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    • 1. 发明申请
    • Electron beam inspection method and electron beam inspection apparatus
    • 电子束检查方法和电子束检查装置
    • US20080315093A1
    • 2008-12-25
    • US12149512
    • 2008-05-02
    • Masaki HasegawaHiroya Ohta
    • Masaki HasegawaHiroya Ohta
    • G01N23/225G01J1/42
    • G01N23/225H01J37/026H01J37/285H01J37/29H01J2237/0047H01J2237/221H01J2237/2446H01J2237/24495H01J2237/2482H01J2237/2855
    • An electron beam inspection apparatus images reflected electrons and cancels negative charging derived from electron-beam irradiation. Ultraviolet rays are irradiated and an irradiated area of ultraviolet rays is displayed as a photoelectron image. The photoelectron image and a reflected-electron image are displayed on a monitor while being superposed on each other, to easily grasp the positional relationship between the images and the difference in size between them. Specifically, the shape of the irradiated area of an electron beam includes the shape of the irradiated area of ultraviolet rays on a display screen. The intensity of the ultraviolet rays in the irradiated area of the electron beam is adjusted while the reflected-electron imaging conditions for the reflected-electron image are sustained. Moreover, an amount-of-ultraviolet ray adjustment mechanism is controlled on the monitor so that an amount of the ultraviolet rays is adjusted while observing a reflected-electron image obtained during ultraviolet irradiation.
    • 电子束检查装置对反射电子进行成像并消除由电子束照射产生的负电荷。 照射紫外线,照射紫外线的区域作为光电子图像显示。 光电子图像和反射电子图像在彼此重叠的状态下显示在监视器上,以容易地掌握图像之间的位置关系和它们之间的尺寸差异。 具体地,电子束的照射区域的形状包括在显示屏上照射的紫外线区域的形状。 调整电子束的照射区域中的紫外线的强度,同时维持反射电子图像的反射电子成像条件。 此外,在监视器上控制紫外线量调节机构,使得在观察紫外线照射期间获得的反射电子图像的同时调节紫外线的量。
    • 2. 发明授权
    • Electron beam inspection method and electron beam inspection apparatus
    • 电子束检查方法和电子束检查装置
    • US08288722B2
    • 2012-10-16
    • US12926489
    • 2010-11-22
    • Masaki HasegawaHiroya Ohta
    • Masaki HasegawaHiroya Ohta
    • H01J37/26
    • G01N23/225H01J37/026H01J37/285H01J37/29H01J2237/0047H01J2237/221H01J2237/2446H01J2237/24495H01J2237/2482H01J2237/2855
    • An electron beam inspection apparatus images reflected electrons and cancels negative charging derived from electron-beam irradiation. Ultraviolet rays are irradiated and an irradiated area of ultraviolet rays is displayed as a photoelectron image. The photoelectron image and a reflected-electron image are displayed on a monitor while being superposed on each other, to easily grasp the positional relationship between the images and the difference in size between them. Specifically, the shape of the irradiated area of an electron beam includes the shape of the irradiated area of ultraviolet rays on a display screen. The intensity of the ultraviolet rays in the irradiated area of the electron beam is adjusted while the reflected-electron imaging conditions for the reflected-electron image are sustained. Moreover, an amount-of-ultraviolet ray adjustment mechanism is controlled on the monitor so that an amount of the ultraviolet rays is adjusted while observing a reflected-electron image obtained during ultraviolet irradiation.
    • 电子束检查装置对反射电子进行成像并消除由电子束照射产生的负电荷。 照射紫外线,照射紫外线的区域作为光电子图像显示。 光电子图像和反射电子图像在彼此重叠的状态下显示在监视器上,以容易地掌握图像之间的位置关系和它们之间的尺寸差异。 具体地,电子束的照射区域的形状包括在显示屏上照射的紫外线区域的形状。 调整电子束的照射区域中的紫外线的强度,同时维持反射电子图像的反射电子成像条件。 此外,在监视器上控制紫外线量调节机构,使得在观察紫外线照射期间获得的反射电子图像的同时调节紫外线的量。
    • 3. 发明授权
    • Electron beam inspection method and electron beam inspection apparatus
    • 电子束检查方法和电子束检查装置
    • US07863565B2
    • 2011-01-04
    • US12149512
    • 2008-05-02
    • Masaki HasegawaHiroya Ohta
    • Masaki HasegawaHiroya Ohta
    • H01J37/26H01J37/29
    • G01N23/225H01J37/026H01J37/285H01J37/29H01J2237/0047H01J2237/221H01J2237/2446H01J2237/24495H01J2237/2482H01J2237/2855
    • An electron beam inspection apparatus images reflected electrons and cancels negative charging derived from electron-beam irradiation. Ultraviolet rays are irradiated and an irradiated area of ultraviolet rays is displayed as a photoelectron image. The photoelectron image and a reflected-electron image are displayed on a monitor while being superposed on each other, to easily grasp the positional relationship between the images and the difference in size between them. Specifically, the shape of the irradiated area of an electron beam includes the shape of the irradiated area of ultraviolet rays on a display screen. The intensity of the ultraviolet rays in the irradiated area of the electron beam is adjusted while the reflected-electron imaging conditions for the reflected-electron image are sustained. Moreover, an amount-of-ultraviolet ray adjustment mechanism is controlled on the monitor so that an amount of the ultraviolet rays is adjusted while observing a reflected-electron image obtained during ultraviolet irradiation.
    • 电子束检查装置对反射电子进行成像并消除由电子束照射产生的负电荷。 照射紫外线,照射紫外线的区域作为光电子图像显示。 光电子图像和反射电子图像在彼此重叠的状态下显示在监视器上,以容易地掌握图像之间的位置关系和它们之间的尺寸差异。 具体地,电子束的照射区域的形状包括在显示屏上照射的紫外线区域的形状。 调整电子束的照射区域中的紫外线的强度,同时维持反射电子图像的反射电子成像条件。 此外,在监视器上控制紫外线量调节机构,使得在观察紫外线照射期间获得的反射电子图像的同时调节紫外线的量。
    • 7. 发明申请
    • NONAQUEOUS ELECTROLYTE SECONDARY BATTERY
    • 非电解电解质二次电池
    • US20120270105A1
    • 2012-10-25
    • US13450155
    • 2012-04-18
    • Natsumi GotoTakashi TakeuchiMasaki Hasegawa
    • Natsumi GotoTakashi TakeuchiMasaki Hasegawa
    • H01M4/485H01M4/54H01M4/505H01M4/525
    • H01M4/485H01M4/131H01M4/505H01M4/525H01M10/0525H01M2004/027H01M2010/4292Y02T10/7011
    • A nonaqueous electrolyte secondary battery disclosed in the present application includes: a positive electrode capable of absorbing and releasing lithium, containing a positive electrode active material composed of a lithium-containing transition metal oxide having a layered crystalline structure; and a negative electrode capable of absorbing and releasing lithium, containing a negative electrode active material composed of a lithium-containing transition metal oxide obtained by substituting some of Ti element of a lithium-containing titanium oxide having a spinel crystalline structure with one or more element different from Ti, wherein a retention of the negative electrode is set to be greater than a retention of the positive electrode, and an irreversible capacity rate of the negative electrode is set to be greater than an irreversible capacity rate of the positive electrode, whereby a discharge ends by negative electrode limitation.
    • 本申请中公开的非水电解质二次电池包括:能够吸收和释放锂的正极,其含有由具有层状结晶结构的含锂过渡金属氧化物构成的正极活性物质; 以及能够吸收和释放锂的负极,其含有由含有锂的过渡金属氧化物构成的负极活性物质,所述负极活性物质通过用一种或多种元素代替具有尖晶石结晶结构的含锂氧化钛的Ti元素 与Ti不同,其中将负极的保持力设定为大于正极的保持量,将负极的不可逆容量率设定为大于正极的不可逆容量率,由此, 放电末端由负极限制。