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1. 发明授权

US07874063B2 Thin film magnetic head integrated structure 有权
标题翻译：薄膜磁头集成结构
公开(公告)号：US07874063B2
公开(公告)日：2011-01-25
申请号：US11507538
申请日：2006-08-22
申请人： Naoto Matono , Yoshihiko Koyama , Tatsuya Harada
发明人： Naoto Matono , Yoshihiko Koyama , Tatsuya Harada
IPC分类号： G11C5/12 , G11B5/1455
CPC分类号： G11B5/3166 , G11B5/3169 , G11B5/3173 , G11B5/3903 , Y10T29/49028 , Y10T29/49032 , Y10T29/49036 , Y10T29/53165
摘要： A thin film magnetic head integrated structure is provided. A plurality of thin film magnetic head bars include a plurality of thin film magnetic head precursors, a plurality of RLG sensors for read head core, and a plurality of RLG sensors for write head core, the read head core including a magnetoresistive element that performs a read process and the write head core including a magnetic pole layer that performs a write process.
摘要翻译：提供薄膜磁头集成结构。多个薄膜磁头杆包括多个薄膜磁头前体，用于读取磁头磁芯的多个RLG传感器和用于写入磁头磁芯的多个RLG传感器，读取磁头磁芯包括磁阻元件，该磁阻元件执行读取处理和写入磁头核心包括执行写入处理的磁极层。

2. 发明申请

US20070044297A1 Thin film magnetic head integrated structure, method of manufacturing thereof, and method of manufacturing thin film magnetic head 有权
标题翻译：薄膜磁头一体化结构及其制造方法以及制造薄膜磁头的方法
公开(公告)号：US20070044297A1
公开(公告)日：2007-03-01
申请号：US11507538
申请日：2006-08-22
申请人： Naoto Matono , Yoshihiko Koyama , Tatsuya Harada
发明人： Naoto Matono , Yoshihiko Koyama , Tatsuya Harada
IPC分类号： G11B5/127
CPC分类号： G11B5/3166 , G11B5/3169 , G11B5/3173 , G11B5/3903 , Y10T29/49028 , Y10T29/49032 , Y10T29/49036 , Y10T29/53165
摘要： A plurality of thin film magnetic head bars are formed so as to include a plurality of thin film magnetic head precursors, a plurality of RLG sensors for read head core, and a plurality of RLG sensors for write head core. An air bearing surface is formed by grinding the thin film magnetic head bars with the use of the RLG sensors for read head core (secondary resistive film sensors); detecting and adjusting the inclinations of the grinding surfaces of the thin film magnetic head bars with the use of the RLG sensors for read head core (the secondary resistive film sensors) and the RLG sensors for write head core (primary resistive film sensors); and then finish-polishing the thin film magnetic head bars with the use of the RLG sensors for read head core.
摘要翻译：多个薄膜磁头杆形成为包括多个薄膜磁头前体，多个用于读取磁头磁芯的RLG传感器和用于写入磁头磁芯的多个RLG传感器。通过使用用于读取磁头芯（次级电阻膜传感器）的RLG传感器研磨薄膜磁头棒来形成空气轴承表面; 利用用于读头磁芯的RLG传感器（二次电阻膜传感器）和用于写磁头磁芯（初级电阻膜传感器）的RLG传感器来检测和调整薄膜磁头的研磨表面的倾斜度; 然后使用用于读取磁头核心的RLG传感器对薄膜磁头进行精加工。

3. 发明申请

US20060098339A1 Method for manufacturing a magnetic head using a multi-stage ion milling 有权
标题翻译：使用多级离子铣削制造磁头的方法
公开(公告)号：US20060098339A1
公开(公告)日：2006-05-11
申请号：US11266350
申请日：2005-11-04
申请人： Yoshihiko Koyama , Naoto Matono , Yasuyuki Notsuke
发明人： Yoshihiko Koyama , Naoto Matono , Yasuyuki Notsuke
IPC分类号： G11B5/147
CPC分类号： G11B5/3169 , G11B5/1278 , G11B5/3116 , G11B5/3163 , Y10T29/49052
摘要： A method for manufacturing a magnetic head for perpendicular magnetic recording is disclosed. The method comprising: a first step of depositing a non-magnetic film over and around the main magnetic pole, and subsequently polishing and planarizing the non-magnetic film, wherein the non-magnetic film is made of a non-magnetic material which exhibits a lower ion milling rate than that of a magnetic metal material which constitutes the main magnetic pole; a second step of etching the surface by means of ion milling at a first angle relative to a stacked direction of the magnetic head, to form a stepped portion in which the main magnetic pole is lower from the non-magnetic film around the main magnetic pole; and a third step of etching the stepped portion, by means of ion milling, at a second angle relative to the stacked direction, wherein the second angle is larger than the first angle.
摘要翻译：公开了用于制造用于垂直磁记录的磁头的方法。该方法包括：第一步骤，在主磁极上方和周围沉积非磁性膜，随后抛光和平面化非磁性膜，其中非磁性膜由非磁性材料制成，其表现出比构成主磁极的磁性金属材料的离子研磨速度低; 通过离子铣削相对于磁头的堆叠方向以第一角度蚀刻表面的第二步骤，以形成主磁极从主磁极周围的非磁性膜下降的阶梯部分 ; 以及第三步骤，通过离子研磨，相对于所述堆叠方向以第二角蚀刻所述阶梯部分，其中所述第二角度大于所述第一角度。

4. 发明授权

US07503107B2 Method for manufacturing a magnetic head using a multi-stage ion milling 有权
标题翻译：使用多级离子铣削制造磁头的方法
公开(公告)号：US07503107B2
公开(公告)日：2009-03-17
申请号：US11266350
申请日：2005-11-04
申请人： Yoshihiko Koyama , Naoto Matono , Yasuyuki Notsuke
发明人： Yoshihiko Koyama , Naoto Matono , Yasuyuki Notsuke
IPC分类号： G11B5/127 , G11B5/147
CPC分类号： G11B5/3169 , G11B5/1278 , G11B5/3116 , G11B5/3163 , Y10T29/49052
摘要： A method for manufacturing a magnetic head for perpendicular magnetic recording is disclosed. The method comprising: a first step of depositing a non-magnetic film over and around the main magnetic pole, and subsequently polishing and planarizing the non-magnetic film, wherein the non-magnetic film is made of a non-magnetic material which exhibits a lower ion milling rate than that of a magnetic metal material which constitutes the main magnetic pole; a second step of etching the surface by use of ion milling at a first angle relative to a stacked direction of the magnetic head, to form a stepped portion in which the main magnetic pole is lower from the non-magnetic film around the main magnetic pole; and a third step of etching the stepped portion, by use of ion milling, at a second angle relative to the stacked direction, wherein the second angle is larger than the first angle.
摘要翻译：公开了用于制造用于垂直磁记录的磁头的方法。该方法包括：第一步骤，在主磁极上方和周围沉积非磁性膜，随后抛光和平面化非磁性膜，其中非磁性膜由非磁性材料制成，其表现出比构成主磁极的磁性金属材料的离子研磨速度低; 通过使用相对于磁头的堆叠方向的第一角度的离子铣削来蚀刻表面的第二步骤，以形成主磁极从主磁极周围的非磁性膜下降的阶梯部分 ; 以及第三步骤，通过使用离子铣削，相对于所述堆叠方向以第二角蚀刻所述阶梯部分，其中所述第二角度大于所述第一角度。

5. 发明申请

US20110086182A1 Magnetic device, perpendicular magnetic recording head, magnetic recording system, method of forming magnetic layer pattern, and method of manufacturing perpendicular magnetic recording head 有权
公开(公告)号：US20110086182A1
公开(公告)日：2011-04-14
申请号：US12926817
申请日：2010-12-10
申请人： Naoto Matono , Tatsuya Harada
发明人： Naoto Matono , Tatsuya Harada
IPC分类号： C08J7/18
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/3116 , G11B5/3146 , G11B5/3967 , Y10T29/49039 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： Provided is a method of manufacturing a perpendicular magnetic recording head which can enhance accuracy and simplify the manufacturing process. The method includes: forming a photoresist pattern having an opening part (the inclination of an inner wall); forming a non-magnetic layer (the inclination of another inner wall) so as to narrow the opening part by a dry film forming method such as ALD method; stacking a seed layer and a plating layer so as to bury the opening part provided with the non-magnetic layer; and forming a main magnetic pole layer (a front end portion having a bevel angle) by polishing the non-magnetic layer, the seed layer, and the plating layer by CMP method until the photoresist pattern is exposed. The final opening width (the forming width of the front end portion) is unsusceptible to variations, thus reducing the number of the steps of forming the main magnetic layer.

6. 发明申请

US20080239580A1 Magnetic head for perpendicular magnetic recording and method of manufacturing same, the magnetic head including pole layer and two shields that sandwich the pole layer 有权
标题翻译：用于垂直磁记录的磁头及其制造方法，磁头包括磁极层和夹住极层的两个屏蔽层
公开(公告)号：US20080239580A1
公开(公告)日：2008-10-02
申请号：US11727372
申请日：2007-03-26
申请人： Tatsuya Harada , Koichi Otani , Hidetaka Kawano , Kenji Yokoyama , Naoto Matono
发明人： Tatsuya Harada , Koichi Otani , Hidetaka Kawano , Kenji Yokoyama , Naoto Matono
IPC分类号： G11B5/147 , G03C5/00 , G11B5/54
CPC分类号： G11B5/3133 , G11B5/3163 , G11B5/6064 , Y10T29/49044
摘要： A magnetic head incorporates: a medium facing surface; a coil; a pole layer; first and second shields disposed to sandwich the pole layer therebetween; a first gap layer disposed between the first shield and the pole layer; a second gap layer disposed between the second shield and the pole layer; and a substrate. The first shield is located closer to the substrate than the second shield. The magnetic head further incorporates an antireflection film disposed between the first shield and the first gap layer or between the first gap layer and the pole layer. The pole layer is formed by frame plating.
摘要翻译：磁头包括：面向介质的表面; 线圈极层; 第一和第二屏蔽设置成夹在其间的极层; 设置在所述第一屏蔽和所述极层之间的第一间隙层; 设置在第二屏蔽和极层之间的第二间隙层; 和基材。第一屏蔽件比第二屏蔽件更靠近基板。磁头还包括设置在第一屏蔽和第一间隙层之间或者设置在第一间隙层和极层之间的抗反射膜。极层通过框架电镀形成。

7. 发明授权

US07293345B2 Method of manufacturing a thin film magnetic recording head 失效
标题翻译：制造薄膜磁记录头的方法
公开(公告)号：US07293345B2
公开(公告)日：2007-11-13
申请号：US10996466
申请日：2004-11-26
申请人： Naoto Matono , Tatsuya Harada , Shigeru Shoji
发明人： Naoto Matono , Tatsuya Harada , Shigeru Shoji
IPC分类号： G11B5/187 , B44C1/22
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163 , Y10T29/49032 , Y10T29/49041 , Y10T29/49043 , Y10T29/4906
摘要： A invention provides a method of manufacturing a thin film magnetic head is provided, capable of forming a magnetic pole layer as easily as possible. By etching a lower insulating layer and the upper insulating layer by RIE using a fluorine-based gas (CF4 or CHF3) or chlorine-based gas (Cl2 or BCl3), a magnetic pole formation space R1 is formed so as to have a uniform width in an upper insulating layer by and a magnetic pole formation space R2 is formed in the lower insulating layer so as to have a width gradually narrowed from width W1 to width W4 with distance from the magnetic pole formation space R1. After that, a plating film is grown in the magnetic pole formation spaces R1 and R2, thereby forming a main magnetic pole layer.
摘要翻译：本发明提供一种制造薄膜磁头的方法，其能够尽可能容易地形成磁极层。通过使用氟系气体（CF 3或CH 3 3）或氯系气体（Cl 2）蚀刻通过RIE的下绝缘层和上绝缘层， 2或BCl 3），磁极形成空间R 1形成为在上绝缘层中具有均匀的宽度，并且形成磁极形成空间R 2 下部绝缘层的宽度从宽度W1到宽度W4的宽度随着与磁极形成空间R 1的距离而逐渐变窄。之后，在磁极形成空间R 1和R 2中生长电镀膜，从而形成主磁极层。

8. 发明申请

US20070195457A1 Magnetic device, perpendicular magnetic recording head, magnetic recording system, method of forming magnetic layer pattern, and method of manufacturing perpendicular magnetic recording head 有权
标题翻译：磁性装置，垂直磁记录头，磁记录系统，形成磁性层图案的方法以及制造垂直磁记录头的方法
公开(公告)号：US20070195457A1
公开(公告)日：2007-08-23
申请号：US11708609
申请日：2007-02-21
申请人： Naoto Matono , Tatsuya Harada
发明人： Naoto Matono , Tatsuya Harada
IPC分类号： G11B5/147
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/3116 , G11B5/3146 , G11B5/3967 , Y10T29/49039 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： Provided is a method of manufacturing a perpendicular magnetic recording head which can enhance accuracy and simplify the manufacturing process. The method includes: forming a photoresist pattern having an opening part (the inclination of an inner wall); forming a non-magnetic layer (the inclination of another inner wall) so as to narrow the opening part by a dry film forming method such as ALD method; stacking a seed layer and a plating layer so as to bury the opening part provided with the non-magnetic layer; and forming a main magnetic pole layer (a front end portion having a bevel angle) by polishing the non-magnetic layer, the seed layer, and the plating layer by CMP method until the photoresist pattern is exposed. The final opening width (the forming width of the front end portion) is unsusceptible to variations, thus reducing the number of the steps of forming the main magnetic layer.
摘要翻译：提供一种可提高精度并简化制造过程的垂直磁记录头的制造方法。该方法包括：形成具有开口部分（内壁的倾斜度）的光致抗蚀剂图案; 形成非磁性层（另一内壁的倾斜），以通过诸如ALD法的干膜形成方法使开口部分变窄; 堆叠种子层和镀层以便掩埋设置有非磁性层的开口部分; 并通过CMP方法研磨非磁性层，晶种层和镀层，形成主磁极层（具有斜角的前端部分），直到曝光光致抗蚀剂图案为止。最终的开口宽度（前端部分的形成宽度）不易变化，从而减少形成主磁性层的步骤数量。

9. 发明授权

US08325440B2 Magnetic head including a pole layer and an antireflection film sandwiched by two shields 有权
标题翻译：磁头包括由两层屏蔽夹持的极层和抗反射膜
公开(公告)号：US08325440B2
公开(公告)日：2012-12-04
申请号：US11727372
申请日：2007-03-26
申请人： Tatsuya Harada , Koichi Otani , Hidetaka Kawano , Kenji Yokoyama , Naoto Matono
发明人： Tatsuya Harada , Koichi Otani , Hidetaka Kawano , Kenji Yokoyama , Naoto Matono
IPC分类号： G11B5/23 , G11B5/31 , G11B5/11 , H04R31/00
CPC分类号： G11B5/3133 , G11B5/3163 , G11B5/6064 , Y10T29/49044
摘要： A magnetic head incorporates: a medium facing surface; a coil; a pole layer; first and second shields disposed to sandwich the pole layer therebetween; a first gap layer disposed between the first shield and the pole layer; a second gap layer disposed between the second shield and the pole layer; and a substrate. The first shield is located closer to the substrate than the second shield. The magnetic head further incorporates an antireflection film disposed between the first shield and the first gap layer or between the first gap layer and the pole layer. The pole layer is formed by frame plating.
摘要翻译：磁头包括：面向介质的表面; 线圈极层; 第一和第二屏蔽设置成夹在其间的极层; 设置在所述第一屏蔽和所述极层之间的第一间隙层; 设置在第二屏蔽和极层之间的第二间隙层; 和基材。第一屏蔽件比第二屏蔽件更靠近基板。磁头还包括设置在第一屏蔽和第一间隙层之间或者设置在第一间隙层和极层之间的抗反射膜。极层通过框架电镀形成。

10. 发明授权

US07995308B2 Magnetic head for perpendicular magnetic recording and method of manufacturing same, the magnetic head incuding pole layer and two shields sandwiching the pole layer 有权
标题翻译：用于垂直磁记录的磁头及其制造方法，磁头插入极层和两个屏蔽夹住极层
公开(公告)号：US07995308B2
公开(公告)日：2011-08-09
申请号：US11783232
申请日：2007-04-06
申请人： Koichi Otani , Naoto Matono , Tatsuya Harada , Kenji Yokoyama , Hidetaka Kawano
发明人： Koichi Otani , Naoto Matono , Tatsuya Harada , Kenji Yokoyama , Hidetaka Kawano
IPC分类号： G11B5/31
CPC分类号： G11B5/3116 , G11B5/112 , G11B5/1278 , G11B5/3146 , G11B5/3163 , G11B5/3967 , Y10T29/49046
摘要： A magnetic head incorporates: a medium facing surface; a coil; a pole layer; first and second shields disposed to sandwich the pole layer therebetween; a first gap layer disposed between the first shield and the pole layer; a second gap layer disposed between the second shield and the pole layer; and a substrate. The first shield is located closer to the substrate than the second shield. The first shield has a first layer and a second layer disposed between the first layer and the first gap layer.
摘要翻译：磁头包括：面向介质的表面; 线圈极层; 第一和第二屏蔽件设置成夹在其间的极层; 设置在所述第一屏蔽和所述极层之间的第一间隙层; 设置在第二屏蔽和极层之间的第二间隙层; 和基材。第一屏蔽件比第二屏蔽件更靠近基板。第一屏蔽具有设置在第一层和第一间隙层之间的第一层和第二层。

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