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1. 发明专利

JP2546319B2 失效
公开(公告)号：JP2546319B2
公开(公告)日：1996-10-23
申请号：JP4279388
申请日：1988-02-25
申请人： NIPPON KOGAKU KK
发明人： MIZUTANI HIDEO , MORI SUSUMU , KIKUCHI TETSUO
IPC分类号： G03F9/00 , G03F7/20 , H01L21/027 , H01L21/30

2. 发明专利

JPH07113735B2 失效
公开(公告)号：JPH07113735B2
公开(公告)日：1995-12-06
申请号：JP21206486
申请日：1986-09-09
申请人： NIPPON KOGAKU KK
发明人： KIKUCHI TETSUO , NAKAGAWA MASAHIRO , MATSUMOTO KOICHI
IPC分类号： G03B27/54 , G03F7/20 , H01L21/027 , H01L21/30 , H01S3/101

3. 发明专利

JPS6292912A ILLUMINATING OPTICAL SYSTEM 失效
公开(公告)号：JPS6292912A
公开(公告)日：1987-04-28
申请号：JP23284585
申请日：1985-10-18
申请人： NIPPON KOGAKU KK
发明人： MATSUMOTO KOICHI , UEHARA MAKOTO , KIKUCHI TETSUO
IPC分类号： G02B27/00 , G03F7/20 , H01L21/027 , H01L21/30
摘要： PURPOSE:To illuminate an object surface with the uniform illuminance distribution by arranging a small lens group formed with a gathered body, where the first element lenses and the second element lenses provided with prescribed characteristics are mixed, in the light source side of a fly-eye lens. CONSTITUTION:A fly-eye lens 30 consisting of plural element lenses 31 having the same focal length is arranged in a parallel luminous flux 20, and an object surface 60 is illuminated through a condenser lens 50 by many luminous fluxes from this lens 30. A small lens group 40 formed with a gathered body where the first afocal element lenses having -1 angular magnification and the second afocal element lenses 42 having +1 angular magnification are arranged alternately is arranged in the light source side of the fly-eye lens 30. Since the illuminance distribution on the object surface 60 of individual luminous fluxes passing lenses 41 of the lens group 40 is opposite to that of luminous fluxes passing lenses 42, the object surface 60 is illuminated with a uniform illuminance distribution even if the luminous flux incident on the lens 30 has an asymmetrical luminous flux density distribution.

4. 发明专利

JPS6292913A ILLUMINATING OPTICAL SYSTEM 失效
公开(公告)号：JPS6292913A
公开(公告)日：1987-04-28
申请号：JP23284685
申请日：1985-10-18
申请人： NIPPON KOGAKU KK
发明人： MATSUMOTO KOICHI , UEHARA MAKOTO , KIKUCHI TETSUO
IPC分类号： G02B27/00 , G03F7/20 , H01L21/027 , H01L21/30
摘要： PURPOSE:To illuminate an object surface with a uniform illuminance distribution by forming a fly-eye lens with a gathered body where the first element lenses having a positive focal length and the second element lenses having a negative focal length are fixed. CONSTITUTION:A parallel luminous flux 20 made incident on each of the first element lenses 31, 31... is condensed once in an optical path by the lens 31 and passes a condenser lens 40 and is irradiated to an irradiated surface 50. The parallel luminous flux 20 made incident on each of the second element lenses 32, 32... is not condensed by the lens 32 and passes the condenser lens 40 and is irradiated to the irradiated surface 50. Since the gradient of the illumination distribution on the irradiated surface 50 of luminous fluxes passing the first element lenses 31, 31... and that of luminous fluxes passing the second element lenses 32, 32... are opposite to each other, the number of the first element lenses and that of the second element lenses are equalized approximately to illuminate the irradiated surface 50 with a uniform illuminance distribution as the whole.

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