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    • 6. 发明专利
    • Ceramic-coated member and method of manufacturing the same
    • 陶瓷涂层成员及其制造方法
    • JP2008120654A
    • 2008-05-29
    • JP2006309089
    • 2006-11-15
    • Nihon Ceratec Co Ltd株式会社日本セラテック
    • TSUTAI YOSHIFUMISATO KEISUKESAITO CHIKASHIOTAKI HIROMICHIIGUCHI MASAHITO
    • C04B41/87B32B18/00C03C17/25C23C18/12H01L21/3065H01L21/31H01L21/683
    • PROBLEM TO BE SOLVED: To provide a ceramic-coated member which is inhibited from occurrence of particles and has excellent corrosion resistance and durability and to provide a method of manufacturing the ceramic-coated member by which a ceramic film hardly causing occurrence of particles and having excellent corrosion resistance and durability is easily formed on a complicate shaped base material or a large-sized base material. SOLUTION: The ceramic-coated member has structure in which the ceramic film having ≥98% purity, ≥0.05 μm and ≤10 μm film thickness and ≤50 nm average particle diameter is formed on the surface of the base material. The ceramic film is formed by wet-forming a coating film using a solution containing at least one kind of a metal alkoxide, an organic metal complex, an oxide nanoparticle or a non-oxide nanoparticle on the surface of the base material and after drying the coating film, applying heat treatment to the dried coating film at ≥300°C and ≤1,000°C. COPYRIGHT: (C)2008,JPO&INPIT
    • 要解决的问题:提供一种抑制颗粒发生并具有优异的耐腐蚀性和耐久性的陶瓷涂覆部件,并且提供一种陶瓷涂覆部件的制造方法,通过该方法陶瓷膜难以发生 在复杂形状的基材或大尺寸基材上容易形成具有优异的耐腐蚀性和耐久性的颗粒。 < P>解决方案:陶瓷涂覆部件具有在基材的表面上形成具有≥98%纯度≥0.05μm和≤10μm膜厚以及≤50nm平均粒径的陶瓷膜的结构。 通过使用包含至少一种金属醇盐,有机金属络合物,氧化物纳米颗粒或非氧化物纳米颗粒的溶液在基材表面上湿法成膜涂层而形成陶瓷膜, 涂膜,在≥300℃和≤1,000℃下对干燥的涂膜进行热处理。 版权所有(C)2008,JPO&INPIT