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    • 1. 发明申请
    • Apparatus for fabricating a display device
    • 用于制造显示装置的装置
    • US20070041410A1
    • 2007-02-22
    • US11588387
    • 2006-10-27
    • Mikio HongoSachio UtoMineo NomotoToshihiko NakataMutsuko HatanoShinya YamaguchiMakoto Ohkura
    • Mikio HongoSachio UtoMineo NomotoToshihiko NakataMutsuko HatanoShinya YamaguchiMakoto Ohkura
    • H01S3/10G02B27/10
    • H01L21/02683H01L21/0268H01L21/02691H01L21/2026H01L21/268H01L27/1285H01L29/04H01L29/66757
    • Apparatus for fabricating a display device includes a stage capable of mounting an insulating substrate of the display device and moving the insulating substrate, linear scales which detect a position or moving distance of the substrate, a laser oscillator which generates continuous-waves laser light, a modulator which turns ON/OFF the continuous-wave laser light, a beam forming optic which shapes the continuous-wave laser light passing through the modulator into a linear or rectangular form, an objective lens which projects the at least one of the laser light on the insulating substrate so as to irradiate the insulating substrate with the laser light. The controller counts signals generated by the linear scales for every movement of the stage for a given distance, causes the modulator to turn the generated continuous-wave laser light in an ON state at time when a position of the insulating substrate on which the laser light irradiation is to be started reaches an area on which the laser light is projected, and causes the modulator to turn the generated continuous-wave laser light in an OFF state at another time.
    • 用于制造显示装置的装置包括能够安装显示装置的绝缘基板并移动绝缘基板的台,检测基板的位置或移动距离的线性标尺,产生连续波激光的激光振荡器, 将连续波激光切换为ON / OFF的调制器,将通过调制器的连续波激光成形为直线或矩形的光束形成光学器件,将至少一个激光投射到的物镜 绝缘基板,以激光照射绝缘基板。 控制器对于给定距离的级的每次移动来对由线性标尺产生的信号进行计数,使得调制器将产生的连续波激光在其上的激光的绝缘基板的位置处于接通状态 照射开始到达投射激光的区域,并且使得调制器在另一时间将所产生的连续波激光转为OFF状态。
    • 10. 发明授权
    • Method and apparatus for detecting defects
    • 检测缺陷的方法和装置
    • US07528942B2
    • 2009-05-05
    • US11472426
    • 2006-06-22
    • Hiroyuki NakanoToshihiko NakataSachio UtoAkira HamamatsuShunji MaedaYuta Urano
    • Hiroyuki NakanoToshihiko NakataSachio UtoAkira HamamatsuShunji MaedaYuta Urano
    • G01N21/88
    • G01N21/956G01N21/47G01N21/94G01N21/9501G01N2021/8822
    • A method and apparatus for detecting defects are provided for detecting harmful defects or foreign matter with high sensitivity on an object to be inspected with a transparent film, such as an oxide film, by reducing noise due to a circuit pattern. The apparatus for detecting defects includes a stage part on which a substrate specimen is put and which is arbitrarily movable in each of the X-Y-Z-θ directions, an illumination system for irradiating the circuit pattern with light from an inclined direction, and an image-forming optical system for forming an image of an irradiated detection area on a detector from the upward and oblique directions. With this arrangement, diffracted light and scattered light caused on the circuit pattern through the illumination by the illumination system is collected. Furthermore, a spatial filter is provided on a Fourier transform surface for blocking the diffracted light from a linear part of the circuit pattern. The scattered and reflected light received by the detector from the specimen is converted into an electrical signal. The converted electrical signal of one chip is compared with that of the other adjacent chip. If these signals are not identical to each other, the foreign matter is determined to exist on the specimen in detection.
    • 提供一种用于检测缺陷的方法和装置,用于通过减少由于电路图案引起的噪声来检测对诸如氧化物膜的透明膜在内的待检查物体的高灵敏度的有害缺陷或异物。 用于检测缺陷的装置包括:载置基板试样的载台部分,其可以在XYZ-θ方向中任意移动;照射系统,用于利用来自倾斜方向的光照射电路图案;以及图像形成 光学系统,用于从上下方向在检测器上形成照射的检测区域的图像。 利用这种布置,收集通过照明系统的照明在电路图案上产生的衍射光和散射光。 此外,在傅立叶变换表面上提供空间滤波器,用于阻挡来自电路图形的线性部分的衍射光。 由检测器从样本接收的散射和反射光被转换成电信号。 将一个芯片的转换电信号与另一个芯片的转换电信号进行比较。 如果这些信号彼此不相同,则检测到异物被确定为存在于样品上。