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    • 10. 发明授权
    • Semiconductor light reception device of end face light incidence type
    • 端面光入射型半导体光接收装置
    • US06710378B1
    • 2004-03-23
    • US09645876
    • 2000-08-25
    • Masao MakiuchiNami YasuokaHaruhisa SodaTakuya Fujii
    • Masao MakiuchiNami YasuokaHaruhisa SodaTakuya Fujii
    • H01L31109
    • G02B6/42G02B6/12004H01L31/02327
    • A photo sensor is formed in a partial area of the principal surface of a substrate. The photo sensor includes a light reception layer parallel to the principal surface, the light reception layer being made of semiconductor and generating carriers in response to received light. A light waveguide is formed in a partial area of the principal surface of the substrate, the light waveguide propagating light in a direction parallel to the principal surface and introducing light into the light reception layer. A semi-insulating semiconductor film covers side faces of the photo sensor. A pair of electrodes flows current into the light reception layer of the photo sensor in a thickness direction of the light reception layer. A semiconductor light reception device having a structure suitable for high-speed operation and easy to manufacture is provided.
    • 光传感器形成在基板的主表面的局部区域中。 光传感器包括平行于主表面的光接收层,光接收层由半导体制成并响应于接收的光产生载体。 光波导形成在基板的主表面的局部区域中,光波导在平行于主表面的方向上传播光,并将光引入光接收层。 半绝缘半导体膜覆盖光传感器的侧面。 一对电极在光接收层的厚度方向上流入光传感器的光接收层。 提供了具有适合于高速运行且易于制造的结构的半导体光接收装置。