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    • 5. 发明申请
    • Semiconductor integrated circuit device advantageous for microfabrication and manufacturing method for the same
    • 有利于微加工的半导体集成电路器件及其制造方法
    • US20060199325A1
    • 2006-09-07
    • US11365087
    • 2006-02-28
    • Muneaki MaenoToshikazu Sei
    • Muneaki MaenoToshikazu Sei
    • H01L21/8238H01L21/3205
    • H01L27/11807
    • A semiconductor integrated circuit device includes cells, each of the cells including a gate electrode, which is provided on the well, and first diffusion layers of a second conductivity type which are provided in the well such that the first diffusion layers sandwich the gate electrode, the first diffusion layers functioning as sources/drains. The device further includes sub-regions which are arranged in a non-occupied area of the logic circuit structure region, each of the sub-regions including a conductive layer, which is provided on the well and has the same pattern shape as the gate electrode, and second diffusion layers of the first conductivity type, which have the same pattern shape as the first diffusion layers and are disposed spaced apart to sandwich the conductive layer, the second diffusion layers being electrically connected to the well.
    • 半导体集成电路器件包括单元,每个单元包括设置在阱上的栅电极和设置在阱中的第二导电类型的第一扩散层,使得第一扩散层夹着栅电极, 第一扩散层用作源/排水管。 该器件还包括布置在逻辑电路结构区域的非占用区域中的子区域,每个子区域包括导体层,该导电层设置在阱上并具有与栅电极相同的图案形状 以及第一导电类型的第二扩散层,其具有与第一扩散层相同的图案形状并且间隔设置以夹持导电层,第二扩散层电连接到阱。