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1. 发明申请

US20060049826A1 Optical cross-connect system 有权
标题翻译：光交叉连接系统
公开(公告)号：US20060049826A1
公开(公告)日：2006-03-09
申请号：US10469516
申请日：2002-03-01
申请人： Michael Daneman , Franklin Wall , Behrang Behin , Murali Chaparala , Mark Chang , Scott Dalton , Timothy Beerling , Stephen Panyko , Meng-Hsiung Kiang , Boris Kobrin , Chuang-Chia Lin
发明人： Michael Daneman , Franklin Wall , Behrang Behin , Murali Chaparala , Mark Chang , Scott Dalton , Timothy Beerling , Stephen Panyko , Meng-Hsiung Kiang , Boris Kobrin , Chuang-Chia Lin
IPC分类号： G01B7/14
CPC分类号： G02B6/3518 , G02B6/3546 , G02B6/356 , G02B6/357 , G02B6/3572 , G02B6/3584 , G02B26/0841
摘要： An optical cross-connect switch comprises a base (216), a flap (211) and one or more electrically conductive landing pads (222) connected to the flap (211). The flap (211) has a bottom portion that is movably coupled to the base (216) such that the flap (211) is movable with respect to a plane of the base (216) from a first orientation to a second orientation. The one or more landing pads (222) are electrically isolated from the flap (211) and electrically coupled to be equipotential with a landing surface.
摘要翻译：光学交叉连接开关包括底座（216），翼片（211）和连接到翼片（211）的一个或多个导电着陆垫（222）。翼片（211）具有可移动地联接到基部（216）的底部部分，使得翼片（211）能够相对于基部（216）的平面从第一方向移动到第二方向。一个或多个着陆垫（222）与翼片（211）电隔离并且电耦合以与着陆表面等电位。

2. 发明授权

US06473544B1 Optical switch having equalized beam spreading in all connections 有权
标题翻译：光开关在所有连接中具有均衡的光束扩展
公开(公告)号：US06473544B1
公开(公告)日：2002-10-29
申请号：US09518754
申请日：2000-03-03
申请人： Michael Daneman , Behrang Behin , Meng-Hsiung Kiang , Kam Yin Lau
发明人： Michael Daneman , Behrang Behin , Meng-Hsiung Kiang , Kam Yin Lau
IPC分类号： G02B626
CPC分类号： G02B6/3582 , G02B6/3512 , G02B6/3546
摘要： An optical crossbar switch having refractive or reflective components for equalizing beam spreading and diffraction in all the connections. The optical fibers or waveguides coupled to the switch are not staggered, but are parallel as in a conventional fiber array. The refractive component is disposed between the switch and the input optical fibers. Preferably, a similar refractive component is disposed between the output optical fibers and the switch. The refractive component can be a stairstep block made of glass, silicon or silica. Light from each input fiber travels through a well-defined thickness of the stairstep block. Since the block has a refractive index greater than the surrounding atmosphere, the wavelength in reduced within the block, and beam spreading and diffraction are reduced.
摘要翻译：具有用于均衡所有连接中的光束扩散和衍射的折射或反射分量的光学交叉开关。耦合到开关的光纤或波导不是交错的，而是像传统的光纤阵列那样平行。折射分量设置在开关和输入光纤之间。优选地，在输出光纤和开关之间设置类似的折射分量。折射分量可以是由玻璃，硅或二氧化硅制成的稳态块。来自每个输入光纤的光线穿过明显的厚度的步态块。由于该块具有大于周围大气的折射率，因此在块内减少的波长以及光束扩散和衍射减小。

3. 发明授权

US06449407B1 Optical switch having equalized beam spreading in all connections 有权
标题翻译：光开关装置及组装方法
公开(公告)号：US06449407B1
公开(公告)日：2002-09-10
申请号：US09518751
申请日：2000-03-03
申请人： Meng-Hsiung Kiang , Behrang Behin , Michael Daneman , Kam Yin Lau
发明人： Meng-Hsiung Kiang , Behrang Behin , Michael Daneman , Kam Yin Lau
IPC分类号： G02B635
CPC分类号： G02B6/3546 , G02B6/3512 , G02B6/356 , G02B6/357 , G02B6/3572 , G02B6/3576 , G02B6/3578 , G02B6/3582
摘要： An optical switch module having a movable mirror disposed between two fixed mirrors. All three mirrors are aligned parallel to each other in a linear array to form a crossbar switch. The movable mirror moves between a first position and a second position to selectively couple optical signals between two inputs and two outputs. The basic switch module may be scaled up to form an apparatus that incorporates N movable mirrors and N+1 fixed mirrors, where N is an integer greater than zero. Such an apparatus can accommodate 2N fiber inputs and 2N fiber outputs, e.g., in an optical add/drop multiplexer (OADM). The parallel configuration of the switch module takes advantage of existing lens array and fiber V-groove technology to facilitate integration of the fibers and collimators in the module, thereby reducing the difficulty and cost associated with alignment, assembly, and packaging.
摘要翻译：一种具有设置在两个固定镜之间的可移动镜的光学开关模块。所有三个反射镜以线性阵列彼此平行排列以形成交叉开关。可移动镜在第一位置和第二位置之间移动，以在两个输入和两个输出之间选择性地耦合光学信号。基本开关模块可以按比例扩大以形成一个装有N个可移动镜和N + 1个固定镜的装置，其中N是大于零的整数。这种装置可以容纳2N个光纤输入和2N个光纤输出，例如在光分插复用器（OADM）中。开关模块的并联配置利用了现有的透镜阵列和光纤V槽技术，便于将光纤和准直器集成在模块中，从而降低与对准，组装和封装相关的难度和成本。

4. 发明授权

US09540230B2 Methods for CMOS-MEMS integrated devices with multiple sealed cavities maintained at various pressures 有权
标题翻译：具有保持在各种压力下的多个密封腔的CMOS-MEMS集成器件的方法
公开(公告)号：US09540230B2
公开(公告)日：2017-01-10
申请号：US13535180
申请日：2012-06-27
申请人： Michael Daneman , Martin Lim , Kegang Huang , Igor Tchertkov
发明人： Michael Daneman , Martin Lim , Kegang Huang , Igor Tchertkov
IPC分类号： H01L23/02 , H01L21/54 , H01L29/84 , B81B7/02 , B81C1/00
CPC分类号： B81B7/02 , B81C1/0023 , B81C1/00293 , B81C2203/0145 , B81C2203/019
摘要： A Microelectromechanical systems (MEMS) structure comprises a MEMS wafer. A MEMS wafer includes a handle wafer with cavities bonded to a device wafer through a dielectric layer disposed between the handle and device wafers. The MEMS wafer also includes a moveable portion of the device wafer suspended over a cavity in the handle wafer. Four methods are described to create two or more enclosures having multiple gas pressure or compositions on a single substrate including, each enclosure containing a moveable portion. The methods include: A. Forming a secondary sealed enclosure, B. Creating multiple ambient enclosures during wafer bonding, C. Creating and breaching an internal gas reservoir, and D. Forming and subsequently sealing a controlled leak/breach into the enclosure.
摘要翻译：微机电系统（MEMS）结构包括MEMS晶片。 MEMS晶片包括具有通过布置在手柄和器件晶片之间的电介质层与器件晶片结合的空腔的手柄晶片。 MEMS晶片还包括悬挂在处理晶片中的空腔上的器件晶片的可移动部分。描述了四种方法以在单个基底上产生具有多个气体压力或组成的两个或更多个外壳，包括每个外壳包含可移动部分。方法包括：A.形成二次密封外壳，B.在晶片接合期间创建多个环境外壳，C.创建和破坏内部气体储存器，以及D.形成并随后将受控的泄漏/泄漏密封到外壳中。

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