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1. 发明公开

KR20070098060A SIGNAL DETECTOR AND SIGNAL DETECTION SYSTEM 无效
标题翻译：信号检测和信号检测系统
公开(公告)号：KR20070098060A
公开(公告)日：2007-10-05
申请号：KR20060029224
申请日：2006-03-30
申请人： ADVANTEST CORP
发明人： TAKADA YASUO , IHATA TSUYOHIRO
IPC分类号： G01R31/12
CPC分类号： G01R31/2853 , G01R19/12
摘要： A signal detector and a signal detection system are provided to exactly detect a jittered signal accompanied with a sudden change in voltage by judging whether voltage components correspond to the jittered signal or not, on the basis of the change rate of time. A signal detector(1) for detecting a jittered signal accompanied with the sudden change of voltage, included in an electric signal generated by a test device inspecting electrical characteristics of an object is composed of a component extracting unit(9) extracting voltage components whose absolute value of a voltage value is over a predetermined value, from the electric signal; a change rate deriving unit(11) deriving time change rate of the voltage value in the voltage components extracted by the component extracting unit; a judging unit(13) judging whether the voltage components correspond to the jittered signal or not, on the basis of the time change rate of the voltage value; and an informing unit(14) informing a user of the judgment result if the judging unit determines that at least the voltage components correspond to the jittered signal.
摘要翻译：提供信号检测器和信号检测系统，通过基于时间的变化率判断电压分量是否对应于抖动信号，以精确地检测伴随着电压突然变化的抖动信号。用于检测伴随着电压突然变化的抖动信号的信号检测器（1）由检测对象的电特性的测试装置产生的电信号中包括的分量提取单元（9）提取电压分量，绝对值电压值的值超过预定值; 变化率导出单元（11），导出由所述分量提取单元提取的电压分量中的电压值的时间变化率; 判断单元（13），根据电压值的时间变化率判断电压成分是否对应于抖动信号; 以及通知单元（14），如果所述判断单元确定至少所述电压分量对应于所述抖动信号，则向用户通知所述判断结果。

2. 发明公开

KR20070089057A TEST SYSTEM, ADDED APPARATUS, AND TEST METHOD 审中-公开
标题翻译：测试系统，添加设备和测试方法
公开(公告)号：KR20070089057A
公开(公告)日：2007-08-30
申请号：KR20070017719
申请日：2007-02-22
申请人： ADVANTEST CORP
发明人： WATANABE YUYA , SUGAMORI SHIGERU
IPC分类号： G06F11/22
CPC分类号： G01R31/31919 , G01R31/31922
摘要： A test system, an additional apparatus and a test method are provided to perform logic simulation of design data of a DUT(Device Under Test), thereby effectively performing event based-test without directly making a test pattern. A test system comprises the followings: an event data acquiring unit(42) for acquiring event data; a signal generating unit(44) for generating a device input signal to a device to be tested; a signal supply unit(46) for supplying the generated device input signal to the device to be tested; a signal input unit for inputting a device output signal; a variation detecting unit(48) for detecting whether the inputted device output signal is varied; a variation timing detecting unit(50) for detecting variation timing of the device output signal; a storing unit(60) for storing the variation timing of the device output signal and signal values after varying; a reading unit(64) for reading the output events; and a determining unit(52).
摘要翻译：提供了一种测试系统，附加设备和测试方法来对DUT（被测设备）的设计数据执行逻辑仿真，从而有效地执行基于事件的测试，而不直接制作测试模式。测试系统包括：用于获取事件数据的事件数据获取单元（42）; 信号生成单元（44），用于产生到被测设备的设备输入信号; 信号提供单元（46），用于将所生成的设备输入信号提供给要测试的设备; 用于输入设备输出信号的信号输入单元; 用于检测所输入的设备输出信号是否变化的变化检测单元（48）变化定时检测单元，用于检测设备输出信号的变化定时; 存储单元（60），用于存储设备输出信号的变化定时和变化后的信号值; 读取单元（64），用于读取输出事件; 和确定单元（52）。

3. 发明公开

KR20090073223A Tcp handling device, and method for positional alignment of connecting terminals in the device 审中-公开
标题翻译： TCP处理装置和用于在设备中连接终端的位置对准的方法
公开(公告)号：KR20090073223A
公开(公告)日：2009-07-02
申请号：KR20097009678
申请日：2006-11-09
申请人： ADVANTEST CORP
发明人： ICHIKAWA MASAYOSHI , ONOZAWA MASATAKA
IPC分类号： G01B11/26 , G01R31/26 , H01L21/66
CPC分类号： G01R31/01 , G01R31/2893
摘要： A test pad of a tested TCP is photographed by a second camera (6b) so that its coordinate data is acquired. The coordinate data of characteristic portions (84) disposed in a probe card (8) is acquired in relation to the positional information of the contact faces of probes (81) of the probe card (8). The positional information of the contact faces of the probes (81) is estimated from the coordinate data of the characteristic portions (84). The positional displacements between the test pad and the probes (81) are determined from the acquired coordinate data of the test pads and the estimated positional information of the contact faces of the probes (81). The probe card (8) is moved by a probe card stage (7) on the basis of the positional displacements so that the probes (81) are automatically positioned with respect to the test pads of the tested TCP. As a result, the test pads of the TCP and the probes (81) of the probe card (8) can be positioned extremely precisely.
摘要翻译：通过第二摄像机（6b）拍摄经过测试的TCP的测试板，从而获取其坐标数据。相对于探针卡（8）的探针（81）的接触面的位置信息，获取配置在探针卡（8）中的特征部（84）的坐标数据。从特征部（84）的坐标数据估计探针（81）的接触面的位置信息。测试垫和探针（81）之间的位置位移是根据所获取的测试垫的坐标数据和探测器（81）的接触面的估计位置信息确定的。基于位置位移，探针卡（8）由探针卡台（7）移动，使得探针（81）相对于测试的TCP的测试垫自动定位。结果，可以非常精确地定位TCP的测试焊盘和探针卡（8）的探针（81）。

4. 发明公开

KR20070098603A PATTERN MEASUREMENT APPARATUS AND PATTERN MEASURING METHOD 审中-公开
标题翻译：图案测量装置和图案测量方法
公开(公告)号：KR20070098603A
公开(公告)日：2007-10-05
申请号：KR20070030343
申请日：2007-03-28
申请人： ADVANTEST CORP
发明人： MATSUMOTO JUN
IPC分类号： H01L21/66
CPC分类号： G01N23/227 , G01B15/04 , G06T7/12 , G06T2207/10061
摘要： A method and an apparatus for measuring patterns are provided to recognize accurately a convexo-concave shape by detecting a rising or falling edge based on two peak values around a corner obtained by a second-order differential profile. An apparatus for measuring patterns includes a line profile forming unit(21), a differential profile forming unit(22), and a corner detector(23). The line profile forming unit irradiates a charged particle beam to form a line profile of a pattern, which is formed on a sample. The differential profile forming unit differentiates the line profile for two times and forms a second-order differential profile. The corner detector determines whether a corner of the pattern is a rising or falling based on two peak positions and peak values positioned around the corner of the pattern.
摘要翻译：提供一种用于测量图案的方法和装置，用于通过基于通过二阶微分轮廓获得的角落周围的两个峰值检测上升沿或下降沿来准确地识别凸凹形状。用于测量图案的装置包括线轮廓形成单元（21），差分轮廓形成单元（22）和拐角检测器（23）。线轮廓形成单元照射带电粒子束以形成在样品上的图案的线轮廓。差分轮廓形成单元将线轮廓区分两次并形成二阶差分轮廓。拐角检测器基于位于图案拐角处的两个峰值位置和峰值来确定图案的拐角是上升还是下降。

5. 发明公开

KR20200130084A 광학 시험용 장치 审中-公开
公开(公告)号：KR20200130084A
公开(公告)日：2020-11-18
申请号：KR20200023982
申请日：2020-02-27
申请人： ADVANTEST CORP
发明人： SUGAWARA TOSHIHIRO , MASUDA SHIN , SAKURAI TAKAO , MATSUMURA HIDENOBU , SEKI TAKAO
IPC分类号： G01S7/497 , G01S17/10 , G01S17/931
摘要： [과제] 반사광을취득하는기구의시험시에이 기구와측정대상의거리가길어지는것을방지한다. [해결방법] 광원(2a)으로부터의입사광을입사대상(4)에부여하고, 입사광이입사대상(4)에의해반사된반사광을취득하는광학측정기구(2)를시험할때에광학시험용장치(1)를사용한다. 광학시험용장치(1)는입사광을받는광검출기(1a)와, 광검출기(1a)가입사광을받고나서소정의지연시간만큼경과한후, 광신호를입사대상(4)에부여하는레이저다이오드(1c)를구비한다. 광신호가입사대상(4)에의해반사된반사광신호가광학측정기구(2)에부여된다. 지연시간이광학측정기구(2)를실제로사용하는경우의광원(2a)으로부터입사광이조사되고나서광학측정기구(2)에의해반사광이취득될때까지의시간과거의동등하다.

6. 发明公开

KR20100116534A Adjusting apparatus, adjusting method and test apparatus 无效
标题翻译：调整装置，调整方法和测试装置
公开(公告)号：KR20100116534A
公开(公告)日：2010-11-01
申请号：KR20100032250
申请日：2010-04-08
申请人： ADVANTEST CORP
发明人： MATSUBARA YASUO
IPC分类号： G01R31/3183 , G01R31/26 , G01R31/3177
CPC分类号： G06F1/10 , H03L7/0812
摘要： PURPOSE: A controller, a controlling method thereof, and a testing device are provided to improve the precision of signal output timing. CONSTITUTION: A controller(54) outputs a signal of a rising edge from a first signal output unit and a signal of a falling edge from a second signal output unit. A signal obtaining unit(58) obtains a synthesized signal which synthesizes the signals from the first and second signal output units. A controller(64) controls a timing difference between the signal output timing of the first and second signal output units.
摘要翻译：目的：提供控制器，其控制方法和测试装置，以提高信号输出定时的精度。构成：控制器（54）从第一信号输出单元输出上升沿的信号和来自第二信号输出单元的下降沿的信号。信号获取单元（58）获得从第一和第二信号输出单元合成信号的合成信号。控制器（64）控制第一和第二信号输出单元的信号输出定时之间的定时差。

7. 发明公开

KR20180072873A 피시험 디바이스를 테스트하기 위한 테스트 장치 및 방법 审中-公开
公开(公告)号：KR20180072873A
公开(公告)日：2018-06-29
申请号：KR20187017727
申请日：2014-01-30
申请人： ADVANTEST CORP
发明人： RIVOIR JOCHEN
IPC分类号： G01R31/319 , G01R31/317 , G01R35/00
CPC分类号： G01R31/3191
摘要： 피시험디바이스를테스트하기위한테스트장치는, 피시험디바이스로부터응답신호를수신하고, 수신된응답신호에하나이상의보정함수를적용하여 DUT의결함을적어도부분적으로보정하도록구성된다. 따라서, 테스트장치는피시험디바이스의보정된응답신호를획득하고보정된응답신호를평가하여피시험디바이스를판단하도록구성된다.

8. 发明公开

KR20180041617A 노광 장치 및 노광 데이터 구조 审中-公开
公开(公告)号：KR20180041617A
公开(公告)日：2018-04-24
申请号：KR20177030182
申请日：2017-05-12
申请人： ADVANTEST CORP
发明人： YAMADA AKIO , OKAWA TATSURO , KUROKAWA MASAKI
IPC分类号： G03F7/20 , G03F1/20 , G03F7/00 , H01L21/027
CPC分类号： G03F7/20 , H01L21/027
摘要： (과제) 복수의하전입자빔을발생하는복수의컬럼부에빔 제어데이터를분배하는노광장치및 노광데이터구조를제공한다. (해결수단) 제1 방향으로배열한복수의하전입자빔을발생하는복수의컬럼부와, 하전입자빔의조사타이밍을개별적으로제어하는컬럼제어부와, 디바이스패턴의배치좌표를기술한설계데이터를토대로, 1개의하전입자빔의폭을가지고제2 방향으로연신한띠 모양의영역으로분할되어이루어지는제2 데이터와제1 방향의위치에기초하여해당제2 데이터를특정하는제1 데이터로이루어지는노광데이터로변환하는변환부와, 노광데이터를격납하는제1 보존부와, 노광순서에따라노광데이터를재구성하여컬럼부의각각에분배하는분배부를구비하는노광장치및 그러한노광장치용의노광데이터구조및 빔제어데이터의작성방법을제공한다.

9. 发明公开

KR20100097031A Test section unit, test head and electronic device testing apparatus 有权
标题翻译：测试单元，测试头和电子设备测试设备
公开(公告)号：KR20100097031A
公开(公告)日：2010-09-02
申请号：KR20100015542
申请日：2010-02-22
申请人： ADVANTEST CORP
发明人： MURAKAMI TORU , MINEO HIROYUKI , YOO JU HWAN
IPC分类号： G01R31/26 , G01R31/01
CPC分类号： G01R31/2886
摘要： PURPOSE: A test unit, a test head, and an apparatus for testing electronic components are provided to increase a circuit area by simplifying the mechanical structure of the apparatus. CONSTITUTION: An electronic component to be tested is mounted on a plurality of sockets(311). A performance board(301) functions as a main board. The sockets are installed on the performance board without a socket board. A sub-board, on which a peripheral circuit is mounted, is electrically connected to the performance board. The sub-board is installed opposite to the sockets.
摘要翻译：目的：提供测试单元，测试头和用于测试电子部件的设备，以通过简化设备的机械结构来增加电路面积。构成：待测试的电子部件安装在多个插座（311）上。执行板（301）作为主板。插座安装在没有插座板的性能板上。安装有外围电路的子板与性能板电连接。子板与插座相对安装。

10. 发明公开

KR20090086956A TRAY TRANSFER APPARATUS AND ELECTRONIC COMPONENT TESTING APPARATUS PROVIDED WITH THE SAME 有权
标题翻译：托盘传送装置和电子部件测试装置
公开(公告)号：KR20090086956A
公开(公告)日：2009-08-14
申请号：KR20097008270
申请日：2006-10-12
申请人： ADVANTEST CORP
发明人： KANEKO YUJI
IPC分类号： G01R31/26 , H01L21/66
CPC分类号： G01R31/2893 , G01R31/2886
摘要： A tray transfer apparatus is provided with a stocker (210) for storing a customer tray (KST); a lifting apparatus (220) which holds the customer tray (KST) and vertically moves; and a tray transfer apparatus (230), which holds the customer tray (KST) and moves in a vertical direction and a horizontal direction, for transferring and receiving the customer tray (KST) between the stocker (210) and the lifting apparatus (220). The tray transfer apparatus (230) has a plurality of movable positions (M1, M2) in the vertical direction, at which the tray transfer apparatus (230) can shift along the horizontal direction. ® KIPO & WIPO 2009
摘要翻译：托盘传送装置设有用于存储顾客托盘（KST）的储料器（210）; 提升装置（220），其保持顾客托盘（KST）并垂直移动; 以及托盘传送装置（230），其保持所述顾客托盘（KST）并沿垂直方向和水平方向移动，用于在所述储料器（210）和所述提升装置（220）之间传送和接收所述顾客托盘（KST））。托盘传送装置（230）在垂直方向上具有多个可移动位置（M1，M2），托盘传送装置（230）可沿着水平方向移动。 ®KIPO＆WIPO 2009

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