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    • 3. 发明专利
    • Magnetic switching element and memory device using it
    • 磁性开关元件及其使用的存储器件
    • JP2005129908A
    • 2005-05-19
    • JP2004267239
    • 2004-09-14
    • Matsushita Electric Ind Co LtdNational Institute Of Advanced Industrial & Technology松下電器産業株式会社独立行政法人産業技術総合研究所
    • ODAKAWA AKIHIROSATO HIROSHIYAMADA JUICHIISHII YUJIINOUE AKIRAAKAHO HIROSHIKAWASAKI MASASHITAKAGI HIDENORI
    • G11B5/39H01L21/8246H01L27/105H01L29/82H01L43/08
    • PROBLEM TO BE SOLVED: To provide a method for inverting the magnetized state in a magnetic body with high energy conversion efficiency, a magnetic switching element which substantially reduces energy consumption of the entire magnetic device that changes the magnetized state provided by an external magnetic field, and a memory device using the magnetic switching element. SOLUTION: A magnetic switching element comprises at least one transfer body (1), at least one electrode (2), and at least one free magnetic body (3). The transfer body (1) of the magnetic switching element is made of a perovskite compound containing at least a rare-earth element and an alkaline earth metal. On the transfer body (1), the electrode (2) and the free magnetic body (3) are placed so that they are in parallel with each other, and that they are separated from each other. At least one free magnetic body (3) is magnetically coupled to the transfer body (1), and the transfer body (1) is transferred to a ferromagnetic state or an antiferromagnetic state through injection/induction of electrons/holes, thereby changing at least one magnetization direction of the free magnetic body (3). COPYRIGHT: (C)2005,JPO&NCIPI
    • 要解决的问题:为了提供一种用于以高能量转换效率来反转磁体的磁化状态的方法,磁性开关元件显着降低整个磁性器件的能量消耗,从而改变由外部电路提供的磁化状态 磁场,以及使用该磁性开关元件的存储器件。 解决方案:磁性开关元件包括至少一个转移体(1),至少一个电极(2)和至少一个自由磁体(3)。 磁性开关元件的转移体(1)由至少包含稀土元素和碱土金属的钙钛矿化合物制成。 在转印体(1)上,电极(2)和自由磁体(3)彼此平行放置,并且彼此分离。 至少一个自由磁体(3)磁耦合到传输体(1),并且传输体(1)通过注入/感应电子/孔而被转移到铁磁状态或反铁磁状态,从而至少改变 自由磁体(3)的一个磁化方向。 版权所有(C)2005,JPO&NCIPI
    • 5. 发明专利
    • Method for forming thin film
    • 形成薄膜的方法
    • JP2005163128A
    • 2005-06-23
    • JP2003405372
    • 2003-12-04
    • Matsushita Electric Ind Co LtdNational Institute Of Advanced Industrial & Technology松下電器産業株式会社独立行政法人産業技術総合研究所
    • SATO HIROSHIISHII YUJIYAMADA JUICHIAKAHO HIROSHIKAWASAKI MASASHITOKURA YOSHINORIODAKAWA AKIHIRO
    • C23C14/50
    • PROBLEM TO BE SOLVED: To uniformly heat a substrate to be mounted on a substrate holder of a high-temperature film-forming apparatus, without using silver paste.
      SOLUTION: This thin-film-forming method fixes a substrate 13 on a substrate holder 12 by inserting first, second and third metallic foils 31, 32 and 33 between the substrate holder 12 and the substrate 13, and tightening them with a screw thread 24. The second metallic foil 32 has a thickness of 10 times or thicker than the first and third metallic foil 31 and 33; and is formed of a material with a melting point of 800°C or higher, Young's modulus of 150×10
      9 N/m
      2 or less and a heat conductivity of 200 W/mK or higher (for instance, copper). The first and third metallic foils are formed of a material with low reactivity at a high temperature (for instance, NiCr, Inconel and NiCrAlY); and have preferably a thickness in a range between 3 μm and 15 μm.
      COPYRIGHT: (C)2005,JPO&NCIPI
    • 要解决的问题:为了均匀地加热要安装在高温成膜设备的基板保持器上的基板,而不使用银浆。 解决方案:该薄膜形成方法通过将第一,第二和第三金属箔31,32和33插入在基板保持器12和基板13之间,将基板13固定在基板保持件12上,并且用 第二金属箔32的厚度为第一和第三金属箔31和33的厚度的10倍或更厚; 并且由熔点为800℃以上的材料形成,杨氏模量为150×10 9 N / m 2 以下,导热率为200 W / mK以上(例如铜)。 第一和第三金属箔由在高温下具有低反应性的材料(例如,NiCr,Inconel和NiCrAlY)形成; 并且优选具有在3μm和15μm之间的范围内的厚度。 版权所有(C)2005,JPO&NCIPI
    • 9. 发明专利
    • Superconducting element, superconducting integrated circuit, and method of manufacturing superconducting element
    • 超导元件,超导集成电路及制造超导元件的方法
    • JP2008211082A
    • 2008-09-11
    • JP2007047993
    • 2007-02-27
    • National Institute Of Advanced Industrial & TechnologySaitama Univ国立大学法人埼玉大学独立行政法人産業技術総合研究所
    • TAINO TORUMEIREN HIROAKITAKADA SUSUMUASA SHINICHISERITA YOSUKENAKAGAWA HIROSHIKIKUCHI KATSUYAAOYANAGI MASAHIROAKAHO HIROSHI
    • H01L39/24
    • PROBLEM TO BE SOLVED: To provide a superconducting element in which its manufacturing cost is low and a miniaturization of a junction area S of a Josephson junction is easy without increasing the number of processes and complicating any manufacturing process, and also to provide a superconducting integrated circuit using this superconducting element and a method of manufacturing the superconducting element.
      SOLUTION: The superconducting element is equipped with: a load 32; the Josephson junction providing a lower electrode wiring 33 electrically connected to this load 32, a tunnel barrier film 41 contacting with this lower electrode wiring 33, and an upper electrode 42 having vertical sidewalls and contacting with this tunnel barrier film 41; and a first interlayer insulating film 16 which has inner walls contacting with the vertical sidewalls of the upper electrode 42, surrounds peripheries of the upper electrode 42, has a top face consisting of a flat plane perpendicularly intersecting the inner walls, and also has a thickness thicker than the upper electrode 42. A top face of the first interlayer insulating film 16 is flat in a planarity of ±1/20 of a thickness of the upper electrode 42 within the range separated from the inner walls by at least the maximum size of a top face of the upper electrode 42.
      COPYRIGHT: (C)2008,JPO&INPIT
    • 要解决的问题:为了提供其制造成本低的超导元件,并且约瑟夫逊结的接合面积S的小型化容易,而不增加工艺的数量并使任何制造工艺复杂化,并且还提供 使用该超导元件的超导集成电路和制造超导元件的方法。

      解决方案:超导元件配有:负载32; 约瑟夫逊结提供与该负载32电连接的下电极配线33,与该下电极配线33接触的隧道势垒膜41和具有垂直侧壁并与该隧道势垒膜41接触的上电极42; 并且具有与上电极42的垂直侧壁接触的内壁的第一层间绝缘膜16围绕上电极42的周边具有由与内壁垂直相交的平面构成的顶面,并且还具有厚度 第一层间绝缘膜16的顶面在与内壁分开的范围内的上电极42的厚度的±1/20的平坦度平坦至少最大尺寸 上电极42的顶面。(C)2008,JPO&INPIT