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    • 5. 发明申请
    • INSPECTING APPARATUS AND INSPECTION METHOD
    • 检查装置和检查方法
    • US20120050518A1
    • 2012-03-01
    • US13053403
    • 2011-03-22
    • Masahiro Miyata
    • Masahiro Miyata
    • H04N7/18
    • G01N21/9501
    • An inspecting apparatus includes a first light receiving sensor that senses an image of a surface of the wafer incident from the microscope, and that acquires first inspection image data of the surface of the wafer. The inspecting apparatus includes a second light receiving sensor that corrects a focusing position to focus on a reference position of an upper portion of a bump formed on the surface of the wafer, with respect to an image incident from the microscope, that senses an image of the bump incident from the microscope, and that acquires second inspection image data of the bump. The inspecting apparatus includes a first image processing unit that compares the first inspection image data acquired by the first light receiving sensor with previously acquired first reference image data, and that detects a defect of the surface of the wafer on the basis of the comparison result. The inspecting apparatus includes a second image processing unit that compares the second inspection image data acquired by the second light receiving sensor with previously acquired second reference image data, and that detects a defect of the bump on the basis of the comparison result.
    • 检查装置包括:第一受光传感器,其感测从显微镜入射的晶片的表面的图像,并且获取晶片表面的第一检查图像数据。 检查装置包括第二光接收传感器,其校正聚焦位置以聚焦在形成在晶片表面上的凸起的上部的参考位置,相对于从显微镜入射的图像,其感测图像 从显微镜入射的凸块,并且获得凸块的第二检查图像数据。 检查装置包括第一图像处理单元,其将由第一光接收传感器获取的第一检查图像数据与先前获取的第一参考图像数据进行比较,并且基于比较结果来检测晶片的表面的缺陷。 检查装置包括第二图像处理单元,其将由第二光接收传感器获取的第二检查图像数据与先前获取的第二参考图像数据进行比较,并且基于比较结果来检测凹凸的缺陷。
    • 7. 发明授权
    • Vehicle steering control system
    • 车辆转向控制系统
    • US06782969B2
    • 2004-08-31
    • US10626591
    • 2003-07-25
    • Kazumasa KodamaMasahiro Miyata
    • Kazumasa KodamaMasahiro Miyata
    • B62D599
    • B62D5/008B62D5/046
    • A vehicle steering control system is provided which is capable of reliably protecting a motor for driving a wheel steering shaft. The offset output characteristic of a current sensor for detecting the electric current applied to the steering shaft drive motor is actually measured prior to the actual use of the steering control system, and offset compensation information is prepared based on the measured value of the offset output characteristic for storage in an EEPROM. Further, an output value of the current sensor and an output value of a reference current measuring system are measured independently of each other with the supply voltage for use in measurement being set to a constant value. Then, current gain compensation information is prepared based on the output values so measured and is stored in the EEPROM. In the later actual use (i.e., after shipment) of the control system, the output of the current sensor is compensated based on the offset compensation information and the current gain compensation information.
    • 提供一种能够可靠地保护用于驱动车轮转向轴的电动机的车辆转向控制系统。 在实际使用转向控制系统之前,实际测量了用于检测施加到转向轴驱动电动机的电流的电流传感器的偏移输出特性,并且基于偏移输出特性的测量值来准备偏移补偿信息 用于存储在EEPROM中。 此外,电流传感器的输出值和参考电流测量系统的输出值彼此独立地测量,而用于测量的电源电压被设置为恒定值。 然后,根据所测量的输出值准备当前的增益补偿信息,并存储在EEPROM中。 在控制系统的后续实际使用(即出货后)中,基于偏移补偿信息和当前增益补偿信息来补偿电流传感器的输出。