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1. 发明授权

US06540840B1 Vaporizer for MOCVD and method of vaporizing raw material solutions for MOCVD 有权
公开(公告)号：US06540840B1
公开(公告)日：2003-04-01
申请号：US09488764
申请日：2000-01-21
申请人： Masayuki Toda , Masaki Kusuhara , Mikio Doi , Masaru Umeda , Mitsuru Fukagawa , Yoichi Kanno , Osamu Uchisawa , Kohei Yamamoto , Toshikatu Meguro
发明人： Masayuki Toda , Masaki Kusuhara , Mikio Doi , Masaru Umeda , Mitsuru Fukagawa , Yoichi Kanno , Osamu Uchisawa , Kohei Yamamoto , Toshikatu Meguro
IPC分类号： C23C1600
CPC分类号： C23C16/4486 , C23C16/409
摘要： Disclosed is a vaporizer constituted of a dispersing section 8 and a vaporizing section 22. The dispersing section 8 comprises a gas introduction port 4 for introducing a carrier gas 3 under pressure into a gas passage, means for feeding raw material solutions 5a and 5b to the gas passage, and a gas outlet 7 for delivering the carrier gas containing the raw material solutions to the vaporizing section 22. The vaporizing section 22 comprises a vaporizing tube 20 having one end connected to a reaction tube of the MOCVD system and having the other end connected to the gas outlet 7 of the dispersing section 8, and heating means for heating the vaporizing tube 20. The vaporizing section 22 serves to heat and vaporize the raw material solution containing carrier gas 3 delivered from the dispersing section 8. The dispersing section 8 includes a dispersing section body 1 having a cylindrical hollow portion, and a rod 10 having an outer diameter smaller than the inner diameter of the cylindrical hollow portion. The rod 10 has a spiral groove 60 formed in the external periphery closer to the vaporizing section 22, the rod 10 being inserted into the cylindrical hollow portion.

2. 发明授权

US07744698B2 Vaporizer for MOCVD and method of vaporizing raw material solutions for MOCVD 有权
标题翻译：用于MOCVD的蒸发器和用于MOCVD的原料溶液的蒸发方法
公开(公告)号：US07744698B2
公开(公告)日：2010-06-29
申请号：US10310578
申请日：2002-12-05
申请人： Masayuki Toda , Masaki Kusuhara , Mikio Doi , Masaru Umeda , Mitsuru Fukagawa , Yoichi Kanno , Osamu Uchisawa , Kohei Yamamoto , Toshikatu Meguro
发明人： Masayuki Toda , Masaki Kusuhara , Mikio Doi , Masaru Umeda , Mitsuru Fukagawa , Yoichi Kanno , Osamu Uchisawa , Kohei Yamamoto , Toshikatu Meguro
IPC分类号： C23C16/00
CPC分类号： C23C16/4486 , C23C16/409
摘要： Disclosed is a vaporizer constituted of a dispersing section 8 and a vaporizing section 22. The dispersing section 8 comprises a gas introduction port 4 for introducing a carrier gas 3 under pressure into a gas passage, means for feeding raw material solutions 5a and 5b to the gas passage, and a gas outlet 7 for delivering the carrier gas containing the raw material solutions to the vaporizing section 22. The vaporizing section 22 comprises a vaporizing tube 20 having one end connected to a reaction tube of the MOCVD system and having the other end connected to the gas outlet 7 of the dispersing section 8, and heating means for heating the vaporizing tube 20. The vaporizing section 22 serves to heat and vaporize the raw material solution containing carrier gas 3 delivered from the dispersing section 8. The dispersing section 8 includes a dispersing section body 1 having a cylindrical hollow portion, and a rod 10 having an outer diameter smaller than the inner diameter of the cylindrical hollow portion. The rod 10 has a spiral groove 60 formed in the external periphery closer to the vaporizing section 22, the rod i0 being inserted into the cylindrical hollow portion.
摘要翻译：公开了由分散部8和蒸发部22构成的蒸发器。分散部8包括用于将载气3在压力下导入气体通道的气体导入口4，将原料溶液5a，5b供给到气体通道和用于将含有原料溶液的载气输送到汽化部分22的气体出口7.蒸发部分22包括蒸发管20，其一端连接到MOCVD系统的反应管，并具有另一端连接到分散部8的气体出口7，以及用于加热蒸发管20的加热装置。蒸发部22用于加热和蒸发从分散部8输送的含有载气3的原料溶液。分散部8 包括具有圆柱形中空部分的分散部分主体1和具有小于圆柱形内径的外径的杆10 l中空部分。杆10具有形成在更靠近蒸发部22的外周中的螺旋槽60，杆i0插入到圆筒形中空部中。

3. 发明授权

US06931203B2 Vaporizer for MOCVD and method of vaporizing raw material solutions for MOCVD 有权
标题翻译：用于MOCVD的蒸发器和用于MOCVD的原料溶液的蒸发方法
公开(公告)号：US06931203B2
公开(公告)日：2005-08-16
申请号：US10310564
申请日：2002-12-05
申请人： Masayuki Toda , Masaki Kusuhara , Mikio Doi , Masaru Umeda , Mitsuru Fukagawa , Yoichi Kanno , Osamu Uchisawa , Kohei Yamamoto , Toshikatu Meguro
发明人： Masayuki Toda , Masaki Kusuhara , Mikio Doi , Masaru Umeda , Mitsuru Fukagawa , Yoichi Kanno , Osamu Uchisawa , Kohei Yamamoto , Toshikatu Meguro
IPC分类号： H01L21/31 , C23C16/40 , C23C16/448 , H01L21/8242 , H01L27/108 , F22B29/06 , F02M15/04
CPC分类号： C23C16/4486 , C23C16/409
摘要： Disclosed is a vaporizer constituted of a dispersing section 8 and a vaporizing section 22. The dispersing section 8 comprises a gas introduction port 4 for introducing a carrier gas 3 under pressure into a gas passage, means for feeding raw material solutions 5a and 5b to the gas passage, and a gas outlet 7 for delivering the carrier gas containing the raw material solutions to the vaporizing section 22. The vaporizing section 22 comprises a vaporizing tube 20 having one end connected to a reaction tube of the MOCVD system and having the other end connected to the gas outlet 7 of the dispersing section 8, and heating means for heating the vaporizing tube 20. The vaporizing section 22 serves to heat and vaporize the raw material solution containing carrier gas 3 delivered from the dispersing section 8. The dispersing section 8 includes a dispersing section body 1 having a cylindrical hollow portion, and a rod 10 having an outer diameter smaller than the inner diameter of the cylindrical hollow portion. The rod 10 has a spiral groove 60 formed in the external periphery closer to the vaporizing section 22, the rod 10 being inserted into the cylindrical hollow portion.
摘要翻译：公开了由分散部8和蒸发部22构成的蒸发器。分散部8包括用于将载气3在压力下导入气体通道的气体导入口4，供给原料溶液5a，5b的装置和用于将含有原料溶液的载气输送到汽化部分22的气体出口7.蒸发部分22包括蒸发管20，其一端连接到MOCVD系统的反应管，并具有另一端连接到分散部8的气体出口7，以及加热装置，用于加热蒸发管20.蒸发部22用于加热和蒸发从分散部8输送的含有载气3的原料溶液。分散部分8包括具有圆柱形中空部分的分散部分主体1和具有小于圆柱形内径的外径的杆10 cal中空部分。杆10具有形成在更靠近蒸发部分22的外周中的螺旋槽60，杆10插入到圆柱形中空部分中。

4. 发明授权

US07673856B2 Vaporizer and various devices using the same and an associated vaporizing method 有权
标题翻译：汽化器和各种装置使用相同的蒸发方法
公开(公告)号：US07673856B2
公开(公告)日：2010-03-09
申请号：US11496407
申请日：2006-08-01
申请人： Masayuki Toda , Masaki Kusuhara , Masaru Umeda , Mitsuru Fukagawa
发明人： Masayuki Toda , Masaki Kusuhara , Masaru Umeda , Mitsuru Fukagawa
IPC分类号： B01F3/04
CPC分类号： H01L27/11502 , B01B1/005 , B01D3/346 , B01F3/04021 , B01F5/0646 , B01F5/0653 , B01F5/0656 , B01F5/0671 , B01F5/0676 , C23C16/40 , C23C16/409 , C23C16/4486 , H01L21/31691 , H01L27/11507 , H01L28/55 , Y10S261/65
摘要： A vaporizer has gas passage formed inside of main body of a dispersion part, a gas inlet opening to introduce pressurized carrier gas into gas passage, a part to supply raw materials solution to carrier gas passing gas passage, a gas outlet to send carrier gas including dispersed raw material solution to vaporization part, a dispersion part to flow through gas passage having a part to cool, a vaporization pipe connected with a reaction part and gas outlet of dispersion part of the device, and a heater to heat vaporization pipe is provided, a vaporization part to heat and vaporizes the carrier gas where raw materials solution is dispersed is provided, and a radiation prevention portion having small hole for the outside of gas outlet is provided.
摘要翻译：蒸发器在分散部分的主体内部形成气体通道，气体入口用于将加压的载气引入气体通道，将原料溶液供应到载气通过气体通道的部分，气体出口以输送载气，包括将原料溶液分散到蒸发部分，分散部分流过具有部分冷却的气体通道，提供与装置的分散部分的反应部分和气体出口连接的蒸发管和加热器以加热蒸发管，设置用于使分散有原料溶液的载气加热蒸发的蒸发部，具有用于气体出口外部的小孔的防辐射部。

5. 发明申请

US20130291797A1 VAPORIZER 审中-公开
标题翻译：蒸气器
公开(公告)号：US20130291797A1
公开(公告)日：2013-11-07
申请号：US13991756
申请日：2011-12-21
申请人： Masaki Kusuhara , Masaru Umeda , Mitsuru Fukagawa , Masayuki Toda
发明人： Masaki Kusuhara , Masaru Umeda , Mitsuru Fukagawa , Masayuki Toda
IPC分类号： C23C16/448
CPC分类号： C23C16/4481 , B01D1/00
摘要： Provided is a vaporizer that can reduce ripples, particles, and a carbon content of a film and can supply a raw material capable of forming a film having a desired composition. Moreover, a vaporizer is obtained that sufficient vaporization can be performed without heating more than necessary and temperature management can be facilitated. A vaporizer includes a vaporizer main body (3) into which a carrier gas having a film forming liquid material dispersed is introduced and a heater main body (4) disposed in the vaporizer main body (3). The shape of the inlet portion of the heater main body is in a cone.
摘要翻译：提供一种蒸发器，其可以减少膜的波纹，颗粒和碳含量，并且可以提供能够形成具有期望组成的膜的原料。此外，获得能够在不需要加热的情况下进行充分蒸发的蒸发器，并且可以促进温度管理。蒸发器包括：蒸发器主体（3），引入分散有成膜液体材料的载气和设置在蒸发器主体（3）中的加热器主体（4）。加热器主体的入口部分的形状为锥形。

6. 发明申请

US20080193645A1 Vaporizer and various devices using the same and an associated vaporizing method 有权
标题翻译：汽化器和各种装置使用相同的蒸发方法
公开(公告)号：US20080193645A1
公开(公告)日：2008-08-14
申请号：US11496407
申请日：2006-08-01
申请人： Masayuki Toda , Masaki Kusuhara , Masaru Umeda , Mitsuru Fukagawa
发明人： Masayuki Toda , Masaki Kusuhara , Masaru Umeda , Mitsuru Fukagawa
IPC分类号： C23C16/44
CPC分类号： H01L27/11502 , B01B1/005 , B01D3/346 , B01F3/04021 , B01F5/0646 , B01F5/0653 , B01F5/0656 , B01F5/0671 , B01F5/0676 , C23C16/40 , C23C16/409 , C23C16/4486 , H01L21/31691 , H01L27/11507 , H01L28/55 , Y10S261/65
摘要： A vaporizer has gas passage formed inside of main body of a dispersion part, a gas inlet opening to introduce pressurized carrier gas into gas passage, a part to supply raw materials solution to carrier gas passing gas passage, a gas outlet to send carrier gas including dispersed raw material solution to vaporization part, a dispersion part to flow through gas passage having a part to cool, a vaporization pipe connected with a reaction part and gas outlet of dispersion part of the device, and a heater to heat vaporization pipe is provided, a vaporization part to heat and vaporizes the carrier gas where raw materials solution is dispersed is provided, and a radiation prevention portion having small hole for the outside of gas outlet is provided.
摘要翻译：蒸发器在分散部分的主体内部形成气体通道，气体入口用于将加压的载气引入气体通道，将原料溶液供应到载气通过气体通道的部分，气体出口以输送载气，包括将原料溶液分散到蒸发部分，分散部分流过具有部分冷却的气体通道，提供与装置的分散部分的反应部分和气体出口连接的蒸发管和加热器以加热蒸发管，设置用于使分散有原料溶液的载气加热蒸发的蒸发部，具有用于气体出口外部的小孔的防辐射部。

7. 发明授权

US08486196B2 Vaporizing apparatus and film forming apparatus provided with vaporizing apparatus 有权
标题翻译：具有蒸发装置的蒸发装置和成膜装置
公开(公告)号：US08486196B2
公开(公告)日：2013-07-16
申请号：US12601314
申请日：2008-05-15
申请人： Masayuki Toda , Masaki Kusuhara , Masaru Umeda , Mitsuru Fukagawa
发明人： Masayuki Toda , Masaki Kusuhara , Masaru Umeda , Mitsuru Fukagawa
IPC分类号： C23C16/00 , F01M11/03 , B01D21/24 , B01D24/38 , B01D29/88 , B01D33/70
CPC分类号： C23C16/407 , C23C16/4486
摘要： Because an evaporating apparatus for use in an MOCVD film deposition system has a structure in which a plurality of gas passages brings in a gas from the upper direction, the apparatus has a difficulty to position a jet nozzle, and the apparatus is incapable of accurately controlling the pressure and flow rate of a carrier gas mixed with a raw material solution to be issued into an evaporating unit, and it is thus difficult to highly accurately control the composition of MOCVD films. A plurality of gas passages is arranged on a flat, disk-shaped plate. With this configuration, the accurate positioning of the jet nozzle can be made easier, and the composition of MOCVD films can be controlled highly accurately.
摘要翻译：由于用于MOCVD膜沉积系统的蒸发装置具有多个气体通道从上方引入气体的结构，所以该装置难以定位喷嘴，并且该装置不能精确地控制与要发放到蒸发单元中的原料溶液混合的载气的压力和流速，因此难以高精度地控制MOCVD膜的组成。多个气体通道设置在平坦的盘形板上。利用这种结构，可以使喷嘴的精确定位变得更容易，并且可以高精度地控制MOCVD膜的组成。

8. 发明申请

US20100173073A1 VAPORIZING APPARATUS AND FILM FORMING APPARATUS PROVIDED WITH VAPORIZING APPARATUS 有权
标题翻译：蒸气装置蒸发装置和成膜装置
公开(公告)号：US20100173073A1
公开(公告)日：2010-07-08
申请号：US12601314
申请日：2008-05-15
申请人： Masayuki Toda , Masaki Kusuhara , Masaru Umeda , Mitsuru Fukagawa
发明人： Masayuki Toda , Masaki Kusuhara , Masaru Umeda , Mitsuru Fukagawa
IPC分类号： C23C16/455 , C23C16/00
CPC分类号： C23C16/407 , C23C16/4486
摘要： Because an evaporating apparatus for use in an MOCVD film deposition system has a structure in which a plurality of gas passages brings in a gas from the upper direction, the apparatus has a difficulty to position a jet nozzle, and the apparatus is incapable of accurately controlling the pressure and flow rate of a carrier gas mixed with a raw material solution to be issued into an evaporating unit, and it is thus difficult to highly accurately control the composition of MOCVD films. A plurality of gas passages is arranged on a flat, disk-shaped plate. With this configuration, the accurate positioning of the jet nozzle can be made easier, and the composition of MOCVD films can be controlled highly accurately.
摘要翻译：由于用于MOCVD膜沉积系统的蒸发装置具有多个气体通道从上方引入气体的结构，所以该装置难以定位喷嘴，并且该装置不能精确地控制与要发放到蒸发单元中的原料溶液混合的载气的压力和流速，因此难以高精度地控制MOCVD膜的组成。多个气体通道设置在平坦的盘形板上。利用这种结构，可以使喷嘴的精确定位变得更容易，并且可以高精度地控制MOCVD膜的组成。

9. 发明授权

US07246796B2 Carburetor, various types of devices using the carburetor, and method of vaporization 有权
标题翻译：化油器，使用化油器的各种装置以及汽化方法
公开(公告)号：US07246796B2
公开(公告)日：2007-07-24
申请号：US10466528
申请日：2002-01-18
申请人： Masayuki Toda , Masaki Kusuhara , Masaru Umeda , Mitsuru Fukagawa
发明人： Masayuki Toda , Masaki Kusuhara , Masaru Umeda , Mitsuru Fukagawa
IPC分类号： B01F3/04
CPC分类号： H01L27/11502 , B01B1/005 , B01D3/346 , B01F3/04021 , B01F5/0646 , B01F5/0653 , B01F5/0656 , B01F5/0671 , B01F5/0676 , C23C16/40 , C23C16/409 , C23C16/4486 , H01L21/31691 , H01L27/11507 , H01L28/55 , Y10S261/65
摘要： A vaporizer which can be used for extended time without blockage, and possible to stably supply raw materials to a reaction part. A gas passage 2 is formed inside of main body of a dispersion part 1, a gas inlet opening 4 is utilized to introduce a pressurized carrier gas 3 into gas passage 2, a supply source 6 is utilized to supply raw material solution 5 to a carrier gas passing through gas passage 2. A vaporization pipe 20 is connected with a reaction part and gas outlet 7 of dispersion part 8 of the device, with a heater 21 to heat vaporization pipe 20, while a vaporization part 22 is utilized to heat and vaporize the carrier gas where a raw material solution is dispersed.
摘要翻译：一种蒸发器，可以延长使用时间而不堵塞，并且可以稳定地将原料供应到反应部件。在分散部1的主体内部形成有气体通路2，利用气体导入口4将加压载气3引入气体通路2，供给源6将原料溶液5供给到载体气体通过气体通道2。蒸发管20与装置的分散部8的反应部和气体出口7连接，加热器21加热蒸发管20，同时使用蒸发部22来加热和蒸发载气，原料溶液分散。

10. 发明申请

US20060278166A1 Vaporizer, various devices using the same, and vaporizing method 审中-公开
标题翻译：蒸发器，使用各种装置，蒸发方法
公开(公告)号：US20060278166A1
公开(公告)日：2006-12-14
申请号：US10508428
申请日：2003-03-18
申请人： Hisayoshi Yamoto , Mitsuru Fukagawa , Masayuki Toda
发明人： Hisayoshi Yamoto , Mitsuru Fukagawa , Masayuki Toda
IPC分类号： C23C16/00
CPC分类号： C23C16/4481
摘要： There is provided a vaporizer that can be used for a long period of time without being clogged and can supply a raw material stably to a reaction section. The evaporator includes a dispersion section 8 having a gas passage 2 formed in a dispersion section body 1, a gas introduction port 4 for introducing a pressurized carrier gas 3 into the gas passage 2, means 6 for supplying a raw material solution 5 to the gas carrier passing through the gas passage 2, a gas outlet 7 for sending the carrier gas containing the dispersed raw material solution 5 to a vaporization section 22, and means 18 for cooling the gas passage 2; and the vaporization section 22 for heating and vaporizing the carrier gas in which the raw material solution is dispersed, having a vaporization tube 20 connected to the reaction section of an apparatus and the gas outlet 7 of the dispersion section 8, and a heater 21 for heating the vaporization tube 20, and is characterized in that the pressure of the reaction section is set lower than the pressure of the vaporization tube.
摘要翻译：提供一种长时间使用而不堵塞的蒸发器，能够将原料稳定地供给到反应部。蒸发器包括：分散部分8，其具有形成在分散部分主体1中的气体通道2;气体引入口4，用于将加压载气3引入气体通道2中;装置6，用于将原料溶液5供应到气体穿过气体通道2的载体，用于将含有分散的原料溶液5的载气送到蒸发部分22的气体出口7和用于冷却气体通道2的装置18; 以及用于加热和蒸发其中分散有原料溶液的载气的蒸发部分22，其具有连接到装置的反应部分的蒸发管20和分散部分8的气体出口7和用于加热蒸发管20，其特征在于反应段的压力设定为低于蒸发管的压力。

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