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1. 发明授权

US6057928A Free-space time-domain method for measuring thin film dielectric properties 有权
标题翻译：用于测量薄膜介电性质的自由空间时域法
公开(公告)号：US6057928A
公开(公告)日：2000-05-02
申请号：US333596
申请日：1999-06-15
申请人： Ming Li , Xi-Cheng Zhang , Gyu Cheon Cho
发明人： Ming Li , Xi-Cheng Zhang , Gyu Cheon Cho
IPC分类号： G01N21/35 , G01N21/41 , G01N21/55
CPC分类号： G01N21/41 , G01N21/3563 , G01N21/3586
摘要： A non-contact method for determining the index of refraction or dielectric constant of a thin film on a substrate at a desired frequency in the GHz to THz range having a corresponding wavelength larger than the thickness of the thin film (which may be only a few microns). The method comprises impinging the desired-frequency beam in free space upon the thin film on the substrate and measuring the measured phase change and the measured field reflectance from the reflected beam for a plurality of incident angles over a range of angles that includes the Brewster's angle for the thin film. The index of refraction for the thin film is determined by applying Fresnel equations to iteratively calculate a calculated phase change and a calculated field reflectance at each of the plurality of incident angles, and selecting the index of refraction that provides the best mathematical curve fit with both the dataset of measured phase changes and the dataset of measured field reflectances for each incident angle. The dielectric constant for the thin film can be calculated as the index of refraction squared.
摘要翻译：一种非接触式方法，用于在GHz至THz范围内以期望的频率确定衬底上的薄膜的折射率或介电常数，其具有大于薄膜厚度的相应波长（其可能仅为少数几个微米）。该方法包括将自由空间中的期望频率光束照射到衬底上的薄膜上，并且在包括布鲁斯特角度的角度范围内测量测量的相位变化和来自反射光束的多个入射角的测量的场反射率为薄膜。通过应用菲涅尔方程来迭代地计算多个入射角中的每一个处的相位变化和计算的场反射率来确定薄膜的折射率，并且选择提供最佳数学曲线拟合的折射率测量相位变化的数据集和每个入射角的测量场反射数据集。可以计算薄膜的介电常数作为折射率平方。

2. 发明授权

US06556306B2 Differential time domain spectroscopy method for measuring thin film dielectric properties 有权
公开(公告)号：US06556306B2
公开(公告)日：2003-04-29
申请号：US09754183
申请日：2001-01-04
申请人： Zhiping Jiang , Ming Li , Xi-Cheng Zhang
发明人： Zhiping Jiang , Ming Li , Xi-Cheng Zhang
IPC分类号： G01B902
CPC分类号： G01N21/41 , G01N21/3563 , G01N21/3586
摘要： A non-contact, free-space method for determining the index of refraction of a thin film at a desired angular frequency. The method includes generating an input desired-frequency pulse and an optically detectable probe pulse. The thin film is moved in and out of the path of the input pulse, creating an output pulse that alternates between a transmitted signal, created when the film intercepts the input pulse path, and a reference signal, created when the sample is outside the input pulse path. The output pulse modulates the probe pulse, which is then detected with a photo detector, and the difference between the transmitted signal and the reference signal is calculated. The above steps are repeated over a plurality of delay times between the input pulse and the probe pulse until a complete field waveform of the differential signal is characterized. The index of refraction is calculated as a function of a ratio between the differential signal for the thin film and the reference signal. A complete field waveform of the reference signal may be characterized by repeating the above steps for a reference plate identical to the sample except having a non-transmissive film instead of the thin, transmissive film.

3. 发明授权

US08653462B2 Methods and systems for detecting terahertz radiation by radiation enhanced emission of fluorescence 有权
标题翻译：通过辐射增强荧光发射来检测太赫兹辐射的方法和系统
公开(公告)号：US08653462B2
公开(公告)日：2014-02-18
申请号：US13095267
申请日：2011-04-27
申请人： Xi-Cheng Zhang , Jingle Liu
发明人： Xi-Cheng Zhang , Jingle Liu
IPC分类号： G01J5/02
CPC分类号： G01J1/58 , G01J3/4406
摘要： Methods and systems for detecting radiation, particularly, terahertz (THz) radiation, are disclosed. The methods and systems disclosed include directing an optical beam in a volume of gas; ionizing at least a portion of the volume of gas with the optical beam to produce a plasma; and detecting a fluorescence produced from an interaction of a radiation wave with the plasma. The information contained in the characteristics of the detected fluorescence, for example, the amplitude and/or phase are used to characterize the radiation wave. Aspects of the invention may be used for homeland security, medicine, and astronomy, among other fields.
摘要翻译：公开了用于检测辐射，特别是太赫兹（THz）辐射的方法和系统。公开的方法和系统包括将光束引导到一定体积的气体中; 用光束电离至少一部分体积的气体以产生等离子体; 并且检测由辐射波与等离子体的相互作用产生的荧光。包含在检测到的荧光特性中的信息，例如幅度和/或相位用于表征辐射波。本发明的方面可用于国土安全，医药和天文学等领域。

4. 发明授权

US08338802B2 Terahertz radiation anti-reflection devices and methods for handling terahertz radiation 有权
标题翻译：太赫兹辐射防反射装置和处理太赫兹辐射的方法
公开(公告)号：US08338802B2
公开(公告)日：2012-12-25
申请号：US13218993
申请日：2011-08-26
申请人： Xi-Cheng Zhang , Pengyu Han , Yuting W. Chen
发明人： Xi-Cheng Zhang , Pengyu Han , Yuting W. Chen
IPC分类号： H01J19/12 , G02B1/00 , B23P11/00 , G02B5/00 , G01J1/00
CPC分类号： G02B1/118 , Y10T29/49826
摘要： A terahertz (THz) anti-reflection device, for example, a broadband tunable THz anti-reflection device, includes a silicon substrate having a plurality of recesses, each of the plurality of recesses having a plurality of cavities of decreasing dimension. The cavities may be nested polygonal cavities, for example, having a square or rectangular cross section. The recesses having the cavities may be positioned at regular periods, for example, periods ranging from 10 μm to 20 μm. The devices may be fabricated by conventional lithographic methods. Also disclosed are methods for modifying terahertz radiation and methods for fabricating anti-reflection devices.
摘要翻译：太赫兹（THz）抗反射装置，例如宽带可调THz抗反射装置，包括具有多个凹槽的硅基板，多个凹槽中的每一个具有多个尺寸减小的空腔。空腔可以是嵌套的多边形空腔，例如具有正方形或矩形横截面。具有空腔的凹部可以以规定的周期定位，例如10μm至20μm的周期。这些器件可以通过常规的光刻方法制造。还公开了用于修改太赫兹辐射的方法和用于制造防反射装置的方法。

5. 发明授权

US07531802B2 Method of analyzing a remotely-located object utilizing an optical technique to detect terahertz radiation 有权
标题翻译：利用光学技术分析位于遥远的物体以检测太赫兹辐射的方法
公开(公告)号：US07531802B2
公开(公告)日：2009-05-12
申请号：US11610824
申请日：2006-12-14
申请人： Xi-Cheng Zhang , Jianming Dai , Xu Xie
发明人： Xi-Cheng Zhang , Jianming Dai , Xu Xie
IPC分类号： G01N21/35
CPC分类号： G01V8/005 , G01J3/02 , G01J3/0243 , G01J3/42 , G01N21/3563 , G01N21/3581 , G01N21/636 , G01S7/4802 , G01S13/887 , G01S17/026 , G02F1/353 , G02F2203/13
摘要： A method of analyzing a remotely-located object includes the steps of inducing a volume of an ionized ambient gas to emit pulsed terahertz radiation directed toward a targeted object by focusing an optical pump beam in the volume and ionizing another volume of the ambient gas to produce a sensor plasma by focusing an optical probe beam in the other volume of ambient gas. The interaction, in the sensor plasma, of the focused optical probe beam and an incident terahertz wave, which is produced by the targeted object reflecting, scattering, or transmitting the pulsed terahertz radiation, produces a resultant radiation. Detecting an optical component of the resultant radiation emitted by the sensor plasma facilitates detection of a signature of the targeted object imposed onto the incident terahertz radiation.
摘要翻译：分析远程物体的方法包括以下步骤：通过将光泵浦光束聚焦在体积中并使另一体积的环境气体电离以产生电离环境气体的体积，以发射朝向目标物体的脉冲太赫兹辐射通过将光学探针光束聚焦在另一体积的环境气体中的传感器等离子体。在传感器等离子体中，由目标物体反射，散射或传输脉冲太赫兹辐射产生的聚焦光学探针光束和入射的太赫兹波的相互作用产生合成的辐射。检测由传感器等离子体发射的辐射的光学部件有助于检测施加在入射的太赫兹辐射上的目标物体的签名。

6. 发明申请

US20070009207A1 High repetition rate, linear, true time optical delay line 审中-公开
公开(公告)号：US20070009207A1
公开(公告)日：2007-01-11
申请号：US10537626
申请日：2005-03-08
申请人： Jingzhou Xu , Xi-Cheng Zhang
发明人： Jingzhou Xu , Xi-Cheng Zhang
IPC分类号： G02B6/26
CPC分类号： G02B5/10 , G02B6/2861 , G02B6/424 , G02B6/4244
摘要： An optical delay line for use with an optical source including input/output optics optically coupled to the optical source and a curved mirror with a reflective surface that is centered about an evolute curve of the delay line to retro-reflect light traveling along a delay line beam path tangent to the edge of the evolute curve. The input/output optics direct light from the optical source along the delay line beam path and direct delayed light from the delay line beam path out of the optical delay line along an output beam path. The input/output optics and/or the curved mirror rotate about the evolute curve at a selected angular speed. The reflective surface has a curvature based on a parametric curve that is calculated from the evolute curve such that the delay of the delay line varies according to a predetermined function as the input/output optics and/or the curved mirror rotate.

7. 发明授权

US07091506B2 Semiconductor surface-field emitter for T-ray generation 有权
标题翻译：用于T射线产生的半导体表面场发射器
公开(公告)号：US07091506B2
公开(公告)日：2006-08-15
申请号：US10828654
申请日：2004-04-21
申请人： Xi-Cheng Zhang , Jingzhou Xu , Kai Liu
发明人： Xi-Cheng Zhang , Jingzhou Xu , Kai Liu
IPC分类号： G01J5/00
CPC分类号： G01J3/10 , G02F2203/13
摘要： An apparatus and a method for the generation of high-energy terahertz radiation. The apparatus and method function by impinging optical radiation on the surface of a semiconductor substrate, creating a photo-generated dipole emitting terahertz radiation. Because it is desirable to orient the dipole perpendicular to the radiation direction to maximize the power of the terahertz radiation, the surface of the semiconductor is modified to achieve this desirable result. More specifically, three embodiments of the surface modification are disclosed: (1) a grating is created in the top surface of a GaAs semiconductor substrate, (2) an InAs film is formed on a Teflon base to create a grating structure on the semiconductor substrate, and (3) a grating is disposed in the surface of the semiconductor substrate such that the optical radiation engages the substrate at Brewster's angle.
摘要翻译：用于产生高能太赫兹辐射的装置和方法。该装置和方法通过将光辐射照射在半导体衬底的表面上，产生光产生的偶极发射太赫兹辐射。因为期望使偶极子垂直于辐射方向定向以使太赫兹辐射的功率最大化，所以修改半导体的表面以实现该期望的结果。更具体地，公开了表面改性的三个实施例：（1）在GaAs半导体衬底的顶表面中形成光栅，（2）在特氟隆基底上形成InAs膜，以在半导体衬底上形成光栅结构，和（3）在半导体衬底的表面中设置光栅，使得光辐射以布鲁斯特角接合衬底。

8. 发明授权

US06414473B1 Electro-optic/magneto-optic measurement of electromagnetic radiation using chirped optical pulse 有权
标题翻译：使用啁啾光脉冲对电磁辐射进行电光/磁光测量
公开(公告)号：US06414473B1
公开(公告)日：2002-07-02
申请号：US09617242
申请日：2000-07-14
申请人： Xi-Cheng Zhang , Zhiping Jiang
发明人： Xi-Cheng Zhang , Zhiping Jiang
IPC分类号： G01R3100
CPC分类号： G01R29/0885
摘要： Characterization of free-space electromagnetic energy pulses (15) using a chirped optical probe beam is provided. An electro-optic or magneto-optic crystal (14) is positioned such that the free-space radiation and chirped optical probe signal co-propagate, preferably in a co-linear common direction, through the crystal where a temporal waveform of the free-space radiation is linearly encoded onto a wavelength spectrum of the chirped optical probe signal. The temporal waveform of the free-space radiation is then reconstructed using, for example, a dynamic subtraction of the spectral distribution of the chirped optical probe signal without modulation from the spectral distribution of the chirped optical probe signal with modulation by the free-space radiation.
摘要翻译：提供了使用啁啾光学探针光束的自由空间电磁能脉冲（15）的表征。定位电光或磁光晶体（14），使得自由空间辐射和啁啾光学探针信号优选地以共线共同方向共同传播通过晶体，其中自由空间辐射和啁啾光学晶体空间辐射被线性编码在啁啾光学探针信号的波长谱上。然后使用例如通过自由空间辐射调制的啁啾光学探针信号的频谱分布的啁啾光学探针信号的频谱分布的动态减法来重建自由空间辐射的时间波形。

9. 发明授权

US09110022B2 Acoustic methods and systems for detecting terahertz radiation 有权
标题翻译：用于检测太赫兹辐射的声学方法和系统
公开(公告)号：US09110022B2
公开(公告)日：2015-08-18
申请号：US13643871
申请日：2011-04-29
申请人： Benjamin Clough , Jingle Liu , Xi-Cheng Zhang
发明人： Benjamin Clough , Jingle Liu , Xi-Cheng Zhang
IPC分类号： G01N21/63 , G01N21/3504 , G01N21/3581
CPC分类号： G01N21/63 , G01N21/3504 , G01N21/3581
摘要： Methods and systems for detecting radiation for example, terahertz radiation, with the aid of acoustic signal generation and detection include: directing an optical beam into a volume of gas; ionizing at least a portion of the volume of gas with the optical beam to produce a plasma; and detecting an acoustic signal produced from an interaction of a radiation wave with the plasma. The methods and systems are particularly adapted for remote detection of chemicals, biological substances, and explosives, among others. The capability of the methods and systems can be enhanced by employing multi-color laser excitation to produce the plasma and varying the time delay between the multi-color pulses.
摘要翻译：借助于声信号产生和检测，用于检测辐射的方法和系统，例如太赫兹辐射，包括：将光束引导到一定体积的气体中; 用光束电离至少一部分体积的气体以产生等离子体; 以及检测由辐射波与等离子体的相互作用产生的声信号。这些方法和系统特别适用于远程检测化学品，生物物质和爆炸物等。可以通过采用多色激光激发产生等离子体并改变多色脉冲之间的时间延迟来增强方法和系统的能力。

10. 发明授权

US08299435B2 Tunable broadband anti-relfection apparatus 有权
标题翻译：可调式宽带抗再感器
公开(公告)号：US08299435B2
公开(公告)日：2012-10-30
申请号：US12855332
申请日：2010-08-12
申请人： Xi-Cheng Zhang , Pengyu Han , Yuting W. Chen
发明人： Xi-Cheng Zhang , Pengyu Han , Yuting W. Chen
IPC分类号： G01J5/08
CPC分类号： G02B1/118
摘要： A broadband anti-reflection apparatus for use with terahertz radiation includes a layer having an outer surface comprising a plurality of pyramid structures having about a 30 μm to about a 110 μm period, and wherein reflectance of the terahertz radiation is reduced compared to a layer comprising a planar outer surface. Also disclosed is a method for modifying terahertz radiation which includes receiving terahertz radiation on a device having an anti-reflection layer having an outer surface comprising a plurality of pyramid structures having about a 30 μm to a 110 μm period, and modifying the terahertz radiation passing through the device or processing the terahertz radiation in the device.
摘要翻译：一种与太赫兹辐射一起使用的宽带抗反射装置包括具有外表面的层，该层具有包括大约30μm至大约110μm周期的多个金字塔结构，并且与包括以下的层相比，太赫兹辐射的反射率降低：平面外表面。还公开了一种用于修改太赫兹辐射的方法，其包括在具有抗反射层的装置上接收太赫兹辐射，所述抗反射层具有外表面，该外表面包括具有约30μm至110μm周期的多个金字塔结构，并且修改太赫兹辐射通过通过设备或处理设备中的太赫兹辐射。

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