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    • 2. 发明授权
    • Flow control in a semiconductor fabrication facility
    • 半导体制造设备中的流量控制
    • US06411859B1
    • 2002-06-25
    • US09143322
    • 1998-08-28
    • Michael R. ConboyPatrick J. RyanElfido Coss, Jr.
    • Michael R. ConboyPatrick J. RyanElfido Coss, Jr.
    • G06F1900
    • H01L21/67276G05B19/41865G05B2219/32265G05B2219/32316Y02P90/20
    • Techniques for controlling the flow of wafer lots in a semiconductor fabrication facility having multiple storage locations and a fabrication facility employing such techniques are provided. A process and system for controlling the flow of wafer lots within a semiconductor fabrication facility, in accordance with one embodiment of the invention, includes determining a first storage location for a wafer lot, determining, prior to moving the wafer lot, an availability condition of the first storage location based on a condition level of the first storage location and a priority of the wafer lot, and storing the wafer lot in the storage location if the location is available and storing the wafer lot in an alternate location if the storage location is unavailable. The storage location may, for example, be a stocker. In this manner, the invention may, for example, advantageously anticipate or sense bubbles or log jams of wafer lots in a fabrication facility and redirect wafer lots in order to avoid or reduce any bubble effect. This can, for example, significantly increase the throughput of wafers through the fabrication facility.
    • 提供了用于控制具有多个存储位置的半导体制造设备中的晶片批次的流动的技术以及采用这种技术的制造设备。 根据本发明的一个实施例的用于控制半导体制造设备内的晶片批次的流动的工艺和系统包括确定晶片批次的第一存储位置,在移动晶片批之前确定可用状态 所述第一存储位置基于所述第一存储位置的状态级别和所述晶片批次的优先级,并且如果所述位置可用则将所述晶片批次存储在所述存储位置中,并且如果所述存储位置是所述存储位置,则将所述晶片批次存储在备用位置 不可用 存储位置可以例如是储存器。 以这种方式,本发明可以例如有利地预期或感测制造设施中的晶片批次的气泡或木材堵塞,并且重定向晶片批次以避免或减少任何气泡效应。 例如,这可以显着增加通过制造设备的晶片的生产量。
    • 7. 发明公开
    • 엠이에스에서 로트의 우선 순위 제어 시스템 및 그 방법
    • 在制造执行系统中控制优先权的系统和方法
    • KR1020030000081A
    • 2003-01-06
    • KR1020010035714
    • 2001-06-22
    • 주식회사 미라콤아이앤씨
    • 백원인박흥철윤주덕백종현정주석
    • H01L21/00
    • G06Q10/06G05B19/41865G05B2219/31372G05B2219/32316G05B2219/32323G05B2219/45031Y02P90/12Y02P90/20
    • PURPOSE: A method for controlling priority of a lot in a manufacturing execution system(MES) is provided to shorten an interval of process time by automatically making a priority list of the lot in the MES. CONSTITUTION: Queue time and process time in every process is arbitrarily inputted through a control computer(20) for controlling production to set a setup value. Start time and finish time in every process is inputted through an equipment computer(10) for controlling an item regarding a process for fabricating a product to set a measure value. A ratio of a measure value to a setup value is determined to obtain process cycle time substantially used in every process. The process cycle time to use is calculated according to the measure value reflected on the setup value. The priority list of the lot is made according to the result of calculation. The priority list of the lot is displayed on a screen.
    • 目的:提供一种用于控制制造执行系统(MES)中的批次优先级的方法,以通过自动制定MES中批次的优先级列表来缩短处理时间间隔。 构成:通过控制计算机(20)任意地输入每个进程中的队列时间和处理时间,用于控制生产以设置设置值。 在每个处理中的开始时间和完成时间通过设备计算机(10)输入,用于控制关于制造产品的处理的项目以设置测量值。 确定测量值与设定值的比率,以获得在每个过程中基本使用的处理周期时间。 根据设定值反映的测量值计算使用过程周期。 批次的优先级列表是根据计算结果进行的。 批次的优先级列表显示在屏幕上。