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1. 发明专利

DE19611730A1 Joint connection system with inertia body and locally secured holding element 未知
公开(公告)号：DE19611730A1
公开(公告)日：1996-09-26
申请号：DE19611730
申请日：1996-03-25
申请人： NIPPON DENSO CO
发明人： TOMINAGA TAKAYUKI , SENDA KONJI , IDOGAKI TAKAHARU , KANEKO TAKASHI , KANAYAMA HITOSHI
IPC分类号： B25J7/00 , B25J18/06 , F16C11/00 , F16C11/06 , H01L41/083 , H01L41/09 , B25J17/00 , B25J19/00 , H02N2/00 , G12B3/00
摘要： The movement element (2) is rotatable sliding relative to the holding element (11). A unit (4) is provided for supporting the inertia body (5) relative to the movement element, whilst a relative movement is allowed to occur between the inertia body and the movement element. An operating unit (6) is arranged between the movement element and the inertia body, in order to produce the relative movement. So that the holding element and the movement element relatively rotate, if a reactive force, which is produced in the movement element by the inertia of the inertia body, overpowers the frictional force.

2. 发明专利

JPH08266074A MOVING EQUIPMENT 失效
公开(公告)号：JPH08266074A
公开(公告)日：1996-10-11
申请号：JP9158395
申请日：1995-03-24
申请人： NIPPON DENSO CO
发明人： TOMINAGA TAKAYUKI , SENDA ATSUSHIGE , KANAYAMA HITOSHI , IDOGAKI KOJI
IPC分类号： H02N2/00
摘要： PURPOSE: To realize stable moving operations with a small amount of power consumption. CONSTITUTION: A moving member 1 is placed in a slidable manner on a static surface S, and a supporting member 2 supporting an inertial body 3 stands on the moving member 1, the supporting member 2 is a bar-shaped body and has a projected portion 21 projecting laterally in the middle, and a stack of piezoelectric bodies 43, which expands or shrinks by voltage application, is arranged between the projected portion 21 and the moving member 1. If the stack of piezoelectric bodies 43 expands, then the supporting member 2 is shaken and a reaction exceeding a frictional force with the static surface S acts to the moving member 1 and the moving member 1 moves in a direction opposite to the shaking direction of the supporting member 2.

3. 发明专利

JPH04280637A MANUFACTURE OF THIN FILM TRANSISTOR 失效
公开(公告)号：JPH04280637A
公开(公告)日：1992-10-06
申请号：JP4373291
申请日：1991-03-08
申请人： NIPPON DENSO CO
发明人： TOMINAGA TAKAYUKI , SAKAKIBARA NOBUYOSHI , HASEBE YUJI , HATTORI TADASHI
IPC分类号： H01L23/15 , H01L21/336 , H01L21/77 , H01L21/84 , H01L27/12 , H01L29/78 , H01L29/786
摘要： PURPOSE:To make a thin polycrystallive silicon film transistor having the excellent characteristics thereof even if it is formed on a white glass substrate. CONSTITUTION:A Cr film 11, an SiNx film 12 and a polycrystalline Si film 13 are successively formed on a white glass substrate 10. Later, the polycrystalline Si film 13 is etched waway to be an active layer region while the SiNx film 12 is etched away to be a gate insulating film wider than the film 13 and then the Cr film 11 is also etched away to be a gate film wider than the film 12. Later, source drain electrodes 15a, 15b are formed. Through these procedures, even if the substrate 10 is thermally contracted during the formation step of the polycrystalline Si film 13, the effect of the thermal- contraction can be averted while causing no damage to the interface between the active layer and the gate insulating film.

4. 发明专利

JPH06339284A ELECTROSTATIC ACTUATOR AND ITS MANUFACTURE 失效
公开(公告)号：JPH06339284A
公开(公告)日：1994-12-06
申请号：JP12629893
申请日：1993-05-27
申请人： NIPPON DENSO CO
发明人： TOMINAGA TAKAYUKI , OYA NOBUYUKI
IPC分类号： H02N1/00 , B81B3/00 , B81C99/00
摘要： PURPOSE:To provide an electrostatic actuator which can prevent the wiring troubles and insufficient expanding and contracting operations of the actuator by wiring. CONSTITUTION:Electrode plates 2 and 3 have spiral shapes and are counterposed to each other in their axial direction. The plates 2 and 3 are respectively coated with insulating films. One end section 2a of the plate 2 is connected to its corresponding one end section of the plate 3 with an insulator 4 and the other end section 2b of the plate 2 is connected to its corresponding other end section 3b with another insulator 5. When a voltage is applied across the plates 2 and 3, an electrostatic attraction is generated between the plates 2 and 3 and displaces the the plates 2 and 3 in the direction in which the gap interval (d) between the plates 2 and 3 is reduced against the spring forces the plates 2 and 3 themselves have so that, for example, the free insulator 4 can be brought nearer to the fixed insulator 5. When the application of the voltage is discontinued, the plates 2 and 3 are displaced in the direction in which the gap interval (d) is restored and return to their original positions due to the spring restoring forces the plates 2 and 3 themselves have.

5. 发明专利

JPH06216111A WET ETCHING METHOD 失效
公开(公告)号：JPH06216111A
公开(公告)日：1994-08-05
申请号：JP2056993
申请日：1993-01-12
申请人： NIPPON DENSO CO
发明人： TESHIGAWARA AKIHIKO , TOMINAGA TAKAYUKI , HISANAGA MICHIO
IPC分类号： G01L9/04 , G01L9/00 , H01L21/306 , H01L21/3063 , H01L29/84
摘要： PURPOSE:To generate the drive force of convection in the etching liquid itself inside a gap and then achieve a high-speed wet etching by allowing current to flow into the etching liquid between a pair of opposing electrodes and by applying magnetic field in vertical direction to the direction of current flowing into the etching liquid between electrodes. CONSTITUTION:Current is allowed to flow within an etching liquid between a pair of opposing electrodes 2 and 4 and a magnetic field in vertical direction B is applied to a direction I of current flowing within the etching liquid between the electrodes 2 and 4. For example, when forming the sensing part of a capacity-type semiconductor acceleration sensor, a sacrifice layer 3 consisting of silicon oxide which is provided between the lower layer electrode 2 and the upper layer electrode 4 which are pattern-formed by depositing n-type or p-type polysilicon is eliminated by etching within an etching liquid consisting of fluoric acid. At that time, when the etching end face of the sacrifice layer 3 advances between the upper layer electrode 4 and the lower layer electrode 2, the current in the direction of an arrow I is allowed to flow within the etching liquid and at the same time magnetic field in the direction of an arrow B is applied.

6. 发明专利

JPH05101888A MANUFACTURE OF ELECTROLUMINESCENT LAYER 失效
公开(公告)号：JPH05101888A
公开(公告)日：1993-04-23
申请号：JP26382491
申请日：1991-10-11
申请人： NIPPON DENSO CO
发明人： SAKAKIBARA NOBUYOSHI , TOMINAGA TAKAYUKI , HATTORI TAMOTSU
IPC分类号： G09F9/30 , H05B33/10 , H05B33/12 , H05B33/14
摘要： PURPOSE:To suppress the roughness of the surface of a luminescence layer composed of ZnS crystal and improve the step coverage in the case an insulating film, an electrode, etc., are formed in following processes. CONSTITUTION:An under part electrode 22 is formed on a glass substrate 21 and while the substrate 21 being heated, a polycrystalline first luminescence layer 24 is deposited on the electrode 22. After that, the temperature of the substrate is lowered and then an amorphous second luminescence layer 25 is deposited on the first luminescence layer 24 and further a cap layer 27 of a nitride film is formed on it. Then, the amorphous second luminescence layer 25 is crystallized by heating and a crystallized EL luminescence layer 26 composed of the first and second luminescence layers is thus formed.

7. 发明专利

JPH04257228A POLYCRYSTALLINE SILICON TRANSISTOR AND MANUFACTURE THEREOF 失效
公开(公告)号：JPH04257228A
公开(公告)日：1992-09-11
申请号：JP1906991
申请日：1991-02-12
申请人： NIPPON SOKEN , NIPPON DENSO CO
发明人： SAKAKIBARA NOBUYOSHI , TOMINAGA TAKAYUKI , HASEBE YUJI , HATTORI TADASHI
IPC分类号： H01L29/40 , H01L21/336 , H01L29/78 , H01L29/786
摘要： PURPOSE:To provide a polycrystalline silicon transistor and a manufacturing method thereof in which a polycrystalline silicon active layer can be ohmically connected to source/drain leading electrodes, and connecting area of the silicon is suppressed to a minimum limit to reduce a leakage current. CONSTITUTION:A polycrystalline silicon active layer 2 is formed together with a gate electrode 4a and a gate insulating film 3 in a self-alignment manner on an insulating substrate 1, a high-doped silicon 6a is formed only on the sidewall of the layer 2, and source.drain metal layers 7a, 7b are brought into contact with the silicon 6a.

8. 发明专利

JPH08107239A MULTILAYERED DISPLACEMENT DEVICE AND ITS MANUFACTURE 失效
公开(公告)号：JPH08107239A
公开(公告)日：1996-04-23
申请号：JP23887194
申请日：1994-10-03
申请人： NIPPON DENSO CO
发明人： SENDA KOUJI , TOMINAGA TAKAYUKI , OYA NOBUYUKI , IDOGAKI KOJI
IPC分类号： G02B26/10 , B81B3/00 , H01L41/083 , H01L41/22
摘要： PURPOSE: To provide a multilayered displacement device and its manufacturing method wherein an actuator capable of arbitrarily controlling the flexing angle, so as to easily constitute the two-dimensionally scanning mechanism of a laser beam. CONSTITUTION: A piezoelectric unimorph is constituted by bonding a piezoelectric element plate 13 on a metal plate 12, and forming a silver paste film 14 on the surface. A plurality of the piezoelectric unimorphs 111, 112... are laminated. In a position on the peripheral surface of the laminated body 20, the side peripheral parts of the piezoelectric unimorphs 111, 112... are combined by a fixing shaft 21 parallel with an axial line. By a voltage applied to both of the surfaces of the piezoelectric element plate 13, the piezoelectric unimorphs 111, 112... are flexed so as to protrude in the direction of the surfaces. By applying the voltage, the laminated body 20 is flexed around the fixing shaft 21 as a fulcrum, and an actuator whose flexing angle is changed by voltage control can be constituted. By stacking the laminated bodies 20 with the positions of the fixing shafts 21 made different, an actuator capable of being flexed in the arbitrary direction can be constituted.

9. 发明专利

JPH05199773A STATIC WABBLE MOTOR 失效
公开(公告)号：JPH05199773A
公开(公告)日：1993-08-06
申请号：JP632492
申请日：1992-01-17
申请人： NIPPON DENSO CO
发明人： TOMINAGA TAKAYUKI , HISANAGA MICHIO , SAEKI KIYOSHI
IPC分类号： H02N1/00
摘要： PURPOSE:To provide a static wabble motor with construction having sufficient durability against friction and abrasion caused by rotation of a rotor. CONSTITUTION:A static wabble motor is constituted of stator electrodes 12 extended radially from the circumference, an insulation film 15 insulating between the stator electrodes 12 and a substrate 14 and between the stator electrodes 12 and a rotor 11, the rotor 11 equipped with a bushing 13 and the substrate 14 contacted with the rotor 11 as a guide thereto to fix electric potential. The side of the rotor 11 is formed in the shape of a projected surface so that the rotor 11 can be lifted without vibrating it up and down by rotating the rotor 11 and, at the same time, the surface with which the side of the rotor 11 is contacted as the guide is so formed that it is formed in the shape of a recessed surface. In the guide recessed surface, the substrate (conductor) 14 is provided to the lower part thereof to fix the electric potential of the rotor 11, and the insulation film 15 and the stator electrodes 12 are arranged to the upper part thereof to rotate the rotor 11.

10. 发明专利

JPH08117686A OBLIQUELY INSTALLED PROJECTION VIBRATION TYPE MOVING DEVICE 失效
公开(公告)号：JPH08117686A
公开(公告)日：1996-05-14
申请号：JP26288394
申请日：1994-10-26
申请人： NIPPON DENSO CO
发明人： TOMINAGA TAKAYUKI , SENDA KOUJI , OYA NOBUYUKI , IDOGAKI KOJI
IPC分类号： B06B1/06 , B81B7/02 , H01L41/09
摘要： PURPOSE: To provide a obliquely installed projection vibration type moving device which is easily ascendable and climbable against gravity in a piping or channel and is well ascendable or climbable even if a traveling surface is slippery and a freely advanceable and retreatable obliquely installed projection vibration type moving device. CONSTITUTION: The obliquely installed projections 3 fixed to diaphragms 1 are brought into pressurized contact with the traveling surface 100 consisting of the inside surface of the piping or channel by power feeding from a power source (driving section) 2 and are vibrated by the driving section 2 in first constitution. Further, the driving section 2 sets the average value of the pressurized contact force to energize the obliquely installed projections 3 via the diaphragms 1 toward the traveling surface 100 at a desired value and, therefore, adequate propulsion is obtd.; in addition, the traveling, climbing and ascending are realized regardless of the internal width and change in the coefft. of friction of the piping. A pair of the devices of the same constitution as the constitution of the first constitution are prepd. in second constitution and both diaphragms 1 are connected. The propulsion direction of the obliquely installed projections 3 of both diaphragms 1 are reversed and the amplitude or frequency of the vibration or pressurized contact force generated by both devices is controlled, by which the advancing and retreating are made possible.

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