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    • 1. 发明授权
    • Surface analyzing method and its apparatus
    • 表面分析方法及其装置
    • US5714757A
    • 1998-02-03
    • US542562
    • 1995-10-13
    • Naoshi ItabashiKozo MochijiHiroyasu ShichiSeiji YamamotoSatoshi OsabeKeiichi Kanehori
    • Naoshi ItabashiKozo MochijiHiroyasu ShichiSeiji YamamotoSatoshi OsabeKeiichi Kanehori
    • G01N23/225G01Q90/00H01J37/252H01J37/08
    • G01N23/2255H01J37/252H01J2237/04756
    • A surface analyzing method comprising an ion generation step for generating multiply-charged ions of specific ion species and specific charge state; a deceleration step for decelerating the generated multiply-charged ions to a lower kinetic energy than an energy of threshold of sputtering of an objective material; an irradiation step for irradiating the decelerated multiply-charged ions on the surface of a sample; and an analysis step for analyzing particles or light emitted from the surface of said sample by the irradiation of said multiply-charged ions. Apparatus is provided for carrying out the method. Since the ions irradiated on the sample surface are multiply-charged ions having a lower kinetic energy than that of threshold of sputtering of materials constituting a sample, the irradiated ions interact merely with the top surface layer of the sample whereby analyzed information merely from the top surface layer of the sample can be obtained, and as a result, the kind of atoms of the top surface layer of the sample and the bonding state of said atoms can be analyzed with high sensitivity and high resolution.
    • 一种表面分析方法,包括用于产生特定离子种类的多电荷离子和特定电荷状态的离子产生步骤; 减速步骤,用于将产生的多电荷离子减速到比目标材料的溅射阈值的能量更低的动能; 照射步骤,用于在样品的表面上照射减速的多电荷离子; 以及分析步骤,用于通过照射所述多电荷离子来分析从所述样品的表面发射的颗粒或光。 提供了用于执行该方法的装置。 由于照射在样品表面上的离子是具有比构成样品的材料的溅射阈值低的动能的多电荷离子,因此照射的离子仅与样品的顶表面层相互作用,从而仅从顶部分析信息 可以获得样品的表面层,结果,可以以高灵敏度和高分辨率分析样品的顶表面层的原子的种类和所述原子的键合状态。