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1. 发明授权

US06750451B2 Observation apparatus and observation method using an electron beam 失效
标题翻译：使用电子束的观察装置和观察方法
公开(公告)号：US06750451B2
公开(公告)日：2004-06-15
申请号：US10183157
申请日：2002-06-28
申请人： Masanari Koguchi , Kuniyasu Nakamura , Kaoru Umemura , Yoshifumi Taniguchi , Mikio Ichihashi
发明人： Masanari Koguchi , Kuniyasu Nakamura , Kaoru Umemura , Yoshifumi Taniguchi , Mikio Ichihashi
IPC分类号： H01J3726
CPC分类号： H01J37/2955 , H01J2237/2802
摘要： Disclosed is an observation apparatus and method using an electron beam, capable of measuring stress and strain information on a crystal structure in a specimen using electron beam diffraction images. A method according to the invention includes mounting a specimen on a specimen stage; irradiating a predetermined area in the specimen with an electron beam while scanning the electron beam, and acquiring an enlarged image of a specimen internal structure in the predetermined area; irradiating a specific portion included in the predetermined area and acquiring a diffraction image showing the crystal structure in the specimen; extracting information on the crystal structure in the specimen; displaying the information of the crystal structure in the specimen so as to be superimposed on the acquired enlarged image. The observation method according to the invention can obtain information on the crystal structure in a specimen with a high degree of sensitivity and with a high level of resolution.
摘要翻译：公开了一种使用电子束的观测装置和方法，其能够使用电子束衍射图像测量样品中的晶体结构的应力和应变信息。根据本发明的方法包括将样品安装在样品台上; 在扫描电子束的同时用电子束照射样本中的预定区域，并获取预定区域中的样本内部结构的放大图像; 照射包含在预定区域中的特定部分，并获取示出样品中的晶体结构的衍射图像; 提取样品中晶体结构的信息; 在样本中显示晶体结构的信息，以便叠加在所获取的放大图像上。根据本发明的观察方法可以以高灵敏度和高分辨率获得关于样品中的晶体结构的信息。

2. 发明授权

US6051834A Electron microscope 失效
标题翻译：电子显微镜
公开(公告)号：US6051834A
公开(公告)日：2000-04-18
申请号：US126432
申请日：1998-07-30
申请人： Hiroshi Kakibayashi , Yasuhiro Mitsui , Hideo Todokoro , Katsuhiro Kuroda , Masanari Koguchi , Kazutaka Tsuji , Tatsuo Makishima , Mikio Ichihashi , Shigeto Isakozawa , Ruriko Tsuneta , Kuniyasu Nakamura , Kensuke Sekihara , Jun Motoike
发明人： Hiroshi Kakibayashi , Yasuhiro Mitsui , Hideo Todokoro , Katsuhiro Kuroda , Masanari Koguchi , Kazutaka Tsuji , Tatsuo Makishima , Mikio Ichihashi , Shigeto Isakozawa , Ruriko Tsuneta , Kuniyasu Nakamura , Kensuke Sekihara , Jun Motoike
IPC分类号： H01J37/26 , H01J37/28
CPC分类号： H01J37/28 , H01J2237/226 , H01J2237/2802 , H01J2237/2807
摘要： 3-dimensional observation on the atomic arrangement and atomic species in a thin-film specimen are carried out at high speed and accuracy by an electron microscope which measures electrons emitted at high angle from the specimen. A scanning transmission electron microscope has an electron detection device comprising a scintillator converting electrons detected thereby to photons, a photoconductive-film converting photons from the scintillator detected thereby to c.a. 1000 times as many electron-hole pairs as these photons.
摘要翻译：通过电子显微镜高速准确地进行薄膜样品中的原子排列和原子物质的三维观察，该电子显微镜测量从试样以高角度发射的电子。扫描透射电子显微镜具有电子检测装置，该电子检测装置包括将由此检测的电子转化为光子的闪烁体，从其检测的闪烁体的光电导膜转换光子至c.a. 这些光子是电子 - 空穴对的1000倍。

3. 发明授权

US5866905A Electron microscope 失效
标题翻译：电子显微镜
公开(公告)号：US5866905A
公开(公告)日：1999-02-02
申请号：US686740
申请日：1996-07-26
申请人： Hiroshi Kakibayashi , Yasuhiro Mitsui , Hideo Todokoro , Katsuhiro Kuroda , Masanari Koguchi , Kazutaka Tsuji , Tatsuo Makishima , Mikio Ichihashi , Shigeto Isakozawa , Ruriko Tsuneta , Kuniyasu Nakamura , Kensuke Sekihara , Jun Motoike
发明人： Hiroshi Kakibayashi , Yasuhiro Mitsui , Hideo Todokoro , Katsuhiro Kuroda , Masanari Koguchi , Kazutaka Tsuji , Tatsuo Makishima , Mikio Ichihashi , Shigeto Isakozawa , Ruriko Tsuneta , Kuniyasu Nakamura , Kensuke Sekihara , Jun Motoike
IPC分类号： H01J37/26 , H01J37/28
CPC分类号： H01J37/28 , G01N23/046 , G01R31/305 , G01N2223/419 , H01J2237/226 , H01J2237/2802 , H01J2237/2807
摘要： A scanning transmission electron microscope including an electron detection system having a scattering angle limiting aperture (for the inner angle) and a scattering angle limiting aperture (for the outer angle) between a specimen and an electron detector (comprising a scintillator and a light guide) and only one electron detector is installed.
摘要翻译：一种扫描透射电子显微镜，包括具有散射角限制孔径（内角）的电子检测系统和检体与电子检测器（包括闪烁体和光导体）之间的散射角限制孔径（外角）并且仅安装一个电子检测器。

4. 发明授权

US07372029B2 Scanning transmission electron microscope and scanning transmission electron microscopy 失效
标题翻译：扫描透射电子显微镜和扫描透射电子显微镜
公开(公告)号：US07372029B2
公开(公告)日：2008-05-13
申请号：US11806120
申请日：2007-05-30
申请人： Ruriko Tsuneta , Masanari Koguchi , Takahito Hashimoto , Kuniyasu Nakamura
发明人： Ruriko Tsuneta , Masanari Koguchi , Takahito Hashimoto , Kuniyasu Nakamura
IPC分类号： G21K7/00 , G01N23/00
CPC分类号： H01J37/1474 , H01J37/2955 , H01J2237/1501 , H01J2237/221 , H01J2237/2802
摘要： A scanning transmission electron microscope for scanning a primary electron beam on a sample, detecting a transmitted electron from the sample by a detector, and forming an image of the transmitted electron. The scanning transmission electron microscope includes an electron-optics system which enables switching back the transmitted electron beam to the optical axis by a predetermined quantity, and a determining unit for determining the quantity based on a displacement of the transmitted electron with respect to the detector caused by the scanning of the primary electron beam.
摘要翻译：扫描透射电子显微镜，用于扫描样品上的一次电子束，通过检测器检测来自样品的透射电子，并形成透射电子的图像。扫描透射电子显微镜包括能够将透射电子束切换到光轴预定量的电子光学系统，以及用于基于发射的电子相对于检测器的位移来确定量的确定单元通过扫描一次电子束。

5. 发明授权

US5552602A Electron microscope 失效
标题翻译：电子显微镜
公开(公告)号：US5552602A
公开(公告)日：1996-09-03
申请号：US398684
申请日：1995-03-06
申请人： Hiroshi Kakibayashi , Yasuhiro Mitsui , Hideo Tadokoro , Katsuhiro Kuroda , Masanari Koguchi , Kazutaka Tsuji , Tatsuo Makishima , Mikio Ichihashi , Shigeto Isakozawa
发明人： Hiroshi Kakibayashi , Yasuhiro Mitsui , Hideo Tadokoro , Katsuhiro Kuroda , Masanari Koguchi , Kazutaka Tsuji , Tatsuo Makishima , Mikio Ichihashi , Shigeto Isakozawa
IPC分类号： G01N23/04 , G01R31/305 , H01J37/26
CPC分类号： G01R31/305 , G01N23/046 , G01N2223/419 , H01J2237/226
摘要： 3-dimensional observation on the atomic arrangement and atomic species in a thin-film specimen as well as conventional electron microscope observations is carried out at high speed and accuracy by an electron microscope which measures electrons emitted at high angle from the specimen. For that purpose, the present invention provides a scanning transmission electron microscope having an electron detection device comprising a scintillator converting electrons detected thereby to photons, a photoconductive-film converting photons from the scintillator detected thereby to c.a. 1000 times as many electron-hole pairs as these photons (i.d. avalanche multiplication), an electron gun emitting an electron beam toward the photoconductive-film to detect the holes generated therein, and electron deflector electrodes deflecting the electron beam on the photoconductive-film. Avalanche multiplication in the photoconductive-film amplifies the signal of these photons at so high signal-to-noise ratio that the electron microscope in this invention can detect such weak electrons as emitted at high angle from the specimen at high sensitivity and resolution. Therefore this invention enables a scanning transmission electron microscope to obtain for example 3-dimensional image of point defects and impurity elements existing in joint interfaces and contacts in a ULSI device rapidly and accurately.
摘要翻译：通过电子显微镜以高速和准确的方式对薄膜样品中的原子排列和原子种类进行3维观察，以及常规的电子显微镜观察，测量从样品以高角度发射的电子。为此目的，本发明提供了一种具有电子检测装置的扫描透射电子显微镜，该电子检测装置包括将由此检测的电子转化为光子的闪烁体，从其检测的闪烁体的光电导膜转换光子至c.a. 与这些光子（i.d.雪崩乘法）一样多的电子 - 空穴对的1000倍，向光电导膜发射电子束以检测其中产生的空穴的电子枪以及偏转电子束在光电导膜上的电子偏转器电极。光电导膜中的雪崩乘法以如此高的信噪比放大了这些光子的信号，使得本发明的电子显微镜能够以高灵敏度和分辨率从样品中以高角度检测出这样的弱电子。因此，本发明能够使扫描透射电子显微镜能够快速，准确地获得例如存在于ULSI装置的接合界面和触点中的点缺陷和杂质元素的3维图像。

6. 发明授权

US07227144B2 Scanning transmission electron microscope and scanning transmission electron microscopy 有权
标题翻译：扫描透射电子显微镜和扫描透射电子显微镜
公开(公告)号：US07227144B2
公开(公告)日：2007-06-05
申请号：US11328173
申请日：2006-01-10
申请人： Ruriko Tsuneta , Masanari Koguchi , Takahito Hashimoto , Kuniyasu Nakamura
发明人： Ruriko Tsuneta , Masanari Koguchi , Takahito Hashimoto , Kuniyasu Nakamura
IPC分类号： G21K7/00
CPC分类号： H01J37/1474 , H01J37/2955 , H01J2237/1501 , H01J2237/221 , H01J2237/2802
摘要： A scanning transmission electron microscope which enhances correction accuracy of a de-scanning coil for canceling a transmitted-electron-beam position change on an electron detector. Here, this transmitted-electron-beam position change appears in accompaniment with a primary-electron-beam position change on a specimen caused by a scanning coil. First, control over the scanning coil is digitized. Moreover, while being synchronized with a digital control signal resulting from this digitization, values in a de-scanning table registered in a FM(2) are outputted to the de-scanning coil. Here, the de-scanning table is created as follows: Diffraction images before and after activating the scanning coil and the de-scanning coil are photographed using a camera. Then, based on a result acquired by analyzing a resultant displacement quantity of the diffraction images by the image processing, the de-scanning table is created.
摘要翻译：扫描透射电子显微镜，其增强用于消除电子检测器上的透射电子束位置变化的去扫描线圈的校正精度。这里，这种透射电子束位置变化伴随着由扫描线圈引起的样品上的一次电子束位置变化。首先，对扫描线圈的控制被数字化。此外，在与由该数字化产生的数字控制信号同步的同时，在FM（2）中登记的去扫描表中的值被输出到去扫描线圈。这里，如下创建去扫描台：使用相机拍摄激活扫描线圈和去扫描线圈之前和之后的衍射图像。然后，基于通过图像处理分析衍射图像的合成位移量获得的结果，生成去扫描表。

7. 发明申请

US20060151701A1 Scanning transmission electron microscope and scanning transmission electron microscopy 有权
标题翻译：扫描透射电子显微镜和扫描透射电子显微镜
公开(公告)号：US20060151701A1
公开(公告)日：2006-07-13
申请号：US11328173
申请日：2006-01-10
申请人： Ruriko Tsuneta , Masanari Koguchi , Takahito Hashimoto , Kuniyasu Nakamura
发明人： Ruriko Tsuneta , Masanari Koguchi , Takahito Hashimoto , Kuniyasu Nakamura
IPC分类号： G21K7/00
CPC分类号： H01J37/1474 , H01J37/2955 , H01J2237/1501 , H01J2237/221 , H01J2237/2802
摘要： A scanning transmission electron microscope which enhances correction accuracy of a de-scanning coil for canceling a transmitted-electron-beam position change on an electron detector. Here, this transmitted-electron-beam position change appears in accompaniment with a primary-electron-beam position change on a specimen caused by a scanning coil. First, control over the scanning coil is digitized. Moreover, while being synchronized with a digital control signal resulting from this digitization, values in a de-scanning table registered in a FM (2) are outputted to the de-scanning coil. Here, the de-scanning table is created as follows: Diffraction images before and after activating the scanning coil and the de-scanning coil are photographed using a camera. Then, based on a result acquired by analyzing a resultant displacement quantity of the diffraction images by the image processing, the de-scanning table is created.
摘要翻译：扫描透射电子显微镜，其增强用于消除电子检测器上的透射电子束位置变化的去扫描线圈的校正精度。这里，这种透射电子束位置变化伴随着由扫描线圈引起的样品上的一次电子束位置变化。首先，对扫描线圈的控制被数字化。此外，在与由该数字化产生的数字控制信号同步的同时，在FM（2）中登记的去扫描表中的值被输出到去扫描线圈。这里，如下创建去扫描台：使用相机拍摄激活扫描线圈和去扫描线圈之前和之后的衍射图像。然后，基于通过图像处理分析衍射图像的合成位移量获得的结果，生成去扫描表。

8. 发明申请

US20070228277A1 Scanning transmission electron microscope and scanning transmission electron microscopy 失效
标题翻译：扫描透射电子显微镜和扫描透射电子显微镜
公开(公告)号：US20070228277A1
公开(公告)日：2007-10-04
申请号：US11806120
申请日：2007-05-30
申请人： Ruriko Tsuneta , Masanari Koguchi , Takahito Hashimoto , Kuniyasu Nakamura
发明人： Ruriko Tsuneta , Masanari Koguchi , Takahito Hashimoto , Kuniyasu Nakamura
IPC分类号： G01N23/00
CPC分类号： H01J37/1474 , H01J37/2955 , H01J2237/1501 , H01J2237/221 , H01J2237/2802
摘要： A scanning transmission electron microscope for scanning a primary electron beam on a sample, detecting a transmitted electron from the sample by a detector, and forming an image of the transmitted electron. The scanning transmission electron microscope includes an electron-optics system which enables switching back the transmitted electron beam to the optical axis by a predetermined quantity, and a determining unit for determining the quantity based on a displacement of the transmitted electron with respect to the detector caused by the scanning of the primary electron beam.
摘要翻译：扫描透射电子显微镜，用于扫描样品上的一次电子束，通过检测器检测来自样品的透射电子，并形成透射电子的图像。扫描透射电子显微镜包括能够将透射电子束切换到光轴预定量的电子光学系统，以及用于基于发射的电子相对于检测器的位移来确定量的确定单元通过扫描一次电子束。

9. 发明授权

US07518111B1 Magnetic electron microscope 有权
标题翻译：磁电子显微镜
公开(公告)号：US07518111B1
公开(公告)日：2009-04-14
申请号：US11543787
申请日：2006-10-06
申请人： Takao Matsumoto , Masanari Koguchi
发明人： Takao Matsumoto , Masanari Koguchi
IPC分类号： H01J37/27 , G01N23/04
CPC分类号： G01N23/04 , G03H5/00 , H01J37/26 , H01J2237/1514 , H01J2237/221 , H01J2237/2614
摘要： Below 50-nm-diameter extremely narrow electrically-conductive fiber is used instead of the electron beam biprism used in the conventional interference electron microscope method. A phenomenon is utilized where a focus-shifted shadow of this fiber is shifted from a straight line by a distance which is proportional to a differentiation of phase change amount of an electron beam due to a sample with respect to a direction perpendicular to the fiber. The phase change amount is quantified by calibrating this shift amount through its comparison with a shift amount caused by another sample in terms of which the corresponding phase change amount has been quantitatively evaluated in advance. The differentiation amount of the quantified phase change in the electron beam due to the sample is visualized, or eventually, is integrated thereby being transformed into absolute phase change amount to be visualized.
摘要翻译：使用低于50nm直径的非常窄的导电纤维来代替在常规干涉电子显微镜方法中使用的电子束双棱镜。使用这种现象，其中该光纤的聚焦移动阴影从直线移位一定距离，该距离与由于样品相对于垂直于光纤的方向的样品的电子束的相变量的微分成正比。通过与通过与预先对相应的相变量进行定量评价的另一个样品引起的移位量进行比较来校准该偏移量来量化相位变化量。由于样品而导致的电子束的量化相变的微分量被可视化，或最终被积分，从而被转换为绝对相变量以被可视化。

10. 发明授权

US07417227B2 Scanning interference electron microscope 失效
标题翻译：扫描干涉电子显微镜
公开(公告)号：US07417227B2
公开(公告)日：2008-08-26
申请号：US11294470
申请日：2005-12-06
申请人： Takao Matsumoto , Masanari Koguchi
发明人： Takao Matsumoto , Masanari Koguchi
IPC分类号： G01N23/00 , G21K7/00
CPC分类号： H01J37/28 , G03H5/00 , H01J37/023 , H01J37/244 , H01J2237/1502 , H01J2237/1514 , H01J2237/225 , H01J2237/228 , H01J2237/2447 , H01J2237/24495 , H01J2237/24564 , H01J2237/2487 , H01J2237/2614 , H01J2237/2802 , H01J2237/2803
摘要： The conventional detection technique has the following problems in detecting interference fringes: (1) Setting and adjustment are complex and difficult to conduct; (2) A phase image and an amplitude image cannot be displayed simultaneously; and (3) Detection efficiency of electron beams is low. The invention provides a scanning interference electron microscope which is improved in detection efficiency of electron beam interference fringes, and enables the user to observe electric and magnetic information easily in a micro domain of a specimen as a scan image of a high S/N ratio under optimum conditions.
摘要翻译：常规检测技术在检测干涉条纹方面存在以下问题：（1）设置和调整复杂，难以进行; （2）相位图像和振幅图像不能同时显示; （3）电子束的检测效率低。本发明提供了扫描干涉电子显微镜，其提高了电子束干涉条纹的检测效率，并且使得用户能够在样本的微区域中容易地观察电磁信息作为高S / N比的扫描图像最佳条件。

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