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    • 8. 发明专利
    • MANUFACTURE OF SEMICONDUCTOR DEVICE
    • JPH0296350A
    • 1990-04-09
    • JP24873788
    • 1988-09-30
    • NIPPON SOKENNIPPON DENSO CO
    • TSURUTA KAZUHIROFUJINO SEIJIKATADA MITSUTAKAHATTORI TADASHIYAMAOKA MASAMI
    • H01L21/762H01L21/76H01L27/088H01L27/144
    • PURPOSE:To form vertical power elements and form an element isolation region in a little time in such a way that its region has high breakdown strength and does not diffuse crosswise very much by forming an insulation isolating region which is isolated by an oxide film in the first semiconductor substrate. CONSTITUTION:An recessed part 2 is formed on the mirror side of the first semiconductor substrate 1 on which one side face of its substrate is polished into a mirror and along the most part of an interface between the recessed part 2 and the mirror 1a, each trench part 3 which is deeper than the recessed part 2 is formed. The mirror of the second semiconductor substrate 5 where one side face of it is polished into the mirror is joined directly with the mirror of the first semiconductor substrate 1. A space which is formed on a joined substrate 10 between the recessed part 2 of the first semiconductor substrate 1 and the mirror of the second semiconductor substrate 5 is buried by an oxide film 11; besides, the oxide film 11 is formed at side faces of each trench part of the semiconductor substrate 1 to allow the trench part to be exposed to the outside from the other side of the first semiconductor substrate 1. Consequently, vertical power elements are formed at regions other than the element isolating region and then, an insulating isolating region is thus formed by the oxide film 11. Its region is formed in a short time in such a manner that it does not diffuse crosswise very much and has high breakdown strength.
    • 10. 发明专利
    • ION WIND TYPE AIR CLEANER
    • JPS62163755A
    • 1987-07-20
    • JP553986
    • 1986-01-14
    • NIPPON SOKENNIPPON DENSO CO
    • NOGUCHI HIROKIFUKAMI AKIRAHATTORI TADASHINABETA SADAICHI
    • B03C3/40B03C3/41
    • PURPOSE:To prevent the turbulence of an ion wind by arranging an ion-repelling electrode on the air suction port side of a discharge electrode so that an electric potential intermediate between those of the discharge electrode and an electric field-forming electrode is impressed. CONSTITUTION:A dust-collecting electrode 2 is arranged at a position intermediate between the counter electrodes 3. At this time, the upstream end part 3a, with respect to the air current, of the dust-collecting electrode 3 is placed on the downstream side of the upstream end part 2a of the counter electrode 2. The discharge electrode 1 is placed on the upstream side of the counter electrode 2, and arranged at a position between the counter electrodes 2. The ion- repelling electrodes 4 are embedded in the wall surface of a duct 5 on the upstream side of the discharge electrode 1 at regular intervals, and made flush with the inner surface of the duct. A positive electric potential lower than that of the discharge electrode 1 is impressed on the ion-repelling electrode 4 by a high-voltage power source 6.