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    • 4. 发明授权
    • Method of making semiconductor wafers
    • 制造半导体晶圆的方法
    • US6043156A
    • 2000-03-28
    • US960000
    • 1997-10-29
    • Fumitaka KaiMasahiko MaedaKenji Kawate
    • Fumitaka KaiMasahiko MaedaKenji Kawate
    • H01L21/304C30B33/00H01L21/306H01L21/302
    • H01L21/02008C30B33/00
    • It is an object of the present invention to provide a method for efficiently making semiconductor wafers that prevents the production of metal pollution. It is another object of the present invention to provide a method where the back side of the wafer does not influence the front side, thereof, and where the front and back sides of the wafer can be distinguished are polishing.This invention provides a method for efficiently making semiconductor wafers having uniform thickness where the thickness of the back side does not influence the front side and where the front side of the wafer is capable of being distinguished from the back side. A semiconductor ingot is sliced to obtain wafers. The sliced surfaces of the wafers are flattened. The flattened wafer is etched in alkaline etching solution. Both the front and back sides of the etched wafer are polished using a double sided polishing apparatus so that the front side is a mirror surface and an unevenness remains on the back side to distinguish the front and back sides, thereof. The polished wafer is cleaned.
    • 本发明的目的是提供一种有效地制造防止金属污染的半导体晶片的方法。 本发明的另一个目的是提供一种方法,其中晶片的背面不影响其前侧,并且可以区分晶片的正面和背面正在进行抛光。 本发明提供了一种有效地制造具有均匀厚度的半导体晶片的方法,其中背面的厚度不影响前侧,并且晶片的前侧能够与背面区分开。 将半导体锭切片以获得晶片。 晶片的切片表面变平。 在碱性蚀刻溶液中蚀刻扁平晶片。 使用双面抛光装置对被蚀刻的晶片的正面和背面进行抛光,使得前侧是镜面,并且在背面保留凹凸以区分其正面和背面。 抛光的晶圆被清洁。