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1. 发明授权

US06918286B2 SPM cantilever 有权
标题翻译： SPM悬臂
公开(公告)号：US06918286B2
公开(公告)日：2005-07-19
申请号：US10140117
申请日：2002-05-08
申请人： Masashi Kitazawa , Koichi Shiotani
发明人： Masashi Kitazawa , Koichi Shiotani
IPC分类号： G01Q60/16 , G01Q60/38 , G01Q60/56 , G01Q70/00 , G01Q70/06 , G01R33/02
CPC分类号： G01Q70/10
摘要： A silicon nitride film is formed all over the surface of a cantilever prepared as including a support portion made by processing single-crystal silicon wafer, a lever portion extended from the support portion, formed with a controlled thickness from single-crystal silicon, and a probe portion made of single-crystal silicon disposed toward the free end of the lever portion with having its probe axis perpendicular to the lever portion, so as to have a greater film thickness on the side face of the probe portion toward the free end of the lever portion, thereby constructing SPM cantilever of configuration where the terminal end portion of the probe portion is tilted toward the free end by a certain angle θ with respect to the probe axis. The SPM cantilever thereby can be achieved as capable of measuring surface conditions always at high resolution correspondingly to measuring condition or sample shape.
摘要翻译：在悬臂的整个表面上形成氮化硅膜，该悬臂被制备为包括通过加工单晶硅晶片制成的支撑部分，从支撑部分延伸的杠杆部分，以单晶硅形成受控厚度，由单晶硅制成的探针部分朝向杠杆部分的自由端设置，其探头轴线垂直于杆部分，以便在探头部分的侧面朝向自由端的较大的膜厚度从而构成SPM悬臂结构，其中探头部分的末端部分相对于探针轴向自由端倾斜一定角度θ。因此，SPM悬臂可以实现为能够相应于测量条件或样品形状一直以高分辨率测量表面条件。

2. 发明授权

US07010966B2 SPM cantilever and fabricating method thereof 有权
标题翻译： SPM悬臂及其制造方法
公开(公告)号：US07010966B2
公开(公告)日：2006-03-14
申请号：US10694358
申请日：2003-10-28
申请人： Masashi Kitazawa , Koichi Shiotani , Akitoshi Toda
发明人： Masashi Kitazawa , Koichi Shiotani , Akitoshi Toda
IPC分类号： G01B5/28
CPC分类号： G01Q60/38 , G01Q70/10
摘要： Disclosed herein is SPM cantilever having a support portion, a lever portion extended from the support portion and a probe portion formed at a free end of the lever portion, said probe portion having a generally plate-like form and the probe portion having an additionally sharpened terminal end portion. The terminal end portion has its length greater than the plate thickness thereof and is reduced in thickness toward a tip of the terminal end portion, and the tip is located inwardly of the planes extended from the front and back sides of a base portion of the plate-like probe portion.
摘要翻译：本文公开了具有支撑部分的SPM悬臂，从支撑部分延伸的杆部分和形成在杠杆部分的自由端的探针部分，所述探针部分具有大致板形的形状，并且探针部分具有另外锋利的末端部。终端部的长度大于其板厚，并且朝向终端部的前端减小，并且该端部位于从板的基部的前后侧延伸的平面的内侧样的探针部分。

3. 发明申请

US20050160802A1 SPM cantilever and fabricating method thereof 审中-公开
标题翻译： SPM悬臂及其制造方法
公开(公告)号：US20050160802A1
公开(公告)日：2005-07-28
申请号：US11080438
申请日：2005-03-16
申请人： Masashi Kitazawa , Koichi Shiotani , Akitoshi Toda
发明人： Masashi Kitazawa , Koichi Shiotani , Akitoshi Toda
IPC分类号： G01Q30/08 , G01Q30/10 , G01Q30/20 , G01Q60/38 , G01Q70/10 , G01Q70/14 , G01Q70/16 , H01L27/14 , G12B21/02
CPC分类号： G01Q60/38 , G01Q70/10
摘要： Disclosed herein is SPM cantilever having a support portion, a lever portion extended from the support portion and a probe portion formed at a free end of the lever portion, said probe portion having a generally plate-like form and the probe portion having an additionally sharpened terminal end portion. The terminal end portion has its length greater than the plate thickness thereof and is reduced in thickness toward a tip of the terminal end portion, and the tip is located inwardly of the planes extended from the front and back sides of a base portion of the plate-like probe portion.
摘要翻译：本文公开了具有支撑部分的SPM悬臂，从支撑部分延伸的杆部分和形成在杠杆部分的自由端的探针部分，所述探针部分具有大致板形的形状，并且探针部分具有另外锋利的末端部。终端部的长度大于其板厚，并且朝向终端部的前端减小，并且该端部位于从板的基部的前后侧延伸的平面的内侧样的探针部分。

4. 发明授权

US06694805B2 Cantilever for scanning probe microscopy 有权
标题翻译：悬臂扫描探针显微镜
公开(公告)号：US06694805B2
公开(公告)日：2004-02-24
申请号：US10122205
申请日：2002-04-16
申请人： Koichi Shiotani , Masashi Kitazawa , Kenji Sato , Akitoshi Toda
发明人： Koichi Shiotani , Masashi Kitazawa , Kenji Sato , Akitoshi Toda
IPC分类号： G01B528
CPC分类号： G01Q70/16 , G01Q70/10
摘要： A cantilever for Scanning Probe Microscopy including: a support portion; a lever portion extended from the support portion; and a probe portion provided at an free end of the lever portion, said probe portion being configured by two triangular thin plates each having one side respectively being one of the different two sides of a V-like notch formed on the free end of the lever, where the thin plates are caused to face each other while having the other side in common. The cantilever for Scanning Probe Microscopy is thereby achieved as having a probe portion which is light in weight and high in rigidity and is readily positioned in alignment and by which measurement at high resolution is steadily possible
摘要翻译：扫描探针显微镜的悬臂包括：支撑部分; 从所述支撑部延伸的杆部; 以及探针部，设置在所述杆部的自由端，所述探针部由两个三角形薄板构成，所述两个三角形薄板分别具有形成在所述杆的自由端上的V形切口的不同两侧之一，其中使薄板彼此面对，同时使另一侧相同。因此，扫描探针显微镜的悬臂具有重量轻且刚性高的探针部分，并且容易定位成对准，并且可以稳定地以高分辨率进行测量

5. 发明申请

US20070204681A1 Carbon thin line probe 有权
标题翻译：碳细线探头
公开(公告)号：US20070204681A1
公开(公告)日：2007-09-06
申请号：US11710974
申请日：2007-02-27
申请人： Masashi Kitazawa , Masaki Tanemura , Junya Tanaka , Tatsuhiko Okita
发明人： Masashi Kitazawa , Masaki Tanemura , Junya Tanaka , Tatsuhiko Okita
IPC分类号： G12B21/02 , B82B1/00 , B81B7/00
CPC分类号： G01Q70/12 , C12N15/89 , G01Q60/54 , Y10S977/86 , Y10S977/863 , Y10S977/875 , Y10S977/876 , Y10S977/879
摘要： A carbon thin line probe having a carbon thin line selectively formed at a projection-like terminal end portion thereof by means of an irradiation of high-energy beam, the carbon thin line internally containing a metal. Thereby achieved is a carbon thin line probe suitable for example for the probe of SPM cantilever, which has a high aspect ratio and high durability and reliability, capability of batch processing based on a simple manufacturing method, and to which magnetic characteristic can be imparted.
摘要翻译：一种碳细线探针，其具有通过高能束的照射在其突起状端部选择性地形成的碳细线，所述碳细线在内部含有金属。由此实现了适用于例如SPM悬臂的探针的碳细线探针，其具有高纵横比和高耐久性和可靠性，基于简单制造方法的批处理能力，并且可赋予其磁特性。

6. 发明申请

US20080121029A1 Cantilever with carbon nano-tube for AFM 审中-公开
标题翻译：悬臂与碳纳米管用于AFM
公开(公告)号：US20080121029A1
公开(公告)日：2008-05-29
申请号：US12007615
申请日：2008-01-14
申请人： Masashi Kitazawa , Junpei Yoneyama
发明人： Masashi Kitazawa , Junpei Yoneyama
IPC分类号： G01N13/16
CPC分类号： G01Q60/38 , G01Q70/10 , G01Q70/12
摘要： A cantilever having a support portion, a lever portion extended from the support portion, and a probe portion formed in the vicinity of a free end of the lever portion, in which a carbon nano-tube controlled in direction is attached to the probe portion in a manner jutting out from a terminal end portion of the probe portion.
摘要翻译：具有支撑部的悬臂，从所述支撑部延伸的杆部，以及形成在所述杆部的自由端附近的探针部，所述探针部在所述杆部的自由端附近以将所述方向控制的碳纳米管附接到所述探针部的方式从探针部的末端部突出的方式。

7. 发明申请

US20070241373A1 Semiconductor Device and Its Manufacturing Method 失效
标题翻译：半导体器件及其制造方法
公开(公告)号：US20070241373A1
公开(公告)日：2007-10-18
申请号：US11577878
申请日：2005-10-18
申请人： Takashi Kuroi , Katsuyuki Horita , Masashi Kitazawa , Masato Ishibashi
发明人： Takashi Kuroi , Katsuyuki Horita , Masashi Kitazawa , Masato Ishibashi
IPC分类号： H01L29/768 , H01L21/76 , H01L29/00
CPC分类号： H01L21/823475 , H01L21/743 , H01L21/76229 , H01L21/763 , H01L21/823481 , H01L21/823871 , H01L21/823878 , H01L29/7833 , H01L2924/0002 , H01L2924/00
摘要： In the process of manufacturing a semiconductor device, a first layer is formed on a substrate, and the first layer and the substrate are etched to form a trench. The inner wall of the trench is thermally oxidized. On the substrate, including inside the trench, is deposited a first conductive film having a thickness equal to or larger than one half of the width of the trench. The first conductive film on the first layer is removed by chemical mechanical polishing such that the first conductive film remains in only the trench. The height of the first conductive film in the trench is adjusted to be lower than a surface of the substrate by anisotropically etching the first conductive film. An insulating film is deposited on the substrate by chemical vapor deposition to cover an upper surface of the first conductive film in the trench. The insulating film is flattened by chemical mechanical polishing, and the first layer is removed.
摘要翻译：在制造半导体器件的过程中，在衬底上形成第一层，并且蚀刻第一层和衬底以形成沟槽。沟槽的内壁被热氧化。在包括沟槽内部的衬底上沉积厚度等于或大于沟槽宽度的一半的第一导电膜。通过化学机械抛光去除第一层上的第一导电膜，使得第一导电膜仅保留在沟槽中。通过各向异性蚀刻第一导电膜，将沟槽中的第一导电膜的高度调节为低于衬底的表面。通过化学气相沉积在衬底上沉积绝缘膜以覆盖沟槽中的第一导电膜的上表面。绝缘膜通过化学机械抛光而变平，第一层被去除。

8. 发明授权

US06525380B2 CMOS with a fixed charge in the gate dielectric 失效
标题翻译： CMOS在栅极电介质中具有固定电荷
公开(公告)号：US06525380B2
公开(公告)日：2003-02-25
申请号：US09324805
申请日：1999-06-03
申请人： Masayoshi Shirahata , Masashi Kitazawa , Kazunobu Oota
发明人： Masayoshi Shirahata , Masashi Kitazawa , Kazunobu Oota
IPC分类号： H01L2994
CPC分类号： H01L27/092 , H01L21/28176 , H01L21/823857
摘要： A semiconductor device—which includes surface-type n-channel and p-channel single gate transistors by formation of fixed charges within a gate oxide film—and a manufacturing method therefor. A voltage is applied between an electrode connected to a gate electrode and an electrode connected to an N+ region formed in an n-well, and electrons are implanted into the gate electrode at high energy from a substrate, thereby producing fixed negative electric charges in a gate oxide film within an range of 1E11 cm−2 to 1E14 cm−2. An appropriate value for Vth is obtained in the surface channel MOSFET. Therefore, there are solved problems associated with a dual gate structure; namely, a complicated process flow, etch residues or excessive etching due to a difference in etch rate between n-type polycrystalline silicon and p-type polycrystalline silicon, and the deterioration of a gate oxide film due to penetration of boron ions.
摘要翻译：一种半导体器件及其制造方法，其包括在栅极氧化膜内形成固定电荷的表面型n沟道和p沟道单栅极晶体管。在连接到栅电极的电极和连接到形成在n阱中的N +区域的电极之间施加电压，并且电子以高能量从衬底注入到栅电极中，从而在电极中产生固定的负电荷栅极氧化膜在1E11cm-2至1E14cm-2的范围内。在表面沟道MOSFET中获得适当的Vth值。因此，解决了与双栅结构相关的问题; 即由于n型多晶硅和p型多晶硅之间的蚀刻速率差异导致的复杂工艺流程，蚀刻残留物或过度蚀刻以及由于硼离子渗透导致的栅极氧化膜的劣化。

9. 发明授权

US07735357B2 SPM cantilever and manufacturing method thereof 有权
标题翻译： SPM悬臂及其制造方法
公开(公告)号：US07735357B2
公开(公告)日：2010-06-15
申请号：US11587207
申请日：2005-04-20
申请人： Masashi Kitazawa , Ryo Ota , Masaki Tanemura
发明人： Masashi Kitazawa , Ryo Ota , Masaki Tanemura
IPC分类号： G01B5/28
CPC分类号： G01Q70/12 , Y10S977/849 , Y10S977/86
摘要： An SPM cantilever of the present invention including: a support portion (1) fabricated by processing a single crystal silicon wafer; a lever portion (2) formed in a manner extended from the support portion; a probe (3) disposed at a free end side of the lever portion; a coating of graphite film (5) covering all over the side on which the probe is formed and the entire probe; and a piece of thin line (6) consisting of a carbon nanofiber (CNF) or carbon nanotube (CNT) or graphite nanofiber (GNF) grown/formed from the graphite film at a probe terminal end portion (3a).
摘要翻译：本发明的SPM悬臂包括：通过处理单晶硅晶片制造的支撑部分（1）; 以从所述支撑部延伸的方式形成的杆部（2）设置在所述杆部的自由端侧的探针（3）覆盖在其上形成探针的一侧的整个探针的石墨膜（5）涂层; 以及由在探针末端部分（3a）由石墨膜生长/形成的碳纳米纤维（CNF）或碳纳米管（CNT）或石墨纳米纤维（GNF）组成的细线（6）。

10. 发明授权

US07543482B2 Carbon thin line probe 有权
标题翻译：碳细线探头
公开(公告)号：US07543482B2
公开(公告)日：2009-06-09
申请号：US11710974
申请日：2007-02-27
申请人： Masashi Kitazawa , Masaki Tanemura , Junya Tanaka , Tatsuhiko Okita
发明人： Masashi Kitazawa , Masaki Tanemura , Junya Tanaka , Tatsuhiko Okita
IPC分类号： G12B21/08 , B82B1/00
CPC分类号： G01Q70/12 , C12N15/89 , G01Q60/54 , Y10S977/86 , Y10S977/863 , Y10S977/875 , Y10S977/876 , Y10S977/879
摘要： A carbon thin line probe having a carbon thin line selectively formed at a projection-like terminal end portion thereof by means of an irradiation of high-energy beam, the carbon thin line internally containing a metal. Thereby achieved is a carbon thin line probe suitable for example for the probe of SPM cantilever, which has a high aspect ratio and high durability and reliability, capability of batch processing based on a simple manufacturing method, and to which magnetic characteristic can be imparted.
摘要翻译：一种碳细线探针，其具有通过高能束的照射在其突起状端部选择性地形成的碳细线，所述碳细线在内部含有金属。由此实现了适用于例如SPM悬臂的探针的碳细线探针，其具有高纵横比和高耐久性和可靠性，基于简单制造方法的批处理能力，并且可赋予其磁特性。

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