a hand provided with stationary clamp members and a movable clamp member which pinches a to-be-transported object S between the movable clamp member and the stationary clamp members, after transporting the to-be-transported object-S in a horizontal posture to a transport destination, the hand is lowered in a state in which the movable clamp member is receded to an unclamped position, thereby transferring the to-be-transported object onto a plurality of supporting pins which are disposed at the transport destination. In the method mentioned above, an arrangement is made that, even if the stationary clamp members give rise to dents due to wear, the to-be-transported object is arranged to be transferred onto the supporting pins without problems.
摘要翻译：通过具有设置有固定夹紧构件的手的运送机器人和在可移动夹紧构件和固定夹紧构件之间夹持被输送物体S的可动夹紧构件，在将待运送物体S输送到对于运送目的地的水平姿势，手在可动夹紧件退回到未夹紧位置的状态下降低，从而将被运送物体转移到设置在运送目的地的多个支撑销上。在上述方法中，即使固定的夹紧构件由于磨损而产生凹痕，也可以将待传送的物体设置成不受问题地转移到支撑销上。

4. 发明申请

US20120049555A1 ROBOT HAND FOR SUBSTRATE TRANSFER 有权
标题翻译：机架手柄用于基板传送
公开(公告)号：US20120049555A1
公开(公告)日：2012-03-01
申请号：US13288206
申请日：2011-11-03
申请人： Yoshinori Fujii , Shinya Nakamura
发明人： Yoshinori Fujii , Shinya Nakamura
IPC分类号： H01L21/683
CPC分类号： H01L21/67742 , H01L21/68707 , Y10S414/141
摘要： There is provided a robot hand for substrate transfer in which the robot hand is so arranged that, even in case a substrate (S) gives rise to warping, the substrate (S) can be stably supported. On an upper surface of the robot hand there is formed a first seating surface on which is seated a lower-surface peripheral portion of the substrate (S) and, on a periphery thereof, there is formed an upwardly extended step. The step is provided with a plurality of stair-shaped stages. On an upper surface of the robot hand inwardly away from the first seating surface there is provided a second seating surface which is inclined downward toward the center of the substrate (S) such that a lower surface of the substrate (S) is seated on the second seating surface when the substrate (S) is warped downward into a concave shape.
摘要翻译：提供了一种用于基板转印的机器人手，其中机器人手布置成使得即使在基板（S）引起翘曲的情况下，也可以稳定地支撑基板（S）。在机器人手的上表面上形成有第一就座表面，其上安置有基底（S）的下表面周边部分，并且在其周边上形成向上延伸的步骤。台阶设置有多个楼梯阶段。在机器人手的上表面向内离开第一座面，设置有第二座面，其朝向衬底（S）的中心向下倾斜，使得衬底（S）的下表面位于当基板（S）向下弯曲成凹形时，第二座面。

5. 发明申请

US20110130858A1 METHOD OF CONTROLLING TRANSFER ROBOT 有权
标题翻译：控制传输机器人的方法
公开(公告)号：US20110130858A1
公开(公告)日：2011-06-02
申请号：US13054818
申请日：2009-07-23
申请人： Yoshinori Fujii
发明人： Yoshinori Fujii
IPC分类号： B25J9/10 , B25J13/02
CPC分类号： H01L21/67745 , B25J9/1682 , G05B2219/34348 , G05B2219/39109
摘要： A method of controlling a transfer robot is provided, in which method the communication time of the transfer robot can be reduced and the transfer time of a substrate can be shortened. A series of actions of the transfer robot when a substrate that is present in a processing chamber is transferred to a predetermined position in a processing chamber, are performed by a single command. The series of actions may include a swap action in which, after having taken out by a robot hand the substrate that is present in the processing chamber, a substrate that is different from the substrate is handed over by a robot hand to a predetermined position on the processing chamber.
摘要翻译：提供了一种控制传送机器人的方法，其中可以减少传送机器人的通信时间，并且可以缩短基板的传送时间。当存在于处理室中的基板被转移到处理室中的预定位置时，传送机器人的一系列动作通过单个命令执行。一系列动作可以包括互换动作，其中在机器人手中将存在于处理室中的衬底取出之后，与衬底不同的衬底被机器人手移交到预定位置上处理室。

6. 发明申请

US20110013338A1 Electrostatic chuck device 审中-公开
标题翻译：静电吸盘装置
公开(公告)号：US20110013338A1
公开(公告)日：2011-01-20
申请号：US12924125
申请日：2010-09-21
申请人： Yoshinori Fujii
发明人： Yoshinori Fujii
IPC分类号： H01L21/683
CPC分类号： H01L21/6833 , H02N13/00
摘要： The object of this invention is to provide an electrostatic chuck device which can properly and promptly diselectrify a substrate to be processed. In an electrostatic chuck device attracting a substrate to be processed on the surface of a susceptor electrically, a diselectrifying circuit is provided which includes diselectrifying electrode means facing the surface of the susceptor, a diselectrifying potential, and a diselectrifying resistance connected between the diselectrifying electrode means and the diselectrifying potential. The resistance value of the diselectrifying resistance is established such that it is lower than that of an insulating layer of the surface of the susceptor and the diselectrifying resistance can hold the potential of the substrate during an electrostatic chuck operation, such that the diselectrifying resistance can dissipate the potential of the substrate into the ground potential when the electrostatic chuck is canceled. This structure can thus appropriately and promptly diselectrify the substrate.
摘要翻译：本发明的目的是提供一种静电卡盘装置，其可以适当且及时地对待处理的基板进行电位差。在静电卡盘装置中，在基座的表面上吸引要处理的基板的电气设置电路，其设置有包括位于基座的表面的电位差电极装置，相位差电位以及连接在所述电位差电极单元和潜在的潜力。确定耐电阻性的电阻值低于基座表面的绝缘层的电阻值，并且耐电阻性能够在静电卡盘操作期间保持基板的电位，使得耐电阻性能消散当静电卡盘被取消时，衬底到地电位的电位。因此，这种结构可以适当且迅速地使基板失电。

7. 发明申请

US20100287768A1 MEHTOD OF MANUFACTURING ELECTROSTATIC CHUCK MECHANISM 审中-公开
标题翻译：制造静电切割机构的手段
公开(公告)号：US20100287768A1
公开(公告)日：2010-11-18
申请号：US12670523
申请日：2008-07-28
申请人： Yoshinori FUJII , Katsuaki NAKANO , Hidenori FUKUMOTO , Nobumasa MIYANAGA
发明人： Yoshinori FUJII , Katsuaki NAKANO , Hidenori FUKUMOTO , Nobumasa MIYANAGA
IPC分类号： H01R43/00
CPC分类号： H02N13/00 , H01L21/6831 , Y10T29/49117
摘要： There is provided a method of manufacturing an electrostatic chuck which is free from fluctuations in performance or incomplete detachment from the beginning of use, without being influenced by the impurities that remain on the surface of, or in the inside of, a dielectric layer at the time of manufacturing thereof, in case the dielectric layer which comes into contact with an article to be held by the electrostatic chuck is made of silicone rubber or resin. Before assembling the dielectric layer into the surface of a base having disposed thereon an electrode, or after the dielectric layer has been assembled into the surface of the base, a step is performed in which a heating plate that has been heated to a predetermined temperature is pressed against the contact surface of the dielectric layer.
摘要翻译：提供了一种制造静电卡盘的方法，其不受使用开始时的性能波动或不完全分离的影响，而不受留在电介质层的表面或内部的杂质的影响在与静电卡盘保持的物品接触的电介质层由硅橡胶或树脂制成的情况下，制造时间。在将电介质层组装到其上设置有电极的基底的表面之后，或者在电介质层已经组装到基底表面之后，进行如下步骤：将加热到预定温度的加热板压在电介质层的接触表面上。

8. 发明申请

US20070255105A1 TREATMENT TOOL INSERTION CHANNEL OF ENDOSCOPE 有权
标题翻译：治疗工具插管通道
公开(公告)号：US20070255105A1
公开(公告)日：2007-11-01
申请号：US11739127
申请日：2007-04-24
申请人： Kunitaka OCHI , Yoshinori FUJII , Naoki TANAKA , Kikuo IWASAKA , Satoru KANEDA
发明人： Kunitaka OCHI , Yoshinori FUJII , Naoki TANAKA , Kikuo IWASAKA , Satoru KANEDA
IPC分类号： A61B1/00
CPC分类号： A61B1/0055 , A61B1/00071
摘要： A treatment tool insertion channel of an endoscope, which is arranged through an inside of an insertion part that includes a flexible tube and a bendable part, includes a flexible inner tube, a spiral groove formed around the flexible inner tube over an entire length of the bendable part and the flexible tube, at least one coil wound along a bottom of the spiral groove, and at least one type of filler with which the spiral groove is filled. The treatment tool insertion channel includes a first portion that includes a part inside the bendable part and a second portion at a proximal end side of the first portion, the first portion being configured more flexible than the second portion.
摘要翻译：内窥镜的处理工具插入通道，其通过包括柔性管和可弯曲部的插入部的内部布置，包括柔性内管，在柔性内管周围的整个长度上形成的螺旋槽弯曲部分和柔性管，沿着螺旋槽的底部缠绕的至少一个线圈以及填充螺旋槽的至少一种填料。处理工具插入通道包括第一部分，其包括可弯曲部分内部的部分和在第一部分的近端侧的第二部分，第一部分被配置为比第二部分更加柔性。

9. 发明授权

US09093485B2 Transport method 有权
标题翻译：运输方式
公开(公告)号：US09093485B2
公开(公告)日：2015-07-28
申请号：US13635173
申请日：2011-04-14
申请人： Yoshinori Fujii
发明人： Yoshinori Fujii
IPC分类号： B65G49/07 , H01L21/687 , H01L21/677
CPC分类号： H01L21/67742 , H01L21/67745 , H01L21/68707
摘要： By a transport robot having a hand provided with stationary clamp members and a movable clamp member which pinches a to-be-transported object S between the movable clamp member and the stationary clamp members, after transporting the to-be-transported object-S in a horizontal posture to a transport destination, the hand is lowered in a state in which the movable clamp member is receded to an unclamped position, thereby transferring the to-be-transported object onto a plurality of supporting pins which are disposed at the transport destination. In the method mentioned above, an arrangement is made that, even if the stationary clamp members give rise to dents due to wear, the to-be-transported object is arranged to be transferred onto the supporting pins without problems.
摘要翻译：通过具有设置有固定夹紧构件的手的运送机器人和在可移动夹紧构件和固定夹紧构件之间夹持被输送物体S的可动夹紧构件，在将待运送物体S输送到对于运送目的地的水平姿势，手在可动夹紧件退回到未夹紧位置的状态下降低，从而将被运送物体转移到设置在运送目的地的多个支撑销上。在上述方法中，即使固定的夹紧构件由于磨损而产生凹痕，也可以将待传送的物体设置成不受问题地转移到支撑销上。

10. 发明授权

US08688276B2 Teaching method for transfer robot 有权
标题翻译：传送机器人的教学方法
公开(公告)号：US08688276B2
公开(公告)日：2014-04-01
申请号：US13054824
申请日：2009-07-29
申请人： Yoshinori Fujii
发明人： Yoshinori Fujii
IPC分类号： G05B15/00
CPC分类号： H01L21/681 , B25J9/1692 , G05B2219/45031 , H01L21/67748
摘要： There is provided a teaching method for a transfer robot which is capable of quickly performing teaching at high reliability. Relative to a transfer robot which, in a state in which a substrate to be processed in a plurality of processing chambers is supported, transfers the substrate to a predetermined position by turning and telescopic action on the same plane, teaching is made of the transfer actions. At this time, by using at least one detection means that is disposed so as to detect the substrate when the substrate is transferred among the processing chambers, the transfer robot is caused to perform transfer action. At least one index part provided in advance on an operating part of the transfer robot is detected by the detection means. From this detection position, a reference position which serves as an origin of at least one of the turning action and the telescopic action is taught.
摘要翻译：提供了一种能够以高可靠性快速执行教学的传送机器人的教学方法。相对于在多个处理室中被处理的基板被支撑的状态下的转印机器人，通过在同一平面上的转动和伸缩动作将基板转移到预定位置，由传递机构。此时，通过使用至少一个检测装置，其被设置为当在处理室之间转移基板时检测基板，使得传送机器人执行传送动作。由检测装置检测在传送机器人的操作部分上预先提供的至少一个索引部分。从该检测位置，教导了作为转动动作和伸缩动作中的至少一个的原点的基准位置。

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