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1. 发明申请

US20090039908A1 MICROSTRUCTURE INSPECTING APPARATUS AND MICROSTRUCTURE INSPECTING METHOD 审中-公开
标题翻译：微结构检测装置和微结构检测方法
公开(公告)号：US20090039908A1
公开(公告)日：2009-02-12
申请号：US12282744
申请日：2006-04-12
申请人： Naoki Ikeuchi , Masami Yakabe , Akiko Kamigori
发明人： Naoki Ikeuchi , Masami Yakabe , Akiko Kamigori
IPC分类号： G01R31/02
CPC分类号： G01P21/00 , B81C99/005 , G01P15/123 , G01P15/18 , G01P2015/0842 , G01R31/2829
摘要： A microstructure inspecting apparatus for evaluating a characteristic of at least one microstructure having a movable section formed on a substrate, includes: a probe, which electrically connects with pads formed on the microstructure, for obtaining an electric signal of the microstructure; a plurality of nozzles, positioned in the vicinity of the movable section of the microstructure, for discharging or sucking a gas; a nozzle flow rate controller for controlling a flow rate of the gas discharged from or sucked into the plurality of nozzles; and an evaluation unit for detecting a displacement of the movable section of the microstructure by using the electric signal obtained through the probe, wherein the displacement is made by the gas discharged from or sucked into the plurality of nozzles, and evaluating the characteristic of the microstructure based on the detected result.
摘要翻译：一种用于评价具有形成在基板上的可移动部分的至少一个微结构的特性的微结构检查装置，包括：与形成在微结构体上的焊盘电连接的探针，用于获得微结构的电信号; 多个喷嘴，位于微细结构的可移动部分附近，用于排出或吸入气体; 喷嘴流量控制器，用于控制从所述多个喷嘴排出或吸入所述多个喷嘴的气体的流量; 以及评估单元，用于通过使用通过探针获得的电信号来检测微结构的可移动部分的位移，其中通过从多个喷嘴排出或吸入多个喷嘴的气体进行位移，并评估微观结构的特性基于检测结果。

2. 发明申请

US20080190206A1 Device, Method and Program for Inspecting Microstructure 失效
标题翻译：检测微结构的装置，方法和程序
公开(公告)号：US20080190206A1
公开(公告)日：2008-08-14
申请号：US11885432
申请日：2006-03-02
申请人： Toshiyuki Matsumoto , Naoki Ikeuchi , Masami Yakabe , Keiichi Enjoji , Masato Hayashi
发明人： Toshiyuki Matsumoto , Naoki Ikeuchi , Masami Yakabe , Keiichi Enjoji , Masato Hayashi
IPC分类号： G01N29/00
CPC分类号： G01P15/18 , B81B2201/0257 , B81C99/005 , G01C19/56 , G01C25/005 , G01N29/043 , G01N2291/02881 , G01N2291/0421 , G01N2291/044 , G01N2291/102 , G01N2291/2698 , G01P15/123 , G01P21/00 , G01P2015/084 , G01P2015/0842
摘要： A speaker unit has a plurality of sound sources each outputting a sound wave. The compressional, sound wave output from the speaker unit arrives, or vibrates air, which moves a movable part of a three-axis acceleration sensor, or a microstructure of a chip to be tested TP. As the movable part thus moves, a value in resistance accordingly varies, and such variation is measured as based on an output voltage provided via a probe. A control unit determines a property of the three-axis acceleration sensor from a value in property as measured or measurement data. Furthermore, the plurality of sound sources can be spaced by a pitch of a predetermined value set as based on their difference in the distance to the movable part of the three-axis acceleration sensor and the wavelength of the test wave to apply a composite test wave to the movable part such that the composite sound wave's composite sound field is maximized.
摘要翻译：扬声器单元具有多个声源，每个声源都输出声波。来自扬声器单元的压缩声波输出到达或振动空气，其移动三轴加速度传感器的可移动部分或待测试芯片的微结构TP。随着可移动部分的移动，电阻值相应地变化，并且基于经由探针提供的输出电压来测量这种变化。控制单元根据所测量的属性值或测量数据确定三轴加速度传感器的特性。此外，多个声源可以以基于其与三轴加速度传感器的可移动部分的距离和测试波的波长的差设置的预定值的间距间隔开，以应用复合测试波到可动部分，使得复合声波的复合声场最大化。

3. 发明申请

US20050040833A1 Capacitance measuring circuit, capacitance measuring instrument, and microphone device 失效
标题翻译：电容测量电路，电容测量仪和麦克风装置
公开(公告)号：US20050040833A1
公开(公告)日：2005-02-24
申请号：US10488764
申请日：2002-09-06
申请人： Masami Yakabe , Naoki Ikeuchi
发明人： Masami Yakabe , Naoki Ikeuchi
IPC分类号： G01N27/22 , G01R27/26 , H04R19/04 , H04R29/00
CPC分类号： H04R29/004 , G01N27/22 , H04R19/04
摘要： An electrostatic capacitance detection circuit 10 comprises an AC voltage generator 11, a first operational amplifier 14 of which non-inverting input terminal is connected to specific potential (a ground in this example), a second operational amplifier 16 that includes a voltage follower, a resistance (R1) 12 connected between the AC voltage generator 11 and an inverting input terminal of the first operational amplifier 14, a resistance (R2) 13 connected between the inverting input terminal of the first operational amplifier 14 and an output terminal of the second operational amplifier 16, and an impedance element (a capacitor) 15 connected between an output terminal of the first operational amplifier 14 and a non-inverting input terminal of the second operational amplifier 16, and a capacitor to be detected 17 is connected between the non-inverting input terminal of the second operational amplifier 16 and specific potential. The electrostatic capacitance detection circuit 10 and the capacitor 17 are located adjacently.
摘要翻译：静电电容检测电路10包括交流电压发生器11，其非反相输入端连接到特定电位的第一运算放大器14（在该示例中为地），第二运算放大器16，其包括电压跟随器，连接在交流电压发生器11和第一运算放大器14的反相输入端之间的电阻（R1）12，连接在第一运算放大器14的反相输入端和第二运算放大器14的输出端之间的电阻（R2）连接在第一运算放大器14的输出端和第二运算放大器16的非反相输入端之间的阻抗元件（电容器）15和待检测电容器17连接在非易失性存储器16之间。第二运算放大器16的反相输入端和特定电位。静电电容检测电路10和电容器17相邻配置。

4. 发明申请

US20080302185A1 Microstructure Inspecting Apparatus and Microstructure Inspecting Method 审中-公开
标题翻译：微观结构检查仪器和微观结构检测方法
公开(公告)号：US20080302185A1
公开(公告)日：2008-12-11
申请号：US11662478
申请日：2005-09-09
申请人： Masami Yakabe , Toshiyuki Matsumoto , Naoki Ikeuchi , Katsuya Okumura
发明人： Masami Yakabe , Toshiyuki Matsumoto , Naoki Ikeuchi , Katsuya Okumura
IPC分类号： G01H1/00
CPC分类号： G01N29/14 , B81C99/005 , G01N29/4427 , G01N2291/2695 , G01N2291/2697
摘要： Voltage is applied to a chip TP by a voltage drive unit 30 through a probe needle P to move a movable part of a microstructure. A sound produced in response to motion of the movable part of the microstructure is detected by a microphone 3. Then, the sound detected by the microphone 3 is measured by a measurement unit 25. The control unit 20 evaluates the characteristics of the tested chip TP by comparing with a sound detected from an ideal chip TP.
摘要翻译：通过电压驱动单元30通过探针P将电压施加到芯片TP，以移动微结构的可移动部分。通过麦克风3检测响应于微结构的可动部分的运动而产生的声音。然后，由测量单元25测量由麦克风3检测到的声音。控制单元20评估测试芯片TP的特性通过与从理想芯片TP检测到的声音进行比较。

5. 发明申请

US20050279170A1 Device for inspecting micro structure, method for inspecting micro structure and program for inspecting micro structure 失效
标题翻译：微观结构检测装置，微观结构检查方法和微观结构检查程序
公开(公告)号：US20050279170A1
公开(公告)日：2005-12-22
申请号：US11149176
申请日：2005-06-10
申请人： Katsuya Okumura , Toshiyuki Matsumoto , Naoki Ikeuchi , Masami Yakabe
发明人： Katsuya Okumura , Toshiyuki Matsumoto , Naoki Ikeuchi , Masami Yakabe
IPC分类号： B81C99/00 , G01C19/56 , G01C25/00 , G01N29/00 , G01N29/09 , G01N29/12 , G01N29/30 , G01N29/42 , G01N29/46 , G01P15/12 , G01P21/00 , H01L29/84
CPC分类号： G01C19/5719 , B81C99/005 , G01C25/005 , G01N29/12 , G01N29/30 , G01N29/42 , G01N29/46 , G01N2291/2695 , G01N2291/2697 , G01P15/123 , G01P21/00 , G01P2015/0842
摘要： Test sound wave is outputted from a speaker. A movable part of a three-axis acceleration sensor, which is a micro structure of a chip to be tested TP, moves due to the arrival of the test sound wave which is compression wave outputted from the speaker, that is, due to air vibrations. A change in the resistance value that changes in accordance with this movement is measured on the basis of an output voltage that is provided via a probe needles. A control part determines the property of the three-axis acceleration sensor on the basis of the measured property values, that is, measured data.
摘要翻译：测试声波从扬声器输出。作为被测试芯片TP的微结构的三轴加速度传感器的可动部分由于扬声器输出的压缩波的测试声波的到来而移动，即由于空气振动。基于通过探针提供的输出电压来测量根据该移动而变化的电阻值的变化。控制部件基于测量的属性值，即测量数据来确定三轴加速度传感器的特性。

6. 发明申请

US20090145230A1 Displacement Measurement apparatus for microstructure and displcement measurement method thereof 有权
标题翻译：位移测量装置的微结构和位移测量方法
公开(公告)号：US20090145230A1
公开(公告)日：2009-06-11
申请号：US12315742
申请日：2008-12-05
申请人： Naoki Ikeuchi , Hisashi Fujiwara , Masami Yakabe , Masato Hayashi
发明人： Naoki Ikeuchi , Hisashi Fujiwara , Masami Yakabe , Masato Hayashi
IPC分类号： G01P15/125 , G06F15/00
CPC分类号： G01P15/125 , G01C19/5719 , G01P2015/0814
摘要： A displacement measurement apparatus for a microstructure according to the present invention measures a displacement of the microstructure having a fixed portion electrode including a first electrode and a second electrode and a movable portion electrode located oppositely to the fixed portion electrode. A bias generating circuit applies a bias signal to between the first electrode and the movable portion electrode so that influence of a noise signal on a detection signal picked up from between the second electrode and the movable portion electrode may be reduced. A C/V converting circuit converts a capacitance change that is picked up from between the second electrode and the movable portion electrode into a voltage. A detecting circuit detects a displacement of the movable portion electrode based on the voltage.
摘要翻译：根据本发明的用于微结构的位移测量装置测量具有包括第一电极和第二电极的固定部分电极和位于与固定部分电极相对的可动部电极的微结构的位移。偏置产生电路将偏置信号施加到第一电极和可动部分电极之间，从而可以减少噪声信号对从第二电极和可动部分电极之间拾取的检测信号的影响。 C / V转换电路将从第二电极和可动部分电极之间拾取的电容变化转换为电压。检测电路基于电压检测可动部分电极的位移。

7. 发明申请

US20080223136A1 Minute structure inspection device, inspection method, and inspection program 审中-公开
标题翻译：分体结构检查装置，检验方法和检验程序
公开(公告)号：US20080223136A1
公开(公告)日：2008-09-18
申请号：US12012729
申请日：2008-02-04
申请人： Masami Yakabe , Naoki Ikeuchi
发明人： Masami Yakabe , Naoki Ikeuchi
IPC分类号： G01N29/00
CPC分类号： G01N29/4427 , G01N29/12 , G01N29/4445 , G01N2291/2697
摘要： There are provided an inspection device, an inspection method, and an inspection program for accurately inspecting a minute structure having a movable portion by using a simple method. A test sound wave is inputted and frequency characteristic of a sensor output voltage amplitude responding to the input of the test sound wave is analyzed. The maximum frequency and the minimum frequency of the device is calculated from estimated use conditions and it is judged whether it is possible to detect a desired characteristic in the frequency band. More specifically, the device is judged to be good or bad depending whether the response characteristic in a predetermined frequency band exceeds the minimum characteristic level as a threshold value.
摘要翻译：提供了一种检查装置，检查方法和检查程序，用于通过简单的方法精确地检查具有可移动部分的微小结构。输入测试声波，分析响应于测试声波的输入的传感器输出电压幅度的频率特性。从估计使用条件计算设备的最大频率和最小频率，并且判断是否可以检测到频带中的期望特性。更具体地，根据预定频带中的响应特性是否超过最小特征电平作为阈值，判断装置是好还是坏。

8. 发明授权

US07383732B2 Device for inspecting micro structure, method for inspecting micro structure and program for inspecting micro structure 失效
标题翻译：微观结构检测装置，微观结构检查方法和微观结构检查程序
公开(公告)号：US07383732B2
公开(公告)日：2008-06-10
申请号：US11149176
申请日：2005-06-10
申请人： Katsuya Okumura , Toshiyuki Matsumoto , Naoki Ikeuchi , Masami Yakabe
发明人： Katsuya Okumura , Toshiyuki Matsumoto , Naoki Ikeuchi , Masami Yakabe
IPC分类号： G01N29/00 , H01L41/00
CPC分类号： G01C19/5719 , B81C99/005 , G01C25/005 , G01N29/12 , G01N29/30 , G01N29/42 , G01N29/46 , G01N2291/2695 , G01N2291/2697 , G01P15/123 , G01P21/00 , G01P2015/0842
摘要： Test sound wave is outputted from a speaker. A movable part of a three-axis acceleration sensor, which is a micro structure of a chip to be tested TP, moves due to the arrival of the test sound wave which is compression wave outputted from the speaker, that is, due to air vibrations. A change in the resistance value that changes in accordance with this movement is measured on the basis of an output voltage that is provided via a probe needles. A control part determines the property of the three-axis acceleration sensor on the basis of the measured property values, that is, measured data.
摘要翻译：测试声波从扬声器输出。作为被测试芯片TP的微结构的三轴加速度传感器的可动部分由于扬声器输出的压缩波的测试声波的到来而移动，即由于空气振动。基于通过探针提供的输出电压来测量根据该移动而变化的电阻值的变化。控制部件基于测量的属性值，即测量数据来确定三轴加速度传感器的特性。

9. 发明授权

US07019540B2 Electrostatic capacitance detection circuit and microphone device 失效
标题翻译：静电电容检测电路和麦克风装置
公开(公告)号：US07019540B2
公开(公告)日：2006-03-28
申请号：US10488763
申请日：2002-09-06
申请人： Masami Yakabe , Naoki Ikeuchi
发明人： Masami Yakabe , Naoki Ikeuchi
IPC分类号： G01R27/26
CPC分类号： H04R29/004 , G01R27/26
摘要： An electrostatic capacitance detection circuit 10 comprises an AC voltage generator 11, an operational amplifier 14 of which non-inverting input terminal is connected to specific potential (a ground in this example), an impedance converter 16, a resistance (R1) 12 connected between the AC voltage generator 11 and an inverting input terminal of the operational amplifier 14, a resistance (R2) 13 connected between the inverting input terminal of the operational amplifier 14 and an output terminal of the impedance converter 16, and an impedance element (a capacitor) 15 connected between an output terminal of the operational amplifier 14 and an input terminal of the impedance converter 16, and a capacitor to be detected 17 is connected between the input terminal of the impedance converter 16 and specific potential. The electrostatic capacitance detection circuit 10 and the capacitor 17 are located adjacently.
摘要翻译：静电电容检测电路10包括交流电压发生器11，其同相输入端子连接到特定电位的运算放大器14（在该示例中为地），阻抗转换器16，连接的电阻（R 1）12 在交流电压发生器11和运算放大器14的反相输入端之间，连接在运算放大器14的反相输入端和阻抗转换器16的输出端之间的电阻（R 2）13和阻抗元件连接在运算放大器14的输出端子和阻抗转换器16的输入端子之间的电容器15以及待检测电容器17连接在阻抗转换器16的输入端子和特定电位之间。静电电容检测电路10和电容器17相邻配置。

10. 发明授权

US08141426B2 Displacement measurement apparatus for microstructure and displcement measurement method thereof 有权
标题翻译：用于微结构和位移测量方法的位移测量装置
公开(公告)号：US08141426B2
公开(公告)日：2012-03-27
申请号：US12315742
申请日：2008-12-05
申请人： Naoki Ikeuchi , Hisashi Fujiwara , Masami Yakabe , Masato Hayashi
发明人： Naoki Ikeuchi , Hisashi Fujiwara , Masami Yakabe , Masato Hayashi
IPC分类号： G01P15/125 , G01P9/04 , G01C19/56
CPC分类号： G01P15/125 , G01C19/5719 , G01P2015/0814
摘要： A displacement measurement apparatus for a microstructure according to the present invention measures a displacement of the microstructure having a fixed portion electrode including a first electrode and a second electrode and a movable portion electrode located oppositely to the fixed portion electrode. A bias generating circuit applies a bias signal to between the first electrode and the movable portion electrode so that influence of a noise signal on a detection signal picked up from between the second electrode and the movable portion electrode may be reduced. A C/V converting circuit converts a capacitance change that is picked up from between the second electrode and the movable portion electrode into a voltage. A detecting circuit detects a displacement of the movable portion electrode based on the voltage.
摘要翻译：根据本发明的用于微结构的位移测量装置测量具有包括第一电极和第二电极的固定部分电极和位于与固定部分电极相对的可动部电极的微结构的位移。偏置产生电路将偏置信号施加到第一电极和可动部分电极之间，从而可以减少噪声信号对从第二电极和可动部分电极之间拾取的检测信号的影响。 C / V转换电路将从第二电极和可动部分电极之间拾取的电容变化转换为电压。检测电路基于电压检测可动部分电极的位移。

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