专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

WO2012158528A2 HIGH TEMPERATURE ELECTROSTATIC CHUCK WITH RADIAL THERMAL CHOKES 审中-公开
标题翻译：带温度范围的高温静电止回阀
公开(公告)号：WO2012158528A2
公开(公告)日：2012-11-22
申请号：PCT/US2012/037543
申请日：2012-05-11
申请人： NOVELLUS SYSTEMS, INC. , ROY, Shambhu, N. , BURKHART, Vincent, E. , FIELDS, Scott, J.
发明人： ROY, Shambhu, N. , BURKHART, Vincent, E. , FIELDS, Scott, J.
CPC分类号： H01L21/67109 , H01L21/6831 , H01L21/68785 , H01L2924/0002 , H01L2924/00
摘要： A wafer support assembly including a wafer support and cooling plate with radial thermal chokes is provided. The cooling plate and wafer support may have limited contact and may not contact each other outside of certain limited thermal contact patches. The thermal contact patches may generally define one or more radial thermal choke regions. In some implementations, high- and low-temperature cooling systems may be placed at one or more locations across the cooling plate to assist in temperature management.
摘要翻译：提供了一种晶片支撑组件，其包括具有径向热扼流圈的晶片支撑件和冷却板。冷却板和晶片支撑件可能具有有限的接触，并且可能在某些有限的热接触片之外不能彼此接触。热接触片通常可以限定一个或多个径向热扼流圈区域。在一些实施方式中，高温和低温冷却系统可以放置在穿过冷却板的一个或多个位置以辅助温度管理。

2. 发明申请

WO2010019430A2 ELECTROSTATIC CHUCK ASSEMBLY 审中-公开
标题翻译：静电块组件
公开(公告)号：WO2010019430A2
公开(公告)日：2010-02-18
申请号：PCT/US2009/052917
申请日：2009-08-06
申请人： APPLIED MATERIALS, INC. , SANSONI, Steven, V. , TSAI, Cheng-Hsiung , ROY, Shambhu, N. , BROWN, Karl, M. , PARKHE, Vijay, D. , PONNEKANTI, Hari, K.
发明人： SANSONI, Steven, V. , TSAI, Cheng-Hsiung , ROY, Shambhu, N. , BROWN, Karl, M. , PARKHE, Vijay, D. , PONNEKANTI, Hari, K.
IPC分类号： H01L21/687 , B23Q3/15 , H02N13/00 , H01L21/68
CPC分类号： H01L21/6833 , H01J37/32431 , H01L21/67103 , H01L21/67109 , H01L21/6831 , H01L21/68785 , H01L2924/0002 , H02N13/00 , H01L2924/00
摘要： Embodiments of the present invention provide a cost effective electrostatic chuck assembly capable of operating over a wide temperature range in an ultra-high vacuum environment while minimizing thermo-mechanical stresses within the electrostatic chuck assembly. In one embodiment, the electrostatic chuck assembly includes a dielectric body having chucking electrodes which comprise a metal matrix composite material with a coefficient of thermal expansion (CTE) that is matched to the CTE of the dielectric body.
摘要翻译：本发明的实施例提供了一种经济高效的静电卡盘组件，其能够在超高真空环境中在宽的温度范围内运行，同时使静电卡盘组件内的热机械应力最小化。在一个实施例中，静电卡盘组件包括具有夹持电极的介电体，该夹持电极包括与电介质体的CTE匹配的具有热膨胀系数（CTE）的金属基质复合材料。

3. 发明申请

WO2003039808A1 SINGLE MOTOR, MULTI-AXIS STAGE 审中-公开
标题翻译：单电机，多轴阶段
公开(公告)号：WO2003039808A1
公开(公告)日：2003-05-15
申请号：PCT/US2002/035216
申请日：2002-11-04
申请人： ADVANTEST AMERICA CORPORATION , ADVANTEST CORP. , ROY, Shambhu, N.
发明人： ROY, Shambhu, N.
IPC分类号： B23Q1/48
CPC分类号： H01L21/68 , B23Q1/4866 , B23Q1/621 , B23Q5/348 , B23Q5/385 , Y10T74/18032 , Y10T74/18088
摘要： A movable stage system includes a motor which rotates a rotational element, a transmission system engaged with the motor and selectively engaged with a platform, a first lock which engages the transmission system such that the transmission system moves the platform according to a rotation of the rotational element, a second lock which engages the transmission system such that the transmission system moves the platform moves according to the rotation of the rotational element. When the first lock engages and the second lock does not engage the transmission system, the transmission system moves the platform in a first direction according to the rotation of the rotational element. When the first lock does not engage and the second lock engages with the transmission system, the transmission system moves the platform in a second direction other than the first direction according to the rotation of the rotational element.
摘要翻译：可移动平台系统包括旋转旋转元件的马达，与马达接合并选择性地与平台接合的传动系统;接合传动系统的第一锁，使得变速系统根据旋转的旋转移动平台元件，接合传动系统的第二锁，使得传动系统移动平台根据旋转元件的旋转而移动。当第一锁定接合并且第二锁定件不接合传动系统时，传动系统根据旋转元件的旋转沿第一方向移动平台。当第一锁不接合并且第二锁与传动系统接合时，传动系统根据旋转元件的旋转沿除第一方向之外的第二方向移动平台。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式