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1. 发明授权

US07383732B2 Device for inspecting micro structure, method for inspecting micro structure and program for inspecting micro structure 失效
标题翻译：微观结构检测装置，微观结构检查方法和微观结构检查程序
公开(公告)号：US07383732B2
公开(公告)日：2008-06-10
申请号：US11149176
申请日：2005-06-10
申请人： Katsuya Okumura , Toshiyuki Matsumoto , Naoki Ikeuchi , Masami Yakabe
发明人： Katsuya Okumura , Toshiyuki Matsumoto , Naoki Ikeuchi , Masami Yakabe
IPC分类号： G01N29/00 , H01L41/00
CPC分类号： G01C19/5719 , B81C99/005 , G01C25/005 , G01N29/12 , G01N29/30 , G01N29/42 , G01N29/46 , G01N2291/2695 , G01N2291/2697 , G01P15/123 , G01P21/00 , G01P2015/0842
摘要： Test sound wave is outputted from a speaker. A movable part of a three-axis acceleration sensor, which is a micro structure of a chip to be tested TP, moves due to the arrival of the test sound wave which is compression wave outputted from the speaker, that is, due to air vibrations. A change in the resistance value that changes in accordance with this movement is measured on the basis of an output voltage that is provided via a probe needles. A control part determines the property of the three-axis acceleration sensor on the basis of the measured property values, that is, measured data.
摘要翻译：测试声波从扬声器输出。作为被测试芯片TP的微结构的三轴加速度传感器的可动部分由于扬声器输出的压缩波的测试声波的到来而移动，即由于空气振动。基于通过探针提供的输出电压来测量根据该移动而变化的电阻值的变化。控制部件基于测量的属性值，即测量数据来确定三轴加速度传感器的特性。

2. 发明申请

US20080302185A1 Microstructure Inspecting Apparatus and Microstructure Inspecting Method 审中-公开
标题翻译：微观结构检查仪器和微观结构检测方法
公开(公告)号：US20080302185A1
公开(公告)日：2008-12-11
申请号：US11662478
申请日：2005-09-09
申请人： Masami Yakabe , Toshiyuki Matsumoto , Naoki Ikeuchi , Katsuya Okumura
发明人： Masami Yakabe , Toshiyuki Matsumoto , Naoki Ikeuchi , Katsuya Okumura
IPC分类号： G01H1/00
CPC分类号： G01N29/14 , B81C99/005 , G01N29/4427 , G01N2291/2695 , G01N2291/2697
摘要： Voltage is applied to a chip TP by a voltage drive unit 30 through a probe needle P to move a movable part of a microstructure. A sound produced in response to motion of the movable part of the microstructure is detected by a microphone 3. Then, the sound detected by the microphone 3 is measured by a measurement unit 25. The control unit 20 evaluates the characteristics of the tested chip TP by comparing with a sound detected from an ideal chip TP.
摘要翻译：通过电压驱动单元30通过探针P将电压施加到芯片TP，以移动微结构的可移动部分。通过麦克风3检测响应于微结构的可动部分的运动而产生的声音。然后，由测量单元25测量由麦克风3检测到的声音。控制单元20评估测试芯片TP的特性通过与从理想芯片TP检测到的声音进行比较。

3. 发明申请

US20050279170A1 Device for inspecting micro structure, method for inspecting micro structure and program for inspecting micro structure 失效
标题翻译：微观结构检测装置，微观结构检查方法和微观结构检查程序
公开(公告)号：US20050279170A1
公开(公告)日：2005-12-22
申请号：US11149176
申请日：2005-06-10
申请人： Katsuya Okumura , Toshiyuki Matsumoto , Naoki Ikeuchi , Masami Yakabe
发明人： Katsuya Okumura , Toshiyuki Matsumoto , Naoki Ikeuchi , Masami Yakabe
IPC分类号： B81C99/00 , G01C19/56 , G01C25/00 , G01N29/00 , G01N29/09 , G01N29/12 , G01N29/30 , G01N29/42 , G01N29/46 , G01P15/12 , G01P21/00 , H01L29/84
CPC分类号： G01C19/5719 , B81C99/005 , G01C25/005 , G01N29/12 , G01N29/30 , G01N29/42 , G01N29/46 , G01N2291/2695 , G01N2291/2697 , G01P15/123 , G01P21/00 , G01P2015/0842
摘要： Test sound wave is outputted from a speaker. A movable part of a three-axis acceleration sensor, which is a micro structure of a chip to be tested TP, moves due to the arrival of the test sound wave which is compression wave outputted from the speaker, that is, due to air vibrations. A change in the resistance value that changes in accordance with this movement is measured on the basis of an output voltage that is provided via a probe needles. A control part determines the property of the three-axis acceleration sensor on the basis of the measured property values, that is, measured data.
摘要翻译：测试声波从扬声器输出。作为被测试芯片TP的微结构的三轴加速度传感器的可动部分由于扬声器输出的压缩波的测试声波的到来而移动，即由于空气振动。基于通过探针提供的输出电压来测量根据该移动而变化的电阻值的变化。控制部件基于测量的属性值，即测量数据来确定三轴加速度传感器的特性。

4. 发明申请

US20080190206A1 Device, Method and Program for Inspecting Microstructure 失效
标题翻译：检测微结构的装置，方法和程序
公开(公告)号：US20080190206A1
公开(公告)日：2008-08-14
申请号：US11885432
申请日：2006-03-02
申请人： Toshiyuki Matsumoto , Naoki Ikeuchi , Masami Yakabe , Keiichi Enjoji , Masato Hayashi
发明人： Toshiyuki Matsumoto , Naoki Ikeuchi , Masami Yakabe , Keiichi Enjoji , Masato Hayashi
IPC分类号： G01N29/00
CPC分类号： G01P15/18 , B81B2201/0257 , B81C99/005 , G01C19/56 , G01C25/005 , G01N29/043 , G01N2291/02881 , G01N2291/0421 , G01N2291/044 , G01N2291/102 , G01N2291/2698 , G01P15/123 , G01P21/00 , G01P2015/084 , G01P2015/0842
摘要： A speaker unit has a plurality of sound sources each outputting a sound wave. The compressional, sound wave output from the speaker unit arrives, or vibrates air, which moves a movable part of a three-axis acceleration sensor, or a microstructure of a chip to be tested TP. As the movable part thus moves, a value in resistance accordingly varies, and such variation is measured as based on an output voltage provided via a probe. A control unit determines a property of the three-axis acceleration sensor from a value in property as measured or measurement data. Furthermore, the plurality of sound sources can be spaced by a pitch of a predetermined value set as based on their difference in the distance to the movable part of the three-axis acceleration sensor and the wavelength of the test wave to apply a composite test wave to the movable part such that the composite sound wave's composite sound field is maximized.
摘要翻译：扬声器单元具有多个声源，每个声源都输出声波。来自扬声器单元的压缩声波输出到达或振动空气，其移动三轴加速度传感器的可移动部分或待测试芯片的微结构TP。随着可移动部分的移动，电阻值相应地变化，并且基于经由探针提供的输出电压来测量这种变化。控制单元根据所测量的属性值或测量数据确定三轴加速度传感器的特性。此外，多个声源可以以基于其与三轴加速度传感器的可移动部分的距离和测试波的波长的差设置的预定值的间距间隔开，以应用复合测试波到可动部分，使得复合声波的复合声场最大化。

5. 发明申请

US20050030046A1 Impedance measuring circuit and capacitance measuring circuit 失效
标题翻译：阻抗测量电路和电容测量电路
公开(公告)号：US20050030046A1
公开(公告)日：2005-02-10
申请号：US10488680
申请日：2002-09-06
申请人： Masami Yakabe , Naoki Ikeuchi , Toshiyuki Matsumoto , Koichi Nakano
发明人： Masami Yakabe , Naoki Ikeuchi , Toshiyuki Matsumoto , Koichi Nakano
IPC分类号： G01D5/24 , G01N27/22 , G01R27/26 , G01R27/00
CPC分类号： G01D5/24 , G01N27/22 , G01R27/2605
摘要： An electrostatic capacitance detection circuit 10 comprises an AC voltage generator 11, an operational amplifier 14 of which non-inverting input terminal is connected to specific potential (a ground in this example), an impedance converter 16, a resistance (R1) 12 connected between the AC voltage generator 11 and an inverting input terminal of the operational amplifier 14, a resistance (R2) 13 connected between the inverting input terminal of the operational amplifier 14 and an output terminal of the impedance converter 16, and an impedance element (a capacitor) 15 connected between an output terminal of the operational amplifier 14 and an input terminal of the impedance converter 16. A capacitor to be detected 17 is connected between the input terminal of the impedance converter 16 and the specific potential.
摘要翻译：静电电容检测电路10包括交流电压发生器11，其同相输入端连接到特定电位的运算放大器14（在该示例中为地），阻抗转换器16，电阻（R1）12 交流电压发生器11和运算放大器14的反相输入端子，连接在运算放大器14的反相输入端子和阻抗转换器16的输出端子之间的电阻（R2）13和阻抗元件（电容器）15连接在运算放大器14的输出端和阻抗转换器16的输入端之间。待检测电容器17连接在阻抗转换器16的输入端和特定电位之间。

6. 发明授权

US07726190B2 Device, method and program for inspecting microstructure 失效
标题翻译：用于检查微观结构的装置，方法和程序
公开(公告)号：US07726190B2
公开(公告)日：2010-06-01
申请号：US11885432
申请日：2006-03-02
申请人： Toshiyuki Matsumoto , Naoki Ikeuchi , Masami Yakabe , Keiichi Enjoji , Masato Hayashi
发明人： Toshiyuki Matsumoto , Naoki Ikeuchi , Masami Yakabe , Keiichi Enjoji , Masato Hayashi
IPC分类号： G01N29/00 , H01L41/00
CPC分类号： G01P15/18 , B81B2201/0257 , B81C99/005 , G01C19/56 , G01C25/005 , G01N29/043 , G01N2291/02881 , G01N2291/0421 , G01N2291/044 , G01N2291/102 , G01N2291/2698 , G01P15/123 , G01P21/00 , G01P2015/084 , G01P2015/0842
摘要： A speaker unit has a plurality of sound sources each outputting a sound wave. The compressional, sound wave output from the speaker unit arrives, or vibrates air, which moves a movable part of a three-axis acceleration sensor, or a microstructure of a chip to be tested TP. As the movable part thus moves, a value in resistance accordingly varies, and such variation is measured as based on an output voltage provided via a probe. A control unit determines a property of the three-axis acceleration sensor from a value in property as measured or measurement data. Furthermore, the plurality of sound sources can be spaced by a pitch of a predetermined value set as based on their difference in the distance to the movable part of the three-axis acceleration sensor and the wavelength of the test wave to apply a composite test wave to the movable part such that the composite sound wave's composite sound field is maximized.
摘要翻译：扬声器单元具有多个声源，每个声源都输出声波。来自扬声器单元的压缩声波输出到达或振动空气，其移动三轴加速度传感器的可移动部分或待测试芯片的微结构TP。随着可移动部分的移动，电阻值相应地变化，并且基于经由探针提供的输出电压来测量这种变化。控制单元根据所测量的属性值或测量数据确定三轴加速度传感器的特性。此外，多个声源可以以基于其与三轴加速度传感器的可移动部分的距离和测试波的波长的差设置的预定值的间距间隔开以应用复合测试波到可动部分，使得复合声波的复合声场最大化。

7. 发明授权

US07023223B2 Impedance measuring circuit and capacitance measuring circuit 失效
标题翻译：阻抗测量电路和电容测量电路
公开(公告)号：US07023223B2
公开(公告)日：2006-04-04
申请号：US10488680
申请日：2002-09-06
申请人： Masami Yakabe , Naoki Ikeuchi , Toshiyuki Matsumoto , Koichi Nakano
发明人： Masami Yakabe , Naoki Ikeuchi , Toshiyuki Matsumoto , Koichi Nakano
IPC分类号： G01R27/26
CPC分类号： G01D5/24 , G01N27/22 , G01R27/2605
摘要： An electrostatic capacitance detection circuit 10 comprises an AC voltage generator 11, an operational amplifier 14 of which non-inverting input terminal is connected to specific potential (a ground in this example), an impedance converter 16, a resistance (R1) 12 connected between the AC voltage generator 11 and an inverting input terminal of the operational amplifier 14, a resistance (R2) 13 connected between the inverting input terminal of the operational amplifier 14 and an output terminal of the impedance converter 16, and an impedance element (a capacitor) 15 connected between an output terminal of the operational amplifier 14 and an input terminal of the impedance converter 16. A capacitor to be detected 17 is connected between the input terminal of the impedance converter 16 and the specific potential.
摘要翻译：静电电容检测电路10包括交流电压发生器11，其同相输入端子连接到特定电位的运算放大器14（在该示例中为地），阻抗转换器16，连接的电阻（R 1）12 在交流电压发生器11和运算放大器14的反相输入端之间，连接在运算放大器14的反相输入端和阻抗转换器16的输出端之间的电阻（R 2）13和阻抗元件电容器）15，其连接在运算放大器14的输出端和阻抗转换器16的输入端之间。待检测电容器17连接在阻抗转换器16的输入端和特定电位之间。

8. 发明授权

US06756790B2 Impedance detection circuit, impedance detection device, and impedance detection method 失效
标题翻译：阻抗检测电路，阻抗检测装置和阻抗检测方法
公开(公告)号：US06756790B2
公开(公告)日：2004-06-29
申请号：US09959759
申请日：2001-12-03
申请人： Masami Yakabe , Toshiyuki Matsumoto , Yoshihiro Hirota , Kouichi Nakano
发明人： Masami Yakabe , Toshiyuki Matsumoto , Yoshihiro Hirota , Kouichi Nakano
IPC分类号： G01R2700
CPC分类号： G01R27/02
摘要： A second operational amplifier (11) of a core unit (1) shorts an inverting input terminal and an output terminal. A signal line (19) is connected to a non-inverting input terminal. A capacitive sensor (18) is connected to the signal line (19). A first operational amplifier (12) earths the non-inverting input terminal. One end of a first resistance (15) and one end of a second resistance (16) are respectively connected to the inverting input terminal. The other end of the first resistance (15) is connected to an alternate current voltage generator (14). The other end of the second resistance (16) is connected to the output terminal of the first operational amplifier (11). A signal output terminal (21) of the core unit (1) is connected to an inverting amplification device (2). An alternate output terminal (22) of the core unit (1) and an inverting output terminal (42) of the inverting amplification device (2) are connected to an addition device (3). The non-inverting input terminal of operational amplifiers (36) and (40).
摘要翻译：核心单元（1）的第二运算放大器（11）使反相输入端子和输出端子短路。信号线（19）连接到非反相输入端子。电容传感器（18）连接到信号线（19）。第一运算放大器（12）接地非反相输入端。第一电阻（15）的一端和第二电阻（16）的一端分别连接到反相输入端子。第一电阻（15）的另一端连接到交流电压发生器（14）。第二电阻（16）的另一端连接到第一运算放大器（11）的输出端。核心单元（1）的信号输出端（21）连接到反相放大装置（2）。核心单元（1）的替代输出端（22）和反相放大装置（2）的反相输出端（42）连接到加法装置（3）。运算放大器（36）和（40）的非反相输入端。

9. 发明授权

US08082124B2 Method and system for diagnosing abnormal plasma discharge 有权
标题翻译：诊断异常血浆放电的方法和系统
公开(公告)号：US08082124B2
公开(公告)日：2011-12-20
申请号：US12089664
申请日：2007-07-02
申请人： Takaya Miyano , Toshiyuki Matsumoto , Naoki Ikeuchi , Tsuyoshi Moriya
发明人： Takaya Miyano , Toshiyuki Matsumoto , Naoki Ikeuchi , Tsuyoshi Moriya
IPC分类号： G06F11/30
CPC分类号： H05H1/0006 , H01J37/32935 , H01J2237/0206
摘要： Provided are a data obtaining section (21) that obtains a time-series data fluctuating in accordance with the plasma conditions, a translation error calculation section (24) that calculates a determinism providing an indicator of whether the time-series data in the plasma are deterministic or stochastic, from the time-series data that have been obtained in the data obtaining unit (21), and an abnormal discharge determination section (26) that determines that the plasma is under the abnormal discharge conditions, in the case that the value representing the determinism calculated in the determinism derivation unit is less than or equal to a given threshold value, during the plasma generation. Examples of the value representing the determinism include translation error or permutation entropy. In the case the permutation entropy is used as a value representing the determinism, a permutation entropy calculation section is provided.
摘要翻译：提供一种获取根据等离子体条件波动的时间序列数据的数据获取部（21），计算提供等离子体中的时间序列数据的指标的确定性的平移误差计算部（24）在数据获取单元（21）中获得的时间序列数据和确定等离子体处于异常放电条件下的异常放电确定部分（26）的确定性或随机性的情况下，在值在等离子体产生期间表示在确定性推导单元中计算的确定性小于或等于给定阈值。表示确定性的值的示例包括平移误差或置换熵。在使用置换熵作为表示确定性的值的情况下，提供置换熵计算部。

10. 发明申请

US20100161278A1 METHOD FOR DIAGNOSING ABNORMAL PLASMA DISCHARGE, ABNORMAL PLASMA DISCHARGE DIAGNOSTICS SYSTEM, AND COMPUTER PROGRAM 有权
标题翻译：诊断异常血浆放电的方法，异常血浆放射诊断系统和计算机程序
公开(公告)号：US20100161278A1
公开(公告)日：2010-06-24
申请号：US12089664
申请日：2007-07-02
申请人： Takaya Miyano , Toshiyuki Matsumoto , Naoki Ikeuchi , Tsuyoshi Moriya
发明人： Takaya Miyano , Toshiyuki Matsumoto , Naoki Ikeuchi , Tsuyoshi Moriya
IPC分类号： G06F15/00
CPC分类号： H05H1/0006 , H01J37/32935 , H01J2237/0206
摘要： Provided are a data obtaining section (21) that obtains a time-series data fluctuating in accordance with the plasma conditions, a translation error calculation section (24) that calculates a determinism providing an indicator of whether the time-series data in the plasma are deterministic or stochastic, from the time-series data that have been obtained in the data obtaining unit (21), and an abnormal discharge determination section (26) that determines that the plasma is under the abnormal discharge conditions, in the case that the value representing the determinism calculated in the determinism derivation unit is less than or equal to a given threshold value, during the plasma generation. Examples of the value representing the determinism include translation error or permutation entropy. In the case the permutation entropy is used as a value representing the determinism, a permutation entropy calculation section is provided.
摘要翻译：提供一种获取根据等离子体条件波动的时间序列数据的数据获取部（21），计算提供等离子体中的时间序列数据的指标的确定性的平移误差计算部（24）在数据获取单元（21）中获得的时间序列数据和确定等离子体处于异常放电条件下的异常放电确定部分（26）的确定性或随机性的情况下，在值在等离子体产生期间表示在确定性推导单元中计算的确定性小于或等于给定阈值。表示确定性的值的示例包括平移误差或置换熵。在使用置换熵作为表示确定性的值的情况下，提供置换熵计算部。

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