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1. 发明申请

US20050117251A1 Thin film magnetic head, method of manufacturing the same, and magnetic recording apparatus 失效
标题翻译：薄膜磁头，其制造方法和磁记录装置
公开(公告)号：US20050117251A1
公开(公告)日：2005-06-02
申请号：US10996466
申请日：2004-11-26
申请人： Naoto Matono , Tatsuya Harada , Shigeru Shoji
发明人： Naoto Matono , Tatsuya Harada , Shigeru Shoji
IPC分类号： G11B5/31 , G11B5/127 , G11B5/147
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163 , Y10T29/49032 , Y10T29/49041 , Y10T29/49043 , Y10T29/4906
摘要： The present invention provides a method of manufacturing a thin film magnetic head, capable of forming a magnetic pole layer as easily as possible. By etching a lower insulating layer and the upper insulating layer by RIE using a fluorine-based gas (CF4 or CHF3) or chlorine-based gas (Cl2 or BCl3), a magnetic pole formation space R1 is formed so as to have a uniform width in an upper insulating layer by and a magnetic pole formation space R2 is formed in the lower insulating layer so as to have a width gradually narrowed from width W1 to width W4 with distance from the magnetic pole formation space R1. After that, a plating film is grown in the magnetic pole formation spaces R1 and R2, thereby forming a main magnetic pole layer. Since the main magnetic pole layer is formed in one process by using the structural characteristics of the magnetic pole formation spaces R1 and R2, the process of forming the main magnetic pole layer is simplified and the number of processes required to form the main magnetic pole layer is reduced.
摘要翻译：本发明提供一种能够尽可能容易地形成磁极层的薄膜磁头的制造方法。通过使用氟系气体（CF 3或CH 3 3）或氯系气体（Cl 2）蚀刻通过RIE的下绝缘层和上绝缘层， 2或BCl 3），磁极形成空间R 1形成为在上绝缘层中具有均匀的宽度，并且形成磁极形成空间R 2 下部绝缘层的宽度从宽度W1到宽度W4的宽度随着与磁极形成空间R 1的距离而逐渐变窄。之后，在磁极形成空间R 1和R 2中生长电镀膜，从而形成主磁极层。由于通过使用磁极形成空间R 1和R 2的结构特性在一个工序中形成主磁极层，所以形成主磁极层的过程被简化，并且形成主磁场所需的工艺数量极层减少。

2. 发明授权

US07293345B2 Method of manufacturing a thin film magnetic recording head 失效
标题翻译：制造薄膜磁记录头的方法
公开(公告)号：US07293345B2
公开(公告)日：2007-11-13
申请号：US10996466
申请日：2004-11-26
申请人： Naoto Matono , Tatsuya Harada , Shigeru Shoji
发明人： Naoto Matono , Tatsuya Harada , Shigeru Shoji
IPC分类号： G11B5/187 , B44C1/22
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163 , Y10T29/49032 , Y10T29/49041 , Y10T29/49043 , Y10T29/4906
摘要： A invention provides a method of manufacturing a thin film magnetic head is provided, capable of forming a magnetic pole layer as easily as possible. By etching a lower insulating layer and the upper insulating layer by RIE using a fluorine-based gas (CF4 or CHF3) or chlorine-based gas (Cl2 or BCl3), a magnetic pole formation space R1 is formed so as to have a uniform width in an upper insulating layer by and a magnetic pole formation space R2 is formed in the lower insulating layer so as to have a width gradually narrowed from width W1 to width W4 with distance from the magnetic pole formation space R1. After that, a plating film is grown in the magnetic pole formation spaces R1 and R2, thereby forming a main magnetic pole layer.
摘要翻译：本发明提供一种制造薄膜磁头的方法，其能够尽可能容易地形成磁极层。通过使用氟系气体（CF 3或CH 3 3）或氯系气体（Cl 2）蚀刻通过RIE的下绝缘层和上绝缘层， 2或BCl 3），磁极形成空间R 1形成为在上绝缘层中具有均匀的宽度，并且形成磁极形成空间R 2 下部绝缘层的宽度从宽度W1到宽度W4的宽度随着与磁极形成空间R 1的距离而逐渐变窄。之后，在磁极形成空间R 1和R 2中生长电镀膜，从而形成主磁极层。

3. 发明授权

US08325440B2 Magnetic head including a pole layer and an antireflection film sandwiched by two shields 有权
标题翻译：磁头包括由两层屏蔽夹持的极层和抗反射膜
公开(公告)号：US08325440B2
公开(公告)日：2012-12-04
申请号：US11727372
申请日：2007-03-26
申请人： Tatsuya Harada , Koichi Otani , Hidetaka Kawano , Kenji Yokoyama , Naoto Matono
发明人： Tatsuya Harada , Koichi Otani , Hidetaka Kawano , Kenji Yokoyama , Naoto Matono
IPC分类号： G11B5/23 , G11B5/31 , G11B5/11 , H04R31/00
CPC分类号： G11B5/3133 , G11B5/3163 , G11B5/6064 , Y10T29/49044
摘要： A magnetic head incorporates: a medium facing surface; a coil; a pole layer; first and second shields disposed to sandwich the pole layer therebetween; a first gap layer disposed between the first shield and the pole layer; a second gap layer disposed between the second shield and the pole layer; and a substrate. The first shield is located closer to the substrate than the second shield. The magnetic head further incorporates an antireflection film disposed between the first shield and the first gap layer or between the first gap layer and the pole layer. The pole layer is formed by frame plating.
摘要翻译：磁头包括：面向介质的表面; 线圈极层; 第一和第二屏蔽设置成夹在其间的极层; 设置在所述第一屏蔽和所述极层之间的第一间隙层; 设置在第二屏蔽和极层之间的第二间隙层; 和基材。第一屏蔽件比第二屏蔽件更靠近基板。磁头还包括设置在第一屏蔽和第一间隙层之间或者设置在第一间隙层和极层之间的抗反射膜。极层通过框架电镀形成。

4. 发明授权

US07995308B2 Magnetic head for perpendicular magnetic recording and method of manufacturing same, the magnetic head incuding pole layer and two shields sandwiching the pole layer 有权
标题翻译：用于垂直磁记录的磁头及其制造方法，磁头插入极层和两个屏蔽夹住极层
公开(公告)号：US07995308B2
公开(公告)日：2011-08-09
申请号：US11783232
申请日：2007-04-06
申请人： Koichi Otani , Naoto Matono , Tatsuya Harada , Kenji Yokoyama , Hidetaka Kawano
发明人： Koichi Otani , Naoto Matono , Tatsuya Harada , Kenji Yokoyama , Hidetaka Kawano
IPC分类号： G11B5/31
CPC分类号： G11B5/3116 , G11B5/112 , G11B5/1278 , G11B5/3146 , G11B5/3163 , G11B5/3967 , Y10T29/49046
摘要： A magnetic head incorporates: a medium facing surface; a coil; a pole layer; first and second shields disposed to sandwich the pole layer therebetween; a first gap layer disposed between the first shield and the pole layer; a second gap layer disposed between the second shield and the pole layer; and a substrate. The first shield is located closer to the substrate than the second shield. The first shield has a first layer and a second layer disposed between the first layer and the first gap layer.
摘要翻译：磁头包括：面向介质的表面; 线圈极层; 第一和第二屏蔽件设置成夹在其间的极层; 设置在所述第一屏蔽和所述极层之间的第一间隙层; 设置在第二屏蔽和极层之间的第二间隙层; 和基材。第一屏蔽件比第二屏蔽件更靠近基板。第一屏蔽具有设置在第一层和第一间隙层之间的第一层和第二层。

5. 发明授权

US07948716B2 Magnetic head for perpendicular magnetic recording with a shield and a pole layer having a top surface with first and second portions at different heights, and method of manufacturing same 有权
标题翻译：用于具有屏蔽的垂直磁记录的磁头和具有在不同高度处具有第一和第二部分的顶表面的极层及其制造方法
公开(公告)号：US07948716B2
公开(公告)日：2011-05-24
申请号：US11806828
申请日：2007-06-04
申请人： Naoto Matono , Koichi Otani , Tatsuya Harada , Noriaki Kasahara , Takamitsu Sakamoto , Hiroaki Kawashima , Hirotaka Gomi , Kenkichi Anagawa , Norikazu Ota
发明人： Naoto Matono , Koichi Otani , Tatsuya Harada , Noriaki Kasahara , Takamitsu Sakamoto , Hiroaki Kawashima , Hirotaka Gomi , Kenkichi Anagawa , Norikazu Ota
IPC分类号： G11B5/33
CPC分类号： G11B5/3146 , G11B5/11 , G11B5/1278 , G11B5/3116 , G11B5/6064
摘要： A magnetic head includes: a coil; a pole layer; a shield having an end face located in a medium facing surface forward of an end face of the pole layer along a direction of travel of a recording medium; a gap layer between the shield and the pole layer; and a substrate on which the foregoing elements are stacked. The top surface of the pole layer includes: first and second portions with a difference in height therebetween; and a third portion connecting the first and second portions to each other. The first portion has an edge located in the medium facing surface, and the second portion is located farther from the medium facing surface and from the substrate than the first portion. The magnetic head further includes a nonmagnetic layer disposed between the second portion and the gap layer. The nonmagnetic layer has a surface touching the second portion, the surface having an edge located at the boundary between the second and third portions. The nonmagnetic layer has a thickness equal to or greater than the difference in height between the first and second portions.
摘要翻译：磁头包括：线圈; 极层; 屏蔽，其具有沿着记录介质的行进方向位于所述极层的端面的前方的面向介质的表面中的端面; 屏蔽层和极层之间的间隙层; 以及其上堆叠上述元件的基板。极层的顶表面包括：第一和第二部分之间的高度差异; 以及将第一和第二部分彼此连接的第三部分。第一部分具有位于介质面向表面中的边缘，并且第二部分位于比第一部分更远离介质面向表面和基板的位置。磁头还包括设置在第二部分和间隙层之间的非磁性层。非磁性层具有接触第二部分的表面，该表面具有位于第二和第三部分之间的边界处的边缘。非磁性层的厚度等于或大于第一和第二部分之间的高度差。

6. 发明授权

US07874063B2 Thin film magnetic head integrated structure 有权
标题翻译：薄膜磁头集成结构
公开(公告)号：US07874063B2
公开(公告)日：2011-01-25
申请号：US11507538
申请日：2006-08-22
申请人： Naoto Matono , Yoshihiko Koyama , Tatsuya Harada
发明人： Naoto Matono , Yoshihiko Koyama , Tatsuya Harada
IPC分类号： G11C5/12 , G11B5/1455
CPC分类号： G11B5/3166 , G11B5/3169 , G11B5/3173 , G11B5/3903 , Y10T29/49028 , Y10T29/49032 , Y10T29/49036 , Y10T29/53165
摘要： A thin film magnetic head integrated structure is provided. A plurality of thin film magnetic head bars include a plurality of thin film magnetic head precursors, a plurality of RLG sensors for read head core, and a plurality of RLG sensors for write head core, the read head core including a magnetoresistive element that performs a read process and the write head core including a magnetic pole layer that performs a write process.
摘要翻译：提供薄膜磁头集成结构。多个薄膜磁头杆包括多个薄膜磁头前体，用于读取磁头磁芯的多个RLG传感器和用于写入磁头磁芯的多个RLG传感器，读取磁头磁芯包括磁阻元件，该磁阻元件执行读取处理和写入磁头核心包括执行写入处理的磁极层。

7. 发明申请

US20080297953A1 Magnetic head for perpendicular magnetic recording with a shield and method of manufacturing same 有权
标题翻译：用于垂直磁记录的磁头及其制造方法
公开(公告)号：US20080297953A1
公开(公告)日：2008-12-04
申请号：US11806828
申请日：2007-06-04
申请人： Naoto Matono , Koichi Otani , Tatsuya Harada , Noriaki Kasahara , Takamitsu Sakamoto , Hiroaki Kawashima , Hirotaka Gomi , Kenkichi Anagawa , Norikazu Ota
发明人： Naoto Matono , Koichi Otani , Tatsuya Harada , Noriaki Kasahara , Takamitsu Sakamoto , Hiroaki Kawashima , Hirotaka Gomi , Kenkichi Anagawa , Norikazu Ota
IPC分类号： G11B5/10
CPC分类号： G11B5/3146 , G11B5/11 , G11B5/1278 , G11B5/3116 , G11B5/6064
摘要： A magnetic head includes: a coil; a pole layer; a shield having an end face located in a medium facing surface forward of an end face of the pole layer along a direction of travel of a recording medium; a gap layer between the shield and the pole layer; and a substrate on which the foregoing elements are stacked. The top surface of the pole layer includes: first and second portions with a difference in height therebetween; and a third portion connecting the first and second portions to each other. The first portion has an edge located in the medium facing surface, and the second portion is located farther from the medium facing surface and from the substrate than the first portion. The magnetic head further includes a nonmagnetic layer disposed between the second portion and the gap layer. The nonmagnetic layer has a surface touching the second portion, the surface having an edge located at the boundary between the second and third portions. The nonmagnetic layer has a thickness equal to or greater than the difference in height between the first and second portions.
摘要翻译：磁头包括：线圈; 极层; 屏蔽，其具有沿着记录介质的行进方向位于所述极层的端面的前方的面向介质的表面中的端面; 屏蔽层和极层之间的间隙层; 以及其上堆叠上述元件的基板。极层的顶表面包括：第一和第二部分之间的高度差异; 以及将第一和第二部分彼此连接的第三部分。第一部分具有位于介质面向表面中的边缘，并且第二部分位于比第一部分更远离介质面向表面和基板的位置。磁头还包括设置在第二部分和间隙层之间的非磁性层。非磁性层具有接触第二部分的表面，该表面具有位于第二和第三部分之间的边界处的边缘。非磁性层的厚度等于或大于第一和第二部分之间的高度差。

8. 发明申请

US20060132972A1 Thin-film magnetic head for perpendicular magnetic recording and manufacturing method of thin-film magnetic head 有权
标题翻译：用于垂直磁记录的薄膜磁头和薄膜磁头的制造方法
公开(公告)号：US20060132972A1
公开(公告)日：2006-06-22
申请号：US11300277
申请日：2005-12-15
申请人： Katsumichi Tagami , Tatsuya Harada , Hiroki Matsukuma , Tetsuya Roppongi , Susumu Aoki , Kazumasa Fukuda , Naoto Matono
发明人： Katsumichi Tagami , Tatsuya Harada , Hiroki Matsukuma , Tetsuya Roppongi , Susumu Aoki , Kazumasa Fukuda , Naoto Matono
IPC分类号： G11B5/147
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/1872
摘要： A thin-film magnetic head with which an error rate is decreased due to a reduction of a jitter without significant decrease in write field, is provided. The head comprises at least one inductive write head element comprising: a main magnetic pole layer having an inner saturation magnetic flux density varying from both side end surfaces in a track-width direction and a leading end surface, toward a center portion in the track-width direction of a trailing end surface; an auxiliary magnetic pole layer; and at least one coil layer, a curvature width WC of a contour line of a write field adjacent to a trailing edge on an ABS side of the main magnetic pole layer satisfying the following expression: −0.15*WT=WC
摘要翻译：提供了一种薄膜磁头，其由于抖动的减小而不会在写入场中显着降低而误差率降低。头包括至少一个感应写头元件，包括：主磁极层，具有从轨道宽度方向和前端表面的两个侧端面朝着轨道宽度方向的中心部分变化的内部饱和磁通密度，后端面的宽度方向; 辅助磁极层; 以及至少一个线圈层，与主磁极层的ABS侧的后缘相邻的写入场的轮廓线的曲率宽度W C C满足以下表达式：-0.15 * 其中W T是轨道宽度，W C和W的单位是W 是纳米。

9. 发明授权

US08201321B2 Method of forming magnetic layer pattern, and method of manufacturing perpendicular magnetic recording head 有权
标题翻译：形成磁性层图案的方法以及制造垂直磁记录头的方法
公开(公告)号：US08201321B2
公开(公告)日：2012-06-19
申请号：US12926817
申请日：2010-12-10
申请人： Naoto Matono , Tatsuya Harada
发明人： Naoto Matono , Tatsuya Harada
IPC分类号： G11B5/17 , H04R31/00
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/3116 , G11B5/3146 , G11B5/3967 , Y10T29/49039 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： Provided is a method of manufacturing a perpendicular magnetic recording head which can enhance accuracy and simplify the manufacturing process. The method includes: forming a photoresist pattern having an opening part; forming a non-magnetic layer so as to narrow the opening part by a dry film forming method such as ALD method; stacking a seed layer and a plating layer so as to bury the opening part provided with the non-magnetic layer; and forming a main magnetic pole layer by polishing the non-magnetic layer, the seed layer, and the plating layer by CMP method until the photoresist pattern is exposed. The final opening width is unsusceptible to variations, thus reducing the number of the steps of forming the main magnetic layer.
摘要翻译：提供一种可提高精度并简化制造过程的垂直磁记录头的制造方法。该方法包括：形成具有开口部分的光致抗蚀剂图案; 通过诸如ALD法的干膜形成方法形成非磁性层以使开口部分变窄; 堆叠种子层和镀层以便掩埋设置有非磁性层的开口部分; 以及通过CMP方法研磨非磁性层，种子层和镀层，形成主磁极层，直到光刻胶图案露出为止。最终的开口宽度对于变化是不可察觉的，因此减少了形成主磁性层的步骤的数量。

10. 发明授权

US07885036B2 Magnetic device, perpendicular magnetic recording head, magnetic recording system, method of forming magnetic layer pattern, and method of manufacturing perpendicular magnetic recording head 有权
标题翻译：磁性装置，垂直磁记录头，磁记录系统，形成磁性层图案的方法以及制造垂直磁记录头的方法
公开(公告)号：US07885036B2
公开(公告)日：2011-02-08
申请号：US11708609
申请日：2007-02-21
申请人： Naoto Matono , Tatsuya Harada
发明人： Naoto Matono , Tatsuya Harada
IPC分类号： G11B5/147 , G11B5/187
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/3116 , G11B5/3146 , G11B5/3967 , Y10T29/49039 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： Provided is a method of manufacturing a perpendicular magnetic recording head which can enhance accuracy and simplify the manufacturing process. The method includes: forming a photoresist pattern having an opening part (the inclination of an inner wall); forming a non-magnetic layer (the inclination of another inner wall) so as to narrow the opening part by a dry film forming method such as ALD method; stacking a seed layer and a plating layer so as to bury the opening part provided with the non-magnetic layer; and forming a main magnetic pole layer (a front end portion having a bevel angle) by polishing the non-magnetic layer, the seed layer, and the plating layer by CMP method until the photoresist pattern is exposed. The final opening width (the forming width of the front end portion) is unsusceptible to variations, thus reducing the number of the steps of forming the main magnetic layer.
摘要翻译：提供一种可提高精度并简化制造过程的垂直磁记录头的制造方法。该方法包括：形成具有开口部分（内壁的倾斜度）的光致抗蚀剂图案; 形成非磁性层（另一内壁的倾斜），以通过诸如ALD法的干膜形成方法使开口部分变窄; 堆叠种子层和镀层以便掩埋设置有非磁性层的开口部分; 并通过CMP方法研磨非磁性层，晶种层和镀层，形成主磁极层（具有斜角的前端部分），直到曝光光致抗蚀剂图案为止。最终的开口宽度（前端部分的形成宽度）不易变化，从而减少形成主磁性层的步骤数量。

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