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    • 2. 发明授权
    • Laser processing for heat-sensitive mesoscale deposition
    • 用于热敏中尺度沉积的激光加工
    • US07294366B2
    • 2007-11-13
    • US10952108
    • 2004-09-27
    • Michael J. RennBruce H. KingMarcelino EssienManampathy G. GiridharanJyh-Cherng Sheu
    • Michael J. RennBruce H. KingMarcelino EssienManampathy G. GiridharanJyh-Cherng Sheu
    • B05D3/06
    • H05K3/125B05D1/02B05D3/06C08F2/46C23C18/02C23C18/14H01L51/0009
    • A method of depositing various materials onto heat-sensitive targets. Heat-sensitive targets are generally defined as targets that have thermal damage thresholds that are lower than the temperature required to process a deposited material. The invention uses precursor solutions and/or particle or colloidal suspensions, along with optional pre-deposition treatment and/or post-deposition treatment to lower the laser power required to drive the deposit to its final state. The present invention uses Maskless Mesoscale Material Deposition (M3D™) to perform direct deposition of material onto the target in a precise, highly localized fashion. Features with linewidths as small as 4 microns may be deposited, with little or no material waste. A laser is preferably used to heat the material to process it to obtain the desired state, for example by chemical decomposition, sintering, polymerization, and the like. This laser processing may be performed in an ambient environment with laser powers of less than 100 milliwatts.
    • 将各种材料沉积在热敏靶上的方法。 热敏靶标通常定义为具有低于处理沉积材料所需温度的热损伤阈值的靶。 本发明使用前体溶液和/或颗粒或胶态悬浮液以及任选的预沉积处理和/或沉积后处理以降低将沉积物驱动到其最终状态所需的激光功率。 本发明使用无掩模中尺度材料沉积(M 3 S D D TM)以精确,高度局部化的方式将材料直接沉积到靶上。 具有小至4微米的线宽的特征可能被沉积,很少或没有材料浪费。 优选使用激光加热材料以加工以获得期望的状态,例如通过化学分解,烧结,聚合等。 该激光处理可以在具有小于100毫瓦的激光功率的周围环境中进行。
    • 5. 发明授权
    • Annular aerosol jet deposition using an extended nozzle
    • 使用延长喷嘴的环形气溶胶喷射沉积
    • US07938079B2
    • 2011-05-10
    • US11011366
    • 2004-12-13
    • Bruce H. KingMichael J. RennMarcelino EssienGregory J. MarquezManampathy G. GiridharanJyh-Cherng Sheu
    • Bruce H. KingMichael J. RennMarcelino EssienGregory J. MarquezManampathy G. GiridharanJyh-Cherng Sheu
    • B05C5/00B05C19/00F23D11/10
    • H05K3/125
    • Method and apparatus for improved maskless deposition of electronic and biological materials using an extended nozzle. The process is capable of direct deposition of features with linewidths varying from a few microns to a fraction of a millimeter, and can be used to deposit features on targets with damage thresholds near 100° C. or less. Deposition and subsequent processing may be performed under ambient conditions and produce linewidths as low as 1 micron, with sub-micron edge definition. The extended nozzle reduces particle overspray and has a large working distance; that is, the orifice to target distance may be several millimeters or more, enabling direct write onto non-planar surfaces. The nozzle allows for deposition of features with linewidths that are approximately as small as one-twentieth the size of the nozzle orifice diameter, and is preferably interchangeable, enabling rapid variance of deposited linewidth.
    • 使用扩展喷嘴改善电子和生物材料的无掩模沉积的方法和装置。 该过程能够直线沉积具有从几微米变化到几分之一毫米的线宽的特征,并且可以用于在具有接近100℃或更低的损伤阈值的靶上沉积特征。 沉积和后续处理可以在环境条件下进行,并产生低至1微米的线宽,具有亚微米边缘定义。 扩展喷嘴可以减少颗粒过度喷涂,工作距离大; 也就是说,孔到目标距离可以是几毫米或更多,使得能够直接写在非平面表面上。 喷嘴允许具有大约等于喷嘴孔直径的二十分之二的线宽的特征的沉积,并且优选地是可互换的,使得沉积线宽的快速变化。
    • 7. 发明授权
    • Miniature aerosol jet and aerosol jet array
    • 微型气溶胶喷射和气溶胶喷射阵列
    • US08132744B2
    • 2012-03-13
    • US12761201
    • 2010-04-15
    • Bruce H. KingMichael J. RennJason A. Paulsen
    • Bruce H. KingMichael J. RennJason A. Paulsen
    • A62C31/00
    • A62C31/00B05B7/0416B05B7/0884C23C18/06F23D11/16
    • A miniaturized aerosol jet, or an array of miniaturized aerosol jets for direct printing of various aerosolized materials. In the most commonly used embodiment, an aerosol stream is focused and deposited onto a planar or non-planar target, forming a pattern that is thermally or photochemically processed to achieve physical, optical, and/or electrical properties near that of the corresponding bulk material. The apparatus uses an aerosol jet deposition head to form an annularly propagating jet composed of an outer sheath flow and an inner aerosol-laden carrier flow. Miniaturization of the deposition head facilitates the fabrication and operation of arrayed deposition heads, enabling construction and operation of arrays of aerosol jets capable of independent motion and deposition. Arrayed aerosol jets provide an increased deposition rate, arrayed deposition, and multi-material deposition.
    • 小型化气溶胶喷射器或用于直接印刷各种气雾化材料的小型化气溶胶喷射器阵列。 在最常用的实施例中,气溶胶流被聚焦并沉积到平面或非平面靶上,形成热或光化学处理的图案,以达到靠近相应散装材料的物理,光学和/或电特性 。 该装置使用气溶胶喷射沉积头来形成由外鞘流和内部气溶胶载体流组成的环形传播射流。 沉积头的小型化有助于阵列沉积头的制造和操作,使得能够独立运动和沉积的气溶胶喷嘴阵列的构造和操作成为可能。 阵列气溶胶喷射器提供增加的沉积速率,排列沉积和多材料沉积。
    • 10. 发明授权
    • Optical cooling of solids
    • 固体的光学冷却
    • US5615558A
    • 1997-04-01
    • US533656
    • 1995-09-25
    • Eric A. CornellMichael J. Renn
    • Eric A. CornellMichael J. Renn
    • F25B23/00F25B21/00F25D23/00
    • F25B23/003
    • A device and method for laser cooling of a solid to extremely low temperature is disclosed, the device including an active cooling structure having a high purity surface passivated direct band gap semiconductor crystal of less than about 3 microns thick and a transparent hemispherical body in optical contact with the crystal. The crystal is itself cooled when illuminated with a laser beam tuned to a frequency no greater than the band gap edge frequency of the crystal. Cooling is caused by emission of photons of higher energy than photons entering the crystal, the additional energy being accounted for by process of absorption of thermal phonons from the crystal lattice.
    • 公开了一种用于将固体激光冷却至极低温度的装置和方法,该装置包括具有小于约3微米厚的高纯度表面钝化直接带隙半导体晶体的主动冷却结构和光学接触中的透明半球体 与水晶。 当激光束被调谐到不大于晶体的带隙边缘频率的频率时,晶体本身被冷却。 冷却是通过发射比进入晶体的光子更高能量的光子引起的,另外的能量是通过从晶格吸收热声子的过程来解释的。