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1. 发明申请

US20050263915A1 Imprinting method, information recording medium-manufacturing method, and imprinting apparatus 审中-公开
标题翻译：印刷方法，信息记录介质制造方法和压印装置
公开(公告)号：US20050263915A1
公开(公告)日：2005-12-01
申请号：US11087608
申请日：2005-03-24
申请人： Minoru Fujita , Kazuhiro Hattori , Yoshikazu Soeno , Mitsuru Takai
发明人： Minoru Fujita , Kazuhiro Hattori , Yoshikazu Soeno , Mitsuru Takai
IPC分类号： G11B5/84 , B29C43/02 , B29D17/00 , G03F7/00 , G11B5/855 , G11B7/26 , H01L21/027
CPC分类号： B29C43/021 , B29C43/003 , B29C43/52 , B29C2043/025 , B29D17/00 , B82Y10/00 , B82Y40/00 , G03F7/0002 , G11B5/855 , G11B7/263
摘要： An imprinting method which is capable of forming a concave/convex pattern in a short time without causing deformation or incompleteness of the pattern. In the imprinting method, a stamper-pressing step of pressing a stamper against a resin layer formed by applying a resin material to a surface of a substrate, in a state of the resin layer being heated to a predetermined temperature, and a stamper-removing step of removing the stamper from the resin layer while maintaining either of the state of the resin layer being heated and a state of the temperature of the heated resin layer being held, are performed in the mentioned order, whereby shapes of recesses/protrusions of the stamper are transferred to the resin layer to form a concave/convex pattern on the substrate.
摘要翻译：一种能够在短时间内形成凹凸图案而不引起图案变形或不完整的压印方法。在压印方法中，在树脂层被加热到预定温度的状态下，将压模压在通过将树脂材料施加到基板的表面上而形成的树脂层上的压模加工步骤，在保持加热树脂层的状态和保持加热树脂层的温度的状态之一的同时从树脂层除去压模的步骤按照上述顺序进行，由此形成凹部压模转移到树脂层，以在基板上形成凹凸图案。

2. 发明申请

US20070062396A1 Imprinting apparatus and imprinting method 审中-公开
标题翻译：压印装置和压印方法
公开(公告)号：US20070062396A1
公开(公告)日：2007-03-22
申请号：US10556052
申请日：2004-04-28
申请人： Mitsuru Takai , Kazuhiro Hattori , Minoru Fujita
发明人： Mitsuru Takai , Kazuhiro Hattori , Minoru Fujita
IPC分类号： B41K1/56
CPC分类号： B29C59/02 , B29C33/50 , B29C37/0007 , B29C37/0017 , B29L2017/005 , G11B7/261
摘要： An imprinting apparatus according to the present invention is configured to be capable of removing a stamper having one surface thereof formed with a concave/convex portion and having flexibility, from a resist layer to which shapes of the concave/convex portion of the stamper have been transferred by pressing the concave/convex portion of the stamper against the resist layer on a disk-shaped substrate. The imprinting apparatus comprises a suction device (a suction section, an air pump, and a restrictor) configured to be capable of sucking a predetermined part of the other surface of the stamper to thereby remove the predetermined part from the resist layer such that a removal completion range of the stamper can be gradually expanded from a state where the predetermined part is removed from the resist layer by the suction device.
摘要翻译：根据本发明的压印装置被配置为能够从压模的凹/凸部分的形状的抗蚀剂层移除其一个表面形成有凹/凸部并具有柔性的压模通过将压模的凹部/凸部按压在盘状基板上的抗蚀剂层上而转印。压印装置包括吸引装置（抽吸部，空气泵和限流器），其构造成能够吸引压模的另一个表面的预定部分，从而从抗蚀剂层移除预定部分，使得去除可以通过抽吸装置从预定部分从抗蚀剂层移除的状态逐渐扩大压模的完成范围。

3. 发明授权

US07225528B2 Method for manufacturing magnetic recording medium 失效
标题翻译：磁记录介质的制造方法
公开(公告)号：US07225528B2
公开(公告)日：2007-06-05
申请号：US10972325
申请日：2004-10-26
申请人： Takahiro Suwa , Mitsuru Takai , Kazuhiro Hattori , Shuichi Okawa
发明人： Takahiro Suwa , Mitsuru Takai , Kazuhiro Hattori , Shuichi Okawa
IPC分类号： G11B5/127 , H01R31/00
CPC分类号： G11B5/855 , Y10T29/49021 , Y10T29/49032 , Y10T29/49043 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method for manufacturing a magnetic recording medium that has a sufficiently flat surface and includes a recording layer having a concavo-convex pattern that provides favorable accuracy of recording and reproduction. The manufacturing method includes the steps of: forming a lower non-magnetic film over a recording layer having a concavo-convex pattern; and forming an upper non-magnetic film on the lower non-magnetic film to fill concave portions 34 of the concavo-convex pattern. A bias power is applied to an object to be processed at least in the step of forming the upper non-magnetic film, and no bias power or a smaller bias power than the bias power applied in the step of forming the upper non-magnetic film is applied in the formation of the lower non-magnetic film.
摘要翻译：一种制造具有足够平坦表面的磁记录介质的方法，包括具有提供良好记录和再现精度的凹凸图案的记录层。该制造方法包括以下步骤：在具有凹凸图案的记录层上形成下部非磁性膜; 并且在下部非磁性膜上形成上部非磁性膜以填充凹凸图案的凹部34。至少在形成上部非磁性膜的步骤中，对要处理的物体施加偏置功率，并且与形成上部非磁性膜的步骤中施加的偏置功率相比，没有偏置功率或较小的偏置功率用于形成较低的非磁性膜。

4. 发明申请

US20070059562A1 Magnetic recording medium 审中-公开
标题翻译：磁记录介质
公开(公告)号：US20070059562A1
公开(公告)日：2007-03-15
申请号：US11600725
申请日：2006-11-17
申请人： Kazuhiro Hattori , Mitsuru Takai , Takahiro Suwa
发明人： Kazuhiro Hattori , Mitsuru Takai , Takahiro Suwa
IPC分类号： G11B5/65
CPC分类号： G11B5/855 , B82Y10/00 , G11B5/74 , G11B5/743 , G11B5/851 , G11B11/10582
摘要： A magnetic recording medium which is prevented from deterioration of the partitioned recording elements is provided. A magnetic recording medium has partitioned recording elements, a non-magnetic body filled in grooves between the partitioned recording elements, and a barrier film formed between the partitioned recording elements and the non-magnetic body.
摘要翻译：提供防止划分的记录元件劣化的磁记录介质。磁记录介质具有划分的记录元件，填充在分隔的记录元件之间的凹槽中的非磁性体以及形成在分隔的记录元件和非磁性体之间的阻挡膜。

5. 发明申请

US20060115584A1 Production process and production system of magnetic recording medium 审中-公开
标题翻译：磁记录介质的生产过程和生产系统
公开(公告)号：US20060115584A1
公开(公告)日：2006-06-01
申请号：US10544895
申请日：2004-08-03
申请人： Kazuhiro Hattori , Mitsuru Takai
发明人： Kazuhiro Hattori , Mitsuru Takai
IPC分类号： B05D5/12 , G11B5/84
CPC分类号： G11B5/855
摘要： A manufacturing method and a manufacturing apparatus of a magnetic recording medium are provided, which can efficiently manufacture a magnetic recording medium having good magnetic characteristics while suppressing warpage of the medium, magnetic degradation of divided recording elements, and misalignment of the processed shape of the divided recording elements. In the manufacturing method and the manufacturing apparatus, both surfaces of an object to be processed 10 are simultaneously processed. As a dry etching technique for a continuous recording layer 20, ion beam etching is employed. A resist layer 26 is removed before dry etching of the continuous recording layer 20.
摘要翻译：提供一种磁记录介质的制造方法和制造装置，其能够有效地制造具有良好磁特性的磁记录介质，同时抑制介质的翘曲，划分的记录元件的磁性劣化，以及分割的记录元件的加工形状的未对准录音元素在制造方法和制造装置中，同时处理被处理物体10的两面。作为连续记录层20的干蚀刻技术，采用离子束蚀刻。在连续记录层20的干蚀刻之前去除抗蚀剂层26。

6. 发明申请

US20050284842A1 Method of dry etching, method of manufacturing magnetic recording medium, and magnetic recording medium 失效
标题翻译：干蚀刻方法，制造磁记录介质的方法和磁记录介质
公开(公告)号：US20050284842A1
公开(公告)日：2005-12-29
申请号：US11156469
申请日：2005-06-21
申请人： Shuichi Okawa , Kazuhiro Hattori , Mikiharu Hibi , Mitsuru Takai
发明人： Shuichi Okawa , Kazuhiro Hattori , Mikiharu Hibi , Mitsuru Takai
IPC分类号： B44C1/22 , C03C15/00 , C03C25/68 , C23F1/00 , C23F4/00 , G11B5/65 , G11B5/73 , G11B5/74 , G11B5/82 , G11B5/855
CPC分类号： B82Y10/00 , C23F4/00 , G11B5/732 , G11B5/7325 , G11B5/74 , G11B5/743 , G11B5/82 , G11B5/855
摘要： The recording layer (to-be-etched layer), a main mask layer, and a sub mask layer are formed in this order over a substrate, and the sub mask layer is processed into a predetermined concavo-convex pattern. Next, parts of the main mask layer under the concave portions are removed by reactive ion etching using oxygen or ozone as the reactive gas. Parts of the recording layer under the concave portions are also removed by dry etching, whereby the recording layer is shaped into the concavo-convex pattern. The main mask layer is chiefly made of carbon. The sub mask layer is made of a material having an etching rate lower than that of carbon with respect to the reactive ion etching in the step of processing the main mask layer.
摘要翻译：在衬底上依次形成记录层（被蚀刻层），主掩模层和副掩模层，并将子掩模层加工成预定的凹凸图案。接下来，通过使用氧或臭氧作为反应气体的反应离子蚀刻除去凹部下方的主掩模层的一部分。通过干法蚀刻除去凹部下面的记录层的部分，由此将记录层成形为凹凸图案。主掩模层主要由碳制成。在处理主掩模层的步骤中，子掩模层由相对于反应离子蚀刻的蚀刻速率低于碳的蚀刻速率的材料制成。

7. 发明申请

US20050089725A1 Substrate for magnetic recording medium, magnetic recording medium, and method of manufacturing the same 审中-公开
标题翻译：磁记录介质用基板，磁记录介质及其制造方法
公开(公告)号：US20050089725A1
公开(公告)日：2005-04-28
申请号：US10932139
申请日：2004-09-02
申请人： Mitsuru Takai , Kazuhiro Hattori
发明人： Mitsuru Takai , Kazuhiro Hattori
IPC分类号： C03C15/00 , C03C17/00 , C03C17/09 , C03C17/22 , C03C17/34 , G11B5/73 , G11B5/84 , G11B5/64 , B05D5/12 , B32B1/00
CPC分类号： G11B5/7315 , C03C15/00 , C03C17/002 , C03C17/09 , C03C17/22 , C03C17/34 , C03C2204/08 , G11B5/82 , G11B5/8404 , Y10T428/265
摘要： A substrate for a magnetic recording medium with a small surface roughness at a low cost, a magnetic recording medium including the substrate for the magnetic recording medium, and a method of manufacturing the same are provided. The substrate for a magnetic recording medium includes a main substrate one face of which serves as a base surface, and a sub-substrate formed on the base surface of the main substrate by a deposition technique such as a bias sputtering method which applies a bias power thereon. In this configuration, a surface roughness of the sub-substrate is smaller than a surface roughness of the base surface of the main substrate.
摘要翻译：提供了一种用于低成本地具有小表面粗糙度的磁记录介质的基板，包括用于磁记录介质的基板的磁记录介质及其制造方法。用于磁记录介质的基片包括其一面用作基面的主基片和通过诸如偏压溅射法的沉积技术形成在主基片的基面上的副基片，上。在该结构中，副基板的表面粗糙度小于主基板的基面的表面粗糙度。

8. 发明申请

US20050013047A1 Magnetic recording medium 失效
标题翻译：磁记录介质
公开(公告)号：US20050013047A1
公开(公告)日：2005-01-20
申请号：US10891055
申请日：2004-07-15
申请人： Mitsuru Takai , Kazuhiro Hattori
发明人： Mitsuru Takai , Kazuhiro Hattori
IPC分类号： G11B5/00 , G11B5/012 , G11B5/60 , G11B5/82 , G11B21/21
CPC分类号： B82Y10/00 , G11B5/012 , G11B5/6082 , G11B5/743 , G11B5/82 , G11B2005/001
摘要： A magnetic recording medium capable of preventing contact with a magnetic head for use in recording or reproduction, during recording or reproducing of record data. The magnetic recording medium has a disk-shaped substrate having a surface formed with an annular data-recording area, an outer area outward of the data-recording area, and an inner area inward of the same. The annular data-recording area has a plurality of tracks separated from each other by concentric separating grooves. At least one of the outer area and the inner is subjected to lift-adjusting treatment for enabling adjustment of lifts applied to the magnetic head. This makes it possible to effectively prevent the magnetic head from being inclined to be brought into contact with the magnetic recording medium.
摘要翻译：一种磁记录介质，能够在记录或再现记录数据期间防止与用于记录或再现的磁头的接触。磁记录介质具有一个具有形成有环形数据记录区域，数据记录区域外部的外部区域和其内部的内部区域的盘形基板。环形数据记录区域具有通过同心分隔槽彼此分离的多个轨道。对外部区域和内部中的至少一个进行升降调节处理，以便能够调节施加到磁头的电梯。这使得可以有效地防止磁头倾斜于与磁记录介质接触。

9. 发明授权

US07538041B2 Magnetic recording medium, method of manufacturing the same, and intermediate for magnetic recording medium 失效
标题翻译：磁记录介质，其制造方法和磁记录介质的中间体
公开(公告)号：US07538041B2
公开(公告)日：2009-05-26
申请号：US11206874
申请日：2005-08-19
申请人： Mitsuru Takai , Kazuhiro Hattori , Takahiro Suwa , Shuichi Okawa
发明人： Mitsuru Takai , Kazuhiro Hattori , Takahiro Suwa , Shuichi Okawa
IPC分类号： H01L21/302
CPC分类号： G11B5/855
摘要： A magnetic recording medium is provided in which a magnetic recording layer 5 is provided in a predetermined concavo-convex pattern on a substrate 1A, a concave portion in a concavo-convex pattern is filled with a non-magnetic material, and a non-magnetic layer 16 formed of the non-magnetic material positioned at the bottom surface of the concave portion in the non-magnetic materials is formed on a convex portion of the concavo-convex pattern while surface of the convex portion and the concave portion is substantially flattened, and a thickness of the non-magnetic layer 16 is 1 nm or less.
摘要翻译：提供一种磁记录介质，其中在基板1A上以预定的凹凸图案设置磁记录层5，凹凸图案的凹部填充有非磁性材料，并且非磁性形成在非磁性材料的凹部的底面的非磁性材料形成的层16形成在凹凸图案的凸部上，同时凸部和凹部的表面基本平坦化，非磁性层16的厚度为1nm以下。

10. 发明授权

US07488429B2 Method of dry etching, method of manufacturing magnetic recording medium, and magnetic recording medium 失效
标题翻译：干蚀刻方法，制造磁记录介质的方法和磁记录介质
公开(公告)号：US07488429B2
公开(公告)日：2009-02-10
申请号：US11156469
申请日：2005-06-21
申请人： Shuichi Okawa , Kazuhiro Hattori , Mikiharu Hibi , Mitsuru Takai
发明人： Shuichi Okawa , Kazuhiro Hattori , Mikiharu Hibi , Mitsuru Takai
IPC分类号： B44C1/22 , G11B5/82 , G11B5/65 , C03C15/00 , C03C25/68 , C23F1/00
CPC分类号： B82Y10/00 , C23F4/00 , G11B5/732 , G11B5/7325 , G11B5/74 , G11B5/743 , G11B5/82 , G11B5/855
摘要： The recording layer (to-be-etched layer), a main mask layer, and a sub mask layer are formed in this order over a substrate, and the sub mask layer is processed into a predetermined concavo-convex pattern. Next, parts of the main mask layer under the concave portions are removed by reactive ion etching using oxygen or ozone as the reactive gas. Parts of the recording layer under the concave portions are also removed by dry etching, whereby the recording layer is shaped into the concavo-convex pattern. The main mask layer is chiefly made of carbon. The sub mask layer is made of a material having an etching rate lower than that of carbon with respect to the reactive ion etching in the step of processing the main mask layer.
摘要翻译：在衬底上依次形成记录层（被蚀刻层），主掩模层和副掩模层，并将子掩模层加工成预定的凹凸图案。接下来，通过使用氧或臭氧作为反应气体的反应离子蚀刻除去凹部下方的主掩模层的一部分。通过干法蚀刻除去凹部下面的记录层的部分，由此将记录层成形为凹凸图案。主掩模层主要由碳制成。在处理主掩模层的步骤中，子掩模层由相对于反应离子蚀刻的蚀刻速率低于碳的蚀刻速率的材料制成。

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