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1. 发明申请

US20060049826A1 Optical cross-connect system 有权
标题翻译：光交叉连接系统
公开(公告)号：US20060049826A1
公开(公告)日：2006-03-09
申请号：US10469516
申请日：2002-03-01
申请人： Michael Daneman , Franklin Wall , Behrang Behin , Murali Chaparala , Mark Chang , Scott Dalton , Timothy Beerling , Stephen Panyko , Meng-Hsiung Kiang , Boris Kobrin , Chuang-Chia Lin
发明人： Michael Daneman , Franklin Wall , Behrang Behin , Murali Chaparala , Mark Chang , Scott Dalton , Timothy Beerling , Stephen Panyko , Meng-Hsiung Kiang , Boris Kobrin , Chuang-Chia Lin
IPC分类号： G01B7/14
CPC分类号： G02B6/3518 , G02B6/3546 , G02B6/356 , G02B6/357 , G02B6/3572 , G02B6/3584 , G02B26/0841
摘要： An optical cross-connect switch comprises a base (216), a flap (211) and one or more electrically conductive landing pads (222) connected to the flap (211). The flap (211) has a bottom portion that is movably coupled to the base (216) such that the flap (211) is movable with respect to a plane of the base (216) from a first orientation to a second orientation. The one or more landing pads (222) are electrically isolated from the flap (211) and electrically coupled to be equipotential with a landing surface.
摘要翻译：光学交叉连接开关包括底座（216），翼片（211）和连接到翼片（211）的一个或多个导电着陆垫（222）。翼片（211）具有可移动地联接到基部（216）的底部部分，使得翼片（211）能够相对于基部（216）的平面从第一方向移动到第二方向。一个或多个着陆垫（222）与翼片（211）电隔离并且电耦合以与着陆表面等电位。

2. 发明授权

US07183633B2 Optical cross-connect system 有权
标题翻译：光交叉连接系统
公开(公告)号：US07183633B2
公开(公告)日：2007-02-27
申请号：US10469516
申请日：2002-03-01
申请人： Michael J. Daneman , Franklin Wall , Behrang Behin , Murali Chaparala , Mark W. Chang , Scott Dalton , Timothy Beerling , Stephen Panyko , Meng-Hsiung Kiang , Boris Kobrin , Chuang-Chia Lin
发明人： Michael J. Daneman , Franklin Wall , Behrang Behin , Murali Chaparala , Mark W. Chang , Scott Dalton , Timothy Beerling , Stephen Panyko , Meng-Hsiung Kiang , Boris Kobrin , Chuang-Chia Lin
IPC分类号： H01L23/02 , G02B26/08 , G02B6/42
CPC分类号： G02B6/3518 , G02B6/3546 , G02B6/356 , G02B6/357 , G02B6/3572 , G02B6/3584 , G02B26/0841
摘要： An optical cross-connect switch comprises a base (216), a flap (211) and one or more electrically conductive landing pads (222) connected to the flap (211). The flap (211) has a bottom portion that is movably coupled to the base (216) such that the flap (211) is movable with respect to a plane of the base (216) from a first orientation to a second orientation. The one or more landing pads (222) are electrically isolated from the flap (211) and electrically coupled to be equipotential with a landing surface.
摘要翻译：光学交叉连接开关包括底座（216），翼片（211）和连接到翼片（211）的一个或多个导电着陆垫（222）。翼片（211）具有可移动地联接到基部（216）的底部部分，使得翼片（211）能够相对于基部（216）的平面从第一方向移动到第二方向。一个或多个着陆垫（222）与翼片（211）电隔离并且电耦合以与着陆表面等电位。

3. 发明授权

US06888979B2 MEMS mirrors with precision clamping mechanism 有权
标题翻译：具有精密夹紧机构的MEMS镜
公开(公告)号：US06888979B2
公开(公告)日：2005-05-03
申请号：US09834744
申请日：2001-04-12
申请人： Behrang Behin , Michael J. Daneman , Chuang-Chia Lin , Boris Kobrin , Murali Chaparala , Gary Zalewski
发明人： Behrang Behin , Michael J. Daneman , Chuang-Chia Lin , Boris Kobrin , Murali Chaparala , Gary Zalewski
IPC分类号： B81B3/00 , B81C99/00 , G02B6/12 , G02B6/32 , G02B6/35 , G02B26/08 , G02B6/26
CPC分类号： G02B26/0841 , B81B3/0008 , B81B2201/045 , B81B2203/0181 , B81B2203/058 , B81C1/00214 , G02B6/32 , G02B6/3514 , G02B6/3518 , G02B6/3548 , G02B6/357 , G02B6/358 , G02B6/3584 , G02B2006/12104
摘要： A microelectromechanical (MEMS) apparatus has a base and a flap with a portion coupled to the base so that the flap may move out of the plane of the base between first and second position. The base may have a cavity with largely vertical sidewalls that contact a portion of the flap when the flap is in the second position Electrodes may be placed on the vertical sidewalls and electrically isolated from the base to provide electrostatic clamping of the flap to the sidewall. The base may be made from a substrate portion of a silicon-on-insulator (SOI) wafer and the flap defined from a device layer of the SOI wafer. The flap may be connected to the base by one or more flexures such as torsional beams. An array of one or more of such structures may be used to form an optical switch.
摘要翻译：微机电（MEMS）装置具有底座和翼片，其中一部分联接到基座，使得翼片可在第一和第二位置之间移动离开基座的平面。底座可以具有一个具有很大垂直侧壁的空腔，当翼片处于第二位置时，电极可以被放置在垂直侧壁上并与基座电隔离以提供瓣片向侧壁的静电夹持。基底可以由绝缘体上硅（SOI）晶片的衬底部分和从SOI晶片的器件层限定的瓣形成。翼片可以通过一个或多个挠曲件（例如扭转梁）连接到基座。可以使用一个或多个这样的结构的阵列来形成光学开关。

4. 发明授权

US06473544B1 Optical switch having equalized beam spreading in all connections 有权
标题翻译：光开关在所有连接中具有均衡的光束扩展
公开(公告)号：US06473544B1
公开(公告)日：2002-10-29
申请号：US09518754
申请日：2000-03-03
申请人： Michael Daneman , Behrang Behin , Meng-Hsiung Kiang , Kam Yin Lau
发明人： Michael Daneman , Behrang Behin , Meng-Hsiung Kiang , Kam Yin Lau
IPC分类号： G02B626
CPC分类号： G02B6/3582 , G02B6/3512 , G02B6/3546
摘要： An optical crossbar switch having refractive or reflective components for equalizing beam spreading and diffraction in all the connections. The optical fibers or waveguides coupled to the switch are not staggered, but are parallel as in a conventional fiber array. The refractive component is disposed between the switch and the input optical fibers. Preferably, a similar refractive component is disposed between the output optical fibers and the switch. The refractive component can be a stairstep block made of glass, silicon or silica. Light from each input fiber travels through a well-defined thickness of the stairstep block. Since the block has a refractive index greater than the surrounding atmosphere, the wavelength in reduced within the block, and beam spreading and diffraction are reduced.
摘要翻译：具有用于均衡所有连接中的光束扩散和衍射的折射或反射分量的光学交叉开关。耦合到开关的光纤或波导不是交错的，而是像传统的光纤阵列那样平行。折射分量设置在开关和输入光纤之间。优选地，在输出光纤和开关之间设置类似的折射分量。折射分量可以是由玻璃，硅或二氧化硅制成的稳态块。来自每个输入光纤的光线穿过明显的厚度的步态块。由于该块具有大于周围大气的折射率，因此在块内减少的波长以及光束扩散和衍射减小。

5. 发明授权

US06449407B1 Optical switch having equalized beam spreading in all connections 有权
标题翻译：光开关装置及组装方法
公开(公告)号：US06449407B1
公开(公告)日：2002-09-10
申请号：US09518751
申请日：2000-03-03
申请人： Meng-Hsiung Kiang , Behrang Behin , Michael Daneman , Kam Yin Lau
发明人： Meng-Hsiung Kiang , Behrang Behin , Michael Daneman , Kam Yin Lau
IPC分类号： G02B635
CPC分类号： G02B6/3546 , G02B6/3512 , G02B6/356 , G02B6/357 , G02B6/3572 , G02B6/3576 , G02B6/3578 , G02B6/3582
摘要： An optical switch module having a movable mirror disposed between two fixed mirrors. All three mirrors are aligned parallel to each other in a linear array to form a crossbar switch. The movable mirror moves between a first position and a second position to selectively couple optical signals between two inputs and two outputs. The basic switch module may be scaled up to form an apparatus that incorporates N movable mirrors and N+1 fixed mirrors, where N is an integer greater than zero. Such an apparatus can accommodate 2N fiber inputs and 2N fiber outputs, e.g., in an optical add/drop multiplexer (OADM). The parallel configuration of the switch module takes advantage of existing lens array and fiber V-groove technology to facilitate integration of the fibers and collimators in the module, thereby reducing the difficulty and cost associated with alignment, assembly, and packaging.
摘要翻译：一种具有设置在两个固定镜之间的可移动镜的光学开关模块。所有三个反射镜以线性阵列彼此平行排列以形成交叉开关。可移动镜在第一位置和第二位置之间移动，以在两个输入和两个输出之间选择性地耦合光学信号。基本开关模块可以按比例扩大以形成一个装有N个可移动镜和N + 1个固定镜的装置，其中N是大于零的整数。这种装置可以容纳2N个光纤输入和2N个光纤输出，例如在光分插复用器（OADM）中。开关模块的并联配置利用了现有的透镜阵列和光纤V槽技术，便于将光纤和准直器集成在模块中，从而降低与对准，组装和封装相关的难度和成本。

6. 发明授权

US06819822B2 Two-dimensional gimbaled scanning actuator with vertical electrostatic comb-drive for actuation and/or sensing 有权
标题翻译：具有垂直静电梳状驱动器的二维万向扫描执行器用于致动和/或感测
公开(公告)号：US06819822B2
公开(公告)日：2004-11-16
申请号：US09751660
申请日：2000-12-28
申请人： Behrang Behin , Michael J. Daneman , Meng-Hsiung Kiang , Kam-Yin Lau , Satinderpall Pannu
发明人： Behrang Behin , Michael J. Daneman , Meng-Hsiung Kiang , Kam-Yin Lau , Satinderpall Pannu
IPC分类号： G02B635
CPC分类号： G02B6/3556 , B81B3/0021 , B81B2201/033 , B81B2201/045 , B81B2203/0181 , B81B2203/058 , B81B2207/07 , B81C1/00214 , G02B6/3512 , G02B6/3518 , G02B6/3542 , G02B6/3546 , G02B6/356 , G02B6/357 , G02B6/3584 , G02B26/0833 , G02B26/085 , G02B26/0858 , G02B26/0866 , H02N1/008
摘要： A two-dimensional scanner consists of a rotatable gimbal structure with vertical electrostatic comb-drive actuators and sensors. The scanner's two axes of rotation may be controlled independently by activating two sets of vertical comb-drive actuators. The first set of vertical comb-drive actuator is positioned in between a outer frame of the gimbal structure and the base, and the second set of vertical comb-drive actuator is positioned in between the inner part of the gimbal structure and the outer frame of the gimbal structure. The inner part of the gimbal structure may include a reflective surface, and the device may be used as a mirror. Furthermore, the capacitance of the vertical comb-drives may be measured to monitor the angular position of the mirror, and the capacitive position-monitoring signal may be used to implement closed-loop feedback control of the mirror angle. The two-dimensional scanner may be fabricated in a semiconductor process. Two-dimensional scanners may be used to produce fiber-optic switches.
摘要翻译：二维扫描器由可旋转的万向架结构与垂直静电梳状驱动致动器和传感器组成。扫描仪的两个旋转轴可以通过激活两组垂直梳齿驱动执行器来独立控制。第一组垂直梳齿驱动致动器位于万向架结构的外框架和基座之间，第二组垂直梳齿驱动致动器定位在万向架结构的内部和外框之间万向架结构。万向节结构的内部可以包括反射表面，并且该装置可以用作反射镜。此外，可以测量垂直梳状驱动器的电容以监视反射镜的角度位置，并且可以使用电容位置监视信号来实现镜角的闭环反馈控制。二维扫描器可以在半导体工艺中制造。二维扫描仪可用于生产光纤交换机。

7. 发明授权

US06764936B2 Mechanical landing pad formed on the underside of a MEMS device 有权
标题翻译：机械着陆垫形成在MEMS器件的下侧
公开(公告)号：US06764936B2
公开(公告)日：2004-07-20
申请号：US09912150
申请日：2001-07-23
申请人： Michael J. Daneman , Behrang Behin , Meng-Hsiung Kiang
发明人： Michael J. Daneman , Behrang Behin , Meng-Hsiung Kiang
IPC分类号： H01L2144
CPC分类号： G02B26/085 , B81B3/0008 , B81B3/001 , B81B3/0051 , G02B26/0833 , G02B26/0841
摘要： A device having a landing pad structure on an underside of a device and method for fabricating same. The device is formed from a device layer with at least one landing pad protruding from an underside thereof. The landing pad is attached to the device layer by a plug passing through an opening in the device layer. The device may be attached to the device layer by one or more compliant flexures, which allow the device to rotate in and out of a plane defined by the device layer. The landing pads are fabricated by forming one or more vias through the device layer. An underlying sacrificial layer is then partially etched to form one or more depressions at locations corresponding to locations of the vias in the device layer. The vias and depressions are then filled with a landing pad material to form a structure having one or more landing pads protruding from an underside of the device layer. The sacrificial layer is subsequently removed to release the device. Particular embodiments of both methods may be applied to fabricating microelectromechanical systems (MEMS) especially MEMS mirrors. The various embodiments are well suited to use with silicon on insulator (SOI) substrates.
摘要翻译：一种在装置的下侧具有着陆垫结构的装置及其制造方法。该装置由具有从其下侧突出的至少一个着陆板的装置层形成。着陆垫通过穿过装置层中的开口的塞子附接到装置层。该装置可以通过一个或多个柔顺的挠曲件附接到装置层，这允许装置在由装置层限定的平面内进出。通过形成穿过器件层的一个或多个通孔来制造着陆焊盘。然后将底层牺牲层部分地蚀刻以在对应于器件层中的通孔的位置的位置处形成一个或多个凹陷。通孔和凹陷然后用着陆垫材料填充以形成具有从装置层的下侧突出的一个或多个着陆垫的结构。随后去除牺牲层以释放该装置。两种方法的特定实施例可以应用于制造微机电系统（MEMS），特别是MEMS镜。各种实施例非常适合于与绝缘体上硅（SOI）衬底一起使用。

8. 发明授权

US06788520B1 Capacitive sensing scheme for digital control state detection in optical switches 有权
标题翻译：光开关中数字控制状态检测的电容感测方案
公开(公告)号：US06788520B1
公开(公告)日：2004-09-07
申请号：US09724948
申请日：2000-11-28
申请人： Behrang Behin , Michael J. Daneman , Meng-Hsiung Kiang , Kam-Yin Lau , Timothy E. Beerling
发明人： Behrang Behin , Michael J. Daneman , Meng-Hsiung Kiang , Kam-Yin Lau , Timothy E. Beerling
IPC分类号： G02B2608
CPC分类号： G02B6/358 , G02B6/3512 , G02B6/3546 , G02B6/357 , G02B6/359
摘要： Disclosed is an apparatus and method for detecting whether rotatable MEMS elements are in the “on” or “off” position. Embodiments of the invention have application in devices switches that employ mirrors that move between an “on” or “off” position, wherein they reflect light from an input fiber into an output fiber in the “on” position, and allow the light to pass in the “off” position. Electrodes are positioned in the device such that the mirrors are close to, and therefor capacitively coupled to, a different electrode depending on whether they are in the “on” or “off” position. This invention is especially useful for switches that already employ electrodes for electrostatic clamping of mirrors in one or more positions, since those same electrodes can be used both to electrostatically clamp the mirrors and to sense their position. The method described in this invention comprises sensing of the capacitance between the mirrors and the one or more electrodes used to clamp the mirrors in its one or more position in order to detect which of the positions the mirrors are clamped in. Furthermore, the magnitude of the capacitances can be monitored to detect improper clamping.
摘要翻译：公开了一种用于检测可旋转MEMS元件是处于“开”还是“关”位置的装置和方法。本发明的实施例可应用于使用在“开”或“关”位置之间移动的反射镜的装置开关中，其中它们将来自输入光纤的光反射到处于“开”位置的输出光纤，并允许光通过在“关”位置。电极被定位在设备中，使得反射镜接近并因此电容耦合到不同的电极，这取决于它们是处于“开”还是“关”位置。本发明对于已经使用用于在一个或多个位置中的反射镜的静电夹持的电极的开关特别有用，因为这些相同的电极可以用于静电夹紧反射镜并感测其位置。本发明描述的方法包括检测反射镜之间的电容和用于将反射镜夹持在其一个或多个位置中的一个或多个电极，以便检测反射镜夹在哪一个位置。此外，可以监控电容以检测不正确的夹紧。

9. 发明授权

US06586841B1 Mechanical landing pad formed on the underside of a MEMS device 有权
标题翻译：机械着陆垫形成在MEMS器件的下侧
公开(公告)号：US06586841B1
公开(公告)日：2003-07-01
申请号：US09546432
申请日：2000-04-10
申请人： Michael J. Daneman , Behrang Behin , Meng-Hsiung Kiang
发明人： Michael J. Daneman , Behrang Behin , Meng-Hsiung Kiang
IPC分类号： H01L2940
CPC分类号： G02B26/085 , B81B3/0008 , B81B3/001 , B81B3/0051 , G02B26/0833 , G02B26/0841
摘要： A device having a landing pad structure on an underside of a device and method for fabricating same. The device is formed from a device layer with at least one landing pad protruding from an underside thereof. The landing pad is attached to the device layer by a plug passing through an opening in the device layer. The device may be attached to the device layer by one or more compliant flexures, which allow the device to rotate in and out of a plane defined by the device layer. The landing pads are fabricated by forming one or more vias through the device layer. An underlying sacrificial layer is then partially etched to form one or more depressions at locations corresponding to locations of the vias in the device layer. The vias and depressions are then filled with a landing pad material to form a structure having one or more landing pads protruding from an underside of the device layer. The sacrificial layer is subsequently removed to release the device. Particular embodiments of both methods may be applied to fabricating microelectromechanical systems (MEMS) especially MEMS mirrors. The various embodiments are well suited to use with silicon on insulator (SOI) substrates.
摘要翻译：一种在装置的下侧具有着陆垫结构的装置及其制造方法。该装置由具有从其下侧突出的至少一个着陆板的装置层形成。着陆垫通过穿过装置层中的开口的塞子附接到装置层。该装置可以通过一个或多个柔顺的挠曲件附接到装置层，这允许装置在由装置层限定的平面内进出。通过形成穿过器件层的一个或多个通孔来制造着陆焊盘。然后将底层牺牲层部分地蚀刻以在对应于器件层中的通孔的位置的位置处形成一个或多个凹陷。通孔和凹陷然后用着陆垫材料填充以形成具有从装置层的下侧突出的一个或多个着陆垫的结构。随后去除牺牲层以释放该装置。两种方法的特定实施例可以应用于制造微机电系统（MEMS），特别是MEMS镜。各种实施例非常适合于与绝缘体上硅（SOI）衬底一起使用。

10. 发明授权

US07023604B2 Three dimensional optical switches and beam steering modules 有权
标题翻译：三维光开关和光束转向模块
公开(公告)号：US07023604B2
公开(公告)日：2006-04-04
申请号：US09812066
申请日：2001-03-17
申请人： Behrang Behin , Robert Conant , Michael J. Daneman , David Horsley , Meng-Hsiung Kiang , David Lerner , Satinderpall Pannu
发明人： Behrang Behin , Robert Conant , Michael J. Daneman , David Horsley , Meng-Hsiung Kiang , David Lerner , Satinderpall Pannu
IPC分类号： C02B26/00 , C02B26/08 , C02B6/26
CPC分类号： G02B6/3556 , G02B6/3512 , G02B6/3588
摘要： A beam steering module comprised of a mirror stack array in close proximity to a collimator array controllably steers photons along two axis and in a direction substantially less than 90 degrees to the collimator orientation. Several configurations of the module are described using single and double axis mirror rotation and relay optics. Optical telecommunications switches are shown using modules coupled to each other along flat and curved surfaces, with and without use of fold mirror and enabling a plurality of configuration options including photodetector optical power monitoring schemes that require no external power taps.
摘要翻译：光束转向模块包括靠近准直器阵列的反射镜堆叠阵列，其可控制地沿着两个轴线并且沿与准直器取向基本上小于90度的方向导引光子。使用单轴和双轴镜旋转和中继光学器件描述了该模块的几种配置。光通信开关被示出为使用具有和不使用折叠镜的平面和弯曲表面彼此耦合的模块，并且实现多个配置选项，包括不需要外部电源抽头的光电检测器光功率监控方案。

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