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    • 2. 发明授权
    • Vaporizer for MOCVD and method of vaporizing raw material solutions for MOCVD
    • 用于MOCVD的蒸发器和用于MOCVD的原料溶液的蒸发方法
    • US07744698B2
    • 2010-06-29
    • US10310578
    • 2002-12-05
    • Masayuki TodaMasaki KusuharaMikio DoiMasaru UmedaMitsuru FukagawaYoichi KannoOsamu UchisawaKohei YamamotoToshikatu Meguro
    • Masayuki TodaMasaki KusuharaMikio DoiMasaru UmedaMitsuru FukagawaYoichi KannoOsamu UchisawaKohei YamamotoToshikatu Meguro
    • C23C16/00
    • C23C16/4486C23C16/409
    • Disclosed is a vaporizer constituted of a dispersing section 8 and a vaporizing section 22. The dispersing section 8 comprises a gas introduction port 4 for introducing a carrier gas 3 under pressure into a gas passage, means for feeding raw material solutions 5a and 5b to the gas passage, and a gas outlet 7 for delivering the carrier gas containing the raw material solutions to the vaporizing section 22. The vaporizing section 22 comprises a vaporizing tube 20 having one end connected to a reaction tube of the MOCVD system and having the other end connected to the gas outlet 7 of the dispersing section 8, and heating means for heating the vaporizing tube 20. The vaporizing section 22 serves to heat and vaporize the raw material solution containing carrier gas 3 delivered from the dispersing section 8. The dispersing section 8 includes a dispersing section body 1 having a cylindrical hollow portion, and a rod 10 having an outer diameter smaller than the inner diameter of the cylindrical hollow portion. The rod 10 has a spiral groove 60 formed in the external periphery closer to the vaporizing section 22, the rod i0 being inserted into the cylindrical hollow portion.
    • 公开了由分散部8和蒸发部22构成的蒸发器。分散部8包括用于将载气3在压力下导入气体通道的气体导入口4,将原料溶液5a,5b供给到 气体通道和用于将含有原料溶液的载气输送到汽化部分22的气体出口7.蒸发部分22包括蒸发管20,其一端连接到MOCVD系统的反应管,并具有另一端 连接到分散部8的气体出口7,以及用于加热蒸发管20的加热装置。蒸发部22用于加热和蒸发从分散部8输送的含有载气3的原料溶液。分散部8 包括具有圆柱形中空部分的分散部分主体1和具有小于圆柱形内径的外径的杆10 l中空部分。 杆10具有形成在更靠近蒸发部22的外周中的螺旋槽60,杆i0插入到圆筒形中空部中。