专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

US20070020867A1 Buried stress isolation for high-performance CMOS technology 失效
标题翻译：埋地应力隔离用于高性能CMOS技术
公开(公告)号：US20070020867A1
公开(公告)日：2007-01-25
申请号：US11183062
申请日：2005-07-15
申请人： MeiKei Ieong , Zhibin Ren , Haizhou Yin
发明人： MeiKei Ieong , Zhibin Ren , Haizhou Yin
IPC分类号： H01L21/336
CPC分类号： H01L29/7846 , H01L21/823807 , H01L21/823878 , H01L21/84 , H01L27/1203 , H01L29/66772 , H01L29/78654 , H01L29/78696
摘要： A field effect transistor (FET) comprises a substrate; a buried oxide (BOX) layer over the substrate; a current channel region over the BOX layer; source/drain regions adjacent to the current channel region; a buried high-stress film in the BOX layer and regions of the substrate, wherein the high-stress film comprises any of a compressive film and a tensile film; an insulating layer covering the buried high-stress film; and a gate electrode over the current channel region, wherein the high-stress film is adapted to create mechanical stress in the current channel region, wherein the high-stress film is adapted to stretch the current channel region in order to create the mechanical stress in the current channel region; wherein the mechanical stress comprises any of compressive stress and tensile stress, and wherein the mechanical stress caused by the high-stress film causes an increased charge carrier mobility in the current channel region.
摘要翻译：场效应晶体管（FET）包括衬底; 在衬底上的掩埋氧化物（BOX）层; BOX层上的当前通道区域; 源极/漏极区域与当前沟道区域相邻; BOX层中的埋置的高应力膜和衬底的区域，其中高应力膜包括任何压缩膜和拉伸膜; 覆盖埋置的高应力膜的绝缘层; 以及在电流通道区域上的栅电极，其中所述高应力膜适于在所述电流通道区域中产生机械应力，其中所述高应力膜适于拉伸所述电流通道区域，以便产生机械应力当前通道区域; 其中机械应力包括任何压缩应力和拉伸应力，并且其中由高应力膜引起的机械应力导致当前通道区域中电荷载流子迁移率增加。

2. 发明授权

US07704839B2 Buried stress isolation for high-performance CMOS technology 失效
标题翻译：埋地应力隔离用于高性能CMOS技术
公开(公告)号：US07704839B2
公开(公告)日：2010-04-27
申请号：US12099195
申请日：2008-04-08
申请人： MeiKei Ieong , Zhibin Ren , Haizhou Yin
发明人： MeiKei Ieong , Zhibin Ren , Haizhou Yin
IPC分类号： H01L21/336
CPC分类号： H01L29/7846 , H01L21/823807 , H01L21/823878 , H01L21/84 , H01L27/1203 , H01L29/66772 , H01L29/78654 , H01L29/78696
摘要： A field effect transistor (FET) comprises a substrate; a buried oxide (BOX) layer over the substrate; a current channel region over the BOX layer; source/drain regions adjacent to the current channel region; a buried high-stress film in the BOX layer and regions of the substrate, wherein the high-stress film comprises any of a compressive film and a tensile film; an insulating layer covering the buried high-stress film; and a gate electrode over the current channel region, wherein the high-stress film is adapted to create mechanical stress in the current channel region, wherein the high-stress film is adapted to stretch the current channel region in order to create the mechanical stress in the current channel region; wherein the mechanical stress comprises any of compressive stress and tensile stress, and wherein the mechanical stress caused by the high-stress film causes an increased charge carrier mobility in the current channel region.
摘要翻译：场效应晶体管（FET）包括衬底; 在衬底上的掩埋氧化物（BOX）层; BOX层上的当前通道区域; 源极/漏极区域与当前沟道区域相邻; BOX层中的埋置的高应力膜和衬底的区域，其中高应力膜包括任何压缩膜和拉伸膜; 覆盖埋置的高应力膜的绝缘层; 以及在电流通道区域上的栅电极，其中所述高应力膜适于在所述电流通道区域中产生机械应力，其中所述高应力膜适于拉伸所述电流通道区域，以便产生机械应力当前通道区域; 其中机械应力包括任何压缩应力和拉伸应力，并且其中由高应力膜引起的机械应力导致当前通道区域中电荷载流子迁移率增加。

3. 发明申请

US20080185658A1 Buried Stress Isolation for High-Performance CMOS Technology 失效
标题翻译：埋地应力隔离用于高性能CMOS技术
公开(公告)号：US20080185658A1
公开(公告)日：2008-08-07
申请号：US12099195
申请日：2008-04-08
申请人： MeiKei Ieong , Zhibin Ren , Haizhou Yin
发明人： MeiKei Ieong , Zhibin Ren , Haizhou Yin
IPC分类号： H01L27/08 , H01L21/8238
CPC分类号： H01L29/7846 , H01L21/823807 , H01L21/823878 , H01L21/84 , H01L27/1203 , H01L29/66772 , H01L29/78654 , H01L29/78696
摘要： A field effect transistor (FET) comprises a substrate; a buried oxide (BOX) layer over the substrate; a current channel region over the BOX layer; source/drain regions adjacent to the current channel region; a buried high-stress film in the BOX layer and regions of the substrate, wherein the high-stress film comprises any of a compressive film and a tensile film; an insulating layer covering the buried high-stress film; and a gate electrode over the current channel region, wherein the high-stress film is adapted to create mechanical stress in the current channel region, wherein the high-stress film is adapted to stretch the current channel region in order to create the mechanical stress in the current channel region; wherein the mechanical stress comprises any of compressive stress and tensile stress, and wherein the mechanical stress caused by the high-stress film causes an increased charge carrier mobility in the current channel region.
摘要翻译：场效应晶体管（FET）包括衬底; 在衬底上的掩埋氧化物（BOX）层; BOX层上的当前通道区域; 源极/漏极区域与当前沟道区域相邻; BOX层中的埋置的高应力膜和衬底的区域，其中高应力膜包括任何压缩膜和拉伸膜; 覆盖埋置的高应力膜的绝缘层; 以及在电流通道区域上的栅电极，其中所述高应力膜适于在所述电流通道区域中产生机械应力，其中所述高应力膜适于拉伸所述电流通道区域，以便产生机械应力当前通道区域; 其中机械应力包括任何压缩应力和拉伸应力，并且其中由高应力膜引起的机械应力导致当前通道区域中电荷载流子迁移率增加。

4. 发明授权

US07384851B2 Buried stress isolation for high-performance CMOS technology 失效
标题翻译：埋地应力隔离用于高性能CMOS技术
公开(公告)号：US07384851B2
公开(公告)日：2008-06-10
申请号：US11183062
申请日：2005-07-15
申请人： MeiKei Ieong , Zhibin Ren , Haizhou Yin
发明人： MeiKei Ieong , Zhibin Ren , Haizhou Yin
IPC分类号： H01L21/336
CPC分类号： H01L29/7846 , H01L21/823807 , H01L21/823878 , H01L21/84 , H01L27/1203 , H01L29/66772 , H01L29/78654 , H01L29/78696
摘要： A field effect transistor (FET) comprises a substrate; a buried oxide (BOX) layer over the substrate; a current channel region over the BOX layer; source/drain regions adjacent to the current channel region; a buried high-stress film in the BOX layer and regions of the substrate, wherein the high-stress film comprises any of a compressive film and a tensile film; an insulating layer covering the buried high-stress film; and a gate electrode over the current channel region, wherein the high-stress film is adapted to create mechanical stress in the current channel region, wherein the high-stress film is adapted to stretch the current channel region in order to create the mechanical stress in the current channel region; wherein the mechanical stress comprises any of compressive stress and tensile stress, and wherein the mechanical stress caused by the high-stress film causes an increased charge carrier mobility in the current channel region.
摘要翻译：场效应晶体管（FET）包括衬底; 在衬底上的掩埋氧化物（BOX）层; BOX层上的当前通道区域; 源极/漏极区域与当前沟道区域相邻; BOX层中的埋置的高应力膜和衬底的区域，其中高应力膜包括任何压缩膜和拉伸膜; 覆盖埋置的高应力膜的绝缘层; 以及在电流通道区域上的栅电极，其中所述高应力膜适于在所述电流通道区域中产生机械应力，其中所述高应力膜适于拉伸所述电流通道区域，以便产生机械应力当前通道区域; 其中机械应力包括任何压缩应力和拉伸应力，并且其中由高应力膜引起的机械应力导致当前通道区域中电荷载流子迁移率增加。

5. 发明授权

US07002214B1 Ultra-thin body super-steep retrograde well (SSRW) FET devices 有权
标题翻译：超薄体超陡逆行井（SSRW）FET器件
公开(公告)号：US07002214B1
公开(公告)日：2006-02-21
申请号：US10710736
申请日：2004-07-30
申请人： Diane C. Boyd , Judson R. Holt , MeiKei Ieong , Renee T. Mo , Zhibin Ren , Ghavam G. Shahidi
发明人： Diane C. Boyd , Judson R. Holt , MeiKei Ieong , Renee T. Mo , Zhibin Ren , Ghavam G. Shahidi
IPC分类号： H01L27/12
CPC分类号： H01L27/1203 , H01L21/76283 , H01L21/823892 , H01L21/84 , H01L29/66772 , H01L29/78609 , H01L29/78618 , H01L29/78696
摘要： A method of manufacture of a Super Steep Retrograde Well Field Effect Transistor device starts with an SOI layer formed on a substrate, e.g. a buried oxide layer. Thin the SOI layer to form an ultra-thin SOI layer. Form an isolation trench separating the SOI layer into N and P ground plane regions. Dope the N and P ground plane regions formed from the SOI layer with high levels of N-type and P-type dopant. Form semiconductor channel regions above the N and P ground plane regions. Form FET source and drain regions and gate electrode stacks above the channel regions. Optionally form a diffusion retarding layer between the SOI ground plane regions and the channel regions.
摘要翻译：超陡逆行井场效应晶体管器件的制造方法从形成在衬底上的SOI层开始。掩埋氧化层。使SOI层变薄以形成超薄SOI层。形成将SOI层分离成N和P接地平面区域的隔离沟槽。用高水平的N型和P型掺杂剂掺杂由SOI层形成的N和P接地平面区域。在N和P接地平面区域之上形成半导体沟道区。在沟道区域上方形成FET源极和漏极区域以及栅极电极堆叠。可选地，在SOI接地平面区域和沟道区域之间形成扩散延迟层。

6. 发明授权

US07459752B2 Ultra thin body fully-depleted SOI MOSFETs 有权
标题翻译：超薄体全耗尽SOI MOSFET
公开(公告)号：US07459752B2
公开(公告)日：2008-12-02
申请号：US11473757
申请日：2006-06-23
申请人： Bruce B. Doris , Meikei Ieong , Zhibin Ren , Paul M. Solomon , Min Yang
发明人： Bruce B. Doris , Meikei Ieong , Zhibin Ren , Paul M. Solomon , Min Yang
IPC分类号： H01L27/12
CPC分类号： H01L29/78696 , H01L29/66545 , H01L29/66772
摘要： Ultra thin body fully-depleted silicon-on-insulator (SOI) metal-oxide-semiconductor field-effect-transistors (MOSFETs) in which the SOI thickness changes with gate-length variations thereby minimizing the threshold voltage variations that are typically caused by SOI thickness and gate-length variations are provided. Such a SOI MOSFET may include a SOI substrate having a SOI layer in which a first portion thereof has a thickness of less than 20 nm; a gate including a gate dielectric and a gate electrode located atop the first portion of the SOI layer having the thickness, the gate electrode having an upper surface and a bottom surface that have the same length or the bottom surface has a length that is greater than the upper surface; and source and drain diffusion regions located in a second portion of the SOI layer that is adjacent to the first portion, and the second portion of the SOI layer is thicker than the first portion.
摘要翻译：超薄体绝缘体（SOI）金属氧化物半导体场效应晶体管（MOSFET），其中SOI厚度随栅极长度变化而变化，从而最小化通常由SOI引起的阈值电压变化提供了厚度和栅极长度的变化。这样的SOI MOSFET可以包括具有SOI层的SOI衬底，其中第一部分的厚度小于20nm; 包括栅电介质的栅极和位于具有厚度的SOI层的第一部分顶部的栅电极，栅极具有具有相同长度或底表面的上表面和底表面，其长度大于上表面以及位于SOI层的与第一部分相邻的第二部分中的源极和漏极扩散区，并且SOI层的第二部分比第一部分厚。

7. 发明授权

US07091069B2 Ultra thin body fully-depleted SOI MOSFETs 失效
标题翻译：超薄体全耗尽SOI MOSFET
公开(公告)号：US07091069B2
公开(公告)日：2006-08-15
申请号：US10710273
申请日：2004-06-30
申请人： Bruce B. Doris , Meikei Ieong , Zhibin Ren , Paul M. Solomon , Min Yang
发明人： Bruce B. Doris , Meikei Ieong , Zhibin Ren , Paul M. Solomon , Min Yang
IPC分类号： H01L27/01 , H01L21/00 , H01L21/356
CPC分类号： H01L29/78696 , H01L29/66545 , H01L29/66772
摘要： A method of creating ultra tin body fully-depleted SOI MOSFETs in which the SOI thickness changes with gate-length variations thereby minimizing the threshold voltage variations that are typically caused by SOI thickness and gate-length variations is provided. The method of present invention uses a replacement gate process in which nitrogen is implanted to selectively retard oxidation during formation of a recessed channel. A self-limited chemical oxide removal (COR) processing step can be used to improve the control in the recessed channel step. If the channel is doped, the inventive method is designed such that the thickness of the SOI layer is increased with shorter channel length. If the channel is undoped or counter-doped, the inventive method is designed such that the thickness of the SOI layer is decreased with shorter channel length.
摘要翻译：提供了一种制造超薄体全耗尽SOI SOI的方法，其中SOI厚度随着栅极长度变化而变化，从而最小化通常由SOI厚度和栅极长度变化引起的阈值电压变化。本发明的方法使用其中注入氮的替代浇口工艺，以便在形成凹陷通道期间选择性地延迟氧化。可以使用自限制化学氧化物去除（COR）处理步骤来改善凹陷通道步骤中的控制。如果沟道被掺杂，则本发明的方法被设计成使得SOI层的厚度随着沟道长度的增加而增加。如果通道是未掺杂或反掺杂的，则本发明的方法被设计成使得SOI层的厚度随着沟道长度的减小而减小。

8. 发明申请

US20060237791A1 Ultra thin body fully-depleted SOI MOSFETs 有权
标题翻译：超薄体全耗尽SOI MOSFET
公开(公告)号：US20060237791A1
公开(公告)日：2006-10-26
申请号：US11473757
申请日：2006-06-23
申请人： Bruce Doris , Meikei Ieong , Zhibin Ren , Paul Solomon , Min Yang
发明人： Bruce Doris , Meikei Ieong , Zhibin Ren , Paul Solomon , Min Yang
IPC分类号： H01L27/12
CPC分类号： H01L29/78696 , H01L29/66545 , H01L29/66772
摘要： A method of creating ultra thin body fully-depleted SOI MOSFETs in which the SOI thickness changes with gate-length variations thereby minimizing the threshold voltage variations that are typically caused by SOI thickness and gate-length variations is provided. The method of present invention uses a replacement gate process in which nitrogen is implanted to selectively retard oxidation during formation of a recessed channel. A self-limited chemical oxide removal (COR) processing step can be used to improve the control in the recessed channel step. If the channel is doped, the inventive method is designed such that the thickness of the SOI layer is increased with shorter channel length. If the channel is undoped or counter-doped, the inventive method is designed such that the thickness of the SOI layer is decreased with shorter channel length.
摘要翻译：提供了一种制造超薄体全耗尽SOI MOSFET的方法，其中SOI厚度随栅极长度变化而变化，从而最小化通常由SOI厚度和栅极长度变化引起的阈值电压变化。本发明的方法使用其中注入氮的替代浇口工艺，以便在形成凹陷通道期间选择性地延迟氧化。可以使用自限制化学氧化物去除（COR）处理步骤来改善凹陷通道步骤中的控制。如果沟道被掺杂，则本发明的方法被设计成使得SOI层的厚度随着沟道长度的增加而增加。如果通道是未掺杂或反掺杂的，则本发明的方法被设计成使得SOI层的厚度随着沟道长度的减小而减小。

9. 发明申请

US20060022270A1 ULTRA-THIN BODY SUPER-STEEP RETROGRADE WELL (SSRW) FET DEVICES 有权
标题翻译：超声波超声波超声波（SSRW）FET器件
公开(公告)号：US20060022270A1
公开(公告)日：2006-02-02
申请号：US10710736
申请日：2004-07-30
申请人： Diane Boyd , Judson Holt , MeiKei Ieong , Renee Mo , Zhibin Ren , Ghavam Shahidi
发明人： Diane Boyd , Judson Holt , MeiKei Ieong , Renee Mo , Zhibin Ren , Ghavam Shahidi
IPC分类号： H01L27/01
CPC分类号： H01L27/1203 , H01L21/76283 , H01L21/823892 , H01L21/84 , H01L29/66772 , H01L29/78609 , H01L29/78618 , H01L29/78696
摘要： A method of manufacture of a Super Steep Retrograde Well Field Effect Transistor device starts with an SOI layer formed on a substrate, e.g. a buried oxide layer. Thin the SOI layer to form an ultra-thin SOI layer. Form an isolation trench separating the SOI layer into N and P ground plane regions. Dope the N and P ground plane regions formed from the SOI layer with high levels of N-type and P-type dopant. Form semiconductor channel regions above the N and P ground plane regions. Form FET source and drain regions and gate electrode stacks above the channel regions. Optionally form a diffusion retarding layer between the SOI ground plane regions and the channel regions.
摘要翻译：超陡逆行井场效应晶体管器件的制造方法从形成在衬底上的SOI层开始。掩埋氧化层。使SOI层变薄以形成超薄SOI层。形成将SOI层分离成N和P接地平面区域的隔离沟槽。用高水平的N型和P型掺杂剂掺杂由SOI层形成的N和P接地平面区域。在N和P接地平面区域之上形成半导体沟道区。在沟道区域上方形成FET源极和漏极区域以及栅极电极堆叠。可选地，在SOI接地平面区域和沟道区域之间形成扩散延迟层。

10. 发明申请

US20060001095A1 ULTRA THIN BODY FULLY-DEPLETED SOI MOSFETS 失效
标题翻译：超薄体全绝缘SOI MOSFET
公开(公告)号：US20060001095A1
公开(公告)日：2006-01-05
申请号：US10710273
申请日：2004-06-30
申请人： Bruce Doris , Meikei Ieong , Zhibin Ren , Paul Solomon , Min Yang
发明人： Bruce Doris , Meikei Ieong , Zhibin Ren , Paul Solomon , Min Yang
IPC分类号： H01L29/76 , H01L21/00
CPC分类号： H01L29/78696 , H01L29/66545 , H01L29/66772
摘要： A method of creating ultra tin body fully-depleted SOI MOSFETs in which the SOI thickness changes with gate-length variations thereby minimizing the threshold voltage variations that are typically caused by SOI thickness and gate-length variations is provided. The method of present invention uses a replacement gate process in which nitrogen is implanted to selectively retard oxidation during formation of a recessed channel. A self-limited chemical oxide removal (COR) processing step can be used to improve the control in the recessed channel step. If the channel is doped, the inventive method is designed such that the thickness of the SOI layer is increased with shorter channel length. If the channel is undoped or counter-doped, the inventive method is designed such that the thickness of the SOI layer is decreased with shorter channel length.
摘要翻译：提供了一种制造超薄体全耗尽SOI SOI的方法，其中SOI厚度随着栅极长度变化而变化，从而最小化通常由SOI厚度和栅极长度变化引起的阈值电压变化。本发明的方法使用其中注入氮的替代浇口工艺，以便在形成凹陷通道期间选择性地延迟氧化。可以使用自限制化学氧化物去除（COR）处理步骤来改善凹陷通道步骤中的控制。如果沟道被掺杂，则本发明的方法被设计成使得SOI层的厚度随着沟道长度的增加而增加。如果通道是未掺杂或反掺杂的，则本发明的方法被设计成使得SOI层的厚度随着沟道长度的减小而减小。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式