会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 1. 发明授权
    • Thin film transistor
    • 薄膜晶体管
    • US4843438A
    • 1989-06-27
    • US235728
    • 1988-08-19
    • Mitsuhiro KodenHirohisa TanakaKohzo Yano
    • Mitsuhiro KodenHirohisa TanakaKohzo Yano
    • H01L29/417H01L29/45H01L29/49
    • H01L29/41733H01L29/458H01L29/4908
    • A thin film transistor which includes an insulative substrate, and a gate electrode, a gate isulating film, a semi-conductor film, a source electrode, and a drain electrode, which are all laminated in that order onto the insulating substrate in the form of an array. The gate electrode is made of tantalum, and the gate insulating film is formed into a double-layered construction of an anodized tantalum film and a silicon nitride film, while the semi-conductor film is provided at each intersection between the gate electrode and the source electrode.This application is a continuation of application Ser. No. 057,743 filed on June 3, 1987, abandoned, which is a continuation of application Ser. No. 797,660 filed on Nov. 13, 1985, now abandoned.
    • 一种薄膜晶体管,其包括绝缘基板,以及栅极电极,栅极隔离膜,半导体膜,源电极和漏电极,它们均按顺序层叠在绝缘基板上,形式为 数组。 栅电极由钽制成,并且栅极绝缘膜形成为阳极氧化钽膜和氮化硅膜的双层结构,而半导体膜设置在栅电极和源极之间的每个交叉处 电极。 这个应用程序是应用程序的延续。 1987年6月3日提交的第057,743号被遗弃,这是继续申请。 1985年11月13日提交的第797,660号,现已放弃。
    • 7. 发明授权
    • Illumination optical system, exposure apparatus, and device manufacturing method
    • 照明光学系统,曝光装置和装置制造方法
    • US08947635B2
    • 2015-02-03
    • US13168068
    • 2011-06-24
    • Hirohisa TanakaYasushi Mizuno
    • Hirohisa TanakaYasushi Mizuno
    • G03B27/72G02B27/09G03F7/20
    • G02B27/0966G03F7/70091G03F7/70191
    • According to one embodiment, an illumination optical system is provided with an optical integrator which forms a predetermined light intensity distribution on an illumination pupil plane in an illumination optical path of the illumination optical system with incidence of exposure light from a light source device thereinto; a transmission filter arranged on the reticle side with respect to the optical integrator and in a first adjustment region set including the illumination pupil plane in an optical-axis direction of the illumination optical system, and having a transmittance characteristic varying according to positions of the exposure light incident thereinto; and a movement mechanism which moves the transmission filter along the optical-axis direction in the first adjustment region.
    • 根据一个实施例,照明光学系统设置有光学积分器,其在照明光学系统的照明光路中在照明光瞳平面上形成预定的光强度分布,其中光源装置的曝光光入射到照明光学系统中; 相对于光积分器布置在光罩侧的透射滤光器和在照明光学系统的光轴方向上包括照明光瞳面的第一调整区域,并且具有根据曝光位置而变化的透射率特性 光线事件 以及在第一调整区域中沿着光轴方向移动发送滤波器的移动机构。
    • 10. 发明授权
    • Illumination optical apparatus, exposure apparatus, and device manufacturing method
    • 照明光学装置,曝光装置和装置的制造方法
    • US08094290B2
    • 2012-01-10
    • US12266321
    • 2008-11-06
    • Soichi OwaOsamu TanitsuHirohisa Tanaka
    • Soichi OwaOsamu TanitsuHirohisa Tanaka
    • G03B27/54G03B27/72G03B27/32
    • G02B27/0905G02B26/0833G02B27/0927G03F7/70075G03F7/70116G03F7/70583Y10T29/49826
    • An illumination optical system with a simple structure reduces the effects of illumination variations caused by a spatial coherency of illumination light, while maintaining a high usage efficiency of illumination light that is emitted in pulses. The illumination optical system illuminates an irradiated plane with pulse-emitted illumination light and includes a spatial light modulator including a plurality of mirror elements each of which spatially modulates the illumination light in accordance with an incident position of the illumination light. A modulation control unit controls the mirror elements, whenever at least one pulse of illumination light is emitted, in a manner such that the optical elements spatially modulate the pulses of illumination light differently from one another and form substantially the same intensity distribution for the pulses of illumination light on a predetermined plane.
    • 具有简单结构的照明光学系统降低了由照明光的空间相干性引起的照明变化的影响,同时保持以脉冲发射的照明光的高使用效率。 照明光学系统用脉冲发射的照明光照射被照射的平面,并且包括空间光调制器,其包括多个反射镜元件,每个反射镜元件根据照明光的入射位置对照明光进行空间调制。 每当发射照明光的至少一个脉冲时,调制控制单元控制镜元件,使得光学元件彼此空间地调制照明光的脉冲,并且形成基本相同的强度分布,用于脉冲的 在预定平面上的照明光。