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    • 1. 发明申请
    • Image display device
    • 图像显示装置
    • US20070001593A1
    • 2007-01-04
    • US11472397
    • 2006-06-22
    • Masakazu SagawaHiroshi KikuchiYukio TakasakiTomoki NakamuraToshiaki KusunokiKazutaka Tsuji
    • Masakazu SagawaHiroshi KikuchiYukio TakasakiTomoki NakamuraToshiaki KusunokiKazutaka Tsuji
    • H01J1/62
    • H01J1/72H01J9/02H01J29/04H01J31/127
    • The present invention provides an image display device, in which a top electrode is selectively separated by laser ablation for each scan line. As the laser, a third harmonic wave of YAG laser with a wavelength of 355 nm is used. By setting film thickness of the interlayer insulator 15 to 100 nm and film thickness of a field insulator 14 to 140 nm, reflective spectrum has the minimum value near a wavelength of 355 nm, This laser beam is projected from a top electrode 13 toward a substrate 10. A part of the projected laser beam 20 is reflected by the top electrode 13, but most of the laser beam pass through a field insulator 14 and the interlayer insulator 15 and is reflected by a bottom electrode 11. As the result of interference of these two reflection waves, the minimum value appears in reflection spectrum. In this case, the laser beam is mostly absorbed near boundary surface between the top electrode 13 and the interlayer insulator 15. The top electrode 13 is processed by ablation (melting and evaporation), and the top electrode 13 is separated at this portion. By utilizing interference phenomenon in this manner, no damage is given to the interlayer insulator 13, the field insulator 14, and the bottom electrode 11, which serve as underlying layers, and the top electrode 13 can be selectively cut off.
    • 本发明提供一种图像显示装置,其中通过每个扫描线的激光烧蚀选择性地分离顶部电极。 作为激光器,使用波长为355nm的YAG激光器的三次谐波。 通过将层间绝缘体15的膜厚设定为100nm,将场绝缘体14的膜厚设定为140nm,反射光的波长为355nm附近的最小值。该激光从顶部电极13朝向基板 10。 投射的激光束20的一部分被顶部电极13反射,但大多数激光束通过场绝缘体14和层间绝缘体15并由底部电极11反射。 作为这两个反射波的干扰的结果,最小值出现在反射光谱中。 在这种情况下,激光束主要在顶部电极13和层间绝缘体15之间的边界面附近被吸收。 顶部电极13通过消融(熔化和蒸发)进行处理,顶部电极13在该部分分离。 通过以这种方式利用干涉现象,不会对作为下层的层间绝缘体13,场绝缘体14和底电极11以及顶电极13进行选择性地切断。