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    • 7. 发明授权
    • Force sensor and method of manufacturing the same
    • 力传感器及其制造方法
    • US08516906B2
    • 2013-08-27
    • US13475579
    • 2012-05-18
    • Eiji UmetsuMasahiko IshizoneMotoki HirayamaHideki Gochou
    • Eiji UmetsuMasahiko IshizoneMotoki HirayamaHideki Gochou
    • G01L1/04G01L1/10H01L21/00
    • G01L1/18G01L5/162
    • A sensor substrate includes a plurality of piezoresistance elements. The electrical resistance of each piezoresistance element changes in accordance with an amount of displacement of a displacement portion displaced by an external load applied through a pressure receiving unit. A base substrate supports the sensor substrate. The sensor substrate and the base substrate each include a support supporting the displacement portion such that the displacement portion can be displaced and a plurality of electrically connecting portions electrically connected to the plurality of piezoresistance elements. The supports of the sensor and base substrates are joined to each other and the plurality of electrically connecting portions of the sensor and base substrates are joined to each other. Furthermore, in each of the sensor and base substrates, either the support or the plurality of electrically connecting portions or both extend to the periphery of the sensor substrate or the base substrate.
    • 传感器基板包括多个压阻元件。 每个压电元件的电阻根据通过压力接收单元施加的外部负载而移位的位移部分的位移量而变化。 基底支撑传感器基底。 传感器基板和基板各自包括支撑位移部分的支撑件,使得位移部分可以移位,并且多个电连接部分电连接到多个压阻元件。 传感器和基底基板的支撑件彼此接合,并且传感器和基底基板的多个电连接部分彼此接合。 此外,在每个传感器和基底基板中,支撑件或多个电连接部分或两者都延伸到传感器基板或基底基板的周边。